FR1415251A - Method and apparatus for applying vacuum coatings - Google Patents
Method and apparatus for applying vacuum coatingsInfo
- Publication number
- FR1415251A FR1415251A FR996514A FR996514A FR1415251A FR 1415251 A FR1415251 A FR 1415251A FR 996514 A FR996514 A FR 996514A FR 996514 A FR996514 A FR 996514A FR 1415251 A FR1415251 A FR 1415251A
- Authority
- FR
- France
- Prior art keywords
- applying vacuum
- vacuum coatings
- coatings
- applying
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR996514A FR1415251A (en) | 1964-11-27 | 1964-11-27 | Method and apparatus for applying vacuum coatings |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR996514A FR1415251A (en) | 1964-11-27 | 1964-11-27 | Method and apparatus for applying vacuum coatings |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1415251A true FR1415251A (en) | 1965-10-22 |
Family
ID=8843492
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR996514A Expired FR1415251A (en) | 1964-11-27 | 1964-11-27 | Method and apparatus for applying vacuum coatings |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1415251A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2354393A1 (en) * | 1976-06-10 | 1978-01-06 | Univ Sydney | REACTIVE CATHODIC SPRAYING METHOD AND DEVICE |
-
1964
- 1964-11-27 FR FR996514A patent/FR1415251A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2354393A1 (en) * | 1976-06-10 | 1978-01-06 | Univ Sydney | REACTIVE CATHODIC SPRAYING METHOD AND DEVICE |
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