FR1232565A - Dispositif de contrôle et de réglage de l'opération de fusion d'un barreau semiconducteur - Google Patents

Dispositif de contrôle et de réglage de l'opération de fusion d'un barreau semiconducteur

Info

Publication number
FR1232565A
FR1232565A FR795511A FR795511A FR1232565A FR 1232565 A FR1232565 A FR 1232565A FR 795511 A FR795511 A FR 795511A FR 795511 A FR795511 A FR 795511A FR 1232565 A FR1232565 A FR 1232565A
Authority
FR
France
Prior art keywords
adjusting
controlling
melting operation
semiconductor bar
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR795511A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Siemens Corp
Original Assignee
Siemens Schuckertwerke AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Schuckertwerke AG, Siemens Corp filed Critical Siemens Schuckertwerke AG
Application granted granted Critical
Publication of FR1232565A publication Critical patent/FR1232565A/fr
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28Controlling or regulating
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28Controlling or regulating
    • C30B13/285Crystal holders, e.g. chucks
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1004Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008Apparatus with means for measuring, testing, or sensing with responsive control means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Induction Heating (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Arc Welding Control (AREA)
FR795511A 1958-08-16 1959-05-25 Dispositif de contrôle et de réglage de l'opération de fusion d'un barreau semiconducteur Expired FR1232565A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES59437A DE1141086B (de) 1958-08-16 1958-08-16 Vorrichtung zur UEberwachung des durchgeschmolzenen Zustandes einer Schmelzzone beim tiegelfreien Zonenschmelzen

Publications (1)

Publication Number Publication Date
FR1232565A true FR1232565A (fr) 1960-10-10

Family

ID=7493311

Family Applications (1)

Application Number Title Priority Date Filing Date
FR795511A Expired FR1232565A (fr) 1958-08-16 1959-05-25 Dispositif de contrôle et de réglage de l'opération de fusion d'un barreau semiconducteur

Country Status (7)

Country Link
US (1) US3009973A (enrdf_load_stackoverflow)
BE (1) BE581687A (enrdf_load_stackoverflow)
CH (1) CH373193A (enrdf_load_stackoverflow)
DE (1) DE1141086B (enrdf_load_stackoverflow)
FR (1) FR1232565A (enrdf_load_stackoverflow)
GB (1) GB907478A (enrdf_load_stackoverflow)
NL (2) NL240020A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL247741A (enrdf_load_stackoverflow) * 1959-01-27
NL255130A (enrdf_load_stackoverflow) 1959-09-11
DE1165882B (de) * 1960-02-05 1964-03-19 Philips Patentverwaltung Vorrichtung zur Ausfuehrung von Drehbewegungen an stabfoermigen Koerpern, insbesondere an Halbleiterkoerpern
US3211881A (en) * 1962-08-28 1965-10-12 Westinghouse Electric Corp Apparatus for zone heating
US4176002A (en) * 1974-08-21 1979-11-27 Agence Nationale De Valorisation De La Recherche (Anvar) Controlling the melt temperature during zone refining and Czochralski crystal growth by sensing the viscous torque of the melt zone during operation

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2362398A (en) * 1942-08-01 1944-11-07 Ralph R Pittman Thermally responsive device
DE1061527B (de) * 1953-02-14 1959-07-16 Siemens Ag Verfahren zum zonenweisen Umschmelzen von Staeben und anderen langgestreckten Werkstuecken
US2764027A (en) * 1954-04-19 1956-09-25 Otto Walter Thermal fuse
US2870309A (en) * 1957-06-11 1959-01-20 Emil R Capita Zone purification device
DE1092576B (de) * 1957-11-15 1960-11-10 Siemens Ag Stromzufuehrung fuer die bewegliche Heizspule einer tiegelfreien Zonenziehvorrichtung im Innern eines Gefaesses

Also Published As

Publication number Publication date
US3009973A (en) 1961-11-21
DE1141086B (de) 1962-12-13
NL240020A (enrdf_load_stackoverflow)
NL113487C (enrdf_load_stackoverflow)
BE581687A (enrdf_load_stackoverflow)
GB907478A (en) 1962-10-03
CH373193A (de) 1963-11-15

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