FI119785B - Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi - Google Patents
Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi Download PDFInfo
- Publication number
- FI119785B FI119785B FI20041229A FI20041229A FI119785B FI 119785 B FI119785 B FI 119785B FI 20041229 A FI20041229 A FI 20041229A FI 20041229 A FI20041229 A FI 20041229A FI 119785 B FI119785 B FI 119785B
- Authority
- FI
- Finland
- Prior art keywords
- sensor
- electrode
- fixed electrode
- capacitive
- sensor according
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/42—Devices characterised by the use of electric or magnetic means
- G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
- G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
- G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
- G01P3/483—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable capacitance detectors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
- Gyroscopes (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20041229A FI119785B (fi) | 2004-09-23 | 2004-09-23 | Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi |
PCT/FI2005/050318 WO2006032729A1 (en) | 2004-09-23 | 2005-09-15 | A capacitive sensor and a method for manufacturing the capacitive sensor |
EP05787808A EP1809997A4 (en) | 2004-09-23 | 2005-09-15 | CAPACITIVE SENSOR AND METHOD FOR PRODUCING THE CAPACITIVE SENSOR |
JP2007532914A JP2008513800A (ja) | 2004-09-23 | 2005-09-15 | 容量性センサーおよび該容量性センサーを製造する方法 |
CNA2005800322663A CN101027542A (zh) | 2004-09-23 | 2005-09-15 | 电容性传感器和用于制造电容性传感器的方法 |
US11/232,922 US7555950B2 (en) | 2004-09-23 | 2005-09-23 | Capacitive sensor and a method for manufacturing the capacitive sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20041229 | 2004-09-23 | ||
FI20041229A FI119785B (fi) | 2004-09-23 | 2004-09-23 | Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi |
Publications (3)
Publication Number | Publication Date |
---|---|
FI20041229A0 FI20041229A0 (fi) | 2004-09-23 |
FI20041229A FI20041229A (fi) | 2006-03-24 |
FI119785B true FI119785B (fi) | 2009-03-13 |
Family
ID=33041562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20041229A FI119785B (fi) | 2004-09-23 | 2004-09-23 | Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi |
Country Status (6)
Country | Link |
---|---|
US (1) | US7555950B2 (ja) |
EP (1) | EP1809997A4 (ja) |
JP (1) | JP2008513800A (ja) |
CN (1) | CN101027542A (ja) |
FI (1) | FI119785B (ja) |
WO (1) | WO2006032729A1 (ja) |
Families Citing this family (19)
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US7728427B2 (en) * | 2007-12-07 | 2010-06-01 | Lctank Llc | Assembling stacked substrates that can form cylindrical inductors and adjustable transformers |
US20090149038A1 (en) * | 2007-12-07 | 2009-06-11 | Metamems Llc | Forming edge metallic contacts and using coulomb forces to improve ohmic contact |
US7965489B2 (en) * | 2007-12-07 | 2011-06-21 | METAMEMS Corp. | Using coulomb forces to form 3-D reconfigurable antenna structures |
US8159809B2 (en) * | 2007-12-07 | 2012-04-17 | METAMEMS Corp. | Reconfigurable system that exchanges substrates using coulomb forces to optimize a parameter |
US8531848B2 (en) * | 2007-12-07 | 2013-09-10 | METAMEMS Corp. | Coulomb island and Faraday shield used to create adjustable Coulomb forces |
US8018009B2 (en) * | 2007-12-07 | 2011-09-13 | METAMEMS Corp. | Forming large planar structures from substrates using edge Coulomb forces |
US7946174B2 (en) * | 2007-12-07 | 2011-05-24 | METAMEMS Corp. | Decelerometer formed by levitating a substrate into equilibrium |
US8008070B2 (en) * | 2007-12-07 | 2011-08-30 | METAMEMS Corp. | Using coulomb forces to study charateristics of fluids and biological samples |
US7812336B2 (en) * | 2007-12-07 | 2010-10-12 | METAMEMS Corp. | Levitating substrate being charged by a non-volatile device and powered by a charged capacitor or bonding wire |
US7863651B2 (en) * | 2007-12-07 | 2011-01-04 | METAMEMS Corp. | Using multiple coulomb islands to reduce voltage stress |
US20100317124A1 (en) * | 2008-08-25 | 2010-12-16 | Yong Hyup Kim | Metal-containing nanomembranes for molecular sensing |
DE102009001924A1 (de) * | 2009-03-27 | 2010-09-30 | Robert Bosch Gmbh | Drucksensor |
US8567495B2 (en) * | 2010-10-20 | 2013-10-29 | Chevron U.S.A. Inc. | System and method for detecting pressure in a subterranean environment |
KR101999720B1 (ko) * | 2012-11-20 | 2019-07-16 | 삼성디스플레이 주식회사 | 기판 정전기 검사 장치 및 기판 제조 방법 |
KR101489302B1 (ko) | 2013-07-31 | 2015-02-04 | 전자부품연구원 | 압력센서 |
US9464951B2 (en) * | 2013-10-16 | 2016-10-11 | Sercel Inc. | Method and apparatus for electrical gap setting for a piezoelectric pressure sensor |
US10527642B2 (en) | 2014-11-11 | 2020-01-07 | Hitachi, Ltd. | Acceleration sensor |
US10101230B2 (en) * | 2015-09-16 | 2018-10-16 | Sensata Technologies, Inc. | Reduction of non-linearity errors in automotive pressure sensors |
GB2567017A (en) * | 2017-09-29 | 2019-04-03 | Cirrus Logic Int Semiconductor Ltd | MEMS devices and processes |
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FR1327719A (fr) * | 1960-07-01 | 1963-05-24 | Onera (Off Nat Aerospatiale) | Perfectionnements aux capteurs manométriques à variation de capacité électrique |
US4415948A (en) * | 1981-10-13 | 1983-11-15 | United Technologies Corporation | Electrostatic bonded, silicon capacitive pressure transducer |
US4422243A (en) * | 1982-05-24 | 1983-12-27 | Brunson Instrument Co. | Dual axis capacitive inclination sensor |
FR2614986B1 (fr) * | 1987-05-07 | 1989-08-18 | Otic Fischer & Porter | Structure de cellule capacitive pour la mesure des pressions differentielles |
US4998179A (en) * | 1989-02-28 | 1991-03-05 | United Technologies Corporation | Capacitive semiconductive sensor with hinged diaphragm for planar movement |
US5180986A (en) * | 1989-05-22 | 1993-01-19 | Schaevitz Sensing Systems, Inc. | Two axis capacitive inclination sensor |
US5044202A (en) * | 1989-09-18 | 1991-09-03 | Texas Instruments Incorporated | Pressure transducer apparatus |
US5442962A (en) | 1993-08-20 | 1995-08-22 | Setra Systems, Inc. | Capacitive pressure sensor having a pedestal supported electrode |
US5738731A (en) * | 1993-11-19 | 1998-04-14 | Mega Chips Corporation | Photovoltaic device |
US5381299A (en) * | 1994-01-28 | 1995-01-10 | United Technologies Corporation | Capacitive pressure sensor having a substrate with a curved mesa |
US5646349A (en) * | 1994-02-18 | 1997-07-08 | Plan B Enterprises, Inc. | Floating mass accelerometer |
JPH0850142A (ja) * | 1994-08-04 | 1996-02-20 | Mitsubishi Electric Corp | 半導体加速度センサ及びその製造方法 |
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JPH09145740A (ja) * | 1995-09-22 | 1997-06-06 | Denso Corp | 加速度センサ |
JPH09257617A (ja) * | 1996-03-21 | 1997-10-03 | Matsushita Electric Ind Co Ltd | 圧力センサ及びこれを用いたガス異常監視装置 |
JPH10308645A (ja) * | 1997-05-08 | 1998-11-17 | Toyo Commun Equip Co Ltd | Atカット水晶振動子及びその製造方法 |
US6661637B2 (en) * | 1998-03-10 | 2003-12-09 | Mcintosh Robert B. | Apparatus and method to angularly position micro-optical elements |
US6496348B2 (en) * | 1998-03-10 | 2002-12-17 | Mcintosh Robert B. | Method to force-balance capacitive transducers |
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US6556417B2 (en) * | 1998-03-10 | 2003-04-29 | Mcintosh Robert B. | Method to construct variable-area capacitive transducers |
US6658938B2 (en) * | 1998-03-10 | 2003-12-09 | Mcintosh Robert B. | Electret transducer |
JP3417855B2 (ja) * | 1998-11-05 | 2003-06-16 | 株式会社日立製作所 | 赤外センサ |
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US6267009B1 (en) * | 1998-12-14 | 2001-07-31 | Endress + Hauser Gmbh + Co. | Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same |
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DE60232250D1 (de) * | 2001-08-20 | 2009-06-18 | Honeywell Int Inc | Bogenförmige federelemente für mikro-elektromechanischen beschleunigungssensor |
DE10235046A1 (de) * | 2002-07-31 | 2004-02-12 | Endress + Hauser Gmbh + Co. Kg | Kapazitiver Drucksensor |
US6825968B2 (en) * | 2002-10-11 | 2004-11-30 | Exajoule, Llc | Micromirror systems with electrodes configured for sequential mirror attraction |
US6798560B2 (en) * | 2002-10-11 | 2004-09-28 | Exajoula, Llc | Micromirror systems with open support structures |
FI119528B (fi) | 2003-02-11 | 2008-12-15 | Vti Technologies Oy | Kapasitiivinen kiihtyvyysanturirakenne |
US6906848B2 (en) * | 2003-02-24 | 2005-06-14 | Exajoule, Llc | Micromirror systems with concealed multi-piece hinge structures |
JP2005321257A (ja) * | 2004-05-07 | 2005-11-17 | Alps Electric Co Ltd | 静電容量型圧力センサ |
-
2004
- 2004-09-23 FI FI20041229A patent/FI119785B/fi not_active IP Right Cessation
-
2005
- 2005-09-15 EP EP05787808A patent/EP1809997A4/en not_active Withdrawn
- 2005-09-15 JP JP2007532914A patent/JP2008513800A/ja active Pending
- 2005-09-15 WO PCT/FI2005/050318 patent/WO2006032729A1/en active Application Filing
- 2005-09-15 CN CNA2005800322663A patent/CN101027542A/zh active Pending
- 2005-09-23 US US11/232,922 patent/US7555950B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
FI20041229A0 (fi) | 2004-09-23 |
JP2008513800A (ja) | 2008-05-01 |
CN101027542A (zh) | 2007-08-29 |
US7555950B2 (en) | 2009-07-07 |
WO2006032729A1 (en) | 2006-03-30 |
EP1809997A4 (en) | 2010-06-02 |
FI20041229A (fi) | 2006-03-24 |
EP1809997A1 (en) | 2007-07-25 |
US20060213269A1 (en) | 2006-09-28 |
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FG | Patent granted |
Ref document number: 119785 Country of ref document: FI |
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PC | Transfer of assignment of patent |
Owner name: MURATA ELECTRONICS OY |
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MM | Patent lapsed |