FR1349184A - Method and apparatus for depositing vapors under vacuum - Google Patents

Method and apparatus for depositing vapors under vacuum

Info

Publication number
FR1349184A
FR1349184A FR907409A FR907409A FR1349184A FR 1349184 A FR1349184 A FR 1349184A FR 907409 A FR907409 A FR 907409A FR 907409 A FR907409 A FR 907409A FR 1349184 A FR1349184 A FR 1349184A
Authority
FR
France
Prior art keywords
under vacuum
vapors under
depositing
depositing vapors
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR907409A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United States Steel Corp
Original Assignee
United States Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United States Steel Corp filed Critical United States Steel Corp
Application granted granted Critical
Publication of FR1349184A publication Critical patent/FR1349184A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • C23C14/30Vacuum evaporation by wave energy or particle radiation by electron bombardment
FR907409A 1961-08-22 1962-08-21 Method and apparatus for depositing vapors under vacuum Expired FR1349184A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13308961A 1961-08-22 1961-08-22

Publications (1)

Publication Number Publication Date
FR1349184A true FR1349184A (en) 1964-01-17

Family

ID=32296458

Family Applications (1)

Application Number Title Priority Date Filing Date
FR907409A Expired FR1349184A (en) 1961-08-22 1962-08-21 Method and apparatus for depositing vapors under vacuum

Country Status (2)

Country Link
BE (1) BE621560A (en)
FR (1) FR1349184A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1771629B1 (en) * 1968-06-19 1971-07-29 Heraeus Gmbh W C EVAPORATION DEVICE FOR ALUMINUM
DE2812311A1 (en) * 1978-03-21 1980-01-31 Leybold Heraeus Gmbh & Co Kg METHOD AND DEVICE FOR VACUUM VAPORIZATION OF THIN LAYERS BY MEANS OF ELECTRON BEAMS, ESPECIALLY FOR THE PRODUCTION OF TURBINE BLADES

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1771629B1 (en) * 1968-06-19 1971-07-29 Heraeus Gmbh W C EVAPORATION DEVICE FOR ALUMINUM
DE2812311A1 (en) * 1978-03-21 1980-01-31 Leybold Heraeus Gmbh & Co Kg METHOD AND DEVICE FOR VACUUM VAPORIZATION OF THIN LAYERS BY MEANS OF ELECTRON BEAMS, ESPECIALLY FOR THE PRODUCTION OF TURBINE BLADES

Also Published As

Publication number Publication date
BE621560A (en) 1963-02-20

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