FI903368A0 - Anordning foer matning av kornigt silikonmaterial. - Google Patents

Anordning foer matning av kornigt silikonmaterial.

Info

Publication number
FI903368A0
FI903368A0 FI903368A FI903368A FI903368A0 FI 903368 A0 FI903368 A0 FI 903368A0 FI 903368 A FI903368 A FI 903368A FI 903368 A FI903368 A FI 903368A FI 903368 A0 FI903368 A0 FI 903368A0
Authority
FI
Finland
Prior art keywords
silikonmaterial
kornigt
anordning foer
foer matning
matning
Prior art date
Application number
FI903368A
Other languages
English (en)
Inventor
Yoshio Mohri
Original Assignee
Nippon Kokan Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kokan Kk filed Critical Nippon Kokan Kk
Publication of FI903368A0 publication Critical patent/FI903368A0/fi

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
FI903368A 1989-07-05 1990-07-04 Anordning foer matning av kornigt silikonmaterial. FI903368A0 (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1173676A JP2525246B2 (ja) 1989-07-05 1989-07-05 粒状シリコン原料供給装置

Publications (1)

Publication Number Publication Date
FI903368A0 true FI903368A0 (fi) 1990-07-04

Family

ID=15965034

Family Applications (1)

Application Number Title Priority Date Filing Date
FI903368A FI903368A0 (fi) 1989-07-05 1990-07-04 Anordning foer matning av kornigt silikonmaterial.

Country Status (6)

Country Link
US (1) US5152433A (fi)
EP (1) EP0406824A1 (fi)
JP (1) JP2525246B2 (fi)
KR (1) KR930007851B1 (fi)
CN (1) CN1016160B (fi)
FI (1) FI903368A0 (fi)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4968380A (en) * 1989-05-24 1990-11-06 Mobil Solar Energy Corporation System for continuously replenishing melt
JP3478406B2 (ja) * 1992-09-09 2003-12-15 アルベマール・コーポレーシヨン 粒状物質の供給装置
US5535920A (en) * 1995-01-17 1996-07-16 Nordson Corporation Adhesive curing abatement system
US5996855A (en) * 1998-02-27 1999-12-07 Material Sciences Corporation Cross-feed auger and method
US6435474B1 (en) 2000-06-30 2002-08-20 Memc Electronic Materials, Inc. Non-contaminating gas-tight valve for semiconductor applications
US20030101924A1 (en) * 2001-11-15 2003-06-05 Memc Electronic Materials, Inc. Intermittent feeding technique for increasing the melting rate of polycrystalline silicon
US6915811B2 (en) * 2001-12-04 2005-07-12 Arch Chemicals, Inc. Chemical feeder
WO2005058707A2 (en) * 2003-12-15 2005-06-30 Polymer Group, Inc. Unitized fibrous construct dispensing system
JP4933324B2 (ja) * 2007-03-28 2012-05-16 シャープ株式会社 固体材料供給装置、固体材料処理装置および固体材料供給方法
JP2012189243A (ja) * 2011-03-09 2012-10-04 Sinfonia Technology Co Ltd 被処理物投入装置
JP2012189244A (ja) * 2011-03-09 2012-10-04 Sinfonia Technology Co Ltd 被処理物投入装置用のパイプユニット及びこのパイプユニットに用いるパイプ
CN102677156B (zh) * 2012-06-11 2015-07-15 曾泽斌 用于直拉硅单晶炉的块状多晶硅加料装置
US20140252024A1 (en) * 2013-03-05 2014-09-11 Rec Silicon Inc High Vessel Outlet
WO2018045287A1 (en) * 2016-09-02 2018-03-08 Wake Forest University Health Sciences Solid particulate measuring devices, systems, and methods
US11866845B2 (en) 2022-01-06 2024-01-09 Globalwafers Co., Ltd. Methods for growing single crystal silicon ingots that involve silicon feed tube inert gas control
US12037698B2 (en) * 2022-01-06 2024-07-16 Globalwafers Co., Ltd Ingot puller apparatus having a flange that extends from the funnel or from the silicon feed tube

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3123107A (en) * 1964-03-03 Particulate material transfer
US909654A (en) * 1907-11-23 1909-01-12 John F Oliver Detachable cellar-spray.
US2354197A (en) * 1942-08-03 1944-07-25 Alvin A Campbell Measuring device
US3820687A (en) * 1973-03-05 1974-06-28 Astec Ind Apparatus for providing a non-reacting atmosphere within a storage bin
US4002274A (en) * 1974-12-27 1977-01-11 Corning Glass Works Particulate material feeder for high temperature vacuum
US3998686A (en) * 1975-03-10 1976-12-21 Corning Glass Works Sapphire growth from the melt using porous alumina raw batch material
US4299338A (en) * 1979-09-27 1981-11-10 Wyman-Gordon Company Valve system
US4505407A (en) * 1983-03-07 1985-03-19 Francis Tool Company Volumetric measure for granular material
GB8410901D0 (en) * 1984-04-27 1984-06-06 Ici Plc Phenol derivatives
US4816227A (en) * 1984-07-02 1989-03-28 General Signal Corporation Vertically positioned transfer system for controlling and initiating the flow of metered amounts of solid materials
DE3737051A1 (de) * 1987-10-31 1989-05-11 Leybold Ag Vorrichtung fuer die kontinuierliche zufuhr von schmelzgut
JP2617197B2 (ja) * 1987-12-03 1997-06-04 東芝セラミツクス株式会社 粉粒体供給装置
US4863065A (en) * 1988-09-26 1989-09-05 Decrane Charles E Bulk bag discharge unit and method

Also Published As

Publication number Publication date
EP0406824A1 (en) 1991-01-09
CN1016160B (zh) 1992-04-08
US5152433A (en) 1992-10-06
KR930007851B1 (ko) 1993-08-20
KR910003158A (ko) 1991-02-27
CN1048526A (zh) 1991-01-16
JP2525246B2 (ja) 1996-08-14
JPH0337183A (ja) 1991-02-18

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Legal Events

Date Code Title Description
FA Application withdrawn

Owner name: NKK CORPORATION