FR1317607A - - Google Patents
Info
- Publication number
- FR1317607A FR1317607A FR1317607DA FR1317607A FR 1317607 A FR1317607 A FR 1317607A FR 1317607D A FR1317607D A FR 1317607DA FR 1317607 A FR1317607 A FR 1317607A
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/002—Controlling or regulating
- C30B23/005—Controlling or regulating flux or flow of depositing species or vapour
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1961S0072962 DE1262979B (en) | 1961-03-14 | 1961-03-14 | Method and device for the production of monocrystalline layers by vapor deposition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR1317607A true FR1317607A (en) | 1963-05-08 |
Family
ID=7503587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1317607D Expired FR1317607A (en) | 1961-03-14 |
Country Status (5)
| Country | Link |
|---|---|
| CH (1) | CH395680A (en) |
| DE (1) | DE1262979B (en) |
| FR (1) | FR1317607A (en) |
| GB (1) | GB948997A (en) |
| NL (1) | NL275889A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1298512B (en) * | 1964-03-13 | 1969-07-03 | Telefunken Patent | Device for vapor deposition of monocrystalline layers on substrates |
| US3514320A (en) * | 1969-02-10 | 1970-05-26 | William H Vaughan | Method of forming single crystal films by nonepitaxial growth |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE514927A (en) * | 1952-01-22 | |||
| DE1057845B (en) * | 1954-03-10 | 1959-05-21 | Licentia Gmbh | Process for the production of monocrystalline semiconducting compounds |
| NL105256C (en) * | 1956-03-05 | |||
| DE1054802B (en) * | 1956-03-05 | 1959-04-09 | Westinghouse Electric Corp | Process for the evaporation of substances, in particular for the creation of the transition zones (junctions) of transistors |
-
0
- NL NL275889D patent/NL275889A/xx unknown
- FR FR1317607D patent/FR1317607A/fr not_active Expired
-
1961
- 1961-03-14 DE DE1961S0072962 patent/DE1262979B/en active Pending
-
1962
- 1962-03-01 CH CH254362A patent/CH395680A/en unknown
- 1962-03-13 GB GB953462A patent/GB948997A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB948997A (en) | 1964-02-05 |
| NL275889A (en) | |
| DE1262979B (en) | 1968-03-14 |
| CH395680A (en) | 1965-07-15 |