FI129571B

FI129571B - Nozzle head

Info

Publication number: FI129571B
Application number: FI20175916A
Authority: FI
Inventors: Mika Jauhiainen; Pekka Soininen
Original assignee: Beneq Oy
Priority date: 2017-10-18
Filing date: 2017-10-18
Publication date: 2022-04-29
Also published as: FI20175916A1; WO2019077203A1

Abstract

The invention relates to a nozzle head (2) for subjecting a surface of a substrate to successive surface reactions of at least two precursors according to the principles of atomic layer deposition. The nozzle head (2) comprises a body (4), an output surface (16) via which at least one precursor is supplied towards the substrate, and two or more nozzles (6) provided in connection with the output surface (16) for supplying the at least one precursor. The nozzle head (2) comprises at least two separate nozzle units, each nozzle unit comprising one or more nozzles (6). The at least two separate nozzle units are separately supported to the body (4) of the nozzle head (2), and at least one of the separate nozzle units is arranged adjustable relative to the body (4) of the nozzle head (2) independently of the other nozzle units.

Description

NOZZLE HEAD

FIELD OF THE INVENTION The present invention relates to a nozzle head for subjecting a surface of a substrate to successive surface reactions of at least two precursors according to the principles of atomic layer deposition, and more particularly to a nozzle head according to preamble of claim 1.

BACKGROUND OF THE INVENTION Nozzle heads are commonly used in atomic layer deposition (ALD) for subjecting a surface of the substrate to successive surface reactions of at least two precursors. The nozzle head comprises an output surface via which precursor gases are supplied towards the substrate. The output surface is provided with two or more nozzles from which the precursors are supplied. In this kind of spatial ALD processes the precursor gasses are separated in space. With careful management of gas flow and by applying relative movement between the substrate and spatially separated gasses, it is possible to apply the coating continuously on moving substrates at high speeds. During the spatial ALD process the nozzle head is moved over, or under, the surface of the substrate such that there is small gap between the output surface and the surface of the substrate. Alternatively, the substrate may be moved in relation to the nozzle head. The gap — between the output surface and the surface of the substrate must be managed in detail such that the gap is as equal as possible during processing. Therefore, both the relative movement of the nozzle head and the substrate and the dimensions and shape of the nozzle head must be controlled in detail for keeping the gap as ™~ equal as possible. The gap may be between the nozzle head and the surface of S 25 substrate may be for example 0,1 - 2,0 mm, preferably 0,3 - 1,0 mm, or even o smaller than 0,1 mm. © However, during processing the process temperature is usually at least 150 °C and the nozzle head is also heated to the process temperature in & order to control the process in great detail. The process temperature may in same © 30 cases be even 300 °C or 350 °C or even more. These elevated process 3 temperatures cause thermal expansion in the nozzle head and in the surrounding = structures of the nozzle head in the whole process apparatus. The thermal N expansion becomes greater as the process temperature increases. The thermal expansion causes the dimensions of the nozzle head to change and it may also — cause distortions to the shape and dimensions of the nozzle, for example due to temperature differences between different part of the nozzle head. The changed dimensions and distortions may further cause variations to the gap between the output surface of the nozzle head and the surface of the substrate as the output surface of the nozzle head have changed dimensions and distortions. This further causes changes to the flow dynamics of the precursor gases which may cause deterioration of the process and quality of the produced coating. Furthermore, the thermal expansion may even be greater than dimension of the gap such that the operation of the apparatus is compromised.

— BRIEF DESCRIPTION OF THE INVENTION An object of the present invention is to provide a nozzle head so as to solve or at least alleviate the above mentioned prior art problems. The objects of the present invention are achieved by a nozzle head according to independent claim 1.

The preferred embodiments of the invention are disclosed in the dependent claims.

The invention is based on the idea of providing a nozzle head for subjecting a surface of a substrate to successive surface reactions of at least two precursors according to the principles of atomic layer deposition. The nozzle head comprises a body, an output surface via which at least one precursor is supplied towards the surface of the substrate, and two or more nozzles provided in connection with the output surface for supplying the at least one precursor. According to the present invention the nozzle head further comprises at least two separate nozzle units, and each nozzle unit comprising one or more nozzles. The = 25 at least two separate nozzle units are separately supported to the body of the N nozzle head. Furthermore, at least one of the separate nozzle units is arranged > adjustable relative to the body of the nozzle head independently of the other © nozzle units. Therefore, the position of this at least one independently adjustable I nozzle unit may be adjusted relative to the body of the nozzle head and relative to & 30 the other nozzle units.

© In one embodiment, the at least one independently adjustable nozzle D unit is arranged adjustable relative to the body of the nozzle head in a direction o transverse or perpendicular to the output surface and independently of the other N nozzle units. Thus, the position of this at least one nozzle unit may be adjusted in — height direction relative to the output surface of the nozzle head.

In a preferred embodiment, at least two of the separate nozzle units are arranged adjustable relative to the body of the nozzle head independently of the other nozzle units. In a more preferable embodiment, each of the separate nozzle units is arranged adjustable relative to the body of the nozzle head independently of the other nozzle units.

In one embodiment, each of the at least two separate nozzle units is separately supported to the body of the nozzle head and arranged adjustable relative to the body of the nozzle head independently of the other nozzle units. In this embodiment, each or all of the separate nozzle units may be adjusted independently relative to each other and relative to the body of the nozzle head.

In an alternative embodiment, each of the at least two separate nozzle units is separately supported to the body of the nozzle head and arranged adjustable relative to the body of the nozzle head in a direction transverse or perpendicular to the output surface and independently of the other nozzle units.

Thus, the position of each of the at least two nozzle units may be adjusted in height direction relative to the output surface of the nozzle head and relative to other nozzle units.

In one alternative embodiment, each of the at least two separate nozzle units comprises one nozzle. Each of the at least two separate nozzle units is further separately supported to the body of the nozzle head and arranged adjustable relative to the body of the nozzle head independently of the other nozzle units.

In another embodiment, each of the at least two separate nozzle units comprises one nozzle. Each of the at least two separate nozzle units is separately supported to the body of the nozzle head and arranged adjustable relative to the = body of the nozzle head in a direction transverse or perpendicular to the output N surface and independently of the other nozzle units.

2 The at least one of the separate nozzle units or each of the separate © nozzle units may be separately supported to the body of the nozzle head with a E 30 support mechanism. The support mechanism may comprise an adjustment > mechanism for adjusting position of the nozzle unit relative to the body of the © . . . . .

5 nozzle head, or relative to the body in a direction transverse or perpendicular to O the output surface and independently of the other nozzle units. Accordingly, the > support mechanism allows the nozzle unit to be supported in a desired position relative to the body of the nozzle head using the adjustment mechanism.

In one embodiment, the support mechanism may comprise an upright attachment mechanism for attaching the separate nozzle unit to the body of the nozzle head in the direction transverse or perpendicular to the output surface. The upright attachment mechanism may secure nozzle unit to the position which is set with the adjustment mechanism in the direction transverse or perpendicular to the output surface, meaning in height direction relative to the output surface.

In one embodiment, the support mechanism may also comprise a lateral attachment mechanism for attaching the separate nozzle unit to the body of the nozzle head. In one case, the support mechanism may be arranged to attach — the separate nozzle unit to the body of the nozzle head in the direction of the output surface. Accordingly, the lateral attachment structure may be arranged to secure the nozzle unit to the body of the nozzle head in direction transverse or perpendicular to the upright attachment mechanism. Thus, the nozzle unit may be secured in both the upright direction and lateral direction in relation to the — output surface.

In one embodiment, the body of the nozzle head comprises first end structure and a second end structure. The nozzle units or each nozzle unit may be arranged between the first and second end structure. In one case, the nozzle units or each nozzle unit is arranged between the first and second end structures and supported to the first and second end structures. In this latter case, the nozzle units extend from the first end structure to the second end structure.

In another embodiment, the body of the nozzle head may comprise first side structure and a second side structure. The nozzle units may be arranged adjacently in a direction between the first and second side structures. In one case, — the nozzle units or each nozzle unit is arranged between the first and second end = structures and supported to the first and second end structures, and further N arranged adjacently in a direction between the first and second side structures. 2 Thus, the nozzle head may comprise a line of adjacently arranged nozzle units © extending between the first and second end structures.

E 30 The nozzle units may have a first end, a second end and a longitudinal > axis extending between the first and second ends. Therefore, the first end of the = nozzle units may be supported to the first end structure and the second end of the O nozzle units may be supported to the first end structure. In one case, the first end > of the nozzle units may be supported to the first end structure and the second end of the nozzle units may be supported to the first end structure with the support mechanism.

In one embodiment, the upright attachment mechanism may comprise a stop surface provided to the first end structure and the second end structure. The nozzle unit may be supported to the stop surface in the direction transverse to the output surface. In one case, the upright attachment mechanism may 5 comprise a first stop surface provided to the first end structure and a second stop surface provided to the second end structure. In this case, the first end of the nozzle unit may be supported to the first stop surface in the direction transverse to the output surface and the second end of the nozzle unit may be supported to the second stop surface in the direction transverse to the output surface. The stop — surface, or the first and second stop surfaces, may extend in direction of the output surface or in a direction transverse to a direction perpendicular to the output surface. Thus, the nozzle unit may be supported or attached to the stop surface in a direction transverse or perpendicular to the output surface. In another embodiment, the upright attachment mechanism may comprise a stop protrusion protruding from an inner surface of the first end structure and the second end structure. The nozzle unit may be supported to the stop protrusion in the direction transverse to the output surface. In one case, the upright attachment mechanism may comprise a first stop protrusion protruding from an inner surface of the first end structure towards the second end structure and a second stop protrusion protruding from an inner surface of the second end structure towards the first end structure. In this case, the first end of the nozzle unit may be supported to the first stop protrusion in the direction transverse or perpendicular to the output surface and the second end of the nozzle unit may be supported to the second stop protrusion in the direction transverse to the output — surface.

= In one embodiment, the upright attachment mechanism may comprise N upright fasteners for attaching the nozzle unit to the first and second end 2 structures. In one case, the upright attachment mechanism may comprise upright © fasteners for attaching the nozzle unit to the first and second stop protrusions. In E 30 one case, the upright attachment mechanism may comprise upright fasteners > extending between the first and second end structures and the nozzle unit in the = direction transverse or perpendicular to the output surface for attaching the O nozzle unit to the first and second end structures. In another case, the upright > attachment mechanism may comprise upright fasteners extending between the first and second stop protrusions and the nozzle unit in the direction transverse or perpendicular to the output surface or attaching the nozzle unit to the first and second end structures.

Accordingly, the upright attachment mechanism and the upright fasteners may secure the nozzle unit to the body of the nozzle head in the direction transverse or perpendicular to the output surface.

In one embodiment, the upright attachment mechanism may comprise an adjustment mechanism for adjusting the position of the nozzle unit relative to the body of the nozzle head.

In one case, the upright attachment mechanism may comprise an adjustment mechanism for adjusting the position of the nozzle unit relative to the body of the nozzle head in the direction transverse or perpendicular to the output surface.

Thus, the adjustment mechanism may be arranged to adjust the position of the nozzle unit relative to the body of output surface of the nozzle head in the direction transverse or perpendicular to the output surface of the nozzle head.

In one embodiment, the upright attachment mechanism may comprise a first adjustment mechanism provided in connection with the first end structure of the nozzle unit for adjusting the position of the first end of the nozzle unit relative to the body of the nozzle head, and a second adjustment mechanism provided in connection with the second end structure of the nozzle unit for adjusting the position of the second end of the nozzle unit relative to the body of the nozzle head.

In one case, the upright attachment mechanism may comprise a first adjustment mechanism provided in connection with the first end structure of the nozzle unit for adjusting the position of the first end of the nozzle unit relative to the body of the nozzle head in the direction transverse or perpendicular to the output surface, and a second adjustment mechanism provided in connection with the second end structure of the nozzle unit for adjusting the position of the second end of the nozzle unit relative to the body of the nozzle head in the = direction transverse or perpendicular to the output surface.

In this embodiment, N the position of the first end and second end of the nozzle unit may be adjusted 2 separately and thus the position and also the inclination of the nozzle unit may be © adjusted relative to the body and output surface of the nozzle head.

E 30 In one embodiment, the adjustment mechanism may comprise at least > one adjustment part provided between the nozzle unit and the body of the nozzle = head.

In one case, the adjustment mechanism may comprise at least one O adjustment part provided between the nozzle unit and the stop surface or > between the nozzle unit and the stop protrusion.

The position of the nozzle unit may be adjusted using the adjustment part provided between the body of the nozzle head and the nozzle unit.

For example, the distance between the body and the nozzle unit may be adjusted in the direction transverse or perpendicular to the output surface by adjusting the adjustment part.

In another embodiment, the adjustment mechanism may comprise at least one first adjustment part provided between the nozzle unit at the first end of the nozzle unit and the body of the nozzle head, and at least one second adjustment part provided between the nozzle unit at the second end of the nozzle unit and the body of the nozzle head.

In one case, the adjustment mechanism comprises at least one first adjustment part provided between the nozzle unit at the first end of the nozzle unit and the first stop surface or the first stop protrusion, and at least one second adjustment part provided between the nozzle unit at the second end of the nozzle unit and the second stop surface or the second stop protrusion.

In this embodiment, the position of the first and second end of the nozzle unit may be adjusted separately using the first and second adjustment parts, for example such that the distance between the body and the — first and/or second end of the nozzle unit may be adjusted separately in the direction transverse or perpendicular to the output surface by adjusting the adjustment part.

In one embodiment, the first adjustment parts are provided at the first end of the nozzle, or in vicinity thereof and the second adjustment parts are provided at the second end of the nozzle, or in vicinity thereof.

Each first and second adjustment part may be adjusted separately.

Therefore, the first adjustment parts may be arranged to extend a first distance between the nozzle or nozzle unit and the body, and the second adjustment parts may be arranged to extend a second distance between the nozzle or nozzle unit and the body, the second distance being equal or different than the first distance.

When the first = and second distance are equal, the nozzle or the nozzle output surface may be N parallel to the output face.

When the first and second distance are different the 2 nozzle output surface is inclined, or extends in an angle relative to the output © surface.

E 30 In one embodiment, the adjustment part is provided to the nozzle unit. > In one case, the adjustment part is a threaded pilot tap provided to a threaded = hole in the nozzle unit.

Thus, the position of the nozzle unit relative to the body of O the nozzle head may adjusted by setting the threaded pilot tap to a desired > position by turning the threaded pilot tap in the threaded hole, inwards or outwards from the threaded hole.

The nozzle may comprise a support surface, which is a counter surface for the stop surface. The support surface is arranged towards the stop surface or the stop protrusion or the body in the direction transverse or perpendicular to the output surface. The adjustment part is provided between the support surface of the nozzle or the nozzle unit and the body, the first and second end structures, — the stop protrusion or the stop surface.

In one embodiment, the adjustment part may be provided to the body of the nozzle head, or to the first and second end structure, or to the first and second stop surface or to the first and second stop protrusion. In one case, the adjustment part may be a threaded pilot tap provided to a threaded hole in the — body of the nozzle head, or in the first and second end structure, or in the first and second stop surface or in the first and second stop protrusion. Also in this embodiment, the position of the nozzle head may be adjusted by turning the threaded pilot tap in the threaded hole.

In one embodiment of the present invention, the lateral attachment mechanism may comprise lateral fasteners for attaching the nozzle unit to the first and second end structures. In one case, the lateral attachment mechanism comprises lateral fasteners for attaching the nozzle unit to the first and second stop protrusions in the direction of the output surface. The lateral fasteners may be used to secure the nozzle unit to the position set with the adjustment mechanism in transverse or perpendicular direction relative to the upright fasteners. Thus, the nozzle unit may be secure to the body of the nozzle head in two directions.

In one embodiment, the lateral attachment mechanism may comprise lateral fasteners extending in the direction of the output surface between the first and second end structures and the nozzle unit for attaching the nozzle unit to the = first and second end structures in the direction of the output surface. In one case, N the lateral attachment mechanism comprises a first lateral fastener extending in 2 the direction of the output surface between the first end structure and the nozzle © unit for attaching the nozzle unit to the first end structure in the direction of the E 30 — output surface, and a second lateral fastener extending in the direction of the > output surface between the second end structure and the nozzle unit for © . . . oo 5 attaching the nozzle unit to the second end structure in the direction of the output O surface. The lateral fasteners may be used to secure the nozzle unit to the body of > the nozzle head in the direction of the output surface.

In one embodiment, the lateral attachment mechanism may comprise lateral holes provided to the body, or to the first and second end structures, of the nozzle head for receiving lateral fasteners. The lateral hole may be formed as a long hole extending in the direction transverse or perpendicular to the output surface for attaching the nozzle unit to the body of the nozzle head in the direction of the output surface in the position defined by the upright attachment mechanism and the adjustment mechanism. In one case, the lateral attachment mechanism comprises a first lateral hole provided to the first end structure for receiving the first lateral fastener, and a second lateral hole provided to the second end structure for receiving the second lateral fastener. The first and second lateral holes may be formed as long hole extending in the direction transverse or perpendicular to the output surface for attaching the nozzle unit to the body of the nozzle head in the direction of the output surface in the position defined by the upright attachment mechanism and the adjustment mechanism. The long holes extend along a hole axis into the body of the nozzle head in the direction of the output surface for receiving the lateral fastener. Furthermore, the long holes have a longitudinal axis extending in direction perpendicular to the hole axis and in the direction transverse or perpendicular to the output surface such that the lateral fastener may be set on desired distance from the output surface for securing the nozzle unit to a position set with the adjustment mechanism.

The present invention provides a nozzle head in which at least one or each nozzle unit or each nozzle may be adjusted relative to the body of the nozzle head. This allows taking into account the changes in dimensions or distortions of the nozzle head caused by thermal expansion. Accordingly, the nozzle units or nozzle may be adjusted and secured to different positions when the nozzle head is not in the process temperature such that the adjustments take into count the = variations caused by the thermal expansion. When the nozzle head is heated to N the process temperature the nozzle units or nozzles move to desired positions 2 relative to the each other and relative to body of the nozzle head due to the © thermal expansion and thus an equal and desired gap between the output surface E 30 and the surface of the substrate may be achieved.

a © BRIEF DESCRIPTION OF THE DRAWINGS D The invention is described in detail by means of specific embodiments o with reference to the enclosed drawings, in which N Figures 1a, 1b and 1c show one embodiment of a nozzle head according to the present invention;

Figures 2a, 2b and 2c show another embodiment of a nozzle head according to the present invention; Figures 3a and 3b show one embodiment of a nozzle or nozzle unit; Figures 4a and 4b show an embodiment of supporting the nozzle of figures 4a and 4b to a body of the nozzle head; Figure 5 shows side view of the nozzle of figures 3a and 3b supported to the body of the nozzle head; Figures 6a and 6b show another embodiment of a nozzle or nozzle unit; Figures 7a and 4b show an embodiment of supporting the nozzle of figures 6a and 6b to a body of the nozzle head; and Figure 8 shows side view of the nozzle of figures 3a and 3b supported to the body of the nozzle head.

DETAILED DESCRIPTION OF THE INVENTION In this detailed description, the same structural parts of the nozzle head are denoted with same reference numerals. The structure of the part denoted with same reference numeral may vary from one embodiment to another, but they have a same purpose in the nozzle head.

Figure 1a shows schematically a cross-sectional end view of a nozzle head 2 for subjecting a surface of a substrate to successive surface reactions of at least two precursors according to the principles of atomic layer deposition. The nozzle head of figures 1a, 1b and 1c have a planar output surface 16. Accordingly, this kind of nozzle head 2 may be moved in linear oscillating movement relative = 25 to the surface of the substrate between a first and second end positions. The N nozzle head 2 may be arranged to supply one or more precursors via an output > surface 16 towards a surface of a substrate. The nozzle head 2 comprises a body © 4. The body 4 comprises first side structure 10 and a second side structure 12. r The first and second side structures 10, 12 may be plates, sheets, flanges or the & 30 like, and preferably made of metal such as aluminium or steel. The body 4 further © comprises a top structure 14 extending between the first and second side D structures 10, 12. The top structure 14 may be a plate or sheet or the like, and o preferably made of metal such as aluminium or steel. The nozzle head 2 further N comprises two or more nozzles 6 or nozzle units having one or more nozzles 6.

The nozzles 6 have a supply channel 8 and/or discharge channel for supplying precursor gas and/or discharging gases. In the embodiment of figure 1a, there is nozzle head chamber 22 provided between the top structure 14 and the nozzles 6. However, the nozzle chamber 22 may also be omitted. The nozzles 6 or nozzle units are provided in connection with the output surface 16 for supplying the at least one precursor, as shown in figure 1a.

There is direction Y perpendicular, or transverse, to the output surface 16, as shown in figures la and 2a. The wording “direction perpendicular or transverse to the output surface 16” means in this context direction which is exactly perpendicular to the output surface 16 or a direction in a small angle to — the direction exactly perpendicular to the output surface 16. The small angle may be for example 0 to 15 degrees. The direction Y serves also as height direction relative to the output surface 16. There is also direction X parallel, or transverse, to the output surface 16, as shown in figures 1a and 2a. The wording “direction parallel or transverse to the output surface 16” means in this context direction which is exactly parallel to the output surface 16 or a direction in a small angle to the direction exactly parallel to the output surface 16. The small angle may be for example 0 to 15 degrees. In the case of curved output surface 16, as in figure 2a, the parallel and perpendicular relate always a certain point or location of the output surface. For example, the directions Y and X shown in figure 2a relate to 1lineB-B.

Figure 1b shows a schematic bottom view of the nozzle head 2 from the direction of the output surface 16. The body 4 of the nozzle head 2 further comprises first end structure 18 and a second end structure 20. The first and second end structures 18, 20 may be plates, sheets, flanges or the like, and preferably made of metal such as aluminium or steel. The nozzle units or nozzles = 6 are arranged between the first and second end structure 18, 20, or arranged to N extend between the first and second end structure 18, 20. Furthermore, the 2 nozzle units or nozzles 6 may be supported to the first and second end structures © 18, 20 directly or with a support part (not shown).

E 30 The nozzles 6 or nozzle units are arranged adjacently in a direction = between the first and second side structures 10, 12, and between the first and = second side structures 10, 12, as shown in figure 1b. Accordingly, the nozzles 6 or O the nozzle units form at least part of the output surface 16. Alternatively, the > nozzle 6 or nozzle units, and the first and second side structures 10, 12, and the first and second end structures 18, 20 together form the output surface 16. The output surface 16 is arranged towards the surface of the substrate at a predetermined distance such that a process gap is formed between the output surface 16 and the surface of the substrate during processing. The output surface 16 and the surface of the substrate are preferably conformal such that the shape of the output surface 16 and the shape of the surface of the substrate correspond each other for forming a uniform process gap.

Figure 1c shows schematically a cross-sectional side view of the nozzle head 2 along line A-A of figure 1b. The nozzle 6 or nozzle unit is arranged to extend between the first and second end structures 18, 20 and supported to the first and second end structures 18, 20. The nozzle 6 is further provided to the — output surface 16 such that the nozzle 6 may supply precursor gas or discharge gas via the output surface 16. Accordingly, the nozzle 6 or the nozzle unit may be installed to the nozzle head 2 by attaching it to the first and second end structures 18, 20 at the opposite ends of the nozzle 6 or nozzle unit such that the nozzles 6 forms at least part of the output surface 16.

Figures 2a and 2b show schematically another embodiment of the nozzle head 2. Figure 2a shows schematically bottom view of the nozzle head 2 in from the direction of the output surface 16. Figure 2b shows a schematic cross sectional end view of the nozzle head 2. In this embodiment, the nozzle head comprises a curved output surface 16. The curved output surface 16 is curved in — the direction between the first and second side structures 10, 12. The curved output surface 16 has a curvature axis and the output surface 16 is circularly curved or is part of cylinder surface. In the embodiment of figures 2a, 2b and 2c, the output surface 16 is provided as a concave surface. In another embodiment, the curved output surface may also be provided as convex surface. Furthermore, it should be noted that the curved output surface 16 may be preferable, but the = present invention is not limited to only any special kind of output surface 16. N Furthermore, it should be noted that the curved output surface may be smoothly 2 curved or it consist of several planar portions arranged in an angle relative to © each other. The latter may be provided for example with several nozzles having I 30 planar nozzle output surface.

> The nozzles 6 or nozzle units extend between the first and second end = structures 18, 20 and are arranged adjacent to each other in a direction between O the first and second side structures 10, 12, similarly as is figures 1a, 1b and 1c. > The nozzle 6 or nozzle unit is arranged to extend between the first and second — end structures 18, 20 in a direction parallel to curvature axis of the output surface 16 and supported to the first and second end structures 18, 20.

Figure 2c shows schematically a cross-sectional side view of the nozzle head 2 along line B-B of figure 2b. The nozzle 6 or nozzle unit is arranged to extend between the first and second end structures 18, 20 and supported to the first and second end structures 18, 20. The nozzle 6 is further provided to the curved output surface 16 such that the nozzle 6 may supply precursor gas or discharge gas via the output surface 16. Accordingly, the nozzle 6 or the nozzle unit is installed to the nozzle head 2 by attaching it to the first and second end structures 18, 20 at the opposite ends of the nozzle 6 or nozzle unit such that the nozzles 6 forms at least part of the curved output surface 16. According to the above mentioned, the nozzle head 2 comprises at least two separate nozzles 6 or nozzle units comprising one or more nozzles 6. The at least two separate nozzle units are separately supported to the body 4 of the nozzle head 2. At least one of the separate nozzles 6 or nozzle units is arranged adjustable relative to the body 4 of the nozzle head 2 independently of the other nozzle units, or supported adjustably to the body 4 independently of the other nozzles.

In the nozzle heads 2 of figures 1a, 1b, 1c, 2a, 2b and 2c, each of the at least two separate nozzles 6 or nozzle units is separately supported to the body 4 of the nozzle head 2 and arranged adjustable relative to the body 4 of the nozzle head 2 independently of the other nozzle units. They may be arranged adjustable relative to the body 4 of the nozzle head 2 in a direction transverse or perpendicular to the output surface 16. This means that the position of the separate nozzles 6 or nozzle units is adjustable in height direction relative to the output surface 16 of the nozzle head 2.

It should be noted that not all the separate nozzles 6 or separate = nozzle units need to be supported adjustably to the body 4 of the nozzle head 2. In N some embodiments, it may be enough that at least one of the separate nozzles 6 2 or nozzle units is supported adjustably to the body 4. However, preferably they © are all supported adjustably to the body 4.

E 30 Furthermore, it should be noted that there may exist several possible > mechanical solutions for supporting the nozzles 4 or nozzle units separately to = the body 4 of the nozzle head 2. There may also be several possible mechanical O solutions for providing or supporting the separate nozzles 6 or nozzle units > adjustably to the body 4. Accordingly, the present invention is not limited to any specific mechanical solution or structure.

Figures 3a and 3b show schematically a bottom view and side view of one nozzle 6. The nozzle 6 comprises a first end 42, a second end 44, a nozzle output surface 46, a nozzle top surface 47, a first side 41 and a second side 43. The nozzle output surface 46 and the nozzle top surface 47 are opposite to each other and extend between the first and second ends 42, 44. The first and second end 42, 44 comprise a first and second end surface, respectively. The first and second sides 41, 43 comprise first and second side surfaces, respectively. In the nozzle head 2, adjacent nozzles 6 are arranged such that the first side 41 of a nozzle 6 is against a second side of a first adjacent nozzle 6 and the second side 43 is against a second side of a second adjacent nozzle 6.

It should be noted, that the nozzle unit comprising one or more nozzles 6 may have the same structural features, meaning the first end 42, the second end 44, the nozzle output surface 46, the nozzle top surface 47, the first side 41 and the second side 43, and one or more adjacent precursor channels.

The nozzle output surface 46 comprises precursor supply channel or groove 8 from which the precursor gas may be supplied. The precursor supply channel 8 may be a longitudinal channel extending in a direction between the first and second end 42, 44 of the nozzle 6, or in the longitudinal direction of the nozzle 6. The precursor supply channel 8 is open to the nozzle output surface 46 and may comprise one or more supply opening 7 from which the precursor gas may flow to the precursor supply channel 8. The nozzle 6 may further comprise a distribution channel 9 inside the nozzle 6 for distributing the precursor gas to the one or more supply openings 7. The nozzle 6 may further comprise precursor conduit 11 for supplying precursor gas to the distribution into the nozzle 6 and to the distribution channel 9.

The nozzle 6 of figures 3a and 3b comprises discharge channel 48, = which is channel or groove open to the nozzle output surface 46. The discharge N channel 48 may be arranged as circumferential channel surrounding the 2 precursor supply channel 8. The discharge channel 48 is provided with discharge © openings 49 via which precursor gases and possible other gases may be E 30 discharged from the output surface 16 or the nozzle output surface 46. The > discharge openings 48 are connected via discharge conduits (not shown) to a = discharge device (not shown), such as vacuum pump.

O It should be noted that the precursor supply channels, openings and > conduits as well as discharge channels, openings and conduits may be formed and — structure in several different ways and the present invention is not limited to any particular solution.

Figure 4a shows a schematic top view of the nozzle 6 or nozzle unit. The nozzle 6 comprises the first end 42, the second end 44, the nozzle output surface 46, the nozzle top surface 47, the first side 41 and the second side 43. The nozzle 6 also comprises a longitudinal axis C, the nozzle axis, extending between the first and second end 42, 44 and in the middle between the first and second sides 41, 43. Accordingly, the nozzle 6 or nozzle unit has the first end 42, the second end 44 and the longitudinal axis C extending between the first and second ends 42, 44.

The nozzle 6 or nozzle unit is separately supported to the body 4 of the nozzle head 2 with a support mechanism. The support mechanism comprises an upright attachment mechanism for attaching the separate nozzle 6 or nozzle unit to the body 4 of the nozzle head 2 in the direction Y transverse or perpendicular to the output surface 16. The support mechanism also comprises a lateral attachment mechanism for attaching the separate nozzle unit to the body 4 of the nozzle head 2, preferably in the direction of the output surface 16, meaning direction X. The support mechanism further comprises an adjustment mechanism for adjusting position of the nozzle unit relative to the body 4 of the nozzle head 2, preferably in the direction Y transverse or perpendicular to the output surface 16, or in height direction relative to the output surface 16 or adjacent nozzles 6 or nozzle units.

As shown in figures 4a and 4b, the lateral attachment mechanism is arranged to attach the nozzle 6 to the body 4 in lateral direction or in direction of the output surface 16. The lateral attachment mechanism comprises lateral fasteners 54, 55 for attaching the nozzle 6 to the body 4 in direction of the output surface 16 or the nozzle output surface 46. The lateral attachment mechanism = comprises at least one first lateral fastener 54 arranged to attach the first end 42 N of the nozzle 6 to the first end structure 18, and at least one second lateral 2 fastener 55 arranged to attach the second end 44 of the nozzle 6 to the second © end structure 20. The lateral attachment mechanism comprises lateral fasteners I 30 54, 55 provided to the first and second ends 42, 44 of the nozzle 6, respectively, > for attaching the nozzle unit to the first and second end structures 18, 20. The = lateral fasteners 54, 55 may be screws, bolts or the like fasteners. The first and O second ends 42, 44 are further provided with threaded holes for receiving the > lateral fasteners 54, 55. The lateral fasteners 54, 55 are preferably arranged to extend in the direction of the output surface 16 or the nozzle output surface 46, direction X. The nozzle 6 is arranged and supported between the first and second end structure 18, 20, and further attached to the first and second end structure 18, 20 with the lateral fasteners 54, 55. A first lateral fastener 54 is provided to or in connection with the first end 42 and the second lateral fastener 55 is provided to or in connection with the second end 44. The lateral attachment mechanism comprises the lateral fasteners 54, 55 extending in the direction of the output surface 16 between the first and second end structures 18, 20 and the nozzle 6 for attaching the nozzle 6 to the first and second end structures 18, 20 in the direction of the output surface.

The first and second end structures 18, 20 comprise first and second inner surfaces 19, 21, respectively.

The nozzles 6 are arranged between the first and second inner surfaces 19, 21. As shown in figure 4b, the nozzle 6 is supported to the first and second end structure such that the first end surface of first end 42 of the nozzle head 2 is towards or against the first inner surface 19 of the first end structure 18, and the second end surface of second end 44 of the nozzle head 2 is towards or against the second inner surface 21 of the second end structure 42. The body 4 of the nozzle head 2 is provided with lateral holes 56, 57 for receiving the lateral fasteners 54, 55. The lateral holes 56, 57 are provided to the first and second end structures 18, 20 such that the first lateral hole 56 is provided to the first end structure 18 and the second lateral hole 57 is provided to the second end structure 20. The lateral holes 56, 57 extend through the first and second end structures 18, 20 such that the lateral fasteners 54, 55 may extends through the first and second end structure 18, 20 to the nozzle 6 or to the threaded hole in the nozzle 6 for attaching the nozzle 6 first and second ends structures 18, 20. The lateral holes 56,57 are formed as long holes.

The lateral holes 56, 57 have an axial direction into or through the first and second end structures 18, = 20 or body 4. The lateral fasteners 54, 55 extend in the lateral holes 56, 57 along N the axial direction.

The axial direction is parallel, or transverse, to the direction of 2 the output surface 16 or the nozzle output surface 46, meaning direction X.

The © long lateral holes 56, 67 also have a longitudinal direction extending E 30 perpendicularly to the axial direction.

The longitudinal direction is arranged to > extend in the direction transverse or perpendicular to the output surface 16 of = nozzle output surface 46, meaning direction X and height direction relative to the O output surface 16. This allows attaching the nozzle 6 at a desired position relative > to the body 4 or the output surface 16 in the height direction, meaning the direction Y perpendicular to the output surface 16. The support mechanism for supporting the nozzle 6 or nozzle unit to the body 4 comprises an upright attachment mechanism for attaching the nozzle 6 to the body 4 of the nozzle head 2 in the direction transverse or perpendicular to the output surface 16. The term “upright” in this context relates to the direction Y perpendicular or transverse to the output surface 16 or height direction relative —to the output surface 16. The upright attachment mechanism comprises upright fasteners 52, 53 for attaching the nozzle 6 to the body 4 in the direction transverse or perpendicular to the output surface 16 or the nozzle output surface

46. The upright attachment mechanism comprises at least one first upright fastener 52 arranged to attach the first end 42 of the nozzle 6 to the first end — structure 18, and at least one second upright fastener 53 arranged to attach the second end 44 of the nozzle 6 to the second end structure 20. The upright fasteners 52, 53 may be screws, bolts or the like fasteners. According to the above mentioned, the upright fasteners 52, 53 are arranged to extend from the body 4 or from first and second end structures 18, 20 to the nozzle 6. The upright fasteners 52, 53 are arranged to extend in the direction Y transverse or perpendicular to the output surface 16 or nozzle output surface 46 for attaching the nozzle 6 to the body 4 or to the first and second end structures 18, 20 in the direction transverse or perpendicular to the output surface 16 or nozzle output surface 46.

As shown in figure 4b, the upright attachment mechanism comprises a stop protrusions 32, 33 protruding from the inner surfaces 19, 21 of the first end structure 18 and the second end structure 20. A first stop protrusion 32 is protruding from the first inner surface 19 of the first end structure 18 towards the second end structure 20 and a second stop protrusion 33 protruding from the second inner surface 21 of the second end structure 20 towards the first end = structure 18. The stop protrusions 32, 3 may be any protrusion protruding from N the inner surface 19, 21. The first and second stop protrusions 32, 33 extends 2 parallel to the output surface 16. The stop protrusions 32, 33 are provided to the © inner surfaces 19, 21 at a predetermined distance from the output surface 46, in E 30 direction Y, such that the nozzle 6 may be received between the first and second > end structure 18, 20 and between the output surface 16 and the stop protrusions = 32, 33. The nozzle 6 is supported to the stop protrusion 32, 33 in the direction Y O transverse or perpendicular to the output surface. Further, the first end 42 of the > nozzle 6 is supported to the first stop protrusion 32 in the direction transverse or perpendicular to the output surface 16 and the second end 44 of the nozzle 6 is supported to the second stop protrusion 33 in the direction transverse or perpendicular to the output surface 16. It should be noted, that the stop protrusion 32, 33 may be formed in many different ways and the first and second stop protrusion 32, 33 may also be connected to each other or there may be only one stop protrusion extending between the first and second end structures 18,

20. The upright fasteners 52, 53 are arranged to extend between the first and second stop protrusions 32, 33 and the nozzle 6 in the direction transverse or perpendicular to the output surface 16. In figure 4b the stop protrusions 32, 33 are provided with upright holes and the upright fasteners 52, 53 extend through — the holes to the nozzle 6. The upright holes extend transverse to perpendicularly to the output surface 16. Therefore, the nozzle 6 may be attached to the protrusions 32, 33 in the direction transverse or perpendicular to the output surface 16 or nozzle output surface 46. The nozzle head 2 of figures 4a and 4b is formed such that the separate nozzle 6 or nozzle unit may be installed to the body 4 from direction of the output surface 16. Thus, the nozzle 6 is arranged from the output surface 16 between the first and second end structures 18, 20 and attached to the body 4 or the first and second end structures 18, 20 with the upright and lateral attachment mechanisms. The upright attachment mechanism comprises one or more stop surfaces provided to the body 4 or to the first end structure 18 and the second end structure 20. The nozzle 6 is supported to the stop surface in the direction Y perpendicular or transverse to the output surface 16. The stop surface extends in the space between the first and second end structures 18, 20 and in direction parallel, in an angle to or transverse to the output surface 16, meaning direction = X. The stop surface may be any surface to which the nozzle 6 may be supported in N the direction transverse or perpendicular to the output surface 16. 2 In figure 4b, the stop surface is the bottom surface 34, 35 of the stop © protrusion 32, 33. A first stop surface 34 is provided to the first stop protrusion E 30 32 and a second stop surface 35 is provided to the second stop protrusion 33. The > stop surfaces 34, 35 are towards the output surface 16. The nozzle 16 is attached = to the body 4 such that the nozzle top surface 47 is towards the stop surface 34, O 35. The upright holes extend through the stop surfaces 34, 35 and also the upright Q fasteners 52, 53 extend through the stop surfaces 34, 35. The nozzle 6 comprises a support surface, which is a counter surface for the stop surface 34, 35. The support surface is arranged towards the stop surface 34, 35 or the stop protrusion 32, 33 or the body 4 in the direction transverse or perpendicular to the output surface 16. In figures 4a and 4b the support surface is the nozzle top surface 47. The support surface may extend in in direction parallel, in an angle to or transverse to the output surface 16, meaning direction X.

The upright attachment mechanism further comprises an adjustment mechanism for adjusting the position of the nozzle 6 relative to the body 4 of the nozzle head 2 or attaching the nozzle 6 to a desired position relative to the body 4 in the direction transverse or perpendicular to the output surface 16, or in the — height direction relative to the output surface 16. The adjustment mechanism is used to attach or support the nozzle 6 to the body 4 in the direction transverse or perpendicular to the output surface 6. As shown in figures 4a, 4b the upright attachment mechanism comprises a first adjustment mechanism provided in connection with the first end — structure 18 of the nozzle unit for adjusting the position of the first end 42 of the nozzle 6 relative to the body 4 and a second adjustment mechanism provided in connection with the second end structure 20 of the nozzle unit for adjusting the position of the second end 44 of the nozzle unit relative to the body 4. The adjustment mechanism comprises at least one adjustment part 50, 51 provided between the nozzle 6 and the body 4, or between the nozzle 6 and the stop surface 34, 35 or the stop protrusion 32, 33. In figures 4a and 4b, the adjustment mechanism comprises at least one first adjustment part 50 provided between the nozzle 6 at the first end 42 of the nozzle 6, or in vicinity thereof, and the body 4, and at least one second adjustment part 51 provided between the N 25 nozzle 6 at the second end 44 of the nozzle 6, or in vicinity thereof, and the body S 4. N The adjustment part 50,51 may be provided between the nozzle 6 and 2 the stop surface 34, or between the nozzle 6 and the stop protrusion 32 such that © the adjustment part defines a gap 80 between the nozzle 6 and the body 4, the E 30 first and second end structures 18, 20, the stop surface 34 or the stop protrusion > 32. The height or position of the adjustment part 50, 51 in the direction Y = transverse or perpendicular to the output surface 16, or in the height direction O relative to the output surface 16, is adjustable for adjusting the position of the > nozzle 6 in relation to the output surface 16. As shown in figure 4b, the adjustment mechanism comprises at least one first adjustment part 50 provided between the nozzle 6 at the first end 42, or in vicinity thereof, of the nozzle 6 and the body 4, or the first stop surface 34 or the first stop protrusion 32, and at least one second adjustment part 51 provided between the nozzle 6 at the second end 44, or in vicinity thereof, of the nozzle 6 and the body 4, or the second stop surface 35 or the second stop protrusion 33. The adjustment part 50, 51 may be provided or attached to the nozzle 6 or the body 4, or the first and/or second end structures 18, 20, or to the stop surface 34, 35, or to the stop protrusion 32, 33. In some embodiment, the adjustment part 50, 51 may also be separate or changeable part.

In figures 4a and 4b the adjustment parts 50, 51 are provided to the nozzle 6 and to the nozzle top — surface 47 of the nozzle 6 such that they protrude from the nozzle top surface 47. In the embodiment of figures 4a, 4b, the adjustment part 50, 51 is a treaded pilot tap or the like which is arranged to a threaded adjustment hole in the nozzle 6. The adjustment part 50, 51 may also be any kind of spacer which may be arranged or installed between the nozzle 6 and the body 4, preferably adjustable spacer or adjustably arranged between the nozzle 6 and the body 4. The height of the adjustment part 50, 51 may be arranged by turning the threaded pilot tap 50, 51 the threaded adjustment hole such that the distance the pilot tap 50, 51 protrudes from the nozzle 6 is adjusted.

The pilot tap is arranged to extend in the direction transverse or perpendicular to the output surface 16. Furthermore, the pilot tap 50, 51 is adjustable in the direction Y transverse or perpendicular to the output surface 16, or in the height direction relative to the output surface 16, is adjustable for adjusting the position of the nozzle 6 in relation to the output surface 16. As the pilot tap 50, 51 is provided between the nozzle 6 and the body 4, adjusting the distance the pilot tap 50, 51 protrudes from N 25 — the nozzle 6 also adjusts the position of the nozzle 6 in relation to the output face S 16. N According to the above mentioned, the position of the nozzle 6 in 2 direction transverse or perpendicular in relation to the output surface 16 or the © position of the nozzle 6 in height direction in relation to the output surface 16 is I 30 determined or changed by the adjustment parts 50, 51 provided between the > nozzle 6 and the body 4, and more particularly between the support surface = 47,the nozzle top surface, of the nozzle 6 and the stop surface 34, 35 of the body 4 O or the first and second end structures 18, 20. > In figures 4a and 4b, the first adjustment parts 50 are provided at the first end 42 of the nozzle 6, or in vicinity thereof and the second adjustment parts 51 are provided at the second end 44 of the nozzle 6, or in vicinity thereof, and on the nozzle top surface 47. Each first and second adjustment part 50, 51 may be adjusted separately. Therefore, the first adjustment parts 50 may be arranged to protrude from the nozzle top surface 47 a first distance and the second adjustment parts 51 may be arranged to protrude from the nozzle top surface 47 a second distance, the second distance being equal or different than the first distance. When the first and second distance are equal, the nozzle output surface 46 may be parallel to the output face 16. When the first and second distance are different the nozzle output surface 46 is inclined or extends in an angle relative to the output surface 16. It should be noted that the first and second adjustment parts 50,51 may also be provided to the body 4. Furthermore, it should be noted that in all embodiment of the present invention the adjustment parts of the adjustment mechanism may be provided separately adjustable between the nozzle 6 and the body such that the inclination of the nozzle 6 may also be adjusted.

Figure 5 shows schematically a side view of the embodiment of figures 4a and 4b. The nozzle 6 is attached to the body 4 or to the first and second end structures with the upright attachment mechanism and with upright fasteners 52, 53 in the direction transverse or perpendicular to the output surface 16. Adjustment mechanism is used for adjusting the position of the nozzle 6 in the direction transverse or perpendicular to the output surface 16. The adjustment mechanism comprises adjustment parts 50, 51 provided between the body 4 and the nozzle 6. The height of adjustment parts 50, 51 between the body 4 and the nozzle 6 is adjusted in the direction transverse or perpendicular to the output surface 16 to further adjust position of the nozzle 6 or the position of the nozzle output surface 46 in the direction transverse or perpendicular to the output = surface 16 relative to the body 4. When the adjustment parts 50, 51 extend from N the nozzle 6 and the body 4 is attached and tightened against the adjustment 2 parts 50, 51 such that the gap 80 is formed between the nozzle 6 and the body 4. © Alternatively, the adjustment parts 50, 51 extend from the body 4 and the nozzle I 30 6 is attached and tightened against the adjustment parts 50, 51 such that the gap > 80 is formed between the nozzle 6 and the body 4. = In figure 5, the adjustment parts 50, 51 extend from the support O surface 47, in this case the nozzle top surface, of the nozzle 6 and against the stop > surface 34, 35, in this case the bottom surface of the stop protrusion 32, 33. Alternatively, the adjustment parts 50, 51 may be provided to the stop surface 34, 35 of the body 4 and they extend from stop surface 34, 35 and against the support surface 47.

The nozzle 6 is further attached to the to the body 4 or to the first and second end structures with the lateral attachment mechanism and with lateral fasteners 54, 55 in the direction transverse or parallel to the output surface 16.

Accordingly, when installing the nozzle 6 to the body 4, first the adjustment mechanism is used to set the nozzle 6 at desired position in the direction transverse or perpendicular to the output surface 16, then the nozzle head is attached and secured to the desired position with the upright attachment mechanism and last the nozzle 6 is secured to the desired position with the lateral attachment mechanism.

Figures 6a, 6b, 7a, 7b and 8 show an alternative embodiment of the present invention. It should be noted that specific features of the different embodiments may be combined. Furthermore, description of same features between embodiment is omitted.

In figures 6a and 6b, the nozzle 6 is provided on the nozzle output surface 46 only with precursor supply channel or groove 8 one or more supply openings 7. The nozzle 6 further comprises nozzle protrusions 60, 61. The nozzle protrusion 60, 61 are provided to the first and second ends 42, 44, respectively, and extend from the first and second ends 42, 44 in the longitudinal direction or in the direction of the longitudinal axis C of the nozzle 6. A first nozzle protrusion 60 is provided to the first end 42 of the nozzle 6 and a second nozzle protrusion 61 is provided to the second end 44 of the nozzle 6. The nozzle protrusions 60, 61 comprise protrusion end surface 62, 63, or first end surface 62 and a second end surface 63, respectively. The protrusion end surfaces 62, 63 preferably extend parallel to the end surfaces of the first and second end 42, 44. The nozzle = protrusions 60, 61 further comprise protrusion bottom surfaces 64, 65 extending N between the end surface of the first or second ends 42, 44 and the protrusion end 2 surfaces 62, 63. The protrusion bottom surfaces 64, 65 may extend in the © direction transverse or parallel to the nozzle output surface 46. The protrusion I 30 — bottom surfaces 64, 65 form the support surface of the nozzle 6.

> As shown in figures 7a and 7b, the body 4 comprises stop protrusions = 70,71 provided to the first and second end structures 18, 20 and to extends from O the output surface 16 towards the top structure 14 of the nozzle 6. The stop > protrusions 70, 71 comprises inner stop protrusion surfaces 72, 73 extending in — the direction transverse or perpendicular to the output surface 16 and from the output surface 16. The inner stop protrusion surfaces 72, 73 are facing each other. The stop protrusions 70, 71 comprises upper stop protrusion surfaces 74, 75 extending in the direction transverse or parallel to the output surface 16 and between the inner surface 19, 21 of the first and second end structures 18, 20. The upper stop protrusion surfaces 74, 75 form the stop surfaces of the body 4 or the first and second end structures 18, 20.

The end surfaces of the first and second end 42, 44 of the nozzle 6 are placed against the inner stop protrusion surfaces 72, 73, and the protrusion end surfaces 62, 63 are placed against the inner surfaces 19, 21 of the first and second end structures 18, 20. The lateral attachment mechanism if similar to the embodiment of figures 3a, 3b, 4a, 4b and 5, but the threaded holes 56, 57 are now provided to the nozzle protrusions 60, 61, and the protrusion end surfaces 62, 63.

In this embodiment, the upright attachment mechanism comprises a threaded holes provided to the stop protrusions 70, 71, and to the upper stop protrusion surfaces 74, 75 for receiving upright fasteners 52, 53. The nozzle 6 is provided with through holes extending through the nozzle protrusions 60, 61 from the nozzle top surface 47 to the protrusion bottom surfaces 64, 65 and through the nozzle protrusions 60, 61 in the direction transverse or perpendicular to the output surface 16. The upright fasteners 52, 53 thus extends through the nozzle protrusions 60, 61 and attach to the threaded holes in the stop protrusions 70, 71 of the body 4 for securing the nozzle 6 to the body 4 in the direction transverse or perpendicular to the output surface 16.

The adjustment mechanism comprises adjustment parts 50, 51 provided to the body 4, or the first and second end structures or to the stop protrusions 70, 71 or to the upper stop protrusion surfaces 74, 75. The adjustment parts 50, 51 protrude from the upper stop protrusion surfaces 74, 75 = and between the upper stop protrusion surfaces 74, 75 and the protrusion N bottom surfaces 64, 65 for forming the gap 80 between the nozzle 6 and the body 2 4, as shown in figure 5. © The gap 80 and the position of the nozzle 6 in relation to the output E 30 surface 16 in the direction transverse or perpendicular to the output surface 16 > may be adjusted by adjusting height of the adjustment part or the distance the = adjustment protrudes from the upper stop protrusion surfaces 74, 75. The nozzle O 6 is in this embodiment installed to the body 4 from the direction of the top > structure 14 of the nozzle 6. When installing the nozzle 6 to the body 4, the nozzle —6 is attached or tightened against the adjustment parts 50, 51. The adjustment parts 50, 51 may be adjusted in the same manner as disclosed above in connection with figures 3a, 3b, 4a, 4b and 5 for adjusting the position of the nozzle 6 in direction Y transverse or perpendicular to the output surface 16. The support mechanism and the adjustment mechanism for supporting the nozzle 6 or nozzle unit to the body 4 of the nozzle head 2 may be carried out number of ways. The support mechanism comprises upright attachment mechanism and lateral attachment mechanism for attaching the nozzle 6 to the body in directions perpendicular to the output surface 16 and direction parallel to the output surface 16, respectively. The adjustment mechanism is provided to the allow adjustment or adjusting the position of the nozzle 6 or the nozzle output surface 46 in relation to the output surface 16 or the body 4 of the nozzle head 2 in direction perpendicular to the output surface 16. The invention has been described above with reference to the examples shown in the figures. However, the invention is in no way restricted to the above examples but may vary within the scope of the claims.

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Claims

1. A nozzle head (2) for subjecting a surface of a substrate to successive surface reactions of at least two precursors according to the principles of atomic layer deposition, the nozzle head (2) comprising: - a body (4); - an output surface (16) via which at least one precursor is supplied towards the surface of the substrate; - two or more nozzles (6) provided in connection with the output surface (16) for supplying the at least one precursor; and - at least two separate nozzle units, each nozzle unit comprising one or more nozzles (6), characterized inthat the at least two separate nozzle units are separately supported to the body (4) of the nozzle head (2), and at least one of the separate nozzle units is supported adjustable relative to the body (4) of the nozzle head (2) independently of the other nozzle units such that the at least one of the separate nozzle units or each of the separate nozzle units is separately supported to the body (4) of the nozzle head (2) with a support mechanism (50, 51, 52, 53, 54, 55, 56), the support mechanism (50, 51, 52, 53, 54, 55, 56) comprising an adjustment mechanism (50, 51, 56) for adjusting position of the nozzle unit relative to the body (4) of the nozzle head (2) and a lateral attachment mechanism (52, 53) for attaching the separate nozzle unit to the body (4) of the nozzle head (2).

2.A nozzle head (2) according to claim 1, characterized inthat: - each of the at least two separate nozzle units is separately supported to the N body (4) of the nozzle head (2) and arranged adjustable relative to the body (4) of N the nozzle head (2) independently of the other nozzle units; or g - each of the at least two separate nozzle units is separately supported to the = 30 body (4) of the nozzle head (2) and arranged adjustable relative to the body (4) of I the nozzle head (2) in a direction transverse or perpendicular to the output surface > (16) and independently of the other nozzle units; or = - each of the at least two separate nozzle units comprises one nozzle (6), and R each of the at least two separate nozzle units is separately supported to the body (4) 2 35 ofthe nozzle head (2) and arranged adjustable relative to the body (4) of the nozzle head (2) independently of the other nozzle units; or

- each of the at least two separate nozzle units comprises one nozzle (6), and each of the atleast two separate nozzle units is separately supported to the body (4) of the nozzle head (2) and arranged adjustable relative to the body (4) of the nozzle head (2) in a direction transverse or perpendicular to the output surface (16) and independently of the other nozzle units.

3. A nozzle head (2) according toclaim1l,characterized inthat: - the support mechanism (50, 51, 52, 53, 54, 55, 56) comprises an upright attachment mechanism (52, 53) for attaching the separate nozzle unit to the body (4) of the nozzle head (2) in the direction transverse to the output surface (16); or - the support mechanism (50, 51, 52, 53, 54, 55, 56) comprises an upright attachment mechanism (52, 53) for attaching the separate nozzle unit to the body (4) of the nozzle head (2) in the direction perpendicular to the output surface (16).

4. A nozzle head (2) according to any one of claims 1 to 3, characterized inthat: - the body (4) of the nozzle head (2) comprises a first end structure (18) and a second end structure (20), and that each nozzle unit is arranged between the first and second end structure (18, 20); or - the body (4) of the nozzle head (2) comprises a first end structure (18) and a second end structure (20), and that each nozzle unit is arranged between the first and second end structures (18, 20) and supported to the first and second end structures (18, 20).

5. A nozzle head (2) according to any one of claims 1 to 4, characterized in that: - the body (4) of the nozzle head (2) comprises first side structure (10) and N a second side structure (12), and that the nozzle units are arranged adjacently in a N direction between the first and second side structures (10, 12); or 3 30 - the body (4) of the nozzle head (2) comprises first end structure (18) and a - second end structure (20), and that each nozzle unit is arranged between the first z and second end structures (18, 20) and supported to the first and second end c structures (18, 20)and that the body (4) of the nozzle head (2) comprises first side D» structure (10) and a second side structure (12), and the nozzle units are arranged S 35 adjacently in a direction between the first and second side structures (10, 12).

N

6. A nozzle head (2) according to claim 4 or 5,characterized inthat:

- the nozzle units have a first end (42), a second end (44) and a longitudinal axis (C) extending between the first and second ends (42, 44), and that the first end (42) of the nozzle units is supported to the first end structure (18) and the second end (44) of the nozzle units is supported to the second end structure (20); or - the nozzle units have a first end (42), a second end (44) and a longitudinal axis (C) extending between the first and second ends (42, 44), and that the first end (42) of the nozzle units is supported to the first end structure (18) and the second end (44) of the nozzle units is supported to the second end structure (20) with the support mechanism (50, 51, 52, 53, 54, 55, 56).

7. A nozzle head (2) according to any one of claims 4 to 6, characterized in that: - the upright attachment mechanism (52, 53) comprises a stop surface (34, 35, 74, 75) provided to the first end structure (18) and the second end structure (20), the nozzle unit is supported to the stop surface (34, 35, 74, 75) in the direction transverse to the output surface (16); or - the upright attachment mechanism (52, 53) comprises a first stop surface (34, 74) provided to the first end structure (18) and a second stop surface (35, 75) provided to the second end structure (20), the first end (42) of the nozzle unit is supported to the first stop surface (34, 74) in the direction transverse to the output surface (16) and the second end (44) of the nozzle unit is supported to the second stop surface (35, 75) in the direction transverse to the output surface (16); - the upright attachment mechanism (52, 53) comprises a stop protrusion (32, 33, 70, 71) protruding from an inner surface (19, 21) of the first end structure (18) and the second end structure (20), the nozzle unit is supported to the stop protrusion (32, 33, 70, 71) in the direction transverse to the output surface (16); or - the upright attachment mechanism (52, 53) comprises a first stop N protrusion (32, 70) protruding from an inner surface (19) of the first end structure N (18) towards the second end structure (20) and a second stop protrusion (33, 71) 3 30 protruding from an inner surface (21) of the second end structure (20) towards the - first end structure (18), the first end (42) of the nozzle unit is supported to the first z stop protrusion (32, 70) in the direction transverse to the output surface (16) and c the second end (44) of the nozzle unit is supported to the second stop protrusion D» (33, 71) in the direction transverse to the output surface (16). S 35 N 8. A nozzle head (2) according to any one of claims 3 to 7, characterized in that:

- the upright attachment mechanism (52, 53) comprises upright fasteners (52, 53) for attaching the nozzle unit to the first and second end structures (18, 20); or - the upright attachment mechanism (52, 53) comprises upright fasteners (52, 53) for attaching the nozzle unit to the first and second stop protrusions (32, 33,70,71); or - the upright attachment mechanism (52, 53) comprises upright fasteners (52, 53) extending between the first and second end structures (18, 20) and the nozzle unit in the direction transverse or perpendicular to the output surface (16) for attaching the nozzle unit to the first and second end structures (18, 20); or - the upright attachment mechanism (52, 53) comprises upright fasteners (52, 53) extending between the first and second stop protrusions (32, 33, 70, 71) and the nozzle unit in the direction transverse or perpendicular to the output surface (16) for attaching the nozzle unit to the first and second end structures (18, 20).

9. A nozzle head (2) according to any one of claims 3 to 8, characterized in that: - the upright attachment mechanism (52, 53) comprises an adjustment mechanism (50,51) for adjusting the position of the nozzle unit relative to the body (4) of the nozzle head (2); or - the upright attachment mechanism (52, 53) comprises an adjustment mechanism (50,51) for adjusting the position of the nozzle unit relative to the body (4) of the nozzle head (2) in the direction transverse or perpendicular to the output — surface (16); or - the upright attachment mechanism (52, 53) comprises a first adjustment mechanism (50, 51) provided in connection with the first end structure (18) of the N nozzle unit for adjusting the position of the first end (42) of the nozzle unit relative N to the body (4) of the nozzle head (2) and a second adjustment mechanism (50, 51) 3 30 provided in connection with the second end structure (20) of the nozzle unit for - adjusting the position of the second end (44) of the nozzle unit relative to the body z (4) of the nozzle head (2), or c - the upright attachment mechanism (52, 53) comprises a first adjustment D» mechanism (50, 51) provided in connection with the first end structure (18) of the S 35 nozzle unit for adjusting the position of the first end (42) of the nozzle unit relative N to the body (4) of the nozzle head (2) in the direction transverse or perpendicular to the output surface (16) and a second adjustment mechanism (50,51) provided in connection with the second end structure (20) of the nozzle unit for adjusting the position of the second end (44) of the nozzle unit relative to the body (4) of the nozzle head (2) in the direction transverse or perpendicular to the output surface (16).

10. A nozzle head (2) according to claim 9, characterized in that: - the adjustment mechanism comprises at least one adjustment part (50, 51) provided between the nozzle unit and the body (4) of the nozzle head (2); or - the adjustment mechanism comprises at least one adjustment part (50, 51) provided between the nozzle unit and the stop surface (34, 35, 74, 75) or the stop protrusion (32, 33,70, 71); - the adjustment mechanism comprises at least one first adjustment part (50) provided between the nozzle unit at the first end (42) of the nozzle unit and the body (4) of the nozzle head (2) and at least one second adjustment part (51) provided between the nozzle unit at the second end (44) of the nozzle unit and the body (4) of the nozzle head (2); or - the adjustment mechanism comprises at least one first adjustment part (50) provided between the nozzle unit at the first end (42) of the nozzle unit and the first stop surface (34, 74) or the first stop protrusion (32, 70), and at least one second adjustment part (51) provided between the nozzle unit at the second end (44) of the nozzle unit and the second stop surface (35, 75) or the second stop protrusion (33, 71).

11. A nozzle head (2) according to claim 10,characterized in that: -the adjustment part (50, 51) is provided to the nozzle unit; or - the adjustment part (50, 51) is a threaded pilot tap (50, 51) provided to a threaded hole in the nozzle unit; or N - the adjustment part is provided to the body (4) of the nozzle head (2), or to the N first and second end structure (18, 20), or to the first and second stop surface (34, 3 30 35, 74,75) or to the first and second stop protrusion (32, 33, 70, 71); or - - the adjustment part is a threaded pilot tap (50, 51) provided to a threaded hole in z the body (4) of the nozzle head (2), or in the first and second end structure (18, 20), c or in the first and second stop surface (34, 35, 74, 75) or in the first and second stop > protrusion (32, 33,70, 71). S 35 N

12. A nozzle head (2) according to any one of claims 1 to 11, characterized in that:

- the lateral attachment mechanism (54, 55) comprises lateral fasteners (54, 55) for attaching the nozzle unit to the first and second end structures (18, 20); or - the lateral attachment mechanism (54, 55) comprises lateral fasteners (54, 55) for attaching the nozzle unit to the first and second stop protrusions (32, 33, 70, 71) in the direction of the output surface (16); or - the lateral attachment mechanism (54, 55) comprises lateral fasteners (54, 55) extending in the direction of the output surface (16) between the first and second end structures (18, 20) and the nozzle unit for attaching the nozzle unit to the first and second end structures (18, 20) in the direction of the output surface (16); or - the lateral attachment mechanism (54, 55) comprises a first lateral fastener (54) extending in the direction of the output surface (16) between the first end structure (18) and the nozzle unit for attaching the nozzle unit to the first end structure (18) in the direction of the output surface (16), and a second lateral fastener (55) extending in the direction of the output surface (16) between the second end structure (20) and the nozzle unit for attaching the nozzle unit to the second end structure (20) in the direction of the output surface (16).

13. A nozzle head (2) according to claim 12,characterized in that: - the lateral attachment mechanism (54, 55) comprises lateral holes (56, 57) provided to the body (4) of the nozzle head (2) for receiving lateral fasteners (54, 55), the lateral hole (56, 57) is formed as long hole extending in the direction transverse or perpendicular to the output surface (16) for attaching the nozzle unit to the body (4) of the nozzle head (2) in the direction of the output surface (16) in the position defined by the upright attachment mechanism (52, 53) and the adjustment mechanism (50, 51); or - the lateral attachment mechanism (54, 55) comprises lateral holes (56, 57) N provided to the first and second end structures (18, 20) for receiving lateral N fasteners (54, 55), the lateral hole (56, 57) is formed as long hole extending in the 3 30 direction transverse or perpendicular to the output surface (16) for attaching the - nozzle unit to the body (4) of the nozzle head (2) in the direction of the output z surface (16) in the position defined by the upright attachment mechanism (52, 53) c and the adjustment mechanism (50, 51); or D» - the lateral attachment mechanism (54, 55) comprises a first lateral hole S 35 (56) provided to the first end structure (18) for receiving the first lateral fastener N (54), and a second lateral hole (57) provided to the second end structure (20) for receiving the second lateral fastener (55), and the first and second lateral holes (56,

57) are formed as long hole extending in the direction transverse or perpendicular to the output surface (16) for attaching the nozzle unit to the body (4) of the nozzle head (2) in the direction of the output surface (16) in the position defined by the upright attachment mechanism (52, 53) and the adjustment mechanism (50, 51).

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