FR1450869A - Contrôle de processus de fabrication de mémoires à pellicules d'indium - Google Patents
Contrôle de processus de fabrication de mémoires à pellicules d'indiumInfo
- Publication number
- FR1450869A FR1450869A FR30043A FR30043A FR1450869A FR 1450869 A FR1450869 A FR 1450869A FR 30043 A FR30043 A FR 30043A FR 30043 A FR30043 A FR 30043A FR 1450869 A FR1450869 A FR 1450869A
- Authority
- FR
- France
- Prior art keywords
- manufacturing process
- process control
- indium film
- film memories
- memories
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/44—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using super-conductive elements, e.g. cryotron
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US396604A US3400014A (en) | 1964-09-15 | 1964-09-15 | Process control of indium sheet film memories |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1450869A true FR1450869A (fr) | 1966-06-24 |
Family
ID=23567922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR30043A Expired FR1450869A (fr) | 1964-09-15 | 1965-09-01 | Contrôle de processus de fabrication de mémoires à pellicules d'indium |
Country Status (3)
Country | Link |
---|---|
US (1) | US3400014A (fr) |
DE (1) | DE1521316A1 (fr) |
FR (1) | FR1450869A (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5137667B2 (fr) * | 1971-11-13 | 1976-10-16 | ||
US4112134A (en) * | 1976-03-22 | 1978-09-05 | Transat Corp. | Vacuum deposition method for frequency adjustment of piezoelectric resonators |
US4407871A (en) * | 1980-03-25 | 1983-10-04 | Ex-Cell-O Corporation | Vacuum metallized dielectric substrates and method of making same |
US4431711A (en) * | 1980-03-25 | 1984-02-14 | Ex-Cell-O Corporation | Vacuum metallizing a dielectric substrate with indium and products thereof |
US4477484A (en) * | 1982-12-10 | 1984-10-16 | International Business Machines Corporation | Electroless plating monitor |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2767105A (en) * | 1953-04-17 | 1956-10-16 | Nat Res Corp | Coating |
US2879364A (en) * | 1954-11-29 | 1959-03-24 | Clarostat Mfg Co Inc | Fuse-resistor |
US3023727A (en) * | 1959-09-10 | 1962-03-06 | Ibm | Substrate processing apparatus |
NL294439A (fr) * | 1959-12-21 | |||
US3119707A (en) * | 1960-03-31 | 1964-01-28 | Space Technology Lab Inc | Method for the deposition of thin films by electron deposition |
US3055775A (en) * | 1960-06-10 | 1962-09-25 | Space Technology Lab Inc | Superconductive switching component |
US3085913A (en) * | 1960-10-03 | 1963-04-16 | Ibm | Vacuum evaporation method |
US3239375A (en) * | 1962-06-28 | 1966-03-08 | Ibm | Method of fabricating high gain cryotrons |
-
1964
- 1964-09-15 US US396604A patent/US3400014A/en not_active Expired - Lifetime
-
1965
- 1965-09-01 FR FR30043A patent/FR1450869A/fr not_active Expired
- 1965-09-14 DE DE19651521316 patent/DE1521316A1/de active Pending
Also Published As
Publication number | Publication date |
---|---|
US3400014A (en) | 1968-09-03 |
DE1521316A1 (de) | 1969-08-21 |
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