ES2017941B3 - Muelle de flexion y procedimiento para su fabricacion. - Google Patents
Muelle de flexion y procedimiento para su fabricacion.Info
- Publication number
- ES2017941B3 ES2017941B3 ES87100744T ES87100744T ES2017941B3 ES 2017941 B3 ES2017941 B3 ES 2017941B3 ES 87100744 T ES87100744 T ES 87100744T ES 87100744 T ES87100744 T ES 87100744T ES 2017941 B3 ES2017941 B3 ES 2017941B3
- Authority
- ES
- Spain
- Prior art keywords
- wafer
- flexion
- procedure
- manufacture
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F1/00—Springs
- F16F1/02—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant
- F16F1/18—Leaf springs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C11/00—Pivots; Pivotal connections
- F16C11/04—Pivotal connections
- F16C11/12—Pivotal connections incorporating flexible connections, e.g. leaf springs
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP87100744A EP0275338B1 (de) | 1987-01-20 | 1987-01-20 | Biegefedergelenk und Verfahren zu seiner Herstellung |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2017941B3 true ES2017941B3 (es) | 1991-03-16 |
Family
ID=8196690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES87100744T Expired - Lifetime ES2017941B3 (es) | 1987-01-20 | 1987-01-20 | Muelle de flexion y procedimiento para su fabricacion. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4953834A (es) |
EP (1) | EP0275338B1 (es) |
JP (1) | JPH01177212A (es) |
AT (1) | ATE55632T1 (es) |
CA (1) | CA1323639C (es) |
DE (1) | DE3764354D1 (es) |
ES (1) | ES2017941B3 (es) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU627820B2 (en) * | 1988-12-20 | 1992-09-03 | Rtz Mining And Exploration Ltd. | Gravity gradiometer |
AU643627B2 (en) * | 1988-12-20 | 1993-11-18 | Rtz Mining And Exploration Ltd. | Flexural pivot bearing |
GB2247717B (en) * | 1990-09-06 | 1995-03-08 | Raymond Guthrie | Hinge element |
FR2682728B1 (fr) * | 1991-10-21 | 1996-02-09 | Sfim | Articulation a la cardan plane, procede de realisation, gyroscope et support orientable comportant une telle articulation. |
US20020053734A1 (en) | 1993-11-16 | 2002-05-09 | Formfactor, Inc. | Probe card assembly and kit, and methods of making same |
US6741085B1 (en) | 1993-11-16 | 2004-05-25 | Formfactor, Inc. | Contact carriers (tiles) for populating larger substrates with spring contacts |
US5806181A (en) * | 1993-11-16 | 1998-09-15 | Formfactor, Inc. | Contact carriers (tiles) for populating larger substrates with spring contacts |
US8033838B2 (en) | 1996-02-21 | 2011-10-11 | Formfactor, Inc. | Microelectronic contact structure |
US5994152A (en) | 1996-02-21 | 1999-11-30 | Formfactor, Inc. | Fabricating interconnects and tips using sacrificial substrates |
TW334622B (en) * | 1996-04-17 | 1998-06-21 | Esec Sa | Apparatus for making wire connections on semiconductor chips |
US5711063A (en) * | 1996-06-11 | 1998-01-27 | Seagate Technology, Inc. | Method of forming a suspension fabricated from silicon |
FR2754577B1 (fr) | 1996-10-11 | 1998-12-11 | Suisse Electronique Microtech | Pivot flexible planaire a modules unitaires monolithiques |
US5879570A (en) * | 1997-01-14 | 1999-03-09 | Seagate Technology, Inc. | One piece flexure for a hard disc file head with selective nickel plating |
US6690185B1 (en) | 1997-01-15 | 2004-02-10 | Formfactor, Inc. | Large contactor with multiple, aligned contactor units |
US5850320A (en) * | 1997-05-13 | 1998-12-15 | Seagate Technology, Inc. | Head-gimbal assembly with reduced vertical spacing envelope and alignment structures |
US7215131B1 (en) | 1999-06-07 | 2007-05-08 | Formfactor, Inc. | Segmented contactor |
US7008426B2 (en) * | 2001-12-14 | 2006-03-07 | Paul Kamaljit S | Bone treatment plate assembly |
JP4572911B2 (ja) * | 2007-06-11 | 2010-11-04 | 三菱電機株式会社 | 熱交換器 |
EP2497428B1 (de) | 2011-03-11 | 2015-02-11 | EMPA Eidgenössische Materialprüfungs- und Forschungsanstalt | Nachgiebige Werkzeuge |
US8902010B2 (en) | 2013-01-02 | 2014-12-02 | Motorola Mobility Llc | Microelectronic machine-based ariable |
GB201417705D0 (en) * | 2014-10-07 | 2014-11-19 | Rolls Royce Plc | Locking member |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US31459A (en) * | 1861-02-19 | Stave-machine | ||
FR689387A (fr) * | 1930-02-04 | 1930-09-05 | Asea Ab | Transformateur pour la prise de courants biphasés d'un réseau triphasé |
NO120906B (es) * | 1965-02-24 | 1970-12-21 | Ivan Alfred Duck | |
BE689387A (es) * | 1966-03-21 | 1967-04-14 | ||
US3920482A (en) * | 1974-03-13 | 1975-11-18 | Signetics Corp | Method for forming a semiconductor structure having islands isolated by adjacent moats |
CH642461A5 (fr) * | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | Accelerometre. |
DE3176140D1 (en) * | 1981-10-30 | 1987-05-27 | Ibm Deutschland | Contact device for the detachable connection of electrical components |
US4699006A (en) * | 1984-03-19 | 1987-10-13 | The Charles Stark Draper Laboratory, Inc. | Vibratory digital integrating accelerometer |
US4542397A (en) * | 1984-04-12 | 1985-09-17 | Xerox Corporation | Self aligning small scale integrated circuit semiconductor chips to form large area arrays |
DE3428820C2 (de) * | 1984-08-04 | 1986-11-06 | Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn | Schwingungsisolator |
JPS6197572A (ja) * | 1984-10-19 | 1986-05-16 | Nissan Motor Co Ltd | 半導体加速度センサの製造方法 |
US4626244A (en) * | 1985-02-01 | 1986-12-02 | Consolidated Controls Corporation | Implantable medication infusion device |
US4700817A (en) * | 1985-06-27 | 1987-10-20 | Nippon Kokan Kabushiki Kaisha | Dynamic vibration absorber with spring-supported pendulum |
US4670092A (en) * | 1986-04-18 | 1987-06-02 | Rockwell International Corporation | Method of fabricating a cantilever beam for a monolithic accelerometer |
US4685996A (en) * | 1986-10-14 | 1987-08-11 | Busta Heinz H | Method of making micromachined refractory metal field emitters |
-
1987
- 1987-01-20 AT AT87100744T patent/ATE55632T1/de not_active IP Right Cessation
- 1987-01-20 ES ES87100744T patent/ES2017941B3/es not_active Expired - Lifetime
- 1987-01-20 EP EP87100744A patent/EP0275338B1/de not_active Expired - Lifetime
- 1987-01-20 DE DE8787100744T patent/DE3764354D1/de not_active Expired - Fee Related
- 1987-12-28 JP JP62336787A patent/JPH01177212A/ja active Granted
-
1988
- 1988-01-20 CA CA000556935A patent/CA1323639C/en not_active Expired - Fee Related
- 1988-01-20 US US07/146,295 patent/US4953834A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0275338B1 (de) | 1990-08-16 |
ATE55632T1 (de) | 1990-09-15 |
JPH01177212A (ja) | 1989-07-13 |
EP0275338A1 (de) | 1988-07-27 |
JPH0413883B2 (es) | 1992-03-11 |
DE3764354D1 (de) | 1990-09-20 |
CA1323639C (en) | 1993-10-26 |
US4953834A (en) | 1990-09-04 |
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