FI873643L - Foerfarande och anlaeggning foer galvanisering av kopparfilm. - Google Patents
Foerfarande och anlaeggning foer galvanisering av kopparfilm. Download PDFInfo
- Publication number
- FI873643L FI873643L FI873643A FI873643A FI873643L FI 873643 L FI873643 L FI 873643L FI 873643 A FI873643 A FI 873643A FI 873643 A FI873643 A FI 873643A FI 873643 L FI873643 L FI 873643L
- Authority
- FI
- Finland
- Prior art keywords
- kopparfilm
- galvanisering
- foerfarande och
- anlaeggning foer
- och anlaeggning
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/04—Wires; Strips; Foils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/382—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
- H05K3/384—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0355—Metal foils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0307—Providing micro- or nanometer scale roughness on a metal surface, e.g. by plating of nodules or dendrites
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/0723—Electroplating, e.g. finish plating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/241—Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Electroplating Methods And Accessories (AREA)
- Electrolytic Production Of Metals (AREA)
- Physical Vapour Deposition (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Laminated Bodies (AREA)
- Coupling Device And Connection With Printed Circuit (AREA)
- Control Of El Displays (AREA)
- Spinning Or Twisting Of Yarns (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US81309785A | 1985-12-24 | 1985-12-24 | |
| PCT/US1986/002797 WO1987003915A1 (en) | 1985-12-24 | 1986-12-23 | A process and apparatus for electroplating copper foil |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| FI873643A0 FI873643A0 (fi) | 1987-08-24 |
| FI873643L true FI873643L (fi) | 1987-08-24 |
| FI873643A7 FI873643A7 (fi) | 1987-08-24 |
Family
ID=25211440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FI873643A FI873643A7 (fi) | 1985-12-24 | 1986-12-23 | Menetelmä ja laitteisto kuparikalvon galvanoimiseksi. |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US4898647A (de) |
| EP (1) | EP0252139B1 (de) |
| JP (1) | JPS63241193A (de) |
| AT (1) | ATE92544T1 (de) |
| AU (1) | AU602673B2 (de) |
| BR (1) | BR8607061A (de) |
| DE (1) | DE3688840T2 (de) |
| DK (1) | DK439887A (de) |
| FI (1) | FI873643A7 (de) |
| HU (1) | HU208556B (de) |
| IN (1) | IN166842B (de) |
| NO (1) | NO873533D0 (de) |
| WO (1) | WO1987003915A1 (de) |
Families Citing this family (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4661213A (en) * | 1986-02-13 | 1987-04-28 | Dorsett Terry E | Electroplate to moving metal |
| US5215645A (en) * | 1989-09-13 | 1993-06-01 | Gould Inc. | Electrodeposited foil with controlled properties for printed circuit board applications and procedures and electrolyte bath solutions for preparing the same |
| US5403465A (en) * | 1990-05-30 | 1995-04-04 | Gould Inc. | Electrodeposited copper foil and process for making same using electrolyte solutions having controlled additions of chloride ions and organic additives |
| US5393396A (en) * | 1990-10-30 | 1995-02-28 | Gould Inc. | Apparatus for electrodepositing metal |
| US5228965A (en) * | 1990-10-30 | 1993-07-20 | Gould Inc. | Method and apparatus for applying surface treatment to metal foil |
| JP3207909B2 (ja) * | 1992-02-07 | 2001-09-10 | ティーディーケイ株式会社 | 電気めっき方法および電気めっき用分割型不溶性電極 |
| US5215646A (en) * | 1992-05-06 | 1993-06-01 | Circuit Foil Usa, Inc. | Low profile copper foil and process and apparatus for making bondable metal foils |
| US5685970A (en) | 1992-07-01 | 1997-11-11 | Gould Electronics Inc. | Method and apparatus for sequentially metalized polymeric films and products made thereby |
| US5646814A (en) | 1994-07-15 | 1997-07-08 | Applied Materials, Inc. | Multi-electrode electrostatic chuck |
| US5592358A (en) | 1994-07-18 | 1997-01-07 | Applied Materials, Inc. | Electrostatic chuck for magnetic flux processing |
| JP3281783B2 (ja) * | 1995-12-06 | 2002-05-13 | 三井金属鉱業株式会社 | プリント配線板用銅箔、その製造法及び電解装置 |
| US6730387B2 (en) | 1996-04-24 | 2004-05-04 | The Procter & Gamble Company | Absorbent materials having improved structural stability in dry and wet states and making methods therefor |
| WO2000061498A2 (en) * | 1999-04-13 | 2000-10-19 | Semitool, Inc. | System for electrochemically processing a workpiece |
| JPH10195689A (ja) * | 1996-12-27 | 1998-07-28 | Fukuda Metal Foil & Powder Co Ltd | 微細孔明き金属箔の製造方法 |
| US5863410A (en) * | 1997-06-23 | 1999-01-26 | Circuit Foil Usa, Inc. | Process for the manufacture of high quality very low profile copper foil and copper foil produced thereby |
| US7244677B2 (en) * | 1998-02-04 | 2007-07-17 | Semitool. Inc. | Method for filling recessed micro-structures with metallization in the production of a microelectronic device |
| AU2233399A (en) * | 1998-02-12 | 1999-08-30 | Acm Research, Inc. | Plating apparatus and method |
| TW593731B (en) * | 1998-03-20 | 2004-06-21 | Semitool Inc | Apparatus for applying a metal structure to a workpiece |
| US6565729B2 (en) * | 1998-03-20 | 2003-05-20 | Semitool, Inc. | Method for electrochemically depositing metal on a semiconductor workpiece |
| US6497801B1 (en) * | 1998-07-10 | 2002-12-24 | Semitool Inc | Electroplating apparatus with segmented anode array |
| EP1038994A1 (de) * | 1998-09-14 | 2000-09-27 | Mitsui Mining & Smelting Co., Ltd. | Poröse kupferfolie, herstellung und verwendung derselben |
| AU1298299A (en) * | 1998-11-03 | 2000-05-22 | Johns Hopkins University, The | Copper metallization structure and method of construction |
| US6309969B1 (en) | 1998-11-03 | 2001-10-30 | The John Hopkins University | Copper metallization structure and method of construction |
| US7438788B2 (en) * | 1999-04-13 | 2008-10-21 | Semitool, Inc. | Apparatus and methods for electrochemical processing of microelectronic workpieces |
| US6916412B2 (en) | 1999-04-13 | 2005-07-12 | Semitool, Inc. | Adaptable electrochemical processing chamber |
| US7351314B2 (en) | 2003-12-05 | 2008-04-01 | Semitool, Inc. | Chambers, systems, and methods for electrochemically processing microfeature workpieces |
| US7020537B2 (en) | 1999-04-13 | 2006-03-28 | Semitool, Inc. | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| US7351315B2 (en) | 2003-12-05 | 2008-04-01 | Semitool, Inc. | Chambers, systems, and methods for electrochemically processing microfeature workpieces |
| US7160421B2 (en) * | 1999-04-13 | 2007-01-09 | Semitool, Inc. | Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| US6368475B1 (en) * | 2000-03-21 | 2002-04-09 | Semitool, Inc. | Apparatus for electrochemically processing a microelectronic workpiece |
| US7264698B2 (en) * | 1999-04-13 | 2007-09-04 | Semitool, Inc. | Apparatus and methods for electrochemical processing of microelectronic workpieces |
| US20030038035A1 (en) * | 2001-05-30 | 2003-02-27 | Wilson Gregory J. | Methods and systems for controlling current in electrochemical processing of microelectronic workpieces |
| US7189318B2 (en) * | 1999-04-13 | 2007-03-13 | Semitool, Inc. | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| US7585398B2 (en) * | 1999-04-13 | 2009-09-08 | Semitool, Inc. | Chambers, systems, and methods for electrochemically processing microfeature workpieces |
| KR19990064747A (ko) | 1999-05-06 | 1999-08-05 | 이종구 | Ni-Fe 합금 박판 제조방법 및 그 장치 |
| US6183607B1 (en) * | 1999-06-22 | 2001-02-06 | Ga-Tek Inc. | Anode structure for manufacture of metallic foil |
| US20050183959A1 (en) * | 2000-04-13 | 2005-08-25 | Wilson Gregory J. | Tuning electrodes used in a reactor for electrochemically processing a microelectric workpiece |
| US6913680B1 (en) | 2000-05-02 | 2005-07-05 | Applied Materials, Inc. | Method of application of electrical biasing to enhance metal deposition |
| WO2001090446A2 (en) * | 2000-05-23 | 2001-11-29 | Applied Materials, Inc. | Method and apparatus to overcome anomalies in copper seed layers and to tune for feature size and aspect ratio |
| AU2001259504A1 (en) * | 2000-05-24 | 2001-12-03 | Semitool, Inc. | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| WO2002029137A2 (en) * | 2000-10-03 | 2002-04-11 | Applied Materials,Inc. | Method and associated apparatus for tilting a substrate upon entry for metal deposition |
| WO2003018874A2 (en) | 2001-08-31 | 2003-03-06 | Semitool, Inc. | Apparatus and methods for electrochemical processing of microelectronic workpieces |
| US6911136B2 (en) * | 2002-04-29 | 2005-06-28 | Applied Materials, Inc. | Method for regulating the electrical power applied to a substrate during an immersion process |
| US20040108212A1 (en) * | 2002-12-06 | 2004-06-10 | Lyndon Graham | Apparatus and methods for transferring heat during chemical processing of microelectronic workpieces |
| US20040206628A1 (en) * | 2003-04-18 | 2004-10-21 | Applied Materials, Inc. | Electrical bias during wafer exit from electrolyte bath |
| DE602005022650D1 (de) * | 2004-04-26 | 2010-09-16 | Rohm & Haas Elect Mat | Verbessertes Plattierungsverfahren |
| US20060175201A1 (en) * | 2005-02-07 | 2006-08-10 | Hooman Hafezi | Immersion process for electroplating applications |
| CN102321895B (zh) * | 2011-09-01 | 2013-10-23 | 西安航天动力机械厂 | 一种整体式阳极槽 |
| CN104099652A (zh) * | 2014-07-09 | 2014-10-15 | 山东金宝电子股份有限公司 | 一种电子铜箔的表面处理粗化工艺 |
| KR102029139B1 (ko) * | 2015-11-09 | 2019-10-07 | 케이씨에프테크놀로지스 주식회사 | 전해동박, 그것을 포함하는 전극, 그것을 포함하는 이차전지, 및 그것의 제조방법 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4318794A (en) * | 1980-11-17 | 1982-03-09 | Edward Adler | Anode for production of electrodeposited foil |
| US4490218A (en) * | 1983-11-07 | 1984-12-25 | Olin Corporation | Process and apparatus for producing surface treated metal foil |
| US4549941A (en) * | 1984-11-13 | 1985-10-29 | Olin Corporation | Electrochemical surface preparation for improving the adhesive properties of metallic surfaces |
| IT1182818B (it) * | 1985-08-12 | 1987-10-05 | Centro Speriment Metallurg | Dispositivo a cella radiale per elettrodeposizione |
-
1986
- 1986-12-23 HU HU87913D patent/HU208556B/hu not_active IP Right Cessation
- 1986-12-23 AT AT87900763T patent/ATE92544T1/de not_active IP Right Cessation
- 1986-12-23 AU AU68981/87A patent/AU602673B2/en not_active Ceased
- 1986-12-23 FI FI873643A patent/FI873643A7/fi not_active Application Discontinuation
- 1986-12-23 EP EP87900763A patent/EP0252139B1/de not_active Expired - Lifetime
- 1986-12-23 BR BR8607061A patent/BR8607061A/pt not_active Application Discontinuation
- 1986-12-23 WO PCT/US1986/002797 patent/WO1987003915A1/en not_active Ceased
- 1986-12-23 DE DE87900763T patent/DE3688840T2/de not_active Expired - Fee Related
-
1987
- 1987-01-27 IN IN78/CAL/87A patent/IN166842B/en unknown
- 1987-08-21 NO NO873533A patent/NO873533D0/no unknown
- 1987-08-24 DK DK439887A patent/DK439887A/da not_active Application Discontinuation
- 1987-12-23 JP JP62326681A patent/JPS63241193A/ja active Granted
-
1988
- 1988-12-22 US US07/288,472 patent/US4898647A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| BR8607061A (pt) | 1988-02-23 |
| DE3688840T2 (de) | 1993-11-25 |
| HU208556B (en) | 1993-11-29 |
| US4898647A (en) | 1990-02-06 |
| AU6898187A (en) | 1987-07-15 |
| JPH031391B2 (de) | 1991-01-10 |
| EP0252139A1 (de) | 1988-01-13 |
| DE3688840D1 (de) | 1993-09-09 |
| HUT46083A (en) | 1988-09-28 |
| DK439887D0 (da) | 1987-08-24 |
| WO1987003915A1 (en) | 1987-07-02 |
| FI873643A0 (fi) | 1987-08-24 |
| NO873533L (no) | 1987-08-21 |
| FI873643A7 (fi) | 1987-08-24 |
| EP0252139A4 (de) | 1988-03-22 |
| DK439887A (da) | 1987-08-24 |
| EP0252139B1 (de) | 1993-08-04 |
| JPS63241193A (ja) | 1988-10-06 |
| IN166842B (de) | 1990-07-28 |
| AU602673B2 (en) | 1990-10-25 |
| NO873533D0 (no) | 1987-08-21 |
| ATE92544T1 (de) | 1993-08-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FC | Application refused |
Owner name: GOULD INC. |