FR1091369A - Advanced device for the deposition of materials by evapocation in a vacuum - Google Patents
Advanced device for the deposition of materials by evapocation in a vacuumInfo
- Publication number
- FR1091369A FR1091369A FR1091369DA FR1091369A FR 1091369 A FR1091369 A FR 1091369A FR 1091369D A FR1091369D A FR 1091369DA FR 1091369 A FR1091369 A FR 1091369A
- Authority
- FR
- France
- Prior art keywords
- evapocation
- deposition
- vacuum
- materials
- advanced device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB222453A GB766119A (en) | 1953-01-26 | 1953-01-26 | Improved means for coating of surfaces by vapour deposition |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1091369A true FR1091369A (en) | 1955-04-12 |
Family
ID=9735777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1091369D Expired FR1091369A (en) | 1953-01-26 | 1954-01-13 | Advanced device for the deposition of materials by evapocation in a vacuum |
Country Status (4)
Country | Link |
---|---|
ES (1) | ES213308A1 (en) |
FR (1) | FR1091369A (en) |
GB (1) | GB766119A (en) |
NL (2) | NL184420B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0337369A1 (en) * | 1988-04-11 | 1989-10-18 | Mitsubishi Jukogyo Kabushiki Kaisha | Continuous vacuum vapor deposition apparatus |
WO1996035822A1 (en) * | 1995-05-10 | 1996-11-14 | Centre De Recherches Metallurgiques - Centrum Voor Research In De Metallurgie | Device and plant for coating a steel band |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3001892A (en) * | 1958-03-26 | 1961-09-26 | Gen Electric | Evaporation method and apparatus |
US3245674A (en) * | 1960-04-25 | 1966-04-12 | Nat Res Corp | Crucible coated with reaction product of aluminum and boron nitride coating |
US3277865A (en) * | 1963-04-01 | 1966-10-11 | United States Steel Corp | Metal-vapor source with heated reflecting shield |
US3244857A (en) * | 1963-12-23 | 1966-04-05 | Ibm | Vapor deposition source |
US3603285A (en) * | 1968-11-05 | 1971-09-07 | Massachusetts Inst Technology | Vapor deposition apparatus |
US3690638A (en) * | 1970-05-15 | 1972-09-12 | Republic Steel Corp | Apparatus and method for vaporizing molten metal |
US4094269A (en) | 1974-06-14 | 1978-06-13 | Zlafop Pri Ban | Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances |
JPH04308076A (en) * | 1991-04-03 | 1992-10-30 | Mitsubishi Heavy Ind Ltd | Vacuum deposition device for sublimable substance |
US6237529B1 (en) * | 2000-03-03 | 2001-05-29 | Eastman Kodak Company | Source for thermal physical vapor deposition of organic electroluminescent layers |
CN107254663A (en) * | 2017-07-13 | 2017-10-17 | 安徽省宁国市海伟电子有限公司 | A kind of anti-oxidative vacuum coater |
KR102367988B1 (en) * | 2017-07-31 | 2022-02-28 | 삼성디스플레이 주식회사 | Apparatus and method for manufacturing a display apparatus |
GB2574400B (en) * | 2018-06-04 | 2022-11-23 | Dyson Technology Ltd | A Device |
GB2574401B (en) * | 2018-06-04 | 2022-11-23 | Dyson Technology Ltd | A Device |
-
0
- NL NL85130D patent/NL85130C/xx active
- NL NLAANVRAGE8102730,B patent/NL184420B/en unknown
-
1953
- 1953-01-26 GB GB222453A patent/GB766119A/en not_active Expired
-
1954
- 1954-01-13 FR FR1091369D patent/FR1091369A/en not_active Expired
- 1954-01-25 ES ES0213308A patent/ES213308A1/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0337369A1 (en) * | 1988-04-11 | 1989-10-18 | Mitsubishi Jukogyo Kabushiki Kaisha | Continuous vacuum vapor deposition apparatus |
US5000114A (en) * | 1988-04-11 | 1991-03-19 | Mitsubishi Jukogyo Kabushiki Kaisha | Continuous vacuum vapor deposition system having reduced pressure sub-chambers separated by seal devices |
WO1996035822A1 (en) * | 1995-05-10 | 1996-11-14 | Centre De Recherches Metallurgiques - Centrum Voor Research In De Metallurgie | Device and plant for coating a steel band |
Also Published As
Publication number | Publication date |
---|---|
GB766119A (en) | 1957-01-16 |
NL184420B (en) | |
NL85130C (en) | |
ES213308A1 (en) | 1954-03-16 |
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