FI80521C - Fiber optic location sensor - Google Patents

Fiber optic location sensor Download PDF

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Publication number
FI80521C
FI80521C FI851760A FI851760A FI80521C FI 80521 C FI80521 C FI 80521C FI 851760 A FI851760 A FI 851760A FI 851760 A FI851760 A FI 851760A FI 80521 C FI80521 C FI 80521C
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Finland
Prior art keywords
light
tubes
receiving
tube
optical
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FI851760A
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Finnish (fi)
Swedish (sv)
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FI851760A0 (en
FI851760L (en
FI80521B (en
Inventor
Simo Tammela
Seppo Honkanen
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Vaisala Oy
Altim Control Ky
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Priority to FI851760A priority Critical patent/FI80521C/en
Publication of FI851760A0 publication Critical patent/FI851760A0/en
Publication of FI851760L publication Critical patent/FI851760L/en
Application granted granted Critical
Publication of FI80521B publication Critical patent/FI80521B/en
Publication of FI80521C publication Critical patent/FI80521C/en

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Description

8052180521

Kuituoptinen paikka-anturi 5Fiber optic position sensor 5

Keksinnön kohteena on optinen paikka-anturi pienten siirtymien mittaamiseksi optisesti. Anturi perustuu valon kytkeytymiseen optisesta valoaaltoputkesta, esim. optisesta kuidusta, integroidun optiikan valoaaltoputkiin ja anturiosan muodostaa optinen valoaaltoputki.The invention relates to an optical position sensor for optically measuring small displacements. The sensor is based on the coupling of light from an optical light waveguide, e.g. an optical fiber, to the light waveguides of the integrated optics and the sensor part is formed by an optical light waveguide.

1010

Aikaisemmat kuituoptiset paikka-anturit perustuvat valon kytkeytymiseen optisesta kuidusta toiseen, jolloin kytkeytyvän valon intensiteetti riippuu kuitujen asemasta toisiinsa nähden. Antureiden heikkoutena on niiden herkkyys kaikkiin 15 suuntiin tapahtuville siirtymille, joten siirtymän suuntaa ei voida mitata. Lisäksi valon intensiteettitasossa tapahtuvat pienet muutokset vaikuttavat mittaustuloksiin.Previous fiber optic position sensors are based on the coupling of light from one optical fiber to another, with the intensity of the coupled light depending on the position of the fibers relative to each other. The weakness of the sensors is their sensitivity to displacements in all 15 directions, so the direction of the displacement cannot be measured. In addition, small changes in the light intensity level affect the measurement results.

Keksinnön mukaisella paikka-anturilla saadaan aikaan ratkai-c seva parannus edellä esitetyissä epäkohdissa. Keksinnön mu kaiselle optiselle paikka-anturille on tunnusomaista se, et-tä paikka mitataan valoaaltoputkiin valoaaltoputkesta (esim. optisesta yksimuotokuidusta) kytkeytyvien. valotehojen suhteesta, joka on riippuva valoaaltoputken paikasta vain toi-sessa suunnassa ja johon ei vaikuta valoaaltoputkessa etenevä valoteho.The position sensor according to the invention provides a decisive improvement in the above-mentioned drawbacks. The optical position sensor according to the invention is characterized in that the position is measured by those connected to the light waveguides by a light waveguide (e.g. a single-mode optical fiber). a ratio of light powers which depends on the position of the light waveguide only in the other direction and which is not affected by the light power propagating in the light waveguide.

Täsmällisemmin sanottuna keksinnön mukaiselle menetelmälle on tunnusomaista se, mikä on esitetty patenttivaatimuksen 1 30 tunnusmerkkiosassa.More specifically, the method according to the invention is characterized by what is set forth in the characterizing part of claim 1.

Keksinnön mukaiselle paikka-anturille puolestaan on tunnusomaista se, mikä on esitetty patenttivaatimuksen 2 tunnusmerkkiosassa.The position sensor according to the invention, in turn, is characterized by what is set forth in the characterizing part of claim 2.

Integroidun optiikan valoaaltoputkien käytön ansiosta anturi on herkkä ainoastaan yhteen suuntaan tapahtuville siirtymil- 35 2 80521 le. Lisäksi kun mitataan kahteen toisistaan eristettyyn va-loaaltoputkeen kytkeytyvien intensiteettien suhdetta, päästään eroon intensiteettitasossa tapahtuvista muutoksista. Mittaustulosten perusteella anturin herkkyys on samaa luok-5 kaa kuin aikaisempien kuituoptisten paikka-antureiden.Thanks to the use of integrated optics fluorescent tubes, the sensor is only sensitive to one-way transitions. In addition, when measuring the ratio of the intensities coupled to two isolated light tubes, changes in the intensity level are eliminated. Based on the measurement results, the sensitivity of the sensor is in the same class as previous fiber optic position sensors.

Seuraavassa keksintöä selitetään tarkemmin oheisiin piirustuksiin viittaamalla.In the following, the invention will be explained in more detail with reference to the accompanying drawings.

10 Kuvio 1 esittää yhtä keksinnön mukaista optista paikka-anturia, jonka integroidun optiikan haaroitinrakenteessa on kaksi valoaaltoputkea.Figure 1 shows one optical position sensor according to the invention, which has two light waveguides in the branch structure of the integrated optics.

Kuvio 2 esittää toista keksinnön mukaista optista paikka-15 anturia, jonka integroidun optiikan haaroitusrakenteessa on neljä valoaaltoputkea.Figure 2 shows another optical position-15 sensor according to the invention, which has four light waveguides in the branching structure of the integrated optics.

Kuvion 1 mukainen anturi koostuu esim. yksimuotokuidusta 1 ja integroidun optiikan haaroitusrakenteesta 3, jota on ai-2Q emmin käytetty monimuotokuitujen takaisinsirontamittauksis-sa. Valo kytketään valonlähteestä (esim. laser) siirtyvään valoaaltoputkeen 1, esim. yksimuotokuituun, jonka ulostulo-pää on asetettu n. 10 pm:n päähän integroidun optiikan 3 va-loaaltoputkien 2 yhteisestä päästä. Integroidun optiikan 3 25 valoaaltoputket 2 ovat vierekkäin sijoitetut. Lasisubstraa-tin pintaan muodostettuina valoaaltoputkien toisiaan vasten olevat rajapinnat ovat olennaisen suoria ja yhdensuuntaisia ja eristeenä toimii n. 5 pm:n paksu liimakerros, jonka taitekerroin on aaltoputkien taitekerrointa pienempi. Kun mita-taan valoaaltoputkien 2 ulostulosta saatavien intensiteettien suhde, saadaan selville optisen kuidun siirtymä valoaaltoputkien yhteiseen päähän nähden. Anturi on herkkä ainoastaan yhteen suuntaan tapahtuville siirtymille, koska aaltoputkien 2 dimensiot ovat n. 10-kertaiset yksimuotokuidun 1 ytimen kokoon verrattuna.The sensor according to Fig. 1 consists, for example, of a single-mode fiber 1 and a branching structure 3 of the integrated optics, which has been previously used in backscatter measurements of multi-mode fibers. The light is connected to a light waveguide 1 transmitted from a light source (e.g. a laser), e.g. a single mode fiber, the output end of which is placed at a distance of about 10 μm from the common end of the light waveguides 2 of the integrated optics 3. The 25 optical waveguides 2 of the integrated optics 3 are arranged side by side. Formed on the surface of the glass substrate, the interfaces of the light waveguides against each other are substantially straight and parallel, and the insulator is a layer of adhesive about 5 .mu.m thick with a refractive index lower than that of the waveguides. By measuring the ratio of the intensities obtained from the output of the light tubes 2, the displacement of the optical fiber with respect to the common end of the light tubes is determined. The sensor is sensitive to displacements in only one direction, because the dimensions of the waveguides 2 are about 10 times the size of the core of the single-mode fiber 1.

Kuvion 2 mukaisessa anturissa on kaksi kuvion 1 mukaista va-The sensor according to Figure 2 has two devices according to Figure 1.

IIII

35 3 80521 loaaltoputkisovitelmaa 2 järjestetty rinnakkain, jolloin siirtyvän kuidun 1 asemasta saadaan tietoa sekä pysty- että vaakasuunnassa mittaamalla valoaaltoputkiin kuidusta kytkeytyvien valotehojen suhde.35 3 80521 light waveguide arrangement 2 arranged in parallel, whereby information on the position of the moving fiber 1 is obtained both vertically and horizontally by measuring the ratio of the light powers connected to the light waveguides from the fiber.

55

Kuvioissa esitetyt optiset paikka-anturit ovat vain esimerkkejä keksinnön mukaisesta paikka-anturista. Luonnollisesti keksinnön sovellutusmuodot voivat vaihdella laajastikin patenttivaatimusten puitteissa.The optical position sensors shown in the figures are only examples of a position sensor according to the invention. Of course, embodiments of the invention may vary widely within the scope of the claims.

10 15 20 ' 25 30 3510 15 20 '25 30 35

Claims (3)

1. Förfarande för optisk förskjutningsmätning, enligt 5 vilket förfarande - en ljussignal förs längs ett emitterande op-tiskt ljusvagsrör (1) tili en givare (3) omfat-tande atminstone tva mottagande ljusvagsrör 10 (2), - den ljuseffekt som träffat vart och ett av de mottagande ljusvagsrören (2) detekteras med motsvarande detektorer för bestämning av ljus- 15 effekten i ljusvagsrören, kännetecknat därav, att - förhallandet mellan den ljuseffekt som träf- 20 fat vart och ett av de mottagande ljusvagsrören (2) och den ljuseffekt som träffat de andra mottagande ljusvagsrören (2) bestäms, varvid förskjutningen kan bestämmas och variationen i den inkommande ljuseffekten elimineras utgäende 25 fran dessa relativa 1juseffekter.An optical displacement measurement method, according to which method - a light signal is passed along an emitting optical light tube (1) to a sensor (3) comprising at least two receiving light tube 10 (2), - the light effect that hit each one of the receiving light tubes (2) is detected with corresponding detectors for determining the light effect in the light tubes, characterized in that - the relationship between the light effect that hit each of the receiving light tubes (2) and the light effect which when the other receiving light-tube tubes (2) are determined, the displacement can be determined and the variation in the incoming light output is eliminated from these relative light effects. 2. Optisk platsgivare, omfattande - ett emitterande, flyttbart ljusvagsrör (1) 30 och - atminstone tva mottagande ljusvagsrör (2), som är anordnade bredvid varandra, 35 kännetecknad därav, att - de mottagande, bredvid varandra anordnade ljusvagsrören (2) är bildade av integrerad op-tik, sä att angränsande kantytor hos de motta- 40 gande ljusvagsrören <23 är väsentligt raka och parallella för att ge riktningskänslighet. (I 7 805212. Optical position sensor, comprising - an emitting, movable light-tube (1) 30 and - at least two receiving light-tube (2), arranged side by side, characterized in that - the receiving, arranged side-by-side (2) tubes (2) are formed of integrated optics, such that adjacent edge surfaces of the receiving light wave tubes <23 are substantially straight and parallel to provide directional sensitivity. (I 7 80521 3. Platsgivare enligt patentkrav 2, känneteck-n a t därav, att den uppvisar fyra mottagande ljusvigs-rör (2).3. An encoder according to claim 2, characterized in that it has four receiving lightweight tubes (2).
FI851760A 1985-05-03 1985-05-03 Fiber optic location sensor FI80521C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FI851760A FI80521C (en) 1985-05-03 1985-05-03 Fiber optic location sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI851760 1985-05-03
FI851760A FI80521C (en) 1985-05-03 1985-05-03 Fiber optic location sensor

Publications (4)

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FI851760A0 FI851760A0 (en) 1985-05-03
FI851760L FI851760L (en) 1986-11-04
FI80521B FI80521B (en) 1990-02-28
FI80521C true FI80521C (en) 1990-06-11

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FI851760A0 (en) 1985-05-03
FI851760L (en) 1986-11-04
FI80521B (en) 1990-02-28

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Owner name: VAISALA OY

Owner name: ALTIM CONTROL OY