FI930173A - En metod foer att avskilja fraon varandra som differentialkondensatorer utformade accelerationssensorer - Google Patents

En metod foer att avskilja fraon varandra som differentialkondensatorer utformade accelerationssensorer Download PDF

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Publication number
FI930173A
FI930173A FI930173A FI930173A FI930173A FI 930173 A FI930173 A FI 930173A FI 930173 A FI930173 A FI 930173A FI 930173 A FI930173 A FI 930173A FI 930173 A FI930173 A FI 930173A
Authority
FI
Finland
Prior art keywords
utformade
differentialkondensatorer
avskilja
accelerationssensorer
varandra
Prior art date
Application number
FI930173A
Other languages
English (en)
Other versions
FI104763B (fi
FI930173A0 (fi
Inventor
Horst Plankenhorn
Original Assignee
Mannesmann Kienzle Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mannesmann Kienzle Gmbh filed Critical Mannesmann Kienzle Gmbh
Publication of FI930173A0 publication Critical patent/FI930173A0/fi
Publication of FI930173A publication Critical patent/FI930173A/fi
Application granted granted Critical
Publication of FI104763B publication Critical patent/FI104763B/fi

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/007—Interconnections between the MEMS and external electrical signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece
    • Y10T29/4979—Breaking through weakened portion
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece
    • Y10T29/49792—Dividing through modified portion

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Pressure Sensors (AREA)
FI930173A 1992-01-17 1993-01-15 Menetelmä differentiaalikondensaattoreiksi muodostettujen kiihdytyssensoreiden erottamiseksi toisistaan FI104763B (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4201104 1992-01-17
DE4201104A DE4201104C1 (fi) 1992-01-17 1992-01-17

Publications (3)

Publication Number Publication Date
FI930173A0 FI930173A0 (fi) 1993-01-15
FI930173A true FI930173A (fi) 1993-07-18
FI104763B FI104763B (fi) 2000-03-31

Family

ID=6449695

Family Applications (1)

Application Number Title Priority Date Filing Date
FI930173A FI104763B (fi) 1992-01-17 1993-01-15 Menetelmä differentiaalikondensaattoreiksi muodostettujen kiihdytyssensoreiden erottamiseksi toisistaan

Country Status (5)

Country Link
US (1) US5343602A (fi)
EP (1) EP0551616B1 (fi)
JP (1) JPH05264574A (fi)
DE (1) DE4201104C1 (fi)
FI (1) FI104763B (fi)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4342890A1 (de) * 1993-12-16 1995-06-22 Mannesmann Kienzle Gmbh Verfahren zum Abdichten herstellprozeßbedingter Öffnungen an mikromechanischen Beschleunigungssensoren
DE9415052U1 (de) 1994-09-16 1994-11-03 Mannesmann Kienzle Gmbh, 78052 Villingen-Schwenningen Beschleunigungsgeber
DE19530736B4 (de) * 1995-02-10 2007-02-08 Robert Bosch Gmbh Beschleunigungssensor und Verfahren zur Herstellung eines Beschleunigungssensors
DE19616014B4 (de) * 1996-04-23 2006-04-20 Robert Bosch Gmbh Verfahren zur Herstellung von mikromechanische Strukturen aufweisenden Halbleiterbauelementen
DE19709520B4 (de) * 1997-03-10 2007-05-31 GEMAC-Gesellschaft für Mikroelektronikanwendung Chemnitz mbH Kapazitives Beschleunigungssensor-Element
KR100514240B1 (ko) * 2001-06-21 2005-09-13 미쓰비시덴키 가부시키가이샤 가속도 센서 및 그 제조방법
US6573156B1 (en) 2001-12-13 2003-06-03 Omm, Inc. Low defect method for die singulation and for structural support for handling thin film devices
JP2006297543A (ja) * 2005-04-20 2006-11-02 Sumitomo Precision Prod Co Ltd Ｍｅｍｓデバイス及びその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ

Also Published As

Publication number Publication date
EP0551616B1 (de) 1996-08-28
FI104763B (fi) 2000-03-31
US5343602A (en) 1994-09-06
FI930173A0 (fi) 1993-01-15
EP0551616A1 (de) 1993-07-21
JPH05264574A (ja) 1993-10-12
DE4201104C1 (fi) 1993-05-13

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