FI64656B - Foerfarande foer framstaellning av en fotoresistbild - Google Patents

Foerfarande foer framstaellning av en fotoresistbild

Info

Publication number
FI64656B
FI64656B FI793585A FI793585A FI64656B FI 64656 B FI64656 B FI 64656B FI 793585 A FI793585 A FI 793585A FI 793585 A FI793585 A FI 793585A FI 64656 B FI64656 B FI 64656B
Authority
FI
Finland
Prior art keywords
fotoresistbild
foerfarande foer
foer framstaellning
water
residues
Prior art date
Application number
FI793585A
Other languages
English (en)
Other versions
FI793585A7 (fi
FI64656C (fi
Inventor
Walter Herwig
Kurt Kluepfel
Helga Sikora
Heide Sprengel
Original Assignee
Hoechst Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoechst Ag filed Critical Hoechst Ag
Publication of FI793585A7 publication Critical patent/FI793585A7/fi
Publication of FI64656B publication Critical patent/FI64656B/fi
Application granted granted Critical
Publication of FI64656C publication Critical patent/FI64656C/fi

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
    • C23G1/10—Other heavy metals
    • C23G1/103—Other heavy metals copper or alloys of copper
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/34—Pretreatment of metallic surfaces to be electroplated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Materials For Photolithography (AREA)
  • Optical Communication System (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Endoscopes (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Amplifiers (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
FI793585A 1978-11-17 1979-11-15 Foerfarande foer framstaellning av en fotoresistbild FI64656C (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19782849894 DE2849894A1 (de) 1978-11-17 1978-11-17 Verfahren zum reinigen von kupfer enthaltenden metalloberflaechen
DE2849894 1978-11-17

Publications (3)

Publication Number Publication Date
FI793585A7 FI793585A7 (fi) 1980-05-18
FI64656B true FI64656B (fi) 1983-08-31
FI64656C FI64656C (fi) 1983-12-12

Family

ID=6054924

Family Applications (1)

Application Number Title Priority Date Filing Date
FI793585A FI64656C (fi) 1978-11-17 1979-11-15 Foerfarande foer framstaellning av en fotoresistbild

Country Status (8)

Country Link
US (1) US4379834A (fi)
EP (1) EP0013310B1 (fi)
JP (1) JPS5569271A (fi)
AT (1) ATE3068T1 (fi)
CA (1) CA1147246A (fi)
DE (2) DE2849894A1 (fi)
ES (1) ES8105401A1 (fi)
FI (1) FI64656C (fi)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0367074A3 (en) * 1988-10-31 1991-06-12 LeaRonal, Inc. Preparing printed circuit boards for electroplating
JPH0375386A (ja) * 1989-08-18 1991-03-29 Metsuku Kk 錫又は錫‐鉛合金の剥離方法
CN1076067C (zh) 1995-08-03 2001-12-12 欧罗巴金属公开有限公司 由含铅的铜基合金制成的低铅释放管件及制备该管件的方法
US5597975A (en) * 1995-10-04 1997-01-28 Mcgean-Rohco, Inc. Mechanical plating of small arms projectiles
US6461534B2 (en) 1997-11-19 2002-10-08 Europa Metalli S. P. A. Low lead release plumbing components made of copper based alloys containing lead, and a method for obtaining the same
US6555170B2 (en) 1998-01-30 2003-04-29 Duratech Industries, Inc. Pre-plate treating system
US6174561B1 (en) 1998-01-30 2001-01-16 James M. Taylor Composition and method for priming substrate materials
US6036758A (en) * 1998-08-10 2000-03-14 Pmd (U.K.) Limited Surface treatment of copper
TWI539032B (zh) * 2013-08-01 2016-06-21 Chang Chun Petrochemical Co Electrolytic copper foil, cleaning fluid composition and cleaning copper foil method

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3030238A (en) * 1957-12-27 1962-04-17 Samuel L Cohn Method of treating metal surfaces
US3166444A (en) * 1962-04-26 1965-01-19 Lubrizol Corp Method for cleaning metal articles
CA786294A (en) 1965-03-31 1968-05-28 Hofer Konrad Surface cleaning and defatting composition
GB1198312A (en) * 1967-07-22 1970-07-08 Geigy Uk Ltd Corrosion Inhibiting Chemical Compositions
GB1256710A (fi) * 1968-04-29 1971-12-15
DE1910860C3 (de) * 1969-03-04 1980-10-30 Hoechst Ag, 6000 Frankfurt Verfahren zur Herstellung von Alkalialkansulfonaten
US3847663A (en) * 1970-07-24 1974-11-12 Lubrizol Corp Cleaning of metals with compositions containing alkali metal silicate and chloride
US4088498A (en) * 1970-12-28 1978-05-09 Hoechst Aktiengesellschaft Photopolymerizable copying composition
US3915633A (en) * 1972-09-21 1975-10-28 Colgate Palmolive Co Complexing acid pre-wash composition and method
JPS526853B2 (fi) * 1972-12-22 1977-02-25
JPS4988603A (fi) * 1972-12-29 1974-08-24
DE2363806B2 (de) * 1973-12-21 1979-05-17 Hoechst Ag, 6000 Frankfurt Lichtempfindliches Gemisch
DE2448821C2 (de) 1974-10-14 1986-01-30 Hoechst Ag, 6230 Frankfurt Verfahren zum Übertragen einer thermoplastischen photopolymerisierbaren Schicht und Schichtübertragungsmaterial
DE2531163C2 (de) * 1975-07-11 1985-05-15 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Verbesserung der Lötbarkeit elektrischer Leiterplatten
US4165295A (en) * 1976-10-04 1979-08-21 Allied Chemical Corporation Organic stripping compositions and method for using same

Also Published As

Publication number Publication date
JPS5569271A (en) 1980-05-24
ES486062A0 (es) 1981-05-16
US4379834A (en) 1983-04-12
JPS6356314B2 (fi) 1988-11-08
DE2965221D1 (en) 1983-05-19
CA1147246A (en) 1983-05-31
EP0013310B1 (de) 1983-04-13
FI793585A7 (fi) 1980-05-18
DE2849894A1 (de) 1980-05-29
EP0013310A1 (de) 1980-07-23
ES8105401A1 (es) 1981-05-16
FI64656C (fi) 1983-12-12
ATE3068T1 (de) 1983-04-15

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Legal Events

Date Code Title Description
MM Patent lapsed

Owner name: HOECHST AKTIENGESELLSCHAFT