ES2421583T3 - Composición fotosensible - Google Patents

Composición fotosensible

Info

Publication number
ES2421583T3
ES2421583T3 ES06253575T ES06253575T ES2421583T3 ES 2421583 T3 ES2421583 T3 ES 2421583T3 ES 06253575 T ES06253575 T ES 06253575T ES 06253575 T ES06253575 T ES 06253575T ES 2421583 T3 ES2421583 T3 ES 2421583T3
Authority
ES
Spain
Prior art keywords
weight
photosensitive composition
polymeric binder
total weight
binder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES06253575T
Other languages
English (en)
Inventor
Ming-Hsiung Yang
Hui-Kuan Mao
Feng-Chih Tsai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eternal Materials Co Ltd
Original Assignee
Eternal Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eternal Chemical Co Ltd filed Critical Eternal Chemical Co Ltd
Application granted granted Critical
Publication of ES2421583T3 publication Critical patent/ES2421583T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0076—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the composition of the mask

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Graft Or Block Polymers (AREA)
  • Polymerisation Methods In General (AREA)

Abstract

Una composición fotosensible que comprende, basado en el peso total de la composición fotosensible: (A) de 30 a 80% en peso de un aglutinante polimérico; (B) de 5 a 50% en peso de un compuesto fotopolimerizable; y (C) de 1,5 a 20% en peso de un fotoiniciador, en la que el aglutinante polimérico, el componente (A), contiene como unidad polimerizada al menos un monómero con la estructura de fórmula (1), en una cantidad desde 5 hasta 35% en peso, basado en el peso total del aglutinante polimérico, en la que R1 es H o metilo, y R2, R3, R4, R5 y R6 representan independientemente H, un halógeno, o un alquilo de C1 a C10 sustituido o sin sustituir.
ES06253575T 2005-07-08 2006-07-07 Composición fotosensible Active ES2421583T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNA2005100841169A CN1892428A (zh) 2005-07-08 2005-07-08 可光成像组合物

Publications (1)

Publication Number Publication Date
ES2421583T3 true ES2421583T3 (es) 2013-09-04

Family

ID=37106976

Family Applications (1)

Application Number Title Priority Date Filing Date
ES06253575T Active ES2421583T3 (es) 2005-07-08 2006-07-07 Composición fotosensible

Country Status (3)

Country Link
EP (1) EP1742107B1 (es)
CN (1) CN1892428A (es)
ES (1) ES2421583T3 (es)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2015178462A1 (ja) * 2014-05-21 2017-04-20 旭化成株式会社 感光性樹脂組成物及び回路パターンの形成方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4159094B2 (ja) * 2003-10-15 2008-10-01 東京応化工業株式会社 感光性樹脂組成物およびこれを用いた感光性ドライフィルム

Also Published As

Publication number Publication date
CN1892428A (zh) 2007-01-10
EP1742107A1 (en) 2007-01-10
EP1742107B1 (en) 2013-06-05

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