FR1503209A - Pompe à vide - Google Patents

Pompe à vide

Info

Publication number
FR1503209A
FR1503209A FR86063A FR86063A FR1503209A FR 1503209 A FR1503209 A FR 1503209A FR 86063 A FR86063 A FR 86063A FR 86063 A FR86063 A FR 86063A FR 1503209 A FR1503209 A FR 1503209A
Authority
FR
France
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR86063A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ultek Corp
Original Assignee
Ultek Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultek Corp filed Critical Ultek Corp
Application granted granted Critical
Publication of FR1503209A publication Critical patent/FR1503209A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR86063A 1965-12-03 1966-12-02 Pompe à vide Expired FR1503209A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51151665A 1965-12-03 1965-12-03

Publications (1)

Publication Number Publication Date
FR1503209A true FR1503209A (fr) 1967-11-24

Family

ID=24035232

Family Applications (1)

Application Number Title Priority Date Filing Date
FR86063A Expired FR1503209A (fr) 1965-12-03 1966-12-02 Pompe à vide

Country Status (4)

Country Link
BE (1) BE690567A (enrdf_load_stackoverflow)
DE (1) DE1539139A1 (enrdf_load_stackoverflow)
FR (1) FR1503209A (enrdf_load_stackoverflow)
GB (1) GB1171141A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITUB20160885A1 (it) * 2016-02-19 2017-08-19 Getters Spa Catodi sinterizzati non porosi e pompe a vuoto ioniche contenenti gli stessi
GB2623794A (en) * 2022-10-27 2024-05-01 Edwards Vacuum Llc Sputter ion pump

Also Published As

Publication number Publication date
DE1539139A1 (de) 1970-01-22
GB1171141A (en) 1969-11-19
BE690567A (enrdf_load_stackoverflow) 1967-06-01

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