FI110357B - Tool for remodeling and chip removal devices, device for controlling remodeling and chip removal methods and process for making a tool - Google Patents

Abstract

The tool comprises a substrate with a layer arrangement having a temp. sensor and a wear sensor arrangement, where the sensors are connected to a processing circuit. The novelty is that the sensors are provided on the direct wear surface of the tool. The layer arrangement is a closed layer structure comprising a 1st gradient layer implanted in the surface of the substrate, which continuously transfers from a metallic layer connected to the substrate into an insulating layer, and a conducting structured metallic layer, and a wear protection layer. Also claimed are an appts. for controlling deforming and machining processes, and prodn. of the tool. <IMAGE>

Description

110357

TOOL FOR molding and LASTUAMISLAITTEITA, molding and chip cutting DEVICE AND METHOD FOR ADJUSTING TOOL FOR MANUFACTURING - VERKTYG FOR OMFORM NINGS- OCH S-S PANAV KILJNINGSANORDNINGAR, an arrangement for regulating the OMFORMNINGS- 5 OCH SPÄNAVSKILJNINGFÖRFARAN DEN to a method for the preparation of the ETT VERKTYG

The invention relates to a tool as defined in the preamble of claim 1. The invention further relates to a device as defined in the preamble of claim 10. The invention further relates to claims its method as defined in its introduction.

| US 5,176,053 discloses a cutting tool having temperature sensors and electrical conductors arranged at different distances from the cutting edge to the rear edge of the blade so that the temperature distribution in the tool near the cutting edge can be determined. At least some of the temperature sensing members are arranged to be destroyed during use, whereby wear can be determined.

In such a well-known cutting tool, ·,! it is not possible to place the sensors directly on the cutting *: * *: edge or on the blade face or cutting edge. or on the blade face, since the device is not capable of resisting large forces directly on the wear surface.

WO-A-87/04236 discloses a tool according to the preamble of claim 1. The publication discloses a mechanical component formed as a cutting blade with an integrated circuit that enables the sensor to measure the pressure, temperature and wear of the mechanical component. Layering occurs in the circuit; . ·. and semiconductor techniques using a vapor-i », ··. coating and sputtering processes which allow atomic application of the coating agent.

It is therefore an object of the invention to provide a tool for molding and cutting equipment which, by means of sensors, enables to measure important process parameters directly on the wear surface, i.e.. on the surface of the tool or counter, which, however, is not adversely affected in terms of durability and service life, whereby the sensing arrangement should be able to resist strong forces.

This object can be achieved in accordance with the invention by the features of claim 1 by combining the sensors with temperature and / or temperature. In order to measure snow in thin-film technology with a tool operating layer / wear protection layer in a single coating technology integrated layer order, essential process parameters (temperature, wear 15 and force) can be used in shaping and cutting tools to directly produce tool cutting blade and forming and cutting. Thus, intelligent systems can be disclosed in which adjustment of method parameters, such as shear rate or feed rate, can be accomplished by means of data-based computer systems, such as fuzzy logic modules. The sandwich construction ensures a long effective service life and is designed so that the sensors can be placed directly on the wear surface or the like.

, ·, For wear, whereby curved surfaces are also available at $ 25.

• · · · ·. · For the surface enables simplification of the manufacturing process '·' *, since the structure on all cutting surfaces can be executed at the same time and a large number of tools, for example knife blades, can be processed simultaneously.

It is advantageous to further develop and improve the features of the dependent claims. Claim 10::: 35 rolls a device for adjusting the forming and cutting methods using a tool according to the invention. Requirements 11 to 19 relate to a method for making such a workpiece.

In the following, the invention will be described in detail with the aid of exemplary embodiments and with reference to the accompanying drawings, in which Figure 1 is a schematic view of a tool according to the present invention formed as a turning blade, Figure 2 is a plan view of a tool 3c are sectional views of the layer structure of the rotary piece of Fig. 2, and Fig. 4 shows another embodiment of the rotary piece having a multifunctional member.

Figure 1 shows a turning blade 1 having one cutting edge 2 with cutting edge. The cutting edge 2 schematically shows a single sensor 3 arranged as an intermediate layer by thin-film technology and which is below the wear protection layer 20 as will be described in more detail below. Such a tool exhibits wear phenomena during the cutting phase on the cutting unit 2 or its cutting edges, which always develop differently depending on the type of stress and the duration of the stress. The cut will wear the blade! '*. 25 on the rear edge 4 (tread wear) and on the blade chest / / side 5 (recess wear). Therefore, in particular,> '· ·, as proposed, should arrange the sensors corresponding to the sensor 3. The sensing member 3 is connected to the current conductors 6, which are shown in FIG. the overpasses have: 30 connections 7 and connected to coupling 8. This coupling functions for pre-treatment or counter evaluation of the sensors and is arranged in the proximity of the sensor 3 to the tool 1 or its holder. Preferably, the coupling 8 is formed as a micro coupling. The coupling 8 is a terminal; 35 control and adjustment switches connected by power lines * i »»; \ | which controls or responds depending on the sensor signals. the tool 1 pointing machine parameter 110 11077, whereby these parameters can be, for example, cutting speed or feed rate or something similar.

Fig. 2 is a partial view of a turning blade piece 9 used in a turning blade. This turning piece 5 has temperature sensing members 10 and a wear sensing arrangement 11 in the form of current conductors or counter resistors arranged directly on the blade face with or without chip guide. For example, the temperature sensing members 10 have meander-shaped portions 12 which, through their first connectors, are connected to respective contact surfaces 14 through their connecting wires 13 and through their second connections through a common contact surface 14 via their connecting conductor 15. The wear sensor system 11 consists of which are connected to respective contact surfaces 14 and also connected to a common connecting conductor 15. The contact surfaces 14 are connected to a processing circuit corresponding to circuit 8 in Figure 1. The temperature at 20 sensors 10 is compensated for by a change in resistance from the meander shaped portions 12 during processing. The wear of the cutting blade piece 9 at the cutting edge is determined by the current conductor 16, which is interrupted when the wear during continuous machining continuously increases. Similarly, the breaking of a * piece can be determined.

: In the illustrated embodiment, for example, "why the contact surfaces 14 could be connected via a corresponding power conductor 11 for indicating the contact surface to drive the signal forward. It is also conceivable that a processing circuit in the center of the knife blade could be arranged" ··· and connected directly to the contact surfaces.

'... · In principle, there is a layer of · 35 · applied structures, such as a knife blade, applied by spraying: one gradient layer on the substrate, where the metal is continuously transformed into a dielectric, e.g. Ti-TiOx-TiO2, whereby oxygen is continuously added. By "implanted" in the present application, it is meant that the gradient layer interleaves with the ion-etched substrate surface-5 or counter-upstream layer to a shallow depth (e.g., 10 nm to 100 nm), whereby wear can be controlled by the (negative) bias voltage between 70 V and 2000 V and thus by ion bombardment. "Planting" procedures can improve infectivity.

In the simplest case, a second gradient layer may be placed over the gradient layer as a sensing layer, eg TiO 2 -TiOx-Ti, by reducing the oxygen uptake, whereby the sensing layer may be suitably structured as the wear and temperature sensing layer.

However, instead of the last gradient layer, two metal layers of different materials may be mounted in succession and over one of them, ion-etched therebetween, one layer forming a resistance layer for the wear sensors and the other a heat-resistant layer for the temperature members. Thus, the sensitivity of the sensors can be improved. The layers are structured accordingly.

25 In addition, a wear protection layer and a · ·. in this case, a pre-insulated layer is removed. The protective wear layer may be formed as a gradient layer, e.g., under increasing nitrogen addition. When using, for example, hBN-cBN, Al 2 O 3 or a diamond as a wear protection layer, ··· is not required. the insulating layer.

'·' All layers are fabricated to grow simultaneously during ion bombardment controlled by the bias voltage of the substrate. Floors:. The thickness and hardness are similarly controlled via the bias voltage or counter potential, whereby it is self-evident that the growth of the layers must be possible. The (negative) bias voltage is between 70 V and 2000 V, whereby values between 100 V and 400 V can be obtained for layer growth and even higher values can be selected for ion etching. However, when the different layers are not continuously separated, ion etching is performed between the layers to improve adhesion; to the next floor.

| TiO 2, BN, Al 2 O 3, SiO 2, and the like e.g. TiN, 10 BN, Al 2 O 3, TiC, TiAlN, TiCN, diamond and the like can be used in the dielectric and wear protection layers.

When sensing layers are applied to curved surfaces, e.g., a post guiding groove, photo printing cannot be used to form the structuring. In this case flat printing with a high depth effect is used, for example, x-ray flat printing, laser beam flat printing or three-layer technology, where a flat surface is produced by filling with a light-resistant or synthetic material and applying a metal layer and etching the device.

20 It is conceivable that the layer structure of a tool can be fabricated in a different order from that of. above. For example, the wear protection layer may be made as a gradient layer directly on the substrate. whereupon there is no doubt that the gap between this layer 25 and the sensing layer must be separated by an insulating layer.

3a to 3c illustrate in more detail the manufacture of a rotating blade with integrated sensors according to one embodiment. Slabs t r a tin 30 uses a commercial knife blade 17 consisting of a carbide or metal ceramic with a thickness of 3 to 5 mm. The knife blade 17 has a smooth surface. Before coating, degrease the knife blade in an alkaline cleaning bath and rinse with deionized | The coating takes place in a prior art injection apparatus, wherein the substrate table which receives one or more blade holder holders is connected to a bias source through which a high and medium frequency supply voltage as well as a DC source can be connected. substraattipöytään. After the substrate 5 is built in, the pressure is reduced to 10 ~ 5 mbar, an ion etching step is performed for the substrate pre-purification at a negative potential of 600 V in the substrate holder, with simultaneous free spraying of the paint. Next, in order to improve adhesion, a TiOx gradient layer is applied as an intermediate layer 19 having a thickness of 100 nm, which is then separated with a T102 insulating layer 20. A second intermediate layer 21 is separated from the titanium layer. The intermediate layers 19 and 21 and the insulating layer 20 have a total thickness of 1.5 to 3.0 µm. The bias voltage gradient on the sub-strate table is then 1400 V - 100 V.

In the next sub-step (non-metallic member), to fabricate the conductor layer 22, it is metallized with a 1 µm molybdenum layer or a titanium layer with a substrate bias voltage of 50 V. The etching of the conductors Cr-mask and is developed in an alkaline developer. Finally, the Mo layer is structured in an etching plant.

3b, a spray-resistant layer consisting of a gradient adhesive layer as an intermediate layer 23 is then applied by spraying. . 30 and a resist layer 24 consisting of Moes which are injected at a thickness of 100 nm. Lämpöävastustava

• I

Layer 23, 24 is re-structured as above::: shown by conventional flat printing methods so that the temperature members take the desired shape.

, 35 Meander geometry and track width are implemented *; 'Resistance which is about 100 Ω.

According to Fig. 3, a further 110357 8 insulating layer 25 consisting of TiO 2 is applied, whereby a gradient adhesion layer is also produced which, however, as well as the second and third interlayer, is not shown in Fig. 3c. Finally, a wear-protection layer 26 consisting of TiN is sprayed to a thickness of 5 μιη.

This illustrated order of layers is given by way of example only, of course, additional layers and other layers may be made and in the same manner 10 other materials may be used. For example, boron nitride Bn may be used as the insulating layer, and the wear protection layer may also be formed as a cBN layer.

The manufacturing method for such an embodiment is shown below. The swivel-15 flap (as above) as a substrate is cleaned, degreased and built into a 4-target electrode injection device, which is depressurized to <2 x 10'5 mbar. The target electrodes and substrates are purified by ion etching in a sealed seal. The non-metallic elements are then metallised with a gradient layer

TiBN and an insulating layer from BN (C). This is done. In a DC magnetron injection device at a total pressure of 4 x 10'3 mbar, the TiB2 target electrode (gradient layer) and the B4C target electrode (insulating layer) are reactively injected with various N2 / Ar gas mixtures.

·. * ·· Next, a conductor layer is made of Mo, whose • | j layer thickness is about 1 μτη, which is flat printed and structured. The thermoplastic sensor element is fabricated by injection of Mo at a layer thickness of 30 · 100 nm, flat-printed and structured by reactive ion-etching. A gradient adhesive layer and a wear protection layer are applied over it. For this:, i,: a tool is built into the magnetron spraying device. The target electrode consists of B4C. The free; X 35 method for the target electrode and the short io * t After purifying the substrate for the etching step, an Ar / N2 gas mixture containing 30% N2 911ccB in a recipient and a gas pressure of 50 x 10 &lt; 3 &gt; mbar is introduced into the non-metallic elements of the tool by nanocrystalline c-BN- floor. The power at the target electrode at 250 x 120 nm rises to 1.5 KW, providing a 250 V dc voltage to the substrate. The Ker-5 rust temperature is about 300 ° C. Under these conditions, a hard wear protection surface is formed which, in addition to the cubic BN phase, still contains only small portions of the hexagonal BN and about 5% carbon, probably as a carbide or sp3 bond. The benefit of the wear protection layer 10, consisting of c-BN or diamond, is an overview of the integration of thin film sensors in that one dielectric layer can be omitted with respect to your conductivity with Ti-based ductile layer systems.

Figure 4 shows yet another example of an embodiment 15 of a knife blade 27 provided with a combination of temperature and wear sensors ("multi-function sensor"). In this exemplary embodiment, the meander-shaped portions of the heat sensing elements 12 in the current conductors 16 of the wear sensing arrangement are integrated so that no additional current conductors are required for the temperature sensing elements.

. It is self-evident that other sensors may be integrated into tools that are directly formed in layers or that can be arranged on the tool, e.g., below or in the holder. Thus, for example, the force and / or bending member may be applied as a piezoelectric layer or formed as a strain gauge bridge. Alternatively, vibration tuning means may be contemplated so that a large portion of the effect quantities can be compensated.

• * · • • »• • • • • • • • • • • • • • • • • • • • i! j

Claims (19)

1. Tools for reshaping and clamping separators which can be attached to a holder and to which a substrate is provided with at least one temperature sensor (10) and at least one wear sensor device (11), which are formed as structured conductive metal layers. and an abrasion protection layer comprising a layer system wherein the sensors (3, 10, 11) may be connected to a machining coupling (8), and the sensors (3, 10, 11) are arranged on the straight abrasion surface of the tool, characterized wherein the layer system is a closed layer structure, wherein there is at least a first gradient layer implanted on the surface of the substrate, which continuously transfers from a metal layer connected to the substrate to an insulation layer, and at least a conductive structured metal layer forming the sensors, and the wear protection layer. 2. A tool according to claim 1, characterized in that at least one conductive structured metal layer forming the sensors (3, 10, 11) is formed into a second gradient layer, which continuously transfers from the insulation layer of the first gradient layer. ring layer into one metal layer. y [· 25 3. A tool according to claim 1 or 2, characterized in that in two cases, in each case, in front of the lying layer, there are provided implanted conductive structured metal layers which form the sensors (3, 10, 11), one of which is a resistance layer forming the wear sensor device, and the second is a thermoresistive layer which forms the temperature sensors. * ··· * 4. Tool according to any one of claims 1-3, characterized in that the abrasion protection layer is formed as a third gradient layer during the intermediate connection of the insulation layer. 15 1 10357 5. A tool according to any one of claims 1-4, characterized in that the first and second gradient layers are titanium titanium oxide layers, and the third gradient layer is titanium titanium nitride layers. Tool according to any of claims 1-3, characterized in that the abrasion protection layer is an implanted cubic boron nitride layer or diamond layer implanted in the layer below it. 7. A tool according to any one of claims 1-6, characterized in that the substrate is a annealing plate (2) of tempered metal or ceramic metal, the layer structure being arranged on the clamping surface of the bite with or without clamping guide rails. Tool according to any of claims 1-7, characterized in that the machining coupling-! one (8) is formed as microchips, which are arranged on the tool or holder and are connected to the sensors. Tool according to any of claims 1-8, characterized in that force and / or bending sensors are arranged as ferroelectric or piezo-resistant layers. Apparatus for controlling conversion: ·: 25 and clamp separation methods, with a transformation and clamp separating device, which has a tool inserted into a holder according to any of claims 1-9, characterized in that: device. . there is a control-control circuit which is connected via the tool's sensors to the processing circuit for receiving temperature and wear and possibly power signals, and, depending on these signals, converter and voltage separation -, *. the parameters of the device, such as speed, speed; Feed or the like. '· V 11. A method of producing a tool for remodeling and clamp separating devices according to any one of claims 1-9, characterized in that the substrate is subjected to ion etching and a gradient layer is continuously raised on the abrasion surface by sputtering upon increasing supply of reaction gas, which gradient layer transfers from a metal layer to an insulation layer, that at least a conductive sensor layer is applied by sputtering, and then structured, and that the wear-protective layer is separated by sputtering, all layers being raised simultaneously under a controlled jonbeskjut solution. 12. A method according to claim 11, characterized in that the conductive sensor layer is applied as a gradient layer during rescue-induced reduction of the reaction gases. Process according to any of Claim 11 or Claim 12, characterized in that the abrasion protection layer is raised as a gradient layer by adding the supply of the reaction gas. 20 Process according to any of claims 11-13, characterized in that the amount of material removed from the substrate during ion etching, and / or the density and hardness of the applied layers in the layer structure is controlled by means of -25 voltage and pre-voltage potential respectively; the substrate for ion shooting, the values being between 70V and 2000V. A method according to any of the claims. . 11-14, characterized in that it belongs to the following steps: ··· '(a) pre-cleaning the substrate by ion etching; (b) applying a gradient layer Ti-TiOx-TiO2 insulating layer to the substrate as an adhesion enhancement layer and insulation layer by (c) the application of a conductor coating layer containing Ti, Mo or W, by the sputtering process, (d) providing a mask corresponding to the desired le (d) applying a thermoresistive layer of Mo or the like by sputtering; (f) structuring the thermoresistive layer according to step d); g) the application of a second TiO2 insulation layer corresponding to step b), and I (h) the application of an abrasion protection layer as a gradient. entrapment Ti-TiN by spraying and increasing supply of nitrogen. 15 Method according to any of claims 11-14, characterized in that it belongs to the following steps: (a) pre-cleaning of the substrate by ion etching, (b) applying a gradient layer of TiBN and an insulating layer of BN in # (c) applying (d) structuring the conductor layer; (e) sputtering a thermoresistive layer of Mo or similar material; (f) structuring the conductor layer; a thermoresistive layer; (g) the application of a gradient adhesion layer and a c-BN abrasion protection layer by sputtering. . Method according to any of claims 11-16, characterized in that the temperature of the substrate during the preparation of the layer is::: within the range from 50 ° C to 900 ° C. Method according to any of the claims, 11-17, characterized in that the conductor webs and the thermoresistive layer are tempered for stabilization. 110357 18 19. A method according to any of claims 11-18, characterized in that for the structuring of the sensor layers at curved substrate surfaces, lithography with great depth effect is used, for example X-ray lithography, laser lithography or the three-layer technique. »« ·