FI916184A - Foerfarande foer automatiskt upptaeckande av fel i en objekt under granskning - Google Patents

Foerfarande foer automatiskt upptaeckande av fel i en objekt under granskning Download PDF

Info

Publication number
FI916184A
FI916184A FI916184A FI916184A FI916184A FI 916184 A FI916184 A FI 916184A FI 916184 A FI916184 A FI 916184A FI 916184 A FI916184 A FI 916184A FI 916184 A FI916184 A FI 916184A
Authority
FI
Finland
Prior art keywords
automatic container
following automatic
following
container
automatic
Prior art date
Application number
FI916184A
Other languages
English (en)
Other versions
FI916184A0 (fi
Inventor
Kengi Uesugi
Michihoro Shimada
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Publication of FI916184A0 publication Critical patent/FI916184A0/fi
Publication of FI916184A publication Critical patent/FI916184A/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/178—Methods for obtaining spatial resolution of the property being measured
    • G01N2021/1782—In-depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
FI916184A 1991-03-06 1991-12-31 Foerfarande foer automatiskt upptaeckande av fel i en objekt under granskning FI916184A (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1991/000299 WO1992015864A1 (en) 1991-03-06 1991-03-06 Method of automatically detecting defects of object to be inspected

Publications (2)

Publication Number Publication Date
FI916184A0 FI916184A0 (fi) 1991-12-31
FI916184A true FI916184A (fi) 1992-09-07

Family

ID=14014312

Family Applications (1)

Application Number Title Priority Date Filing Date
FI916184A FI916184A (fi) 1991-03-06 1991-12-31 Foerfarande foer automatiskt upptaeckande av fel i en objekt under granskning

Country Status (4)

Country Link
US (1) US5329133A (fi)
EP (1) EP0528031A4 (fi)
FI (1) FI916184A (fi)
WO (1) WO1992015864A1 (fi)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5563702A (en) * 1991-08-22 1996-10-08 Kla Instruments Corporation Automated photomask inspection apparatus and method
JP3330089B2 (ja) * 1998-09-30 2002-09-30 株式会社大協精工 ゴム製品の検査方法及び装置
US20040150688A1 (en) * 2003-01-30 2004-08-05 Kin-Ming Kwan Measuring laser light transmissivity in a to-be-welded region of a work piece
CN105115428B (zh) * 2015-04-24 2018-02-02 上海工程技术大学 面向辐对称电缆切面绝缘层厚度的并行图像测量方法
WO2018114299A1 (en) * 2016-12-19 2018-06-28 Asml Netherlands B.V. Charged particle beam inspection of ungrounded samples

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3493769A (en) * 1966-02-15 1970-02-03 Philco Ford Corp System,including pulse shape discriminator for detecting flaws in transparent material
JPS5823583B2 (ja) * 1974-03-13 1983-05-16 富士通株式会社 ブツタイケツカンカンソクホウ
JPS5428114B2 (fi) * 1974-04-16 1979-09-13
JPS61140844A (ja) * 1984-12-14 1986-06-27 Hitachi Ltd 三次元構造観察装置
JPS62173731A (ja) * 1986-01-28 1987-07-30 Toshiba Corp 被検査物の表面検査装置
JPS63231141A (ja) * 1987-03-18 1988-09-27 株式会社日立製作所 容量可変冷凍サイクル
JPH0687045B2 (ja) * 1988-07-19 1994-11-02 東レ株式会社 透明物体のピット自動検査装置
DE3926349A1 (de) * 1989-08-09 1991-02-14 Sick Optik Elektronik Erwin Optische fehlerinspektionsvorrichtung
JPH0424541A (ja) * 1990-05-21 1992-01-28 Mitsui Mining & Smelting Co Ltd 内部欠陥測定方法および装置

Also Published As

Publication number Publication date
FI916184A0 (fi) 1991-12-31
EP0528031A1 (en) 1993-02-24
WO1992015864A1 (en) 1992-09-17
US5329133A (en) 1994-07-12
EP0528031A4 (en) 1993-10-20

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Legal Events

Date Code Title Description
FD Application lapsed