FR1454460A - Method and device for adjusting the focus of an electron beam - Google Patents

Method and device for adjusting the focus of an electron beam

Info

Publication number
FR1454460A
FR1454460A FR28031A FR28031A FR1454460A FR 1454460 A FR1454460 A FR 1454460A FR 28031 A FR28031 A FR 28031A FR 28031 A FR28031 A FR 28031A FR 1454460 A FR1454460 A FR 1454460A
Authority
FR
France
Prior art keywords
focus
adjusting
electron beam
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR28031A
Other languages
French (fr)
Inventor
Siegfried Schiller
Peter Lenk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LOKOMOTIVBAU ELEKTROTECH
Lokomotivbau Elektrotechnische Werke Hans Beimler VEB
Original Assignee
LOKOMOTIVBAU ELEKTROTECH
Lokomotivbau Elektrotechnische Werke Hans Beimler VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LOKOMOTIVBAU ELEKTROTECH, Lokomotivbau Elektrotechnische Werke Hans Beimler VEB filed Critical LOKOMOTIVBAU ELEKTROTECH
Application granted granted Critical
Publication of FR1454460A publication Critical patent/FR1454460A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electron Beam Exposure (AREA)
FR28031A 1965-07-05 1965-08-11 Method and device for adjusting the focus of an electron beam Expired FR1454460A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEV0028797 1965-07-05

Publications (1)

Publication Number Publication Date
FR1454460A true FR1454460A (en) 1966-02-11

Family

ID=7584400

Family Applications (1)

Application Number Title Priority Date Filing Date
FR28031A Expired FR1454460A (en) 1965-07-05 1965-08-11 Method and device for adjusting the focus of an electron beam

Country Status (3)

Country Link
BE (1) BE668005A (en)
DE (1) DE1539035A1 (en)
FR (1) FR1454460A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016102864A1 (en) 2014-12-22 2016-06-30 Christophe Arnould Slab producing electrical energy, apparatus for producing electrical energy comprising a matrix of slabs, and facility producing electrical energy equipped with such apparatuses
EP3238788A1 (en) 2016-04-26 2017-11-01 Christophe Arnould Apparatus for generating electric energy provided with a device for controlling the generated power

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5616426B2 (en) * 2010-02-22 2014-10-29 株式会社アルバック Vacuum processing equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016102864A1 (en) 2014-12-22 2016-06-30 Christophe Arnould Slab producing electrical energy, apparatus for producing electrical energy comprising a matrix of slabs, and facility producing electrical energy equipped with such apparatuses
EP3238788A1 (en) 2016-04-26 2017-11-01 Christophe Arnould Apparatus for generating electric energy provided with a device for controlling the generated power

Also Published As

Publication number Publication date
DE1539035A1 (en) 1969-09-18
BE668005A (en) 1966-02-07

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