EP4407183C0 - Pompe à vide à spirales et son procédé de mise en oeuvre - Google Patents

Pompe à vide à spirales et son procédé de mise en oeuvre

Info

Publication number
EP4407183C0
EP4407183C0 EP24179224.1A EP24179224A EP4407183C0 EP 4407183 C0 EP4407183 C0 EP 4407183C0 EP 24179224 A EP24179224 A EP 24179224A EP 4407183 C0 EP4407183 C0 EP 4407183C0
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
operating procedure
scroll vacuum
scroll
procedure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP24179224.1A
Other languages
German (de)
English (en)
Other versions
EP4407183A1 (fr
EP4407183B1 (fr
Inventor
Maik Schäfer
Jonas Becker
Tobias Stoll
Sebastian Latta
Andre Hannweg
Adrian Wirth
Heiko Schäfer
Jan Hofmann
Wolfgang Söhngen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP26167274.5A priority Critical patent/EP4741661A3/fr
Priority to EP24179224.1A priority patent/EP4407183B1/fr
Publication of EP4407183A1 publication Critical patent/EP4407183A1/fr
Priority to JP2025087723A priority patent/JP2025181740A/ja
Priority to CN202510720686.XA priority patent/CN121047798A/zh
Application granted granted Critical
Publication of EP4407183C0 publication Critical patent/EP4407183C0/fr
Publication of EP4407183B1 publication Critical patent/EP4407183B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/811—Actuator for control, e.g. pneumatic, hydraulic, electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/17—Tolerance; Play; Gap
    • F04C2270/175—Controlled or regulated

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
EP24179224.1A 2024-05-31 2024-05-31 Pompe à vide à spirales et son procédé de mise en oeuvre Active EP4407183B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP26167274.5A EP4741661A3 (fr) 2024-05-31 2024-05-31 Pompe à vide à spirales et procédé de fonctionnement d'une pompe à vide à spirales
EP24179224.1A EP4407183B1 (fr) 2024-05-31 2024-05-31 Pompe à vide à spirales et son procédé de mise en oeuvre
JP2025087723A JP2025181740A (ja) 2024-05-31 2025-05-27 スクロール真空ポンプ及びスクロール真空ポンプを運転する方法
CN202510720686.XA CN121047798A (zh) 2024-05-31 2025-05-30 涡旋真空泵和用于操作涡旋真空泵的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP24179224.1A EP4407183B1 (fr) 2024-05-31 2024-05-31 Pompe à vide à spirales et son procédé de mise en oeuvre

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP26167274.5A Division EP4741661A3 (fr) 2024-05-31 2024-05-31 Pompe à vide à spirales et procédé de fonctionnement d'une pompe à vide à spirales
EP26167274.5A Division-Into EP4741661A3 (fr) 2024-05-31 2024-05-31 Pompe à vide à spirales et procédé de fonctionnement d'une pompe à vide à spirales

Publications (3)

Publication Number Publication Date
EP4407183A1 EP4407183A1 (fr) 2024-07-31
EP4407183C0 true EP4407183C0 (fr) 2026-05-13
EP4407183B1 EP4407183B1 (fr) 2026-05-13

Family

ID=91374938

Family Applications (2)

Application Number Title Priority Date Filing Date
EP26167274.5A Pending EP4741661A3 (fr) 2024-05-31 2024-05-31 Pompe à vide à spirales et procédé de fonctionnement d'une pompe à vide à spirales
EP24179224.1A Active EP4407183B1 (fr) 2024-05-31 2024-05-31 Pompe à vide à spirales et son procédé de mise en oeuvre

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP26167274.5A Pending EP4741661A3 (fr) 2024-05-31 2024-05-31 Pompe à vide à spirales et procédé de fonctionnement d'une pompe à vide à spirales

Country Status (3)

Country Link
EP (2) EP4741661A3 (fr)
JP (1) JP2025181740A (fr)
CN (1) CN121047798A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102025101743A1 (de) * 2025-01-20 2026-07-23 Schaeffler Technologies AG & Co. KG Federangestellte Scroll-Kompressor-Lagerung
EP4636251A3 (fr) 2025-09-09 2026-04-29 Pfeiffer Vacuum Technology AG Pompe à vide à spirales

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06207589A (ja) * 1993-01-11 1994-07-26 Hitachi Ltd スクロール形圧縮機
JPH07139480A (ja) * 1993-11-15 1995-05-30 Mitsubishi Heavy Ind Ltd スクロール圧縮機
JP4622242B2 (ja) * 2003-12-19 2011-02-02 ダイキン工業株式会社 スクロール圧縮機
US7244113B2 (en) * 2004-10-07 2007-07-17 Varian, Inc. Scroll pump with controlled axial thermal expansion
US9366255B2 (en) * 2013-12-02 2016-06-14 Agilent Technologies, Inc. Scroll vacuum pump having external axial adjustment mechanism
US9605674B2 (en) * 2013-12-26 2017-03-28 Agilent Technologies, Inc. Vacuum scroll pump having pressure-balanced orbiting plate scroll
EP3153708B1 (fr) 2015-10-06 2019-07-17 Pfeiffer Vacuum Gmbh Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales
DE102015120151A1 (de) * 2015-11-20 2017-05-24 OET GmbH Verdrängermaschine nach dem Spiralprinzip, Verfahren zum Betreiben einer Verdrängermaschine, Fahrzeugklimaanlage und Fahrzeug
GB201610896D0 (en) * 2016-06-22 2016-08-03 Edwards Ltd Vacuum scroll pump
FR3057035B1 (fr) * 2016-10-03 2019-11-22 Peugeot Citroen Automobiles Sa Turbine a volume variable et systeme de conversion d’energie thermomecanique l’incorporant
US10995754B2 (en) * 2017-02-06 2021-05-04 Emerson Climate Technologies, Inc. Co-rotating compressor
EP3617511B1 (fr) 2019-10-07 2021-12-08 Pfeiffer Vacuum Gmbh Pompes à spirales et procédé de fabrication pour des telles pompes
EP3754200B1 (fr) 2019-10-07 2021-12-08 Pfeiffer Vacuum Gmbh Pompe à vide à spirales et procédé de montage
GB2592657A (en) * 2020-03-05 2021-09-08 Edwards Ltd Scroll pump apparatus and method
GB2595283B (en) * 2020-05-21 2022-11-02 Edwards Ltd Scroll pump
CN114856999B (zh) * 2022-04-27 2025-05-09 浙江亚微精密机床有限公司 具有轴向补偿的涡旋压缩机
EP4174285B1 (fr) 2022-12-22 2024-10-23 Pfeiffer Vacuum Technology AG Pompe à vide à spirales
EP4253720B1 (fr) 2023-08-08 2025-10-01 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales

Also Published As

Publication number Publication date
EP4407183A1 (fr) 2024-07-31
EP4741661A3 (fr) 2026-07-15
EP4741661A2 (fr) 2026-05-13
JP2025181740A (ja) 2025-12-11
CN121047798A (zh) 2025-12-02
EP4407183B1 (fr) 2026-05-13

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Inventor name: HOFMANN, JAN

Inventor name: SCHAEFER, HEIKO

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