ES2153524T3 - Procedimiento de fabricacion de dianas de pulverizacion de grano fino. - Google Patents
Procedimiento de fabricacion de dianas de pulverizacion de grano fino.Info
- Publication number
- ES2153524T3 ES2153524T3 ES96113051T ES96113051T ES2153524T3 ES 2153524 T3 ES2153524 T3 ES 2153524T3 ES 96113051 T ES96113051 T ES 96113051T ES 96113051 T ES96113051 T ES 96113051T ES 2153524 T3 ES2153524 T3 ES 2153524T3
- Authority
- ES
- Spain
- Prior art keywords
- procedure
- manufacture
- fine grain
- white
- grain spraying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3423—Shape
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
- H01J37/3491—Manufacturing of targets
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
Abstract
EN UN BLANCO CON UNA RELACION LARGO/ANCHO DE AL MENOS 5:1 HECHA DE METALES O ALEACIONES DE METALES FUNDIBLES EN EL AIRE DE LA SERIE SN, IN, BI, PB, ZN, AL QUE TIENE UNA TEMPERATURA PARA EL LIQUIDO POR DEBAJO DE 700 C, EL TAMAÑO MEDIO DE GRANO SE ENCUENTRA POR DEBAJO DE 6 MM, OBTENIENDOSE EL BLANCO MEDIANTE UN PROCEDIMIENTO DIRECTO DE FUNDICION, RETIRANDOSE UNA PARTE DEL CALOR DE SOLIDIFICACION DE LA PARTE DEL BLANCO RECIENTEMENTE SOLIDIFICADA COLOCANDO UN REFRIGERANTE DE MANERA PLANA Y FINAMENTE DIVIDIDO.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1995137765 DE19537765B4 (de) | 1995-10-11 | 1995-10-11 | Feinkörniges Sputtertarget mit einem vorgegebenen Breiten- zu Dickenverhältnis sowie Verfahren zur Herstellung von Sputtertargetplatten |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2153524T3 true ES2153524T3 (es) | 2001-03-01 |
Family
ID=7774523
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES96113051T Expired - Lifetime ES2153524T3 (es) | 1995-10-11 | 1996-08-14 | Procedimiento de fabricacion de dianas de pulverizacion de grano fino. |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0768387B1 (es) |
DE (1) | DE19537765B4 (es) |
ES (1) | ES2153524T3 (es) |
TR (1) | TR199600798A2 (es) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19806879A1 (de) * | 1998-02-19 | 1999-08-26 | Leybold Materials Gmbh | Target für die Sputterkathode einer Vakuumbeschichtungsanlage und Verfahren zu seiner Herstellung |
US11450516B2 (en) * | 2019-08-14 | 2022-09-20 | Honeywell International Inc. | Large-grain tin sputtering target |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3863703A (en) * | 1974-02-14 | 1975-02-04 | Mitsui Mining & Smelting Co | Method for casting a large lead anode plate |
JPS57185973A (en) * | 1981-05-07 | 1982-11-16 | Mitsui Mining & Smelting Co Ltd | Production of target for sputtering |
JPS63161161A (ja) * | 1986-12-23 | 1988-07-04 | Nippon Mining Co Ltd | Al−Si系合金製タ−ゲツトとその製造方法 |
FR2664618B1 (fr) * | 1990-07-10 | 1993-10-08 | Pechiney Aluminium | Procede de fabrication de cathodes pour pulverisation cathodique a base d'aluminium de tres haute purete. |
US5087297A (en) * | 1991-01-17 | 1992-02-11 | Johnson Matthey Inc. | Aluminum target for magnetron sputtering and method of making same |
-
1995
- 1995-10-11 DE DE1995137765 patent/DE19537765B4/de not_active Expired - Lifetime
-
1996
- 1996-08-14 ES ES96113051T patent/ES2153524T3/es not_active Expired - Lifetime
- 1996-08-14 EP EP19960113051 patent/EP0768387B1/de not_active Expired - Lifetime
- 1996-10-04 TR TR96/00798A patent/TR199600798A2/xx unknown
Also Published As
Publication number | Publication date |
---|---|
EP0768387A1 (de) | 1997-04-16 |
DE19537765B4 (de) | 2007-09-06 |
EP0768387B1 (de) | 2000-10-25 |
TR199600798A2 (tr) | 1997-05-21 |
DE19537765A1 (de) | 1997-04-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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