FR1308356A - Method for controlling the doping of a vapor-growing semiconductor body - Google Patents

Method for controlling the doping of a vapor-growing semiconductor body

Info

Publication number
FR1308356A
FR1308356A FR882533A FR882533A FR1308356A FR 1308356 A FR1308356 A FR 1308356A FR 882533 A FR882533 A FR 882533A FR 882533 A FR882533 A FR 882533A FR 1308356 A FR1308356 A FR 1308356A
Authority
FR
France
Prior art keywords
doping
vapor
controlling
semiconductor body
growing semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR882533A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US79896A external-priority patent/US3184348A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to FR882533A priority Critical patent/FR1308356A/en
Application granted granted Critical
Publication of FR1308356A publication Critical patent/FR1308356A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/223—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
FR882533A 1960-12-30 1961-12-20 Method for controlling the doping of a vapor-growing semiconductor body Expired FR1308356A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR882533A FR1308356A (en) 1960-12-30 1961-12-20 Method for controlling the doping of a vapor-growing semiconductor body

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US79896A US3184348A (en) 1960-12-30 1960-12-30 Method for controlling doping in vaporgrown semiconductor bodies
FR882533A FR1308356A (en) 1960-12-30 1961-12-20 Method for controlling the doping of a vapor-growing semiconductor body

Publications (1)

Publication Number Publication Date
FR1308356A true FR1308356A (en) 1962-11-03

Family

ID=26193588

Family Applications (1)

Application Number Title Priority Date Filing Date
FR882533A Expired FR1308356A (en) 1960-12-30 1961-12-20 Method for controlling the doping of a vapor-growing semiconductor body

Country Status (1)

Country Link
FR (1) FR1308356A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0068839A1 (en) * 1981-06-29 1983-01-05 Fujitsu Limited Method and apparatus for vapor phase growth of a semiconductor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0068839A1 (en) * 1981-06-29 1983-01-05 Fujitsu Limited Method and apparatus for vapor phase growth of a semiconductor
US4507169A (en) * 1981-06-29 1985-03-26 Fujitsu Limited Method and apparatus for vapor phase growth of a semiconductor

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