EP4557352A1 - Beschichtungsvorrichtung und beschichtungsverfahren - Google Patents

Beschichtungsvorrichtung und beschichtungsverfahren Download PDF

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Publication number
EP4557352A1
EP4557352A1 EP23926302.3A EP23926302A EP4557352A1 EP 4557352 A1 EP4557352 A1 EP 4557352A1 EP 23926302 A EP23926302 A EP 23926302A EP 4557352 A1 EP4557352 A1 EP 4557352A1
Authority
EP
European Patent Office
Prior art keywords
coating
bar
base material
nozzle
leveling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP23926302.3A
Other languages
English (en)
French (fr)
Inventor
Naomi Shida
Katsuyuki Naito
Toshiro Hiraoka
Tomohiro Tobari
Tsuyoshi Asatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Energy Systems and Solutions Corp
Original Assignee
Toshiba Corp
Toshiba Energy Systems and Solutions Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Energy Systems and Solutions Corp filed Critical Toshiba Corp
Publication of EP4557352A1 publication Critical patent/EP4557352A1/de
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/023—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface
    • B05C11/025—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface with an essentially cylindrical body, e.g. roll or rod
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0804—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the material being applied without contact with the roller
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0826—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being a web or sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0873—Controlling means responsive to conditions of the liquid or other fluent material, of the ambient medium, of the roller or of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
    • B05D1/42—Distributing applied liquids or other fluent materials by members moving relatively to surface by non-rotary members
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/50—Photovoltaic [PV] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length

Definitions

  • Embodiments of the present invention relate to a coating device and a coating method that can be used for device formation.
  • Organic thin-film solar cells using an organic semiconductor and organic/inorganic hybrid solar cells are expected as low-cost solar cells because an inexpensive coating method can be applied to form an active layer.
  • it is required to uniformly apply a coating material for forming an organic active layer and other layers.
  • the thickness of each layer is about several nm to several 100 nm, and it is required to form such a very thin layer with a large area and high uniformity.
  • a meniscus coating method or a slit coating method is known as a roll-to-roll (R2R) coating method capable of forming an extremely thin layer over a large area at low cost.
  • R2R roll-to-roll
  • Patent Literature 1 JP 2003-251256 A
  • Embodiments of the present invention provide a coating device and a coating method capable of forming a uniform coating film.
  • Fig. 1 is a schematic side view illustrating a coating device according to a first embodiment.
  • Fig. 2 is a schematic top view illustrating the coating device according to the first embodiment.
  • a coating device 100 includes a coating bar 101, a base material conveyance member 102 that conveys a base material, a coating liquid supply member 104 that supplies a coating liquid 103 stored in a liquid reservoir 112 to the coating bar, and a leveling bar 105.
  • the leveling bar 105 is arranged at a position where the coating liquid forms a meniscus between the leveling bar and the base material. Then, in this example, a primary coating film is formed by a so-called meniscus method using the coating bar.
  • Each member is arranged such that the coating liquid 103 is supplied from a nozzle 106 to a surface of the coating bar 101, the coating liquid flows from the surface of the coating bar to between the coating bar 101 and a base material 107 to form a meniscus 103Ma, and the base material is conveyed in an arrow direction to form a primary coating film 108a.
  • a cross-sectional shape of the coating bar 101 is arbitrary.
  • the cross-sectional shape is, for example, a circular shape, a flat circular shape, or a polygonal shape.
  • a portion of the cross-sectional shape that corresponds to a meniscus forming portion may be curved, and the other portion may be linear.
  • a cross-sectional shape of a surface of the coating bar 101 that faces the base material 107 may be curved.
  • the coating bar can be arranged so as not to rotate. As the coating bar does not rotate like a roller, stability of the meniscus is improved.
  • the coating bar 101 contains, for example, at least one selected from the group consisting of stainless steel, aluminum, titanium, and glass. Therefore, processing is facilitated when preparing the coating bar 101.
  • the surface of the coating bar 101 is a mirror surface. In another example, the surface of the coating bar 101 may have an uneven structure.
  • the leveling bar 105 is installed at a position downstream of the coating bar 101 in a coating direction.
  • the coating bar 101 applies the coating liquid 103 to almost the entire surface of the base material 107 to form the coating film 108a, but uniformity of the coating film 108a may be insufficient.
  • the coating film 108a formed in the present embodiment comes into contact with the leveling bar 105 arranged at a position downstream of the coating bar as the base material is conveyed.
  • the meniscus 103Mb of the coating liquid 103 can be formed between the base material 107 and the leveling bar 105.
  • the uniform meniscus 103Mb is formed by a surface tension of the coating liquid.
  • a secondary coating film 108b having high uniformity and formed by the coating 103 is formed on the base material 107.
  • An intended film is obtained by solidifying the coating film 108b by, for example, drying.
  • a drying member 109 can be arranged at a position downstream of the leveling bar.
  • the coating film 108b having a large area can be formed on the base material 107, for example, by moving the base material 107 in a movement direction (an arrow direction in the drawing).
  • the coating device illustrated in Figs. 1 and 2 forms the primary coating film by the meniscus method, and the coating device may further include a nozzle position adjustment member 110 that adjusts a position of the nozzle 106, a nozzle position detection member 111 that detects a distance between the coating bar 101 and the nozzle 106, and the like in order to improve the uniformity of the primary coating film.
  • a plurality of nozzles 106 or a plurality of pumps 104 can be used as illustrated in Fig. 2 .
  • the plurality of nozzles 106 can face the coating bar 101.
  • the plurality of nozzles 106 can supply the coating liquid 103 toward the coating bar 101.
  • an additional nozzle for supplying the coating liquid to the leveling bar 105 may be further provided. It is possible to form a meniscus between the base material and the leveling bar before forming the primary coating film before the coating is started by arranging such an additional nozzle.
  • the plurality of nozzles 106 are arranged in a first direction.
  • the first direction is, for example, a Y-axis direction.
  • One direction perpendicular to the Y-axis direction is defined as an X-axis direction.
  • the movement direction of the base material can coincide with an X axis.
  • a direction perpendicular to the Y-axis direction and the X-axis direction is defined as a Z-axis direction.
  • the coating bar 101 extends, for example, in the Y-axis direction.
  • the number of plurality of nozzles 106 may be three or more. As a result, the primary coating film 108a having a large area can be stably formed. In the example of Fig. 2 , the number of plurality of nozzles 106 is four. In the embodiment, the number may be an arbitrary integer of 3 or more.
  • the nozzle can be a slot die or can have a needle shape.
  • a discharge amount of the coating liquid 103 can be controlled with high accuracy by using the plurality of needle-shaped nozzles 106.
  • the needle-shaped nozzle has high flexibility. Due to the high flexibility, for example, damage to the nozzle due to vibration of the coating bar 101 or the like can be suppressed.
  • a length of the nozzle is, for example, 10 mm or more and 100 mm or less, and an inner diameter of the nozzle is, for example, 0.5 mm or more and 2 mm or less.
  • An angle between an end surface of the tip of the nozzle and an extending direction of the nozzle is, for example, about 90 degrees (for example, 75 degrees or more and 105 degrees or less). With such a shape, for example, occurrence of scratches on the coating bar 101 can be suppressed.
  • a distance between the coating bar 101 and the tip of each nozzle tends to vary.
  • the meniscus 103Ma formed from each nozzle is likely to be disturbed, and as a result, the coating film 108a is likely to be non-uniform.
  • nozzle position adjustment member 110 that adjusts the position of each nozzle and the nozzle position detection member 111 that detects a distance between the coating bar 101 and each nozzle 106 are provided as illustrated in Figs. 1 and 2 , it is possible to reduce variation in the position and the distance between the tip of each nozzle and the coating bar, and to achieve uniform coating.
  • a member that detects contact between the coating bar and each nozzle can be further provided.
  • the contact is easily detected by, for example, a method of measuring an electric resistance between the nozzle and the coating bar, and thus, the variation can be reduced by adjusting a coating condition based on the contact.
  • the coating liquid can be directly applied to the coating bar, and repelling of the coating liquid hardly occurs.
  • a member that measures the electric resistance between each nozzle and the coating bar can be provided as the member that detects the contact between the coating bar and each nozzle. If each nozzle and the coating bar are made of conductive stainless steel or the like, and the nozzles are insulated from each other, when the electric resistance between the coating bar and each nozzle is measured, the electric resistance is drastically reduced at a moment of contact. In addition, since the electric resistance changes as a contact state changes, the contact state can be monitored. For example, in a state in which the nozzle is pressed against the coating bar so strongly as to be greatly curved, the coating bar comes into contact with not only the tip of the nozzle but also a side surface of the nozzle, and the electric resistance becomes very low.
  • the coating liquid is easily ejected from the tip of the nozzle to a portion other than the coating bar, and uneven coating is likely to occur. Since an optimum electric resistance varies depending on a shape and material of the nozzle and the coating bar, it is desirable to measure the optimum electric resistance in advance.
  • each nozzle can be moved to confirm the contact with the coating bar before coating. If the electric resistance is also measured during the coating, it is possible to detect a case where there is an abnormality in the contact between the nozzle and the coating bar.
  • the electric resistance measuring instrument can also be an external device separate from the coating device.
  • the nozzle is preferably detachable.
  • the nozzle is likely to be clogged due to a small opening.
  • an ejection amount from each nozzle can be adjusted by the coating liquid supply member and a coating liquid supply amount adjustment member, but when clogging becomes severe or the ejection becomes completely impossible, it is necessary to perform cleaning or replacement. In such a case, it is preferable that the nozzle is detachable to facilitate maintenance.
  • the primary coating film 108a is formed by the meniscus method by supplying the coating liquid from the plurality of nozzles illustrated in Figs. 1 and 2
  • the primary coating film may be formed by another method.
  • a slit die head that uses the coating bar for slit coating, includes a manifold therein, and supplies the coating liquid from the manifold to the surface of the base material via a slit can be used instead of the plurality of nozzles.
  • the coating liquid can be supplied to the coating bar by using the slit die head instead of the nozzle in Figs. 1 and 2 .
  • the coating device 100 may further include the drying member 109.
  • the drying member 109 can dry the coating film 108b applied to the base material 107.
  • the drying member 109 may include, for example, an air nozzle or a far-infrared lamp.
  • a distance between the coating bar 101 and the leveling bar 105 can be freely changed.
  • a member that controls an interval between the leveling bar 105 and the base material 107 it is preferable to provide a member that controls an interval between the leveling bar 105 and the base material 107.
  • a gap ring, a micrometer, or the like can be used.
  • the leveling bar may be linear or curved.
  • the leveling bar is linear, uniformity of a thickness of the coating film is easily achieved.
  • the leveling bar is curved, for example, the thickness is easily changed such that the center is thicker, but the uniformity in the coating direction is easily achieved.
  • a cross-sectional shape of the leveling bar 105 is arbitrary.
  • the cross-sectional shape is, for example, a circular shape, a flat circular shape, or a polygonal shape.
  • a portion of the cross-sectional shape may be curved, and the other portion may be linear.
  • a cross-sectional shape of a surface of the leveling bar 105 that faces the base material 107 may be curved.
  • the leveling bar can be arranged so as not to rotate. As the leveling bar does not rotate like a roller, stability of the meniscus is improved.
  • the leveling bar 105 contains, for example, at least one selected from the group consisting of stainless steel, aluminum, titanium, and glass. Therefore, processing is facilitated when preparing the leveling bar 105.
  • the surface of the leveling bar 105 is a mirror surface. In another example, the surface of the leveling bar 26 may have an uneven structure.
  • a second embodiment relates to a coating method.
  • coating is performed using the coating device 10 (and a modification thereof) described in the first embodiment.
  • Fig. 3 is a flowchart illustrating the coating method (S30) according to the second embodiment.
  • the coating method for forming and applying a meniscus of a coating liquid includes: a step (S31) of detecting and adjusting a distance between a coating bar and a meniscus leveling bar, and a base material; a step (S32) of detecting and adjusting a distance between the coating bar and each nozzle; a step (S33) of forming a meniscus between the base material and the leveling bar; and a step (S34) of supplying the coating liquid to perform coating on the base material.
  • a meniscus M22 is stably formed in a coating process by performing the step of S33 before the step of S34. It is preferable to arrange an additional nozzle that supplies the coating liquid to the leveling bar in order to form a meniscus between the base material and the leveling bar before the start of coating as described above.
  • each nozzle can be installed on one cantilever fixing plate capable of rotation, horizontal movement, or vertical movement. With such an arrangement, it is possible to simultaneously adjust positions of all the nozzles.
  • a solar cell can be formed by coating with the coating device 100.
  • the number of pumps is four.
  • a pipe connected to one pump is connected to four nozzles.
  • the total number of nozzles is 16.
  • the nozzle is installed on one cantilever bar.
  • An actuator for movement and a wiring for measuring the electric resistance are installed in each nozzle.
  • the wiring is connected to the electric resistance measuring instrument.
  • the nozzle position detection member such as a camera for observing a positional relationship between the nozzle and the coating bar is installed.
  • the base material 107 is a roll-shaped PET film.
  • a width of the PET film is, for example, 330 mm.
  • a light-transmissive electrode having a width of 300 mm is formed on the PET film by a roll-to-roll sputtering device.
  • a sheet resistance of the electrode is, for example, 10 ⁇ / ⁇ .
  • the electrode has, for example, a laminated structure of ITO film/Ag alloy/ITO film.
  • a plurality of electrodes are provided. A length of one of the plurality of electrodes is, for example, about 10 mm. An interval between the plurality of electrodes is, for example, 50 ⁇ m.
  • Cross sections of the coating bar 101 and the leveling bar 105 are circular.
  • a radius of the circle is 10 mm.
  • a length of the coating bar 101 and the leveling bar 105 is 300 mm.
  • the coating bar 101 and the leveling bar 105 contain, for example, stainless steel (for example, SUS303).
  • the nozzle includes a stainless steel locking base.
  • the length of the nozzle is 50 mm.
  • a pipe for the coating liquid is a polytetrafluoroethylene tube.
  • the nozzle and the pipe are connected by a detachable joint.
  • the pipe is connected to the pump.
  • a hole transport layer is formed by the coating liquid 103.
  • the coating liquid 103 is an aqueous solution containing PEDOT and PSS.
  • the gap ring or the actuator controls a relative positional relationship between the coating bar 101 and the leveling bar 105, and the base material 107.
  • the nozzle is brought into a horizontal state. In such a state, the coating liquid 103 is supplied, and air in the nozzle is discharged.
  • the tip of the needle nozzle is lowered and inclined by 20° from the horizontal state.
  • the cantilever is brought close to the coating bar.
  • each nozzle is brought close to and into contact with the coating bar one by one such that the electric resistance becomes 10 to 50 ⁇ .
  • the coating liquid is supplied to the leveling bar 105 with a syringe to form the meniscus 103Mb between the leveling bar 105 and the base material 107.
  • the coating liquid 103 is continuously supplied by the pump while the base material 107 is conveyed.
  • a movement speed of the base material 107 is, for example, 5 m/min.
  • the drying member 109 blows heated dry air to the applied coating liquid 103.
  • a solidified coating film is obtained from the coating liquid 103.
  • another coating liquid may be further applied after the above coating.
  • the another coating liquid contains, for example, a semiconductor material.
  • the another coating liquid contains, for example, PTB7 ([poly ⁇ 4,8-bis[(2-ethylhexyl)oxy]benzo[1,2-b:4,5-b']dithiophene-2,6-diyl-1t-alt-3-fluoro-2-[(2-ethylhexyl)carbonyl]thieno[3,4-b]thiophene-4,6-diyl ⁇ ]) and PC70BM ([6,6]-phenyl-C71-butyric acid methylester).
  • PTB7 is, for example, a p-type semiconductor.
  • PC70BM is, for example, an n-type semiconductor.
  • the another coating liquid further contains, for example, monochlorobenzene.
  • An amount of PTB7 is 8 mg for 1 mL of monochlorobenzene.
  • An amount of PC70BM is 12 mg for 1 mL of monochlorobenzene.
  • the another coating liquid is a dispersion liquid containing an organic semiconductor.
  • the another coating liquid is, for example, a semiconductor film of a solar cell.
  • a minimum distance between the coating bar 101 and the base material 107 is 300 ⁇ m.
  • the movement speed of the base material 107 is, for example, 5 m/min. After the coating, drying is performed by the drying member 109.
  • an organic thin-film solar cell using an organic semiconductor and an organic/inorganic hybrid solar cell By preparing such solar cells by the coating method, a high-performance solar cell can be prepared.
  • the coating liquid 103 may be applied to the base material 107 at a position where the base material 107 is conveyed in a vertical direction.
  • an effect of gravity is applied to the meniscus, and a uniform film is easily obtained even at high speed.
  • the coating device and the coating method capable of forming a uniform coating film are provided.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Coating Apparatus (AREA)
EP23926302.3A 2023-03-08 2023-03-08 Beschichtungsvorrichtung und beschichtungsverfahren Pending EP4557352A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/008884 WO2024185092A1 (ja) 2023-03-08 2023-03-08 塗布装置および塗布方法

Publications (1)

Publication Number Publication Date
EP4557352A1 true EP4557352A1 (de) 2025-05-21

Family

ID=92674515

Family Applications (1)

Application Number Title Priority Date Filing Date
EP23926302.3A Pending EP4557352A1 (de) 2023-03-08 2023-03-08 Beschichtungsvorrichtung und beschichtungsverfahren

Country Status (5)

Country Link
US (1) US20250178021A1 (de)
EP (1) EP4557352A1 (de)
JP (1) JP7714830B2 (de)
CN (1) CN119731773A (de)
WO (1) WO2024185092A1 (de)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003251256A (ja) 2002-03-06 2003-09-09 Fuji Photo Film Co Ltd 塗布装置および塗布方法
JP4696814B2 (ja) * 2005-09-26 2011-06-08 東レ株式会社 コーティングロッドならびにそれを用いた塗布装置・方法およびフィルムの製造装置・方法
JP6256265B2 (ja) * 2014-09-05 2018-01-10 Ｊｆｅスチール株式会社 スラリー塗布装置およびスラリー塗布方法
CN113613798A (zh) * 2020-03-04 2021-11-05 株式会社东芝 能用于形成器件的涂敷方法以及涂敷装置
EP4119237B1 (de) * 2020-03-09 2025-12-24 Kabushiki Kaisha Toshiba Beschichtungskopf, beschichtungsvorrichtung und beschichtungsverfahren

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CN119731773A (zh) 2025-03-28
JPWO2024185092A1 (de) 2024-09-12
US20250178021A1 (en) 2025-06-05
JP7714830B2 (ja) 2025-07-29
WO2024185092A1 (ja) 2024-09-12

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