FR1091369A - Dispositif perfectionné pour le dépôt de matières par évapocation dans le vide - Google Patents

Dispositif perfectionné pour le dépôt de matières par évapocation dans le vide

Info

Publication number
FR1091369A
FR1091369A FR1091369DA FR1091369A FR 1091369 A FR1091369 A FR 1091369A FR 1091369D A FR1091369D A FR 1091369DA FR 1091369 A FR1091369 A FR 1091369A
Authority
FR
France
Prior art keywords
evapocation
deposition
vacuum
materials
advanced device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
French (fr)
Inventor
Tzu En Shen
John Philip Huggett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BRITISH DIELECTRIC RES Ltd
Original Assignee
BRITISH DIELECTRIC RES Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BRITISH DIELECTRIC RES Ltd filed Critical BRITISH DIELECTRIC RES Ltd
Application granted granted Critical
Publication of FR1091369A publication Critical patent/FR1091369A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR1091369D 1953-01-26 1954-01-13 Dispositif perfectionné pour le dépôt de matières par évapocation dans le vide Expired FR1091369A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB222453A GB766119A (en) 1953-01-26 1953-01-26 Improved means for coating of surfaces by vapour deposition

Publications (1)

Publication Number Publication Date
FR1091369A true FR1091369A (fr) 1955-04-12

Family

ID=9735777

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1091369D Expired FR1091369A (fr) 1953-01-26 1954-01-13 Dispositif perfectionné pour le dépôt de matières par évapocation dans le vide

Country Status (4)

Country Link
ES (1) ES213308A1 (nl)
FR (1) FR1091369A (nl)
GB (1) GB766119A (nl)
NL (2) NL85130C (nl)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0337369A1 (en) * 1988-04-11 1989-10-18 Mitsubishi Jukogyo Kabushiki Kaisha Continuous vacuum vapor deposition apparatus
WO1996035822A1 (fr) * 1995-05-10 1996-11-14 Centre De Recherches Metallurgiques - Centrum Voor Research In De Metallurgie Dispositif et installation pour revetir une bande d'acier

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3001892A (en) * 1958-03-26 1961-09-26 Gen Electric Evaporation method and apparatus
US3245674A (en) * 1960-04-25 1966-04-12 Nat Res Corp Crucible coated with reaction product of aluminum and boron nitride coating
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3244857A (en) * 1963-12-23 1966-04-05 Ibm Vapor deposition source
US3603285A (en) * 1968-11-05 1971-09-07 Massachusetts Inst Technology Vapor deposition apparatus
US3690638A (en) * 1970-05-15 1972-09-12 Republic Steel Corp Apparatus and method for vaporizing molten metal
US4094269A (en) 1974-06-14 1978-06-13 Zlafop Pri Ban Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances
JPH04308076A (ja) * 1991-04-03 1992-10-30 Mitsubishi Heavy Ind Ltd 昇華性物質真空蒸着装置
US6237529B1 (en) 2000-03-03 2001-05-29 Eastman Kodak Company Source for thermal physical vapor deposition of organic electroluminescent layers
CN107254663A (zh) * 2017-07-13 2017-10-17 安徽省宁国市海伟电子有限公司 一种抗氧化型真空镀膜装置
KR102367988B1 (ko) * 2017-07-31 2022-02-28 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
GB2574400B (en) 2018-06-04 2022-11-23 Dyson Technology Ltd A Device
GB2574401B (en) * 2018-06-04 2022-11-23 Dyson Technology Ltd A Device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0337369A1 (en) * 1988-04-11 1989-10-18 Mitsubishi Jukogyo Kabushiki Kaisha Continuous vacuum vapor deposition apparatus
US5000114A (en) * 1988-04-11 1991-03-19 Mitsubishi Jukogyo Kabushiki Kaisha Continuous vacuum vapor deposition system having reduced pressure sub-chambers separated by seal devices
WO1996035822A1 (fr) * 1995-05-10 1996-11-14 Centre De Recherches Metallurgiques - Centrum Voor Research In De Metallurgie Dispositif et installation pour revetir une bande d'acier

Also Published As

Publication number Publication date
ES213308A1 (es) 1954-03-16
NL85130C (nl)
GB766119A (en) 1957-01-16
NL184420B (nl)

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