ES2186822T3 - DEVICE AND PROCEDURE FOR VAPORIZATION BY ELECTRONIC BEAM. - Google Patents
DEVICE AND PROCEDURE FOR VAPORIZATION BY ELECTRONIC BEAM.Info
- Publication number
- ES2186822T3 ES2186822T3 ES97109082T ES97109082T ES2186822T3 ES 2186822 T3 ES2186822 T3 ES 2186822T3 ES 97109082 T ES97109082 T ES 97109082T ES 97109082 T ES97109082 T ES 97109082T ES 2186822 T3 ES2186822 T3 ES 2186822T3
- Authority
- ES
- Spain
- Prior art keywords
- hollow body
- hole
- crisol
- gases
- modules
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
- H01J2237/3132—Evaporating
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
LA INVENCION SE REFIERE A UN EVAPORADOR POR RADIACION ELECTRONICA FORMADO POR LOS MODULOS DE CAÑON ELECTRONICO (7), SISTEMA DE DESVIACION (6) Y CRISOL/CRISOL GIRATORIO CON REFRIGERACION POR AGUA (10) Y QUE SE ENCUENTRA FIJADO SOBRE LA PLACA DE CUBIERTA (3) DE UN CUERPO HUECO PLANO DE FORMA QUE IMPIDE EL PASO DE GASES. EL CUERPO HUECO ESTA, A SU VEZ, DISPUESTO DE FORMA IMPERMEABLE A LOS GASES SOBRE UN ORIFICIO (B) EN LA CALDERA, PUDIENDO OSCILAR ALREDEDOR DEL EJE PRINCIPAL (A) DEL ORIFICIO (B). EL ESPACIO INTERIOR DEL CUERPO HUECO ESTA EN CONTACTO CON LA ATMOSFERA POR ENCIMA DEL ORIFICIO. TODAS LAS LINEAS DE CONEXION DE AGUA, CORRIENTE DE BAJA TENSION, ALTA TENSION Y ACCIONAMIENTO DE GIRO LLEGAN EN EL CUERPO HUECO HASTA LOS MODULOS DISPUESTOS DE FORMA IMPERMEABLE A LOS GASES.THE INVENTION REFERS TO AN ELECTRONIC RADIATION EVAPORATOR FORMED BY THE ELECTRONIC CANNON MODULES (7), DEVIATION SYSTEM (6) AND ROTATING CRISOL / CRISOL WITH WATER COOLING (10) AND THAT IS FOUND FIXED ON THE COVER PLATE ( 3) OF A FLAT HOLLOW BODY THAT PREVENTS THE GAS PASS. THE HOLLOW BODY IS, IN turn, WATERPROOFLY PROVIDED TO GASES ON A HOLE (B) IN THE BOILER, BEING ABLE TO ROCK AROUND THE MAIN AXLE (A) OF THE HOLE (B). THE INTERIOR SPACE OF THE HOLLOW BODY IS IN CONTACT WITH THE ATMOSPHERE ABOVE THE HOLE. ALL WATER CONNECTION, LOW VOLTAGE, HIGH VOLTAGE AND TURN DRIVE LINES ARRIVE IN THE HOLLOW BODY UNTIL THE MODULES AVAILABLE TO GASES.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19623701A DE19623701A1 (en) | 1996-06-14 | 1996-06-14 | Device and method for electron beam evaporation |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2186822T3 true ES2186822T3 (en) | 2003-05-16 |
Family
ID=7796911
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES97109082T Expired - Lifetime ES2186822T3 (en) | 1996-06-14 | 1997-06-05 | DEVICE AND PROCEDURE FOR VAPORIZATION BY ELECTRONIC BEAM. |
Country Status (5)
Country | Link |
---|---|
US (1) | US6495216B2 (en) |
EP (1) | EP0813226B1 (en) |
JP (1) | JP4142130B2 (en) |
DE (2) | DE19623701A1 (en) |
ES (1) | ES2186822T3 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4725975B2 (en) * | 2006-12-06 | 2011-07-13 | 株式会社昭和真空 | Vacuum deposition apparatus and operation method thereof |
US20110229660A1 (en) * | 2010-03-22 | 2011-09-22 | Timothy Ray Reynolds | Ion beam assisted deposition of ophthalmic lens coatings |
CN108300981B (en) * | 2017-12-20 | 2020-05-15 | 湖南红太阳光电科技有限公司 | Preheating box for graphite boat |
CN111663105A (en) * | 2020-05-26 | 2020-09-15 | 南方科技大学 | Ultrahigh vacuum electron beam evaporator and electron beam coating device |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE123979C (en) | ||||
US2482329A (en) * | 1946-05-27 | 1949-09-20 | Rca Corp | Apparatus for selective vapor coating |
US3389210A (en) * | 1965-03-29 | 1968-06-18 | Everette M. Whitson | Multiple crucible for a permanent magnet transverse electron beam evaporation source |
DE2528032C2 (en) * | 1975-06-24 | 1983-06-09 | Leybold-Heraeus GmbH, 5000 Köln | Electron beam generators for heating, melting and evaporation purposes |
DE2544725C3 (en) * | 1975-10-07 | 1981-01-08 | Leybold-Heraeus Gmbh, 5000 Koeln | Electron beam evaporator |
DE2656314A1 (en) | 1976-12-11 | 1978-06-15 | Leybold Heraeus Gmbh & Co Kg | POWER SUPPLY DEVICE FOR ELECTRON BEAM CANNONS |
CH631743A5 (en) * | 1977-06-01 | 1982-08-31 | Balzers Hochvakuum | METHOD FOR EVAPORATING MATERIAL IN A VACUUM EVAPORATION SYSTEM. |
US4561382A (en) * | 1983-11-22 | 1985-12-31 | The United States Of America As Represented By The United States Department Of Energy | Vacuum vapor deposition gun assembly |
CH663037A5 (en) * | 1985-02-05 | 1987-11-13 | Balzers Hochvakuum | STEAM SOURCE FOR VACUUM COATING SYSTEMS. |
JPS62247067A (en) * | 1986-04-18 | 1987-10-28 | Citizen Watch Co Ltd | Ion plating device |
US4776299A (en) * | 1986-05-15 | 1988-10-11 | The United States Of America As Represented By The United States Department Of Energy | Source replenishment device for vacuum deposition |
DE3704505A1 (en) * | 1987-02-13 | 1988-08-25 | Leybold Ag | INSERT UNIT FOR VACUUM SYSTEMS |
JP2913745B2 (en) * | 1990-04-10 | 1999-06-28 | 松下電器産業株式会社 | Vacuum deposition equipment |
FR2687171B1 (en) * | 1992-02-12 | 1994-03-25 | Commissariat A Energie Atomique | DEVICE FOR CONTROLLING A FLOW OF MATERIAL EMITTED BY A HEATED EVAPORATION SOURCE AND APPLICATION IN A VACUUM EVAPORATION COATING MACHINE. |
US5216690A (en) * | 1992-03-11 | 1993-06-01 | Hanks Charles W | Electron beam gun with grounded shield to prevent arc down |
US5473627A (en) * | 1992-11-05 | 1995-12-05 | Mdc Vacuum Products Corporation | UHV rotating fluid delivery system |
-
1996
- 1996-06-14 DE DE19623701A patent/DE19623701A1/en not_active Ceased
-
1997
- 1997-06-05 ES ES97109082T patent/ES2186822T3/en not_active Expired - Lifetime
- 1997-06-05 EP EP97109082A patent/EP0813226B1/en not_active Expired - Lifetime
- 1997-06-05 DE DE59708040T patent/DE59708040D1/en not_active Expired - Lifetime
- 1997-06-16 JP JP15851997A patent/JP4142130B2/en not_active Expired - Fee Related
- 1997-06-16 US US08/876,887 patent/US6495216B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0813226A2 (en) | 1997-12-17 |
US20010006708A1 (en) | 2001-07-05 |
US6495216B2 (en) | 2002-12-17 |
JP4142130B2 (en) | 2008-08-27 |
EP0813226A3 (en) | 1998-05-06 |
JPH1060630A (en) | 1998-03-03 |
EP0813226B1 (en) | 2002-08-28 |
DE59708040D1 (en) | 2002-10-02 |
DE19623701A1 (en) | 1997-12-18 |
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