FR1347111A - Method and apparatus for automatic focusing of the beam of electrified particles in instruments intended for working a material by means of a beam of electrified particles - Google Patents

Method and apparatus for automatic focusing of the beam of electrified particles in instruments intended for working a material by means of a beam of electrified particles

Info

Publication number
FR1347111A
FR1347111A FR914764A FR914764A FR1347111A FR 1347111 A FR1347111 A FR 1347111A FR 914764 A FR914764 A FR 914764A FR 914764 A FR914764 A FR 914764A FR 1347111 A FR1347111 A FR 1347111A
Authority
FR
France
Prior art keywords
electrified particles
working
automatic focusing
electrified
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR914764A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DEZ9079A external-priority patent/DE1196806B/en
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Priority to FR914764A priority Critical patent/FR1347111A/en
Application granted granted Critical
Publication of FR1347111A publication Critical patent/FR1347111A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/0013—Positioning or observing workpieces, e.g. with respect to the impact; Aligning, aiming or focusing electronbeams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR914764A 1961-11-18 1962-11-08 Method and apparatus for automatic focusing of the beam of electrified particles in instruments intended for working a material by means of a beam of electrified particles Expired FR1347111A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR914764A FR1347111A (en) 1961-11-18 1962-11-08 Method and apparatus for automatic focusing of the beam of electrified particles in instruments intended for working a material by means of a beam of electrified particles

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEZ9079A DE1196806B (en) 1961-11-18 1961-11-18 Method and device for the automatic focusing of the charge carrier beam in devices for material processing by means of the charge carrier beam
FR914764A FR1347111A (en) 1961-11-18 1962-11-08 Method and apparatus for automatic focusing of the beam of electrified particles in instruments intended for working a material by means of a beam of electrified particles

Publications (1)

Publication Number Publication Date
FR1347111A true FR1347111A (en) 1963-12-27

Family

ID=26003471

Family Applications (1)

Application Number Title Priority Date Filing Date
FR914764A Expired FR1347111A (en) 1961-11-18 1962-11-08 Method and apparatus for automatic focusing of the beam of electrified particles in instruments intended for working a material by means of a beam of electrified particles

Country Status (1)

Country Link
FR (1) FR1347111A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1299498B (en) * 1964-07-24 1969-07-17 Steigerwald Strahltech Device for monitoring the beam impact area in corpuscular beam processing devices
FR2024057A6 (en) * 1969-08-05 1970-08-21 Cit Alcatel Focusing an electron beam during welding - by electronic bombardment
FR2464783A1 (en) * 1979-09-14 1981-03-20 Petroles Cie Francaise METHOD FOR ELECTRON BEAM WELDING, WITH ABSORBED POWER REGULATION OR BY THE THROUGHPOWER POWER, AND DEVICE FOR CARRYING OUT SAID METHOD

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1299498B (en) * 1964-07-24 1969-07-17 Steigerwald Strahltech Device for monitoring the beam impact area in corpuscular beam processing devices
FR2024057A6 (en) * 1969-08-05 1970-08-21 Cit Alcatel Focusing an electron beam during welding - by electronic bombardment
FR2464783A1 (en) * 1979-09-14 1981-03-20 Petroles Cie Francaise METHOD FOR ELECTRON BEAM WELDING, WITH ABSORBED POWER REGULATION OR BY THE THROUGHPOWER POWER, AND DEVICE FOR CARRYING OUT SAID METHOD

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