FR1301121A - Containers for the manufacture or processing of semiconductors - Google Patents

Containers for the manufacture or processing of semiconductors

Info

Publication number
FR1301121A
FR1301121A FR871812A FR871812A FR1301121A FR 1301121 A FR1301121 A FR 1301121A FR 871812 A FR871812 A FR 871812A FR 871812 A FR871812 A FR 871812A FR 1301121 A FR1301121 A FR 1301121A
Authority
FR
France
Prior art keywords
semiconductors
containers
manufacture
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR871812A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schunk and Ebe GmbH
Original Assignee
Schunk and Ebe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schunk and Ebe GmbH filed Critical Schunk and Ebe GmbH
Priority to FR871812A priority Critical patent/FR1301121A/en
Application granted granted Critical
Publication of FR1301121A publication Critical patent/FR1301121A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/14—Crucibles or vessels

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
FR871812A 1961-08-29 1961-08-29 Containers for the manufacture or processing of semiconductors Expired FR1301121A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR871812A FR1301121A (en) 1961-08-29 1961-08-29 Containers for the manufacture or processing of semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR871812A FR1301121A (en) 1961-08-29 1961-08-29 Containers for the manufacture or processing of semiconductors

Publications (1)

Publication Number Publication Date
FR1301121A true FR1301121A (en) 1962-08-10

Family

ID=8761910

Family Applications (1)

Application Number Title Priority Date Filing Date
FR871812A Expired FR1301121A (en) 1961-08-29 1961-08-29 Containers for the manufacture or processing of semiconductors

Country Status (1)

Country Link
FR (1) FR1301121A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2198802A1 (en) * 1972-09-08 1974-04-05 Wacker Chemitronic
FR2500768A1 (en) * 1981-02-27 1982-09-03 Labo Electronique Physique Dismantlable crucible for silicon solar cell mfr. - comprises rectangular blocks fastened together with strap
EP0102130A1 (en) * 1982-09-01 1984-03-07 Koninklijke Philips Electronics N.V. Method of growing monocrystalline bodies of volatile compounds

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2198802A1 (en) * 1972-09-08 1974-04-05 Wacker Chemitronic
FR2500768A1 (en) * 1981-02-27 1982-09-03 Labo Electronique Physique Dismantlable crucible for silicon solar cell mfr. - comprises rectangular blocks fastened together with strap
EP0102130A1 (en) * 1982-09-01 1984-03-07 Koninklijke Philips Electronics N.V. Method of growing monocrystalline bodies of volatile compounds

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