Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
  • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
  • G01M11/02—Testing optical properties
  • G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
  • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
  • G01M11/02—Testing optical properties
  • G01M11/0207—Details of measuring devices

Definitions

• the camera is designed to observe the afocal optical system in the recording device from a second side opposite the first side and to create a camera image, with the light providing device, the afocal optical system and the camera being arranged coaxially on or with measuring axes when the measuring device is in an operational state are arranged parallel to a measurement axis, which is aligned perpendicular to the recording plane.
• the additional light providing device is designed to provide additional light for illuminating the afocal optical system in the recording device from the first side.
• the additional camera is designed to observe the afocal optical system in the recording device from the second side and to create an additional camera image; wherein in the operational state the further light providing device, the afocal optical system and the further camera are arranged coaxially on or with measurement axes parallel to an inclined measurement axis which is aligned at an angle to the measurement axis and/or recording plane.
• the transmission interface is designed to transmit the camera image and another camera image to an evaluation unit, which is designed to recognize the modulation transfer function of the a-focal optical system using at least the camera image and/or another camera image.
• An afocal optical system is characterized in that, as a whole, it has no converging or diverging effect for the light emitted from the optical system.
• the afocal optical system can either be a single element, e.g. B. an exit window for a laser, a haptically sensitive, transparent viewing window for a smartphone display or an optical filter, or an optical system composed of several elements, such as. B. a double-telecentric camera lens or binoculars act.
• MTF modulation transfer function
• the measuring device presented here uses the approach of simultaneously measuring the imaging quality of an optical system at a plurality of field positions, an afocal optical system in particular being advantageously measurable as the optical system using the measuring device.
• the recording device of the measuring device can be designed to record the optical system within the recording plane at a permanently defined position or to move the optical system to the permanently defined position within the recording plane.
• the light providing device can be designed to provide the light as broadband light and/or the further light providing device can be designed to provide the further light as broadband further light.
• the light supply device and/or further light providing device can comprise at least one LED, for example at least one white light LED.
• the measurement axis can be understood as the optical path of the light providing device through the optical system to the camera.
• the oblique measurement axis can be understood as the optical path of the further light supply device through the optical system to the further camera.
• the evaluation unit can be part of the measuring device.
• the MTF of the afocal optical system can thus advantageously be measured at a plurality of field angles in order to be able to achieve a more detailed result for the MTF.
• the measuring device can also have any number of additional cameras and associated light supply devices, which can each be arranged with the optical system on different additional oblique measurement axes.
• the measuring device can have a total of nine cameras and nine light supply devices associated with the cameras.
• the survey axis and eight oblique survey axes can be used to measure the MTF of the optical system. All oblique measurement axes can intersect the measurement axis at a common point of intersection, which can be arranged, for example, on or in the afocal optical system.
• the measuring device has at least one optical filter which is designed to change light with a first wavelength range impinging on the optical filter in order to change the light exiting the optical filter with a changed second wavelength range and/or which is designed to change light having a first polarization which is incident on the optical filter in order to provide the light exiting the optical filter with a changed second polarization.
• an optical filter makes it possible to adapt the wavelength range or the polarization of the light to a field of application.
• a so-called V-Lambda filter can be used as an optical filter if the optical system is a window for a mobile phone display or a waveguide of an "augmented reality” system or “virtual reality” system, or “AR system” for short. tem” or “VR system”.
• the light can be adapted to a sensitivity distribution in daylight for the human eye.
• a corresponding or other optical filter can also be arranged on the oblique measurement axis.
• the optical filter can be pivoted and/or rotatable or else fixed.
• the optical filter can be arranged parallel to the recording plane, for example between the camera and the recording device or else between the light supply device and the recording device.
• the measuring device can have a pivotable and/or rotatable or fixed optical filter arranged in the beam path of the collimator for changing or limiting a wavelength range of the light or changing or limiting a polarization of the light.
• the measuring device can have a camera holding device, which has recording units for holding the cameras.
• a camera holding device makes it possible, for example, for all cameras to be recorded together in fixed positions in relation to one another.
• the camera holding device can be designed in the form of a spherical shell as a camera spherical shell.
• the camera ball shell can be on a perpendicular to the measurement axis X-axis and / or perpendicular to the Measurement axis and perpendicular to the X-axis Y-axis linearly movable and / or tiltable about the X-axis and / or Y-axis.
• an eye box can be measured in an optical system designed as a waveguide, for example.
• Such a mobility of the spherical shell that provides the light can be used to measure an eyebox in an optical system that is designed, for example, as a waveguide.
• the camera spherical shell and the recording device are fixed and the spherical shell providing the light can be moved linearly and/or tilted.
• the spherical shell providing the light and the recording device are fixed and the spherical shell of the camera can be moved linearly and/or tilted.
• the camera holding device can be arranged such that it can be tilted or tilted relative to the light supply holding device, or the light supply holding device can be arranged such that it can be tilted or tilted relative to the camera holding device.
• an offset between the light supply spherical shell and the camera spherical shell can be implemented or implemented.
• the camera holding device and additionally or alternatively the light supply holding device can be arranged such that they can be moved laterally.
• a lateral offset along the X-axis and/or the Y-axis can thereby be achieved.
• specimens in which, for example, the entrance pupil is much smaller than the exit pupil. are, for example, waveguides for AR/VR systems. The examinee must therefore be in a fixed position so that the entrance pupil can be hit.
• the collimators can be offset laterally.
• the measuring device can also have a movement device that is designed to move the recording device transversely to the measurement axis.
• the recording device can be movable using the movement device along an X axis running perpendicular to the measurement axis and/or a Y axis running perpendicular to the measurement axis and perpendicular to the X axis and/or about the X axis and/or Y axis can be tilted.
• the afocal optical system can be moved to the measurement axis between the camera and the light supply device and/or to the intersection point of the oblique measurement axis/s by the movement device.
• a tiltable recording device enables FOV measurement, i.e. field of view measurement, with optical systems designed as waveguides.
• the measuring device has at least one aperture for the light and/or additional light.
• the aperture can be used to create an effective pupil.
• the screen can be arranged on the recording device, camera or light supply device.
• the measuring device can also have the evaluation unit, which is designed to detect a deviation in the modulation transfer function using the camera image and/or another camera image and, using the deviation, a correction value or a correction matrix for correcting the modulation transfer function to increase the imaging quality of the optical system to determine.
• the evaluation unit which is designed to detect a deviation in the modulation transfer function using the camera image and/or another camera image and, using the deviation, a correction value or a correction matrix for correcting the modulation transfer function to increase the imaging quality of the optical system to determine.
• the evaluation unit can be designed to detect the deviation in the modulation transfer function from a predetermined desired modulation transfer function.
• a deviation in the modulation transfer function can be caused, for example, by internal structuring, such as capacitive sensors for creating a touch-sensitive mobile phone display, in the optical system formed as part of a mobile phone display.
• the structuring can therefore have negative effects on the image information transmitted through the mobile phone display, what results in a reduction in imaging quality.
• the deviating modulation transfer function can advantageously be corrected and thus the imaging quality can be increased.
• the camera and/or additional camera can have a fixed or adjustable focus position.
• the focus position can be adjusted in that the camera sensor can be displaced relative to the collecting optics of the camera in the axial direction along its optical axis.
• the collecting optics of the camera can have a changeable focal length.
• the measuring device can have a structure recognition camera which is arranged facing the second side and is designed to recognize a predefined structure on the recording plane or in a defined area around the recording plane, the evaluation device being designed to use the recognized predefined Structure to determine a lateral position of the optical system. This makes it possible to detect a position of the optical system within the recording plane, for example to bring about a movement of the optical system to the measurement axis and/or the point of intersection of the oblique measurement axis(s) using the movement device.
• the afocal optical system can be formed as a single element such as an exit window for a laser, for example, a display window for a mobile phone, for example, a waveguide for an AR system, for example, or an optical filter.
• the afocal optical system can also be in the form of an optical system composed of a plurality of optical elements, for example as a camera lens or binoculars.
• a method for measuring a modulation transfer function of an afocal optical system comprises a step of providing light, a step of providing further light, a step of generating a camera image, a step of generating a further camera image and a step of recognition.
• the step of providing light light for illuminating the optical system, which is accommodated in a recording plane of a recording device, is provided from a first side using a light providing device.
• further light becomes for illuminating the optical system, which is accommodated in the imaging plane of the imaging device, from the first side using a further light providing device.
• a further camera image of a further reticle is generated via the afocal optical system in the recording device from the second side using a further camera, with the further light supply device, the optical system and the further camera being coaxial on or with measuring axes are arranged parallel to an oblique measurement axis, which is oriented obliquely to the measurement axis and/or recording plane.
• the modulation transfer function of the optical system is detected using the camera image and/or additional camera images.
• the camera image can be generated by the reticle, which is imaged by means of the collimator, afocal system and camera optics of the camera.
• the further camera image can be generated from the further reticle, which is imaged by means of the collimator, afocal system and camera optics of the further camera.
• FIG. 1 shows a schematic representation of a measuring device for measuring a modulation transfer function of an afocal optical system according to an embodiment
• FIG. 3 shows a schematic representation of a measuring device according to an embodiment
• FIG. 4 shows a schematic representation of a camera image of a measuring device according to an embodiment
• FIG. 6 shows a perspective top view of a camera holding device of a measuring device according to an embodiment
• FIG. 7 shows a lateral cross-sectional illustration of a camera holding device of a measuring device according to an embodiment
• FIG. 8 shows a perspective top view of a light supply holding device of a measuring device according to an embodiment
• FIG. 9 shows a lateral cross-sectional view of a light supply holding device of a measuring device according to an embodiment
• FIG. 1 shows a schematic representation of a measuring device 100 for measuring a modulation transfer function MTF of an afocal optical system 105 according to an exemplary embodiment.
• the camera 120 is designed to observe the afocal optical system 105 in the recording device 110 from a second side 155 opposite the first side 150 and to create a camera image 160, with the light supply device 115, the afocal optical System 105 and the camera 120 are arranged coaxially on or with measurement axes parallel to a measurement axis 162 which is oriented perpendicularly to the recording plane 140 .
• the additional light providing device 125 is designed to provide additional light 165 for illuminating the afocal optical system 105 in the recording device 110 from the first side 150 .
• the additional camera 130 is designed to observe the afocal optical system 105 in the recording device 110 from the second side 155 and to create an additional camera image 170; in the operational state, the further light supply device 125, the a-focal optical system 105 and the further camera 130 are arranged coaxially on or with measurement axes parallel to an inclined measurement axis 175, which is aligned at an angle to the measurement axis 162 and/or at an angle to the recording plane 140 is.
• Transmission interface 135 is designed to transmit camera image 160 and another camera image 170 to an evaluation unit 180, which is designed to recognize the modulation transfer function MTF of afocal optical system 105 using at least camera image 160 and/or another camera image 170.
• the afocal optical system 105 according to this exemplary embodiment is received in the recording device 110 of the measuring device 100 purely by way of example and is therefore arranged in the recording plane 140 .
• the afocal optical system 105 is, for example, a single optical element, here in the form of a display window for a mobile phone, for example.
• the afocal optical system 105 is configured as another single optical element such as e.g. B. an exit window for a laser, a waveguide for example for an AR / VR system or an optical filter, or as an optical system composed of several optical elements, such as. B. formed a double-sided telecentric camera lens or binoculars.
• the measuring device 100 presented here is designed to simultaneously measure the modulation transfer function MTF/imaging quality of the afocal optical system 105 at a plurality of field positions.
• the measurement axis 162 can be understood as the optical path of the light providing device 115 through the optical system 105 to the camera 120 .
• the oblique measurement axis 175 can be understood as the optical path of the further light supply device 125 through the optical system 105 to the further camera 130 .
• evaluation unit 180 is part of measuring device 100.
• the reticle 185 is arranged between the light provision device 115 and the optical system 105 .
• a position of the structure/reticle 185 is fixed or variable along the measurement axis 162/oblique measurement axis 175.
• the additional light supply device 125 has its own additional reticle 185 .
• the measuring device 100 has at least one optical filter that is designed to change light 145 with a first wavelength range that is incident on the optical filter, in order to provide the light 145 with a changed second wavelength range that emerges from the optical filter, and /or which is designed to change light 145 with a first polarization incident on the optical filter in order to provide the light 145 with a changed second polarization exiting the optical filter.
• Such an optical filter makes it possible to adapt the wavelength range or the polarization of the light to a field of application.
• a corresponding or other optical filter is also arranged on the oblique measurement axis 175 .
• the optical filter can be pivoted and/or rotated or arranged in a fixed manner.
• the optical filter is arranged parallel to the recording plane 140 , for example between the camera 120 and the recording device 110 or, according to another exemplary embodiment, between the light supply device 115 and the recording device 110 .
• measuring device 100 has a pivotable and/or rotatable or fixed optical filter, arranged in the beam path of the collimator of light provision device 115, for changing or limiting a wavelength of light 145 or changing or limiting a polarization of light 145.
• measuring device 100 has a pivotable and/or rotatable or fixed optical filter arranged in the beam path of the collimator of additional light providing device 125 for changing or restricting a wavelength of additional light 165 or changing or restricting a polarization of additional light 165 .
• the optical system 105 is in accordance with an exemplary embodiment within the recording plane 140 on the measurement axis 162 between the camera 120 and the light supply device 115 and/or on an intersection of the measurement axis 162 with the oblique measurement axis 175.
• measuring device 100 also has evaluation unit 180, which is designed to use camera image 160 and/or another camera image 170 to detect a deviation in modulation transfer function MTF and to use the deviation to calculate a correction value or a correction matrix for correcting the To determine modulation transfer function MTF to increase the imaging quality of the optical system 105.
• a deviation in the modulation transfer function MTF is caused, for example, by internal structuring 195, such as capacitive sensors for generating a touch-sensitive mobile phone display, in the afocal optical system 105 designed as a mobile phone display window.
• the structuring 195 can have negative effects on the image information transmitted through the mobile phone display, which results in a reduction in the imaging quality.
• the deviating modulation transfer function can advantageously be corrected using the correction value or the correction matrix, and the imaging quality can thus be increased.
• the evaluation unit 180 is designed to detect the deviation in the modulation transfer function MTF from a predetermined desired modulation transfer function.
• the camera 120 and/or further camera 130 has either a fixed or an adjustable focus position.
• camera 120 and/or additional camera 130 has an adjustable focus position, in that the image sensor can be moved relative to the collecting optics of the camera along its optical axis, and/or is formed here, for example, in the form of a telescopic camera with an adjustable focal length.
• the measuring device 100 also has a structure recognition camera 197 which is arranged facing the second side 155 and is designed to recognize a predefined structure on the recording plane 140 or in a defined area around the recording plane 140, with the evaluation device 180 being designed to determine a lateral position of the optical system 105 using the detected predefined structure.
• the movement device 190 is designed to bring about a movement of the optical system 105 onto the measurement axis 162 and/or the intersection of the measurement axis 162 with the oblique measurement axis 175 using the lateral position of the optical system 105 .
• FIG. 2 shows a perspective representation of a measuring device 100 according to an exemplary embodiment. This can be the measuring device 100 described in FIG. 130, 200 and/or a light supply holding device 220 with receiving units 225 for receiving the light supply devices 115, 125, 205.
• the third camera 200 is designed to observe the optical system 105 in the recording device 110 from the second side and to create a third camera image.
• the third light providing device 205 is designed to provide third light for illuminating the optical system 105 in the recording device 110 from the first side, wherein in the operational state of the measuring device 100 shown here, the third light providing device 205, the optical system 105 and the third camera 200 are arranged coaxially on or with measurement axes parallel to a further oblique measurement axis, which is oriented obliquely to the measurement axis and/or recording plane and/or oblique measurement axis.
• the measuring device 100 has any number of additional cameras and associated light supply devices, which are each arranged with the optical system 105 on different, additional oblique measurement axes.
• the measuring device 100 has a total of nine cameras 120, 130, 200 and nine light supply devices 115, 125, 205 associated with the cameras 120, 130, 200.
• the measurement axis and eight oblique measurement axes are used to measure the MTF of the optical system 105.
• all oblique measurement axes intersect the measurement axis at a common intersection point which is arranged on or in the optical system 105, for example.
• the camera holding device 210 is in the form of a spherical shell as a camera spherical shell.
• the camera ball shell is linearly movable on an X axis running perpendicular to the measurement axis and/or a Y axis running perpendicular to the measurement axis and perpendicular to the X axis and/or about the X axis and/or Y axis.
• the light supply holder 220 is formed in the shape of a spherical shell as a light supply spherical shell.
• the light-providing spherical shell is linearly movable on an X-axis running perpendicular to the measurement axis and/or a Y-axis running perpendicular to the measurement axis and perpendicular to the X-axis and/or about the X-axis and/or Y-axis.
• the camera spherical shell and the recording device 110 are fixed and the spherical shell that provides the light is designed to be linearly movable and/or tiltable.
• the spherical shell that provides the light and the receiving device 110 are fixed and the spherical shell of the camera is designed to be linearly movable and/or tiltable.
• the camera holding device 210, the light supply holding device 220 and the receiving device 110 are accommodated in a workbench, here in the form of a trolley 230, for example.
• FIGS. 1 and 2 A measuring principle and structure of the measuring device 100 for afocal, optical systems 105 are shown in FIGS. 1 and 2 using the example of a structured display. For the sake of clarity, the beam paths that are off-axis with respect to the measurement axis are not shown.
• the technical implementation in the finished measuring device is shown in FIG.
• the measuring device 100 makes it possible, as in known measuring systems, to measure the imaging quality of optical components, also referred to below as “test objects”, simultaneously at different field positions in contrast to the known measuring systems, the test objects to be measured are afocal optical systems 105. In an application example, the test object is illuminated from below with collimated light.
• FIG. 2 shows a collimator with a fixed crosshair.
• a white light LED is used as the light source of the light supply devices 115, 125, 205, for example.
• optical filters are used in order to adapt the wavelength range to the application. For example, when measuring mobile phone display windows or waveguides for AR/VR systems, a photopic eye filter is used to adapt the wavelength range of the light 145 to the sensitivity distribution of the human eye in daylight.
• a fixed or rotatable polarization filter is arranged in the beam path of the collimator. The use of filters is also relevant, for example, when measuring the wavelength-dependent imaging quality (MTF).
• MTF wavelength-dependent imaging quality
• the collimators are arranged on the light supply holding device 220 in the form of a dome and the cameras 120, 130, 200 on the camera holding device 210, also in the form of a dome. These domes are shown in more detail in FIGS. 6, 7, 8 and 9.
• the two dome constructions are placed below and above the test object.
• the assembled measuring device 100 is shown in FIG. 2 here.
• Each dome consists of a spherical shell with holding devices attached to the surface. These holding devices in turn are used to attach the cameras 120, 130, 200 or the collimators.
• the cameras 120, 130, 200 and collimators are mounted in such a way that their optical axes intersect at one point.
• the camera 120 or the collimator of the light supply device 115 is mounted in the center of the dome.
• This axial camera 120 or this axial collimator is aligned in such a way that its optical axis is perpendicular to the plane of the specimen, previously referred to as the recording plane.
• the intersection of all optical axes of the cameras 120, 130, 200 or collimators lies on the optical axis of the axial camera 120 or the axial collimator.
• the dome constructions are arranged opposite one another
• the centers of curvature coincide, or, according to another exemplary embodiment, are offset from one another. This can be necessary, for example, when the optical element/system 105 to be tested generates a parallel offset in the beam path. As may be the case, for example, with a planar waveguide or a prismatic system.
• an effective pupil is generated in the beam path of the cameras 120, 130, 200. According to one exemplary embodiment, this is implemented using a screen in the vicinity of the test object, as is shown in FIG. 1 or FIG. 3 .
• an individual aperture is placed in front of each collimator or camera 120,130,200.
• the test object itself is/is placed in a suitable holder, the recording device 110, which is located between the upper and lower domes.
• the holder can be moved in the x-direction and in the y-direction so that the test object can be measured at different positions.
• the holder is designed to accommodate a plurality of test specimens which are measured one after the other.
• an optical filter is arranged above or below the test object, which changes the wavelength and/or the polarization of the light beams running through the test object.
• the size of the filter can be adjusted if required. This represents an alternative embodiment for the case when collimators without appropriate filters are used.
• the struts of the upper dome are equipped with additional cameras in the form of the structure recognition cameras described in FIG. 1 in order to determine the lateral position (x, y position) of the test object.
• these structure recognition cameras are designed to recognize known structures in the test specimen plane or additional structures that are arranged at a defined distance from the test specimen and are located, for example, on the test specimen holder.
• the measuring device 100 presented here An important area of application of the measuring device 100 presented here is the measurement of mobile phone display windows. These have the special feature that they have internal structuring, which ensures, for example, that the displays are touch-sensitive. A section of such a structured display is shown schematically in FIGS. Such an introduced structure has a negative impact on the image information transmitted through the display.
• the measuring device 100 presented here also has the evaluation unit, which makes it possible to determine a reduction in the imaging quality caused by the structuring and to calculate a correction factor or a correction matrix on the basis of this value.
• the correction factor calculated in this way or the correction matrix calculated in this way is also used as part of image processing in order to correct an image that was recorded through the display with a camera 120, 130, 200.
• a specific use case would be image capture via the front camera of a smartphone.
• Another important area of application of the measuring device 100 presented here is the measurement of waveguides, in particular of those waveguides that are used in VR/AR headsets.
• This area can be generally defined as a volume in which the pupil of the eye must be located in order to meet certain defined criteria with regard to image perception.
• Such a criterion can For example, an image generated by the headset remains fully visible in the area of the eyebox.
• the measuring device 100 proposed here to measure a corresponding waveguide at different positions within the eyebox, this is designed in a corresponding variant in such a way that the test specimen and either the lower or upper dome are fixed and the lateral position of the other dome can be changed is.
• each collimator/light supply device 115, 125, 205 has a broadband light source and/or that fixed or rotating or pivotable, optical filters within the beam path of the collimator/light supply device 115, 125, 205 are arranged and/or that the optical filters serve to limit or to limit the wavelength range and/or the polarization of the light 145 emitted by the light source change; that in the beam path of each collimator/light supply device 115, 125, 205 there is a reticle, which is illuminated by the light source and its position along the optical axis in the beam path of the collimator/light supply device 115, 125, 205 is either fixed or variable is; that in a plane which is parallel to the plane of the specimen, a fixed or rotatable or pivotable optical filter is arranged and serves to influence the wavelength and/or polarization of the light beams running
• FIG. 5 shows a schematic lateral cross-sectional illustration of a collimator 500 of a measuring device according to an embodiment. This can be the measuring device 100 described in one of FIGS.
• the functional principle of a focusable collimator 500 is shown in general for the purpose of illustration.
• FIG. 6 shows a perspective top view of a light supply holding device 220 of a measuring device according to an exemplary embodiment. This can be the light supply holding device 220 described in FIG. 2 .
• the light supply holding device 220 can also be referred to as a collimator dome.
• a cutting line AA is drawn.
• FIG. 9 shows a lateral cross-sectional representation of a camera holding device 210 of a measuring device according to an exemplary embodiment.
• a section AA is shown. It can therefore be the camera holding device 210 described in FIG. 8, in which cameras are accommodated.
• FIG. 10 shows a flow chart of a method 1000 for measuring a modulation transfer function of an afocal optical system according to an embodiment. This can be the afocal optical system described in one of the preceding figures. The method 1000 can be controlled or carried out by the measuring device that was described in one of the previous figures.
• a camera image of the reticle is generated via the afocal optical system in the recording device from a second side opposite the first side using a camera, the light providing device, the afocal optical system and the camera being coaxial on a measurement axis are arranged or have parallel measuring axes which are aligned perpendicularly to the recording plane.
• a further camera image of a further reticle is generated via the afocal, optical system in the recording device from the second side using a further camera, with the further light providing device, the afocal optical system and the further camera being arranged coaxially or are arranged with measurement axes parallel to an oblique measurement axis, which is aligned obliquely to the measurement axis and/or recording plane.
• the modulation transfer function of the afocal optical system is recognized or calculated using the camera image and/or another camera image.
• a correction factor or a correction matrix can also be calculated as part of this step.
• the camera image can be generated by the reticle, which is imaged by means of the collimator, afocal system and camera optics of the camera.
• the further camera image can be generated from the further reticle, which is imaged by means of the collimator, afocal system and camera optics of the further camera.
• a sequence of camera images and/or further camera images can be generated. For example, a first intermediate image of the reticle is generated by the collimator, this is changed by the afocal optical system (test object) and then imaged onto the sensor via a collecting optics of the camera/additional camera.

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• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Length Measuring Devices By Optical Means (AREA)
• Testing Of Optical Devices Or Fibers (AREA)
• Photometry And Measurement Of Optical Pulse Characteristics (AREA)
• Optical Measuring Cells (AREA)

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• 2021
  • 2021-02-02 DE DE102021102354.8A patent/DE102021102354A1/de active Pending
• 2022
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  • 2022-02-01 WO PCT/EP2022/052276 patent/WO2022167393A1/de active Application Filing
  • 2022-02-01 US US18/274,851 patent/US20240085271A1/en active Pending
  • 2022-02-01 JP JP2023546499A patent/JP2024504839A/ja active Pending
  • 2022-02-01 KR KR1020237028630A patent/KR20230136631A/ko unknown
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  • 2022-02-01 CN CN202280012399.8A patent/CN116888449A/zh active Pending
  • 2022-02-01 EP EP22702963.4A patent/EP4288756A1/de active Pending

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