ES2010857A6 - Procedimiento para limpiar una pieza de trabajo metalica con partes superficiales de material diferente mediante bombardeo de iones de una descarga gaseosa. - Google Patents

Procedimiento para limpiar una pieza de trabajo metalica con partes superficiales de material diferente mediante bombardeo de iones de una descarga gaseosa.

Info

Publication number
ES2010857A6
ES2010857A6 ES8900399A ES8900399A ES2010857A6 ES 2010857 A6 ES2010857 A6 ES 2010857A6 ES 8900399 A ES8900399 A ES 8900399A ES 8900399 A ES8900399 A ES 8900399A ES 2010857 A6 ES2010857 A6 ES 2010857A6
Authority
ES
Spain
Prior art keywords
ion bombardment
gas discharge
surface parts
cleaning
different material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES8900399A
Other languages
English (en)
Spanish (es)
Inventor
Herbert Kirsch
Walter Gartner
Franz Koroschetz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miba Gleitlager Austria GmbH
Original Assignee
Miba Gleitlager Austria GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miba Gleitlager Austria GmbH filed Critical Miba Gleitlager Austria GmbH
Publication of ES2010857A6 publication Critical patent/ES2010857A6/es
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
ES8900399A 1988-02-05 1989-02-03 Procedimiento para limpiar una pieza de trabajo metalica con partes superficiales de material diferente mediante bombardeo de iones de una descarga gaseosa. Expired ES2010857A6 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT23088A AT388884B (de) 1988-02-05 1988-02-05 Verfahren zum reinigen eines metallischen werkstueckes mit oberflaechenteilen aus verschiedenem werkstoff durch ionenbeschuss aus einer gasentladung

Publications (1)

Publication Number Publication Date
ES2010857A6 true ES2010857A6 (es) 1989-12-01

Family

ID=3485008

Family Applications (1)

Application Number Title Priority Date Filing Date
ES8900399A Expired ES2010857A6 (es) 1988-02-05 1989-02-03 Procedimiento para limpiar una pieza de trabajo metalica con partes superficiales de material diferente mediante bombardeo de iones de una descarga gaseosa.

Country Status (4)

Country Link
AT (1) AT388884B (enrdf_load_stackoverflow)
BR (1) BR8900523A (enrdf_load_stackoverflow)
DE (1) DE3902418A1 (enrdf_load_stackoverflow)
ES (1) ES2010857A6 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2141005C1 (ru) * 1997-03-28 1999-11-10 Баранов Александр Михайлович Способ уменьшения шероховатости поверхности и устройство для его осуществления

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0058214B1 (en) * 1981-02-16 1985-06-19 International Business Machines Corporation Method for increasing the resistance of a solid material surface against etching
US4534921A (en) * 1984-03-06 1985-08-13 Asm Fico Tooling, B.V. Method and apparatus for mold cleaning by reverse sputtering
US4668366A (en) * 1984-08-02 1987-05-26 The Perkin-Elmer Corporation Optical figuring by plasma assisted chemical transport and etching apparatus therefor
JPS62240776A (ja) * 1986-04-11 1987-10-21 Canon Inc エツチングマスクパタ−ンの作製方法

Also Published As

Publication number Publication date
AT388884B (de) 1989-09-11
ATA23088A (de) 1989-02-15
DE3902418C2 (enrdf_load_stackoverflow) 1990-11-22
DE3902418A1 (de) 1989-08-17
BR8900523A (pt) 1989-10-03

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Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 19991102