FR1419326A - Improvements to ion pumps - Google Patents

Improvements to ion pumps

Info

Publication number
FR1419326A
FR1419326A FR449A FR1419326DA FR1419326A FR 1419326 A FR1419326 A FR 1419326A FR 449 A FR449 A FR 449A FR 1419326D A FR1419326D A FR 1419326DA FR 1419326 A FR1419326 A FR 1419326A
Authority
FR
France
Prior art keywords
ion pumps
pumps
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR449A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Francaise Thomson Houston SA
Original Assignee
Compagnie Francaise Thomson Houston SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Application granted granted Critical
Publication of FR1419326A publication Critical patent/FR1419326A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR449A 1964-01-02 Improvements to ion pumps Expired FR1419326A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US335310A US3228590A (en) 1964-01-02 1964-01-02 Triode ionic pump

Publications (1)

Publication Number Publication Date
FR1419326A true FR1419326A (en) 1966-02-17

Family

ID=23311232

Family Applications (1)

Application Number Title Priority Date Filing Date
FR449A Expired FR1419326A (en) 1964-01-02 Improvements to ion pumps

Country Status (4)

Country Link
US (1) US3228590A (en)
DE (1) DE1489225A1 (en)
FR (1) FR1419326A (en)
GB (1) GB1058093A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3369734A (en) * 1966-11-16 1968-02-20 Varian Associates High voltage stand-off insulator assembly in a sputter-ion vacuum pump
US4064548A (en) * 1976-01-27 1977-12-20 Burlington Industries, Inc. Means for improving ionization efficiency of high-voltage grid systems
US4460317A (en) * 1981-12-14 1984-07-17 Kernco, Inc. Ion pump
US4687417A (en) * 1985-12-19 1987-08-18 Hughes Aircraft Company High voltage feedthrough for ion pump
US8328526B2 (en) * 2007-02-16 2012-12-11 National Institute Of Information And Communications Technology Vacuum conveyance system
EP2249373B1 (en) * 2008-02-14 2017-08-02 National Institute of Information and Communications Technology Ion pump system and electromagnetic field generator

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3018944A (en) * 1958-06-16 1962-01-30 Varian Associates Electrical vacuum pump apparatus
NL243654A (en) * 1958-09-25
NL251847A (en) * 1959-05-25
US3115297A (en) * 1960-06-13 1963-12-24 Varian Associates Vacuum pump

Also Published As

Publication number Publication date
DE1489225A1 (en) 1969-01-09
US3228590A (en) 1966-01-11
GB1058093A (en) 1967-02-08

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