FR1341482A - Process for manufacturing a high purity semiconductor material, in particular silicon - Google Patents

Process for manufacturing a high purity semiconductor material, in particular silicon

Info

Publication number
FR1341482A
FR1341482A FR852095A FR852095A FR1341482A FR 1341482 A FR1341482 A FR 1341482A FR 852095 A FR852095 A FR 852095A FR 852095 A FR852095 A FR 852095A FR 1341482 A FR1341482 A FR 1341482A
Authority
FR
France
Prior art keywords
manufacturing
semiconductor material
high purity
particular silicon
purity semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR852095A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Siemens AG
Original Assignee
Siemens Schuckertwerke AG
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DES67223A external-priority patent/DE1185150B/en
Application filed by Siemens Schuckertwerke AG, Siemens AG filed Critical Siemens Schuckertwerke AG
Priority to FR852095A priority Critical patent/FR1341482A/en
Application granted granted Critical
Publication of FR1341482A publication Critical patent/FR1341482A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
FR852095A 1960-02-23 1961-02-08 Process for manufacturing a high purity semiconductor material, in particular silicon Expired FR1341482A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR852095A FR1341482A (en) 1960-02-23 1961-02-08 Process for manufacturing a high purity semiconductor material, in particular silicon

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES67223A DE1185150B (en) 1960-02-23 1960-02-23 Process for the production of the purest semiconductor material, in particular silicon
FR852095A FR1341482A (en) 1960-02-23 1961-02-08 Process for manufacturing a high purity semiconductor material, in particular silicon

Publications (1)

Publication Number Publication Date
FR1341482A true FR1341482A (en) 1963-11-02

Family

ID=25995991

Family Applications (1)

Application Number Title Priority Date Filing Date
FR852095A Expired FR1341482A (en) 1960-02-23 1961-02-08 Process for manufacturing a high purity semiconductor material, in particular silicon

Country Status (1)

Country Link
FR (1) FR1341482A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0090321A2 (en) * 1982-03-29 1983-10-05 Hüls Aktiengesellschaft Reactor and process for the manufacture of semiconductor silicon

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0090321A2 (en) * 1982-03-29 1983-10-05 Hüls Aktiengesellschaft Reactor and process for the manufacture of semiconductor silicon
EP0090321A3 (en) * 1982-03-29 1986-05-14 Hüls Aktiengesellschaft Reactor and process for the manufacture of semiconductor silicon

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