FR84100E - Advanced Turbomolecular Vacuum Pump - Google Patents
Advanced Turbomolecular Vacuum PumpInfo
- Publication number
- FR84100E FR84100E FR943654A FR943654A FR84100E FR 84100 E FR84100 E FR 84100E FR 943654 A FR943654 A FR 943654A FR 943654 A FR943654 A FR 943654A FR 84100 E FR84100 E FR 84100E
- Authority
- FR
- France
- Prior art keywords
- advanced
- vacuum pump
- turbomolecular vacuum
- turbomolecular
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR943654A FR84100E (en) | 1963-08-02 | 1963-08-02 | Advanced Turbomolecular Vacuum Pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR943654A FR84100E (en) | 1963-08-02 | 1963-08-02 | Advanced Turbomolecular Vacuum Pump |
Publications (1)
Publication Number | Publication Date |
---|---|
FR84100E true FR84100E (en) | 1964-11-20 |
Family
ID=8809827
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR943654A Expired FR84100E (en) | 1963-08-02 | 1963-08-02 | Advanced Turbomolecular Vacuum Pump |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR84100E (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2617543A1 (en) * | 1987-07-04 | 1989-01-06 | Pfeiffer Vakuumtechnik | TURBOMOLECULAR PUMP |
EP0442556A1 (en) * | 1990-02-16 | 1991-08-21 | VARIAN S.p.A. | A stator for a turbo-molecular pump |
-
1963
- 1963-08-02 FR FR943654A patent/FR84100E/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2617543A1 (en) * | 1987-07-04 | 1989-01-06 | Pfeiffer Vakuumtechnik | TURBOMOLECULAR PUMP |
EP0442556A1 (en) * | 1990-02-16 | 1991-08-21 | VARIAN S.p.A. | A stator for a turbo-molecular pump |
US5158426A (en) * | 1990-02-16 | 1992-10-27 | Varian Associates, Inc. | Stator assembly for a turbomolecular pump |
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