FR1322533A - Vacuum coating method and apparatus - Google Patents

Vacuum coating method and apparatus

Info

Publication number
FR1322533A
FR1322533A FR896583A FR896583A FR1322533A FR 1322533 A FR1322533 A FR 1322533A FR 896583 A FR896583 A FR 896583A FR 896583 A FR896583 A FR 896583A FR 1322533 A FR1322533 A FR 1322533A
Authority
FR
France
Prior art keywords
coating method
vacuum coating
vacuum
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR896583A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co PLC
Original Assignee
General Electric Co PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co PLC filed Critical General Electric Co PLC
Priority to FR896583A priority Critical patent/FR1322533A/en
Application granted granted Critical
Publication of FR1322533A publication Critical patent/FR1322533A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR896583A 1962-05-05 1962-05-05 Vacuum coating method and apparatus Expired FR1322533A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR896583A FR1322533A (en) 1962-05-05 1962-05-05 Vacuum coating method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR896583A FR1322533A (en) 1962-05-05 1962-05-05 Vacuum coating method and apparatus

Publications (1)

Publication Number Publication Date
FR1322533A true FR1322533A (en) 1963-03-29

Family

ID=8778295

Family Applications (1)

Application Number Title Priority Date Filing Date
FR896583A Expired FR1322533A (en) 1962-05-05 1962-05-05 Vacuum coating method and apparatus

Country Status (1)

Country Link
FR (1) FR1322533A (en)

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