FR1266612A - Etching solutions for the surface treatment of semiconductor materials - Google Patents

Etching solutions for the surface treatment of semiconductor materials

Info

Publication number
FR1266612A
FR1266612A FR828936A FR828936A FR1266612A FR 1266612 A FR1266612 A FR 1266612A FR 828936 A FR828936 A FR 828936A FR 828936 A FR828936 A FR 828936A FR 1266612 A FR1266612 A FR 1266612A
Authority
FR
France
Prior art keywords
surface treatment
semiconductor materials
etching solutions
etching
solutions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR828936A
Other languages
French (fr)
Inventor
Marc Chappey
Pierre Meritet
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to FR828936A priority Critical patent/FR1266612A/en
Application granted granted Critical
Publication of FR1266612A publication Critical patent/FR1266612A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
FR828936A 1960-06-02 1960-06-02 Etching solutions for the surface treatment of semiconductor materials Expired FR1266612A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR828936A FR1266612A (en) 1960-06-02 1960-06-02 Etching solutions for the surface treatment of semiconductor materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR828936A FR1266612A (en) 1960-06-02 1960-06-02 Etching solutions for the surface treatment of semiconductor materials

Publications (1)

Publication Number Publication Date
FR1266612A true FR1266612A (en) 1961-07-17

Family

ID=8732673

Family Applications (1)

Application Number Title Priority Date Filing Date
FR828936A Expired FR1266612A (en) 1960-06-02 1960-06-02 Etching solutions for the surface treatment of semiconductor materials

Country Status (1)

Country Link
FR (1) FR1266612A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2176664A1 (en) * 1972-03-23 1973-11-02 Siemens Ag
FR2374396A1 (en) * 1976-12-17 1978-07-13 Ibm SILICON PICKLING COMPOSITION

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2176664A1 (en) * 1972-03-23 1973-11-02 Siemens Ag
FR2374396A1 (en) * 1976-12-17 1978-07-13 Ibm SILICON PICKLING COMPOSITION

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