CN107254663A - A kind of anti-oxidative vacuum coater - Google Patents
A kind of anti-oxidative vacuum coater Download PDFInfo
- Publication number
- CN107254663A CN107254663A CN201710571867.6A CN201710571867A CN107254663A CN 107254663 A CN107254663 A CN 107254663A CN 201710571867 A CN201710571867 A CN 201710571867A CN 107254663 A CN107254663 A CN 107254663A
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- Prior art keywords
- vaporization chamber
- chamber
- hypocentrum
- zinc
- diameter
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- 230000003078 antioxidant effect Effects 0.000 title claims abstract description 18
- 239000011248 coating agent Substances 0.000 claims abstract description 14
- 238000000576 coating method Methods 0.000 claims abstract description 14
- 238000007599 discharging Methods 0.000 claims abstract description 13
- 230000008018 melting Effects 0.000 claims abstract description 8
- 238000002844 melting Methods 0.000 claims abstract description 8
- 230000007704 transition Effects 0.000 claims abstract description 5
- 238000009834 vaporization Methods 0.000 claims description 59
- 230000008016 vaporization Effects 0.000 claims description 59
- 230000003139 buffering effect Effects 0.000 claims description 12
- 230000003137 locomotive effect Effects 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 4
- 238000010079 rubber tapping Methods 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 230000001154 acute effect Effects 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 36
- 239000002184 metal Substances 0.000 abstract description 36
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract description 19
- 229910052725 zinc Inorganic materials 0.000 abstract description 19
- 239000011701 zinc Substances 0.000 abstract description 19
- 239000010408 film Substances 0.000 abstract description 16
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 15
- 238000001704 evaporation Methods 0.000 abstract description 14
- 230000008020 evaporation Effects 0.000 abstract description 14
- 239000011104 metalized film Substances 0.000 abstract description 14
- 239000002245 particle Substances 0.000 abstract description 9
- 238000001771 vacuum deposition Methods 0.000 abstract description 9
- 239000000203 mixture Substances 0.000 abstract description 5
- 239000012141 concentrate Substances 0.000 abstract description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 12
- 239000003990 capacitor Substances 0.000 description 10
- 229910052709 silver Inorganic materials 0.000 description 9
- 239000004332 silver Substances 0.000 description 9
- 230000005611 electricity Effects 0.000 description 8
- 238000007747 plating Methods 0.000 description 8
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 8
- 230000006872 improvement Effects 0.000 description 7
- 239000004743 Polypropylene Substances 0.000 description 6
- -1 polypropylene Polymers 0.000 description 6
- 229920001155 polypropylene Polymers 0.000 description 6
- 239000011787 zinc oxide Substances 0.000 description 6
- 238000011161 development Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000010248 power generation Methods 0.000 description 4
- 229910001923 silver oxide Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004146 energy storage Methods 0.000 description 3
- 239000003517 fume Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000013528 metallic particle Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052571 earthenware Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000010025 steaming Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000002028 Biomass Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- TVZPLCNGKSPOJA-UHFFFAOYSA-N copper zinc Chemical compound [Cu].[Zn] TVZPLCNGKSPOJA-UHFFFAOYSA-N 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000686 essence Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000004083 survival effect Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to a kind of anti-oxidative vacuum coater, including coiling chamber and coating chamber, let off roll is provided with coiling chamber, film transition roller, the first dance roller, the first nip rolls, chill roll, pressure roller, the second dance roller, deflector roll, the second nip rolls, carry-over pinch rolls is put and receives certificate roller, wire feeder, melting crucible, discharging tube, station turnplate, stepper motor, bottom plate are provided with coating chamber.The anti-oxidative vacuum coater is applied to the vacuum coating operation of silver-plated/zinc-type metallized film, the content of oxide particle in the zinc sprayed from evaporator crucible or silver metal steam is reduced using power cooperation gear cone is centrifuged, the zinc or silver metal steam that are sprayed in evaporator crucible can be avoided to escape everywhere, the zinc or silver-colored steam sprayed in evaporator crucible concentrates bunchy, good directionality, controllability is high, and zinc or silver-colored steam utilization rate are high, and the metal-coated structure that evaporation is formed is fine and close, composition is uniform.
Description
Technical field
The present invention relates to a kind of anti-oxidative vacuum coater, belong to capacitor technology field.
Background technology
Energy shortage and environmental degradation have become the globalization problem for threatening human survival, and development new energy is to realize people
The only way which must be passed of class sustainable development, China should Speeding up development utilize the paces of new energy, greatly develop new energy, it is progressively real
Now change from conventional energy resource to clean energy resource.
Progressively replaced with new energy traditional energy generated electricity by be electric power industry development from now on trend, generation of electricity by new energy
Mainly including in terms of solar power generation, wind-power electricity generation, biomass power generation, geothermal power generation, tidal power generation.
Urban track traffic refers to freight volume is big, speed fast, safety, on schedule, environmental protection, save the energy and land used etc.
The mode of transportation of feature, including subway, light rail, magnetic suspension, fast rail, tramcar, new traffic system etc..Therefore, in city rail
New energy is comprehensively utilized in road technical field of transportation also turns into the growth requirement of future city track traffic.
New-energy automobile refers to using unconventional vehicle fuel that as power resources new-energy automobile includes hybrid power
Automobile, pure electric automobile, fuel cell electric vehicle, hydrogen engine automobile, other new energy（Such as high-efficiency energy-storage device, dimethyl ether）
The product of all categories such as automobile.
Either the field such as generation of electricity by new energy, new-energy automobile or urban track traffic, is all finally to want power equipment
Driving, changing or realizing, in power equipment, capacitor is important component therein as energy-storage travelling wave tube, especially new
The energy is as unconventional energy resource, during its comprehensive utilization, to traditional power equipment especially capacitor in volume, resistance to
Pressure, heatproof, resistance to rush of current, reliability, there is very high requirement in use time, at present in the world with metallic film capacitor
Its requirement is best suited, the material of this respect most critical is exactly metallized film.
Plating silver type metallized film has preferable electric property, is commonly used in some special equipments.Silver type is plated at present
Metallized film is made of that vacuum coating is carried out in vacuum coating equipment using argent and insulation film.But, due to filamentary silver
The substantial amounts of silver oxide impurity of generation is easily oxidized during fusing, evaporation coating in evaporator crucible, in ac high-voltage high current
During lower work, silver oxide can cause the capacity of capacitor to decline rapidly, thus at present in generation of electricity by new energy, new-energy automobile still
Seldom it is used as energy-storage travelling wave tube using plating the capacitor that silver type metallized film is made in the fields such as urban track traffic.Add,
Due to the environment in vacuum coating equipment be subnormal ambient, silver-colored steam from evaporator crucible flow out when easy four dissipate escape, this causes
The silver-colored steam of a part is wasted, and the utilization rate of silver-colored steam is limited, and the easy skewness of silver-colored steam overflowed so that silver coating
Skewness is easily caused, so as to produce fault, this causes follow-up plating silver type metallized film easily to puncture at fault, right
The security and service life length of capacitor have undesirable effect.
Plating zinc-type metallized film is usually used in the equipment of ac high-voltage high current.Plating zinc-type metallized film is to make at present
Vacuum coating is carried out with metallic zinc and insulation film in vacuum coating equipment to be made.But, because zinc silk melts in evaporator crucible
The substantial amounts of zinc oxide impurities of generation are easily oxidized in change, evaporation process, although zinc oxide impurities are for ac high-voltage high current
Adaptability will not sharp decline, but the zinc oxide that oxidation is formed has fluffy structure, during follow-up use, empty
Oxygen in gas easily enters further oxidized metal zinc in fluffy zinc oxide, if improper use is easily caused capacitor
The heating even accident that punctures, thus at present in the fields such as generation of electricity by new energy, new-energy automobile or urban track traffic very
Few utilize plates the capacitor that zinc-type metallized film is made.Add, because the environment in vacuum coating equipment is subnormal ambient, zinc
Steam easy four scattered escape when being flowed out from evaporator crucible, this causes the zinc fume of a part to be wasted, the utilization rate of zinc fume
It is limited, and the easy skewness of zinc fume overflowed so that zinc coat easily causes skewness, so as to produce fault, this causes
Follow-up plating zinc-type metallized film is more easy to puncture at fault, and the security and service life length to capacitor are caused not
Good influence.
The content of the invention
The present invention is in view of the deficienciess of the prior art, there is provided a kind of anti-oxidative vacuum coater, particular technique
Scheme is as follows：
Let off roll is provided with a kind of anti-oxidative vacuum coater, including coiling chamber and coating chamber, the coiling chamber, put film
Transition roller, the first dance roller, the first nip rolls, chill roll, pressure roller, the second dance roller, deflector roll, the second nip rolls,
It is provided with carry-over pinch rolls and receipts certificate roller, the coating chamber in wire feeder, the coating chamber and is additionally provided with melting crucible, discharge opeing
Pipe, station turnplate, stepper motor, bottom plate, the tail end of the discharging tube are connected with melting crucible, and discharge opeing is additionally provided with discharging tube
Valve；The station turnplate is arranged on the top of bottom plate, and the station turnplate is rotated with bottom plate and is connected, and the station turnplate is by stepping
Motor drives；A pair of symmetrical centrifugal turntables are provided with above the station turnplate, centrifugal turntable turns with station turnplate
Dynamic connection, the side of centrifugal turntable is provided with high-speed electric expreess locomotive, and centrifugal turntable is driven by high-speed electric expreess locomotive；The top of the centrifugal turntable
Evaporator crucible is installed with, evaporator crucible includes straight at the top of vaporization chamber under vaporization chamber in truncated cone-shaped and reverse frustoconic, upper vaporization chamber
Footpath is less than the diameter of upper vaporization chamber bottom, and lower vaporization chamber top diameter is more than lower vaporization chamber base diameter, the bottom of upper vaporization chamber
Connected with the top of lower vaporization chamber, buffering jet pipe is installed with the top of the upper vaporization chamber, buffering jet pipe is connected with upper vaporization chamber；
The interior cone angle of the upper vaporization chamber is α, and α is obtuse angle；The interior cone angle of the lower vaporization chamber is β, and β is acute angle；The lower vaporization chamber
Center be provided with column, the lower end of column is fixedly connected with the bottom of lower vaporization chamber, and the inside of the evaporator crucible is also set up
There is gear to bore, gear cone includes the upper centrum of cone and reverse frustoconic hypocentrum, the diameter of the upper centrum bottom surface is equal to hypocentrum top
The diameter in face, the diameter of hypocentrum top surface is more than the diameter of hypocentrum bottom surface, and the bottom surface of hypocentrum and the upper surface of column are fixed
Connection；The upper centrum is arranged in vaporization chamber, and the cone angle of upper centrum is γ, γ=α；The hypocentrum is arranged on lower evaporation
In room, the cone angle of hypocentrum is 45 °.
As the improvement of above-mentioned technical proposal, the interior cone angle of the upper vaporization chamber is α, 100 °≤α≤135 °；The lower steaming
The interior cone angle for sending out room is β, 5 °≤β≤30 °.
As the improvement of above-mentioned technical proposal, brake apparatus, brake apparatus are provided between the bottom plate and station turnplate
Straight tube, spring, the electromagnet being engaged including magnetic plug, with plug, the lower end of the magnetic plug are arranged on the interior of straight tube
Portion, spring is arranged on the inside of straight tube and spring is arranged on the lower section of magnetic plug, the upper end of spring and the lower end of magnetic plug
It is fixedly connected, the upper end of the electromagnet is fixedly connected with the lower end of straight tube, the lower end of electromagnet is fixedly connected with bottom plate, described
The lower end of spring is fixedly connected with the upper end of electromagnet；A pair and determining that magnetic plug is adapted are provided with the station turnplate
Position hole, two positioning holes are centrosymmetric distribution by symmetrical centre of the center of station turnplate.
As the improvement of above-mentioned technical proposal, the spring is made up of chromium nickel stainless steel.
As the improvement of above-mentioned technical proposal, matching somebody with somebody between the plug and straight tube is combined into gap cooperation.
As the improvement of above-mentioned technical proposal, the upper centrum and hypocentrum are structure as a whole.
As the improvement of above-mentioned technical proposal, the gear cone and column are made by red copper.
Anti-oxidative vacuum coater of the present invention is applied to plating zinc-type metallized film, plating silver type metallized film
Vacuum coating operation, design is optimized by the structure to existing evaporator crucible, using centrifuge power cooperation gear cone reduction from
The content of oxide particle in the zinc or silver metal steam that are sprayed in evaporator crucible, while can also avoid spraying in evaporator crucible
Zinc or silver metal steam escape everywhere, the zinc that is sprayed in evaporator crucible or silver-colored steam concentrate bunchy, good directionality, controllability
Height, zinc or silver-colored steam utilization rate are high, and metal-coated structure densification, the composition that formation is deposited are uniform.Use the anti-oxidative vacuum
The final product quality that coating apparatus is made is high, and defect rate is low, is not susceptible to puncture during follow-up use, safe, uses
Long lifespan.
Brief description of the drawings
Fig. 1 is anti-oxidative vacuum coater structural representation of the present invention；
Fig. 2 is evaporator crucible structural representation of the present invention；
Fig. 3 is upper vaporization chamber of the present invention and lower vaporization chamber structural representation；
Fig. 4 is gear wimble structure schematic diagram of the present invention；
Fig. 5 is station turntable structure schematic diagram of the present invention；
Fig. 6 is brake device structure schematic diagram of the present invention.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
As shown in Fig. 1 ~ 4, the anti-oxidative vacuum coater, including coiling chamber 1 and coating chamber 2, the coiling chamber 1
In be provided with let off roll 11, put film transition roller 12, the first dance roller 13, the first nip rolls 14, chill roll 15, pressure roller 16,
It is provided with second dance roller 17, deflector roll 18, the second nip rolls 19, carry-over pinch rolls 110 and receipts certificate roller 111, the coating chamber 2
Melting crucible 3, discharging tube 31, station turnplate 4, stepper motor 5, bottom plate 6 are additionally provided with wire feeder 21, the coating chamber 2,
The tail end of the discharging tube 31 is connected with melting crucible 3, and tapping valve 32 is additionally provided with discharging tube 31；The station turnplate 4 is set
Put in the top of bottom plate 6, the station turnplate 4 is rotated with bottom plate 6 and is connected, and the station turnplate 4 is driven by stepper motor 5；Institute
The top for stating station turnplate 4 is provided with a pair of symmetrical centrifugal turntables 8, and centrifugal turntable 8 is rotated with station turnplate 4 and is connected,
The side of centrifugal turntable 8 is provided with high-speed electric expreess locomotive 81, and centrifugal turntable 8 is driven by high-speed electric expreess locomotive 81；The top of the centrifugal turntable 8
Evaporator crucible 7 is installed with, evaporator crucible 7 includes vaporization chamber 72, upper vaporization chamber 71 under vaporization chamber 71 in truncated cone-shaped and reverse frustoconic
The diameter at top is less than the diameter of the upper bottom of vaporization chamber 71, and the lower top diameter of vaporization chamber 72 is more than the lower base diameter of vaporization chamber 72,
The bottom of upper vaporization chamber 71 is connected with the top of lower vaporization chamber 72, and the top of the upper vaporization chamber 71 is installed with buffering jet pipe 711,
Buffering jet pipe 711 is connected with upper vaporization chamber 71；The interior cone angle of the upper vaporization chamber 71 is α, 100 °≤α≤135 °；The lower steaming
The interior cone angle for sending out room 72 is β, 5 °≤β≤30 °；The center of the lower vaporization chamber 72 is provided with column 74, the lower end of column 74 with
The bottom of lower vaporization chamber 72 is fixedly connected, and the inside of the evaporator crucible 7 is additionally provided with gear cone 73, and gear cone 73 is included on cone
Centrum 731 and reverse frustoconic hypocentrum 732, the diameter of the upper bottom surface of centrum 731 are equal to the diameter of the top surface of hypocentrum 732, under
The diameter of the top surface of centrum 732 is more than the diameter of the bottom surface of hypocentrum 732, and the bottom surface and the upper surface of column 74 of hypocentrum 732 are fixed
Connection；The upper centrum 731 is arranged in vaporization chamber 71, and the cone angle of upper centrum 731 is γ, γ=α；The hypocentrum 732 is set
Put in lower vaporization chamber 72, the cone angle of hypocentrum 732 is 45 °.
Releasing raw material film, the optional polypropylene film of raw material film in let off roll 11, polypropylene film, which is sequentially passed through, puts film transition
Evaporation is cooled to metallized film on chill roll 15 after roller 12, the first dance roller 13, the first nip rolls 14, metallizes thin
Film sequentially passes through and is receiving certificate roller 111 after pressure roller 16, the second dance roller 17, deflector roll 18, the second nip rolls 19, carry-over pinch rolls 110
Place's winding；Wire feeder 21 is by wire（Such as zinc silk, filamentary silver）Endlessly metal is first fused into feeding melting crucible 3
Liquid, then opens tapping valve 32, and molten metal flows to first evaporation earthenware under gravity from the head end outflow of discharging tube 31
Evaporation mouthful 711 in crucible 7, evaporator crucible 7 makes it produce metal vapors to molten metal continuous heating.At the same time, in stepping electricity
Under the driving of machine 5, station turnplate 4 rotates 180 °, and the now evaporation in first evaporator crucible 7 mouthful 711 is sitting at chill roll 15
Underface, the evaporation mouth 711 in second evaporator crucible 7 is sitting at the underface of the head end of discharging tube 31, second evaporation earthenware
Start to be transfused to molten metal in crucible 7；Start high-speed electric expreess locomotive 81 immediately, high-speed electric expreess locomotive 81 drives centrifugal turntable 8 to rotate at a high speed, centrifuges
Rotating disk 8 also drives first evaporator crucible 7 to carry out high speed rotation simultaneously, and first evaporator crucible 7 rotates at a high speed generation centrifugal force,
Contain due to containing in molten metal in micro oxide particle, such as zinc liquid in micro Zinc oxide particles, silvering solution containing micro
Silver oxide particle, and the density of silver oxide, significantly less than the density of argent, the density of zinc oxide is significantly less than metallic zinc
Density, therefore under the influence of centrifugal force so that molten metal and the obvious subregion of oxide particle and substantial amounts of oxide particle quilt
The centre of lower vaporization chamber 72 is gathered in, that is, near column 74.Because lower vaporization chamber 72 is reverse frustoconic, steamed closer to lower
The upper wall opening for sending out room 72 is bigger, is conducive to evaporation of metal, and molten metal surface easy quilt in evaporation process in lower vaporization chamber 72
Oxidation, therefore under the stop of gear cone 73, substantial amounts of oxide particle is blocked in the lower section of gear cone 73, it is to avoid substantial amounts of oxidation
Composition granule is mixed in metal vapors to be sprayed from buffering jet pipe 711.Due to the presence of upper vaporization chamber 71 so that metal vapors energy
Further concentrated, constrained, due to γ=α, the gap distribution between upper centrum 731 and upper vaporization chamber 71 is uniform, steady so that
Resistance when metal vapors outwards sprays reach it is minimum, even if follow-up have the metallic particles that part is cooled down from buffering jet pipe 711
Fall in vaporization chamber 71, the presence of upper centrum 731 causes metallic particles to be easily melted again into lower vaporization chamber 72, upper vertebra
Last-to-freeze liquid or metallic particles are difficult on body 731.Hypocentrum 732 is not only able to barrier oxidation composition granule as metal vapors enters
Enter into upper vaporization chamber 71, even if having surface condensation of the part metals steam in hypocentrum 732 into molten metal, due to hypocentrum
732 cone angle is 45 ° so that the molten metal on the surface of hypocentrum 732 can run down into metal bath surface rapidly again by refuse, under
The special construction of centrum 732 causes its surface to be difficult to adhere to substantial amounts of molten metal.Under the constraint of centrifugal force, from upper vaporization chamber 71
The metal vapors of middle aggregation is further buffered in buffering jet pipe 711, as metal vapors is cumulative, in buffering jet pipe 711
The air pressure more and more higher of metal vapors, when the atmospheric pressure that metal vapors is subject to is more than centrifugal force, is concentrated the metal steam of constraint
Gas can be sprayed at buffering jet pipe 711, and oxide particle is purified by centrifugation power cooperation gear cone 73 in the part metals steam, from
Oxide content is very low in the metal vapors sprayed at buffering jet pipe 711, and the metal vapors good directionality of ejection is finally sprayed on
Metal vapors on polypropylene film is cooled into that metal-coated structure is fine and close, composition is uniform, it is to avoid metal vapors, which scatters and disappears, to be caused
Substandard products metallized film is produced.
The metal vapors produced in first evaporator crucible 7 is plated on polypropylene film, and the energy of chill roll 15 will
Heat on the polypropylene film of plated film is distributed rapidly, it is to avoid continuous high temperature causes polypropylene film to deform；When first
When molten metal in evaporator crucible 7 runs out of soon, stepper motor 5 is acted again, under the driving of stepper motor 5, station turnplate 4
180 ° are rotated again, and now the buffering jet pipe 711 in first evaporator crucible 7 is immediately returned to the underface of the head end of discharging tube 31,
Then second evaporator crucible 7 of molten metal is filled then in the underface of chill roll 15, and second evaporator crucible 7 starts evaporation and made
Industry, is circulated with this, it is ensured that vacuum coating operation can not stop continuously；Because head end and the evaporator crucible 7 of discharging tube 31 do not connect
Touch, fed using gravity, therefore do not influence the evaporator crucible 7 of rotation to complete molten metal charging operation.
Wherein, the upper centrum 731 and hypocentrum 732 are to be cast using red copper, process and be integrally formed, the upper He of centrum 731
Hypocentrum 732 is an entirety；Meanwhile, column 74 is also made up of red copper, and red copper heat transfer efficiency is very high, and the molten boiling point of red copper
Zinc, silver are above, therefore the gear cone 73 and column 74 that are made up of red copper can transmit heat in time, it is to avoid heat transfer is delayed to be led
Cause the follow-up evaporation of influence.
Further, in order to more preferable braking station rotating disk 4, it is to avoid the reaction force influence that centrifugal turntable 8 is produced
Stability between station turnplate 4 and stepper motor 5, as shown in Fig. 5 ~ 6：System is provided between the bottom plate 6 and station turnplate 4
Dynamic device 9, brake apparatus 9 includes magnetic plug 91, the straight tube 92 being engaged with plug 91, spring 93, electromagnet 94, the magnetic
The lower end of property plug 91 is arranged on the inside of straight tube 92, and spring 93 is arranged on the inside of straight tube 92 and spring 93 is arranged on magnetic core
The lower section of rod 91, the upper end of spring 93 is fixedly connected with the lower end of magnetic plug 91, upper end and the straight tube 92 of the electromagnet 94
Lower end be fixedly connected, the lower end of electromagnet 94 is fixedly connected with bottom plate 6, the lower end of the spring 93 and the upper end of electromagnet 94
It is fixedly connected；Be provided with the positioning hole 41 being adapted with magnetic plug 91 for a pair on the station turnplate 4, two positioning holes 41 with
The center of station turnplate 4 is that symmetrical centre is centrosymmetric distribution.
Cheap metallic iron can be used to be made for magnetic plug 91, and magnetic plug 91 has magnetic, and magnetic plug 91 can be by
The electromagnet 94 of energization is adsorbed；When needing braking station rotating disk 4, electromagnet 94 is powered off, the electricity that magnetic plug 91 is not de-energized
Magnet 94 is adsorbed, in the presence of spring 93, magnetic plug 91 ejected by spring 93 so that magnetic plug 91 on correct it is slotting
Enter first positioning hole 41, magnetic plug 91 causes station turnplate 4 to be checked, braked as pin.When station turnplate 4 needs rotation
When turning 180 °, electromagnet 94 is powered, and the electromagnet 94 that magnetic plug 91 is energized is adsorbed, and spring 93 is compressed, magnetic plug 91
The upper end for causing magnetic plug 91 is driven to be extracted out from first positioning hole 41 by spring 93；Then station turnplate 4 is rotated
180 ° of operations, after rotary operation is finished, electromagnet 94 is powered off again, and the electromagnet 94 that magnetic plug 91 is no longer de-energized is adsorbed,
In the presence of spring 93, magnetic plug 91 ejected by spring 93 so that magnetic plug 91 on correct reeve second positioning
Hole 41, magnetic plug 91 causes station turnplate 4 to be checked, braked again as pin.
Because two positioning holes 41 are centrosymmetric distribution by symmetrical centre of the center of station turnplate 4 so that work as station
When rotating disk 4 rotates 180 °, positioning hole 41 can just coordinate with magnetic plug 91.Further, the spring 93 by chromium nickel not
Rust steel is made, and chromium nickel stainless steel does not have magnetic while having excellent deformation nature, therefore when the absorption magnetic of electromagnet 94 being powered
Property plug 91 when, the electromagnet 94 that spring 93 is not energized is adsorbed, it is to avoid the interference of spring 93 magnetic plug 91 carries out subsequent action.
Further, matching somebody with somebody between the plug 91 and straight tube 92 is combined into gap cooperation；This can ensure magnetic plug
While 91 operation precision so that the action resistance of magnetic plug 91 reaches minimum.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
Any modifications, equivalent substitutions and improvements made within refreshing and principle etc., should be included in the scope of the protection.
Claims (7)
1. a kind of anti-oxidative vacuum coater, including coiling chamber（1）And coating chamber（2）, the coiling chamber（1）In be provided with
Let off roll（11）, put film transition roller（12）, the first dance roller（13）, the first nip rolls（14）, chill roll（15）, pressure roller
（16）, the second dance roller（17）, deflector roll（18）, the second nip rolls（19）, carry-over pinch rolls（110）With receipts certificate roller（111）, it is described
Coating chamber（2）In be provided with wire feeder（21）, it is characterised in that：The coating chamber（2）In be additionally provided with melting crucible（3）、
Discharging tube（31）, station turnplate（4）, stepper motor（5）, bottom plate（6）, the discharging tube（31）Tail end with melting crucible（3）
Connection, discharging tube（31）On be additionally provided with tapping valve（32）；The station turnplate（4）It is arranged on bottom plate（6）Top, the work
Position rotating disk（4）With bottom plate（6）Rotate connection, the station turnplate（4）By stepper motor（5）Driving；The station turnplate（4）'s
Top is provided with a pair of symmetrical centrifugal turntables（8）, centrifugal turntable（8）With station turnplate（4）Rotate connection, centrifugal turntable
（8）Side be provided with high-speed electric expreess locomotive（81）, centrifugal turntable（8）By high-speed electric expreess locomotive（81）Driving；The centrifugal turntable（8）It is upper
Side is installed with evaporator crucible（7）, evaporator crucible（7）Including vaporization chamber in truncated cone-shaped（71）With vaporization chamber under reverse frustoconic（72）,
Upper vaporization chamber（71）The diameter at top is less than upper vaporization chamber（71）The diameter of bottom, lower vaporization chamber（72）Top diameter is more than lower steam
Send out room（72）Base diameter, upper vaporization chamber（71）Bottom and lower vaporization chamber（72）Top connection, the upper vaporization chamber（71）
Top be installed with buffering jet pipe（711）, buffer jet pipe（711）With upper vaporization chamber（71）Connection；The upper vaporization chamber（71）'s
Interior cone angle is α, and α is obtuse angle；The lower vaporization chamber（72）Interior cone angle be β, β is acute angle；The lower vaporization chamber（72）Center
It is provided with column（74）, column（74）Lower end and lower vaporization chamber（72）Bottom be fixedly connected, the evaporator crucible（7）It is interior
Portion is additionally provided with gear cone（73）, gear cone（73）Including centrum on cone（731）With reverse frustoconic hypocentrum（732）, it is described on
Centrum（731）The diameter of bottom surface is equal to hypocentrum（732）The diameter of top surface, hypocentrum（732）The diameter of top surface is more than hypocentrum
（732）The diameter of bottom surface, hypocentrum（732）Bottom surface and column（74）Upper surface be fixedly connected；The upper centrum（731）If
Put in upper vaporization chamber（71）In, upper centrum（731）Cone angle be γ, γ=α；The hypocentrum（732）It is arranged on lower vaporization chamber
（72）In, hypocentrum（732）Cone angle be 45 °.
2. a kind of anti-oxidative vacuum coater according to claim 1, it is characterised in that：The upper vaporization chamber（71）
Interior cone angle be α, 100 °≤α≤135 °；The lower vaporization chamber（72）Interior cone angle be β, 5 °≤β≤30 °.
3. a kind of anti-oxidative vacuum coater according to claim 1, it is characterised in that：The bottom plate（6）With work
Position rotating disk（4）Between be provided with brake apparatus（9）, brake apparatus（9）Including magnetic plug（91）With plug（91）It is engaged
Straight tube（92）, spring（93）, electromagnet（94）, the magnetic plug（91）Lower end be arranged on straight tube（92）Inside, spring
（93）It is arranged on straight tube（92）Inside and spring（93）It is arranged on magnetic plug（91）Lower section, spring（93）Upper end and magnetic
Property plug（91）Lower end be fixedly connected, the electromagnet（94）Upper end and straight tube（92）Lower end be fixedly connected, electromagnet
（94）Lower end and bottom plate（6）It is fixedly connected, the spring（93）Lower end and electromagnet（94）Upper end be fixedly connected；It is described
Station turnplate（4）On be provided with a pair and magnetic plug（91）The positioning hole being adapted（41）, two positioning holes（41）With station
Rotating disk（4）Center be centrosymmetric distribution for symmetrical centre.
4. a kind of anti-oxidative vacuum coater according to claim 3, it is characterised in that：The spring（93）By chromium
Nickel and stainless steel is made.
5. a kind of anti-oxidative vacuum coater according to claim 3, it is characterised in that：The plug（91）With it is straight
Pipe（92）Between be combined into gap cooperation.
6. a kind of anti-oxidative vacuum coater according to claim 1, it is characterised in that：The upper centrum（731）
And hypocentrum（732）It is structure as a whole.
7. a kind of anti-oxidative vacuum coater according to claim 6, it is characterised in that：The gear cone（73）With it is vertical
Post（74）It is made by red copper.
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| CN201710571867.6A CN107254663A (en) | 2017-07-13 | 2017-07-13 | A kind of anti-oxidative vacuum coater |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710571867.6A CN107254663A (en) | 2017-07-13 | 2017-07-13 | A kind of anti-oxidative vacuum coater |
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ID=60024977
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109023252A (en) * | 2018-10-22 | 2018-12-18 | 安徽省宁国市海伟电子有限公司 | Metallized film machining production line system and its production method, metallized film |
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