FR1473535A - Semiconductor integrated circuit manufacturing process - Google Patents

Semiconductor integrated circuit manufacturing process

Info

Publication number
FR1473535A
FR1473535A FR54815A FR54815A FR1473535A FR 1473535 A FR1473535 A FR 1473535A FR 54815 A FR54815 A FR 54815A FR 54815 A FR54815 A FR 54815A FR 1473535 A FR1473535 A FR 1473535A
Authority
FR
France
Prior art keywords
integrated circuit
manufacturing process
semiconductor integrated
circuit manufacturing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR54815A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens and Halske AG
Siemens AG
Original Assignee
Siemens and Halske AG
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DES96207A external-priority patent/DE1230915B/en
Application filed by Siemens and Halske AG, Siemens AG filed Critical Siemens and Halske AG
Priority to FR54815A priority Critical patent/FR1473535A/en
Application granted granted Critical
Publication of FR1473535A publication Critical patent/FR1473535A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
FR54815A 1965-03-26 1966-03-24 Semiconductor integrated circuit manufacturing process Expired FR1473535A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR54815A FR1473535A (en) 1965-03-26 1966-03-24 Semiconductor integrated circuit manufacturing process

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES96207A DE1230915B (en) 1965-03-26 1965-03-26 Process for the production of integrated semiconductor components
FR54815A FR1473535A (en) 1965-03-26 1966-03-24 Semiconductor integrated circuit manufacturing process

Publications (1)

Publication Number Publication Date
FR1473535A true FR1473535A (en) 1967-03-17

Family

ID=25998018

Family Applications (1)

Application Number Title Priority Date Filing Date
FR54815A Expired FR1473535A (en) 1965-03-26 1966-03-24 Semiconductor integrated circuit manufacturing process

Country Status (1)

Country Link
FR (1) FR1473535A (en)

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