FI921404A - Foerfarande foer framstaellning av elektrolumisescens tunnfolie - Google Patents

Foerfarande foer framstaellning av elektrolumisescens tunnfolie Download PDF

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Publication number
FI921404A
FI921404A FI921404A FI921404A FI921404A FI 921404 A FI921404 A FI 921404A FI 921404 A FI921404 A FI 921404A FI 921404 A FI921404 A FI 921404A FI 921404 A FI921404 A FI 921404A
Authority
FI
Finland
Prior art keywords
tunnfolie
elektrolumisescens
foerfarande foer
foer framstaellning
framstaellning
Prior art date
Application number
FI921404A
Other languages
English (en)
Other versions
FI106689B (fi
FI921404A0 (fi
Inventor
Akiyoshi Mikami
Kousuke Terada
Original Assignee
Sharp Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Kk filed Critical Sharp Kk
Publication of FI921404A0 publication Critical patent/FI921404A0/fi
Publication of FI921404A publication Critical patent/FI921404A/fi
Application granted granted Critical
Publication of FI106689B publication Critical patent/FI106689B/fi

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45502—Flow conditions in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/57—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing manganese or rhenium
    • C09K11/572—Chalcogenides
    • C09K11/574—Chalcogenides with zinc or cadmium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/305—Sulfides, selenides, or tellurides
    • C23C16/306—AII BVI compounds, where A is Zn, Cd or Hg and B is S, Se or Te

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Electroluminescent Light Sources (AREA)
FI921404A 1991-04-01 1992-03-31 Menetelmä elektroluminenssiohutkalvon valmistamiseksi FI106689B (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6833191 1991-04-01
JP6833191 1991-04-01

Publications (3)

Publication Number Publication Date
FI921404A0 FI921404A0 (fi) 1992-03-31
FI921404A true FI921404A (fi) 1992-10-02
FI106689B FI106689B (fi) 2001-03-15

Family

ID=13370748

Family Applications (1)

Application Number Title Priority Date Filing Date
FI921404A FI106689B (fi) 1991-04-01 1992-03-31 Menetelmä elektroluminenssiohutkalvon valmistamiseksi

Country Status (2)

Country Link
US (1) US5275840A (fi)
FI (1) FI106689B (fi)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5569486A (en) * 1992-12-25 1996-10-29 Nippondenso Co., Ltd Electroluminescence element and process for fabricating same
US6689422B1 (en) * 1994-02-16 2004-02-10 Howmet Research Corporation CVD codeposition of A1 and one or more reactive (gettering) elements to form protective aluminide coating
JP3564737B2 (ja) * 1994-06-24 2004-09-15 株式会社デンソー エレクトロルミネッセンス素子の製造方法および製造装置
JP3644131B2 (ja) * 1995-08-25 2005-04-27 株式会社デンソー Ｅｌ素子の製造方法
US5837320A (en) * 1996-02-27 1998-11-17 The University Of New Mexico Chemical vapor deposition of metal sulfide films from metal thiocarboxylate complexes with monodenate or multidentate ligands
US5989733A (en) 1996-07-23 1999-11-23 Howmet Research Corporation Active element modified platinum aluminide diffusion coating and CVD coating method
FR2793068B1 (fr) * 1999-04-28 2001-05-25 Commissariat Energie Atomique Dispositif a emission de champ utilisant un gaz reducteur et fabrication d'un tel dispositif

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047717A (ja) * 1983-08-26 1985-03-15 Nippon Denso Co Ltd ショックアブソ−バ制御装置
JPH0744069B2 (ja) * 1985-12-18 1995-05-15 キヤノン株式会社 電場発光素子の製造方法
JPH0760738B2 (ja) * 1988-05-13 1995-06-28 シャープ株式会社 エレクトロルミネッセンス発光膜の製造方法
JPH02140632A (ja) * 1988-11-22 1990-05-30 Asahi Glass Co Ltd 分布型光ファイバー温度センサー及び温度測定方法
JPH0752671B2 (ja) * 1988-11-30 1995-06-05 シャープ株式会社 Ｅｌ発光膜

Also Published As

Publication number Publication date
FI106689B (fi) 2001-03-15
FI921404A0 (fi) 1992-03-31
US5275840A (en) 1994-01-04

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