FI901414A0 - Anordning foer framstaellning av kiselenkristaller. - Google Patents

Anordning foer framstaellning av kiselenkristaller.

Info

Publication number
FI901414A0
FI901414A0 FI901414A FI901414A FI901414A0 FI 901414 A0 FI901414 A0 FI 901414A0 FI 901414 A FI901414 A FI 901414A FI 901414 A FI901414 A FI 901414A FI 901414 A0 FI901414 A0 FI 901414A0
Authority
FI
Finland
Prior art keywords
kiselenkristaller
anordination
framing
Prior art date
Application number
FI901414A
Other languages
English (en)
Finnish (fi)
Inventor
Hiroshi Kamio
Kenji Araki
Takeshi Kaneto
Yoshinobu Shima
Original Assignee
Nippon Kokan Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1076699A external-priority patent/JPH02255592A/ja
Application filed by Nippon Kokan Kk filed Critical Nippon Kokan Kk
Publication of FI901414A0 publication Critical patent/FI901414A0/fi

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C30B15/12—Double crucible methods
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
FI901414A 1989-03-30 1990-03-21 Anordning foer framstaellning av kiselenkristaller. FI901414A0 (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1076699A JPH02255592A (ja) 1989-03-30 1989-03-30 シリコン単結晶の製造方法及びその装置
JP21710489 1989-08-23

Publications (1)

Publication Number Publication Date
FI901414A0 true FI901414A0 (fi) 1990-03-21

Family

ID=26417831

Family Applications (1)

Application Number Title Priority Date Filing Date
FI901414A FI901414A0 (fi) 1989-03-30 1990-03-21 Anordning foer framstaellning av kiselenkristaller.

Country Status (5)

Country Link
EP (1) EP0390503A1 (zh)
KR (1) KR930005407B1 (zh)
CN (1) CN1018001B (zh)
FI (1) FI901414A0 (zh)
MY (1) MY105592A (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69204198T2 (de) * 1991-04-16 1996-02-08 Sumitomo Electric Industries Czochralsky-Verfahren unter Verwendung eines Bauelementes zum Abschirmen der Strahlung der Rohmaterial-Schmelzlösung und Vorrichtung hierfür.
JP2795036B2 (ja) * 1992-02-04 1998-09-10 信越半導体株式会社 単結晶引上装置
EP0691398A1 (en) 1994-07-08 1996-01-10 Unilever N.V. Process for making polymer capsules
US5824152A (en) * 1996-07-09 1998-10-20 Komatsu Electronic Metals Co., Ltd. Semiconductor single-crystal pulling apparatus
MY131022A (en) * 2000-09-29 2007-07-31 Samsung Electronics Co Ltd Silicon wafers having controlled distribution of defects, and methods of preparing the same
CN102787351A (zh) * 2011-05-20 2012-11-21 昭和电工株式会社 单晶制造装置、单晶制造方法和单晶
CN102277615A (zh) * 2011-09-05 2011-12-14 镇江大成新能源有限公司 一种均匀熔体浓度的坩埚
CN104685113A (zh) * 2012-09-10 2015-06-03 Gtatip控股有限责任公司 连续cz方法和设备
CN107434244A (zh) * 2017-09-13 2017-12-05 南京金美镓业有限公司 一种磷化铟合成装置的复合热屏蔽结构
CN112048758A (zh) * 2020-09-17 2020-12-08 乐山新天源太阳能科技有限公司 连续直拉单晶棒工艺
CN113061982A (zh) * 2021-03-22 2021-07-02 上海引万光电科技有限公司 一种可以控制单晶硅氧含量的连续直拉单晶炉及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2821481C2 (de) * 1978-05-17 1985-12-05 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Vorrichtung zum Ziehen von hochreinen Halbleiterstäben aus der Schmelze
JPS62138384A (ja) * 1985-12-11 1987-06-22 Shin Etsu Handotai Co Ltd 単結晶の引上方法
CA1305909C (en) * 1987-06-01 1992-08-04 Michio Kida Apparatus and process for growing crystals of semiconductor materials
GB8718643D0 (en) * 1987-08-06 1987-09-09 Atomic Energy Authority Uk Single crystal pulling

Also Published As

Publication number Publication date
CN1048900A (zh) 1991-01-30
MY105592A (en) 1994-11-30
CN1018001B (zh) 1992-08-26
EP0390503A1 (en) 1990-10-03
KR900014644A (ko) 1990-10-24
KR930005407B1 (ko) 1993-06-19

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Legal Events

Date Code Title Description
FD Application lapsed
MM Patent lapsed

Owner name: NKK CORPORATION