FR1503209A - Vacuum pump - Google Patents
Vacuum pumpInfo
- Publication number
- FR1503209A FR1503209A FR86063A FR86063A FR1503209A FR 1503209 A FR1503209 A FR 1503209A FR 86063 A FR86063 A FR 86063A FR 86063 A FR86063 A FR 86063A FR 1503209 A FR1503209 A FR 1503209A
- Authority
- FR
- France
- Prior art keywords
- vacuum pump
- vacuum
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US51151665A | 1965-12-03 | 1965-12-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1503209A true FR1503209A (en) | 1967-11-24 |
Family
ID=24035232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR86063A Expired FR1503209A (en) | 1965-12-03 | 1966-12-02 | Vacuum pump |
Country Status (4)
Country | Link |
---|---|
BE (1) | BE690567A (en) |
DE (1) | DE1539139A1 (en) |
FR (1) | FR1503209A (en) |
GB (1) | GB1171141A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITUB20160885A1 (en) * | 2016-02-19 | 2017-08-19 | Getters Spa | Non-porous sintered cathodes and ion vacuum pumps containing the same |
GB2623794A (en) * | 2022-10-27 | 2024-05-01 | Edwards Vacuum Llc | Sputter ion pump |
-
1966
- 1966-11-29 GB GB5330766A patent/GB1171141A/en not_active Expired
- 1966-12-01 DE DE19661539139 patent/DE1539139A1/en active Pending
- 1966-12-01 BE BE690567D patent/BE690567A/xx unknown
- 1966-12-02 FR FR86063A patent/FR1503209A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB1171141A (en) | 1969-11-19 |
DE1539139A1 (en) | 1970-01-22 |
BE690567A (en) | 1967-06-01 |
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