FI20041107A - Nesteellä täytetty mikromekaaninen aktuaattori - Google Patents
Nesteellä täytetty mikromekaaninen aktuaattori Download PDFInfo
- Publication number
- FI20041107A FI20041107A FI20041107A FI20041107A FI20041107A FI 20041107 A FI20041107 A FI 20041107A FI 20041107 A FI20041107 A FI 20041107A FI 20041107 A FI20041107 A FI 20041107A FI 20041107 A FI20041107 A FI 20041107A
- Authority
- FI
- Finland
- Prior art keywords
- filled
- liquid
- micromechanical actuator
- micromechanical
- actuator
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20041107A FI20041107A (fi) | 2004-08-24 | 2004-08-24 | Nesteellä täytetty mikromekaaninen aktuaattori |
PCT/FI2005/000364 WO2006021613A1 (en) | 2004-08-24 | 2005-08-24 | Liquid filled micro-mechanical actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20041107A FI20041107A (fi) | 2004-08-24 | 2004-08-24 | Nesteellä täytetty mikromekaaninen aktuaattori |
Publications (2)
Publication Number | Publication Date |
---|---|
FI20041107A0 FI20041107A0 (fi) | 2004-08-24 |
FI20041107A true FI20041107A (fi) | 2006-02-25 |
Family
ID=32922128
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20041107A FI20041107A (fi) | 2004-08-24 | 2004-08-24 | Nesteellä täytetty mikromekaaninen aktuaattori |
Country Status (2)
Country | Link |
---|---|
FI (1) | FI20041107A (fi) |
WO (1) | WO2006021613A1 (fi) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997029538A1 (en) * | 1996-02-10 | 1997-08-14 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Bistable microactuator with coupled membranes |
US6662448B2 (en) * | 1998-10-15 | 2003-12-16 | Xerox Corporation | Method of fabricating a micro-electro-mechanical fluid ejector |
US6334761B1 (en) * | 2000-03-02 | 2002-01-01 | California Institute Of Technology | Check-valved silicon diaphragm pump and method of fabricating the same |
SG105459A1 (en) * | 2000-07-24 | 2004-08-27 | Micron Technology Inc | Mems heat pumps for integrated circuit heat dissipation |
US6811133B2 (en) * | 2002-04-30 | 2004-11-02 | The Regents Of The University Of California | Hydraulically amplified PZT mems actuator |
WO2004063090A2 (en) * | 2003-01-13 | 2004-07-29 | Triad Sensors Inc. | High displacement bistable micro actuator |
-
2004
- 2004-08-24 FI FI20041107A patent/FI20041107A/fi not_active Application Discontinuation
-
2005
- 2005-08-24 WO PCT/FI2005/000364 patent/WO2006021613A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2006021613A1 (en) | 2006-03-02 |
FI20041107A0 (fi) | 2004-08-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
NO20050756D0 (no) | Mikroelektromekaniske anordninger | |
FR2882061B1 (fr) | Materiaux elastiques | |
DE602005018857D1 (de) | Selbstkühlendes Stellelement | |
DE112005003758A5 (de) | Auslenkbares mikromechanisches Element | |
DE602005006539D1 (de) | Tetrahydropyridoindolderivate | |
DE502005004843D1 (de) | Einspritzventil | |
NO20053674L (no) | Avisningslosning | |
DE602004001935D1 (de) | Stellglied | |
DK1902237T3 (da) | Aktuatorsystem | |
DE602005015844D1 (de) | Kompaktes stellglied | |
DE502005007783D1 (de) | Piezoelektrischen aktors | |
DE502005002966D1 (de) | Aktormodul | |
DE502005007580D1 (de) | Baugruppe | |
DE602004025314D1 (de) | Betätigungsgerät | |
DE502005002030D1 (de) | Schwingungsdämpfer | |
SE0400898L (sv) | Flytkonstruktion | |
SE0500257L (sv) | Manöverdon | |
DE502004011857D1 (de) | Piezoaktor | |
DE602005016266D1 (de) | Stellgliedgehäuse | |
DE10318674B8 (de) | Betätigungseinrichtung | |
DE602005000266D1 (de) | Schwingungsdämpfendes Verbindungselement | |
DE602004013423D1 (de) | Kraftstoffverteilerkomponent | |
FR2908124B1 (fr) | Actionneur micromecanique | |
DE112004003052A5 (de) | Elektromechanische Baugruppe | |
DE502004002441D1 (de) | Aktormodul |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FD | Application lapsed |