FR1404193A - Method of manufacturing semiconductor integrated circuit elements - Google Patents

Method of manufacturing semiconductor integrated circuit elements

Info

Publication number
FR1404193A
FR1404193A FR984896A FR984896A FR1404193A FR 1404193 A FR1404193 A FR 1404193A FR 984896 A FR984896 A FR 984896A FR 984896 A FR984896 A FR 984896A FR 1404193 A FR1404193 A FR 1404193A
Authority
FR
France
Prior art keywords
integrated circuit
semiconductor integrated
circuit elements
manufacturing semiconductor
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR984896A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US302966A external-priority patent/US3290753A/en
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Priority to FR984896A priority Critical patent/FR1404193A/en
Application granted granted Critical
Publication of FR1404193A publication Critical patent/FR1404193A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
FR984896A 1963-08-19 1964-08-11 Method of manufacturing semiconductor integrated circuit elements Expired FR1404193A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR984896A FR1404193A (en) 1963-08-19 1964-08-11 Method of manufacturing semiconductor integrated circuit elements

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US302966A US3290753A (en) 1963-08-19 1963-08-19 Method of making semiconductor integrated circuit elements
FR984896A FR1404193A (en) 1963-08-19 1964-08-11 Method of manufacturing semiconductor integrated circuit elements

Publications (1)

Publication Number Publication Date
FR1404193A true FR1404193A (en) 1965-06-25

Family

ID=26209382

Family Applications (1)

Application Number Title Priority Date Filing Date
FR984896A Expired FR1404193A (en) 1963-08-19 1964-08-11 Method of manufacturing semiconductor integrated circuit elements

Country Status (1)

Country Link
FR (1) FR1404193A (en)

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