FR1461909A - Procédé et appareil pour déterminer par les rayons x la vitesse de dépôt d'un revêtement à partir d'une vapeur - Google Patents

Procédé et appareil pour déterminer par les rayons x la vitesse de dépôt d'un revêtement à partir d'une vapeur

Info

Publication number
FR1461909A
FR1461909A FR43769A FR43769A FR1461909A FR 1461909 A FR1461909 A FR 1461909A FR 43769 A FR43769 A FR 43769A FR 43769 A FR43769 A FR 43769A FR 1461909 A FR1461909 A FR 1461909A
Authority
FR
France
Prior art keywords
deposition
vapor
ray
coating
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR43769A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United States Steel Corp
Original Assignee
United States Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United States Steel Corp filed Critical United States Steel Corp
Application granted granted Critical
Publication of FR1461909A publication Critical patent/FR1461909A/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/542Controlling the film thickness or evaporation rate
    • C23C14/544Controlling the film thickness or evaporation rate using measurement in the gas phase
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2209Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using wavelength dispersive spectroscopy [WDS]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/07Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076X-ray fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/07Investigating materials by wave or particle radiation secondary emission
    • G01N2223/079Investigating materials by wave or particle radiation secondary emission incident electron beam and measuring excited X-rays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/61Specific applications or type of materials thin films, coatings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/638Specific applications or type of materials gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR43769A 1965-01-06 1965-12-27 Procédé et appareil pour déterminer par les rayons x la vitesse de dépôt d'un revêtement à partir d'une vapeur Expired FR1461909A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US423764A US3373278A (en) 1965-01-06 1965-01-06 Determination of vapor coating rate by x-rays emitted from said vapor

Publications (1)

Publication Number Publication Date
FR1461909A true FR1461909A (fr) 1966-12-09

Family

ID=23680089

Family Applications (1)

Application Number Title Priority Date Filing Date
FR43769A Expired FR1461909A (fr) 1965-01-06 1965-12-27 Procédé et appareil pour déterminer par les rayons x la vitesse de dépôt d'un revêtement à partir d'une vapeur

Country Status (5)

Country Link
US (1) US3373278A (fr)
BE (1) BE674605A (fr)
FR (1) FR1461909A (fr)
GB (1) GB1126001A (fr)
NL (1) NL6517043A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020104744A1 (fr) * 2018-11-20 2020-05-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Methode d'analyse de fumees d'evaporation, produit programme d'ordinateur, systeme d'analyse et installation de fabrication additive associes
FR3089299A1 (fr) * 2018-11-29 2020-06-05 Commissariat A L'energie Atomique Et Aux Energies Alternatives Methode d’analyse de fumees d’evaporation, produit programme d’ordinateur, systeme d’analyse et installation de fabrication additive associes

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3612859A (en) * 1968-01-31 1971-10-12 Westinghouse Electric Corp Method for measuring and controlling the density of a metallic vapor
US3590777A (en) * 1969-03-13 1971-07-06 United Aircarft Corp Ingot feed drive
US3667421A (en) * 1970-09-17 1972-06-06 United Aircraft Corp Mechanism for controlling the thickness of a coating in a vapor deposition apparatus
US3984581A (en) * 1973-02-28 1976-10-05 Carl Zeiss-Stiftung Method for the production of anti-reflection coatings on optical elements made of transparent organic polymers
JPS5435920B2 (fr) * 1974-06-10 1979-11-06
US4036167A (en) * 1976-01-30 1977-07-19 Inficon Leybold-Heraeus Inc. Apparatus for monitoring vacuum deposition processes
US4292341A (en) * 1980-02-26 1981-09-29 Bell Telephone Laboratories, Incorporated Method of controlling the index profile of optical fiber preforms
GB2125541B (en) * 1982-08-13 1986-02-12 Inst Tzvetna Metalurgia Method and device for determination of dust content in dust gas flow
DE4336682C1 (de) * 1993-10-27 1994-10-27 Fraunhofer Ges Forschung Verfahren zum Elektronenstrahlbedampfen mit mehrkomponentigem Verdampfungsmaterial
KR950034499A (ko) * 1994-01-28 1995-12-28 제임스 조셉 드롱 물리적인 증기증착 과정동안 필름들의 증착속도를 모니터하기 위한 방법 및 장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3230110A (en) * 1962-01-22 1966-01-18 Temescal Metallurgical Corp Method of forming carbon vapor barrier
US3246146A (en) * 1963-07-11 1966-04-12 Ass Elect Ind Apparatus for the X-ray analysis of a liquid suspension of specimen material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020104744A1 (fr) * 2018-11-20 2020-05-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Methode d'analyse de fumees d'evaporation, produit programme d'ordinateur, systeme d'analyse et installation de fabrication additive associes
FR3089299A1 (fr) * 2018-11-29 2020-06-05 Commissariat A L'energie Atomique Et Aux Energies Alternatives Methode d’analyse de fumees d’evaporation, produit programme d’ordinateur, systeme d’analyse et installation de fabrication additive associes

Also Published As

Publication number Publication date
GB1126001A (en) 1968-09-05
BE674605A (fr) 1966-06-30
US3373278A (en) 1968-03-12
NL6517043A (fr) 1966-07-07

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