EP4265909B1 - Pumpstand für eine vakuumpumpe - Google Patents

Pumpstand für eine vakuumpumpe Download PDF

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Publication number
EP4265909B1
EP4265909B1 EP23178938.9A EP23178938A EP4265909B1 EP 4265909 B1 EP4265909 B1 EP 4265909B1 EP 23178938 A EP23178938 A EP 23178938A EP 4265909 B1 EP4265909 B1 EP 4265909B1
Authority
EP
European Patent Office
Prior art keywords
pumping station
spring
vacuum pump
spacer sleeve
spring element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP23178938.9A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP4265909A1 (de
Inventor
Mirko Mekota
Sönke Gilbrich
Dominik HAHN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP23178938.9A priority Critical patent/EP4265909B1/de
Publication of EP4265909A1 publication Critical patent/EP4265909A1/de
Priority to JP2023210075A priority patent/JP2024178888A/ja
Application granted granted Critical
Publication of EP4265909B1 publication Critical patent/EP4265909B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/0027—Pulsation and noise damping means
    • F04B39/0044—Pulsation and noise damping means with vibration damping supports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/001—Noise damping
    • F04B53/003—Noise damping by damping supports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F1/00—Springs
    • F16F1/02—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant
    • F16F1/04—Wound springs
    • F16F1/12—Attachments or mountings
    • F16F1/125—Attachments or mountings where the end coils of the spring engage an axial insert
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F16F15/067—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs

Definitions

  • the present invention relates to a pumping station for a vacuum pump, in particular for a diaphragm vacuum pump.
  • a generic pumping station essentially consists of the DE 10 2014 224 050 A1 out.
  • a vacuum pumping station accommodates several vacuum pumps that are fluidically connected to one another and, in particular, connected in series to complement each other in terms of the achievable pressure levels.
  • a vacuum pumping station can comprise a diaphragm vacuum pump as a backing pump and a turbomolecular pump as a high-vacuum pump. If the diaphragm vacuum pump is rigidly attached to the pumping station or to a base element thereof that accommodates the diaphragm vacuum pump, the vibrations generated by the diaphragm vacuum pump during operation can, under certain circumstances, be undesirably transmitted to the turbomolecular vacuum pump, which can lead to malfunctions.
  • transport-related impulses can be transmitted to the backing pump, which is designed as a diaphragm vacuum pump or a rotary vane pump, if it is rigidly attached to attached to the pumping station, which can lead to damage to the backing pump.
  • the invention is therefore based on the object of ensuring that vibrations emanating from a vacuum pump, in particular a backing pump, are not transmitted to the pumping station in a vacuum pumping station, and that, likewise, no external impulses can be transmitted to the vacuum pump, in particular to the backing pump, of the pumping station. Furthermore, it should be ensured that no additional transport locks are required for the vacuum pump, which would otherwise have to be removed separately when commissioning the pumping station.
  • a pumping station having the features of claim 1 and in particular in that the pumping station has at least one bearing arrangement by means of which a vibration-technical decoupling of a vacuum pump from the pumping station can be achieved.
  • the bearing arrangement comprises a support element for supporting a vacuum pump, wherein the support element comprises one or more bending beams for supporting a vacuum pump. Furthermore, the bearing arrangement comprises at least one spring element, for example in the form of a helical compression spring, via which the support element is elastically supported on the base element of the pumping station. For this purpose, the spring element extends between mutually facing sides of the support element and the base element. If the support element is, for example, a rectangular support plate, this can be elastically supported on the base element of the pumping station at its four corners via spring elements located there.
  • the bearing arrangement further comprises at least one fastening element, for example in the form of a screw with a shaft, which extends through the spring element and by means of which the support element is clamped to the base element, wherein it can be provided in particular that the support element is clamped to the base element by means of the fastening element against the prestressing effect of the spring element.
  • the support element comprises at least one bending beam, each of which is supported at its ends on the base element via a spring element and clamped to the base element by means of a fastening element whose shaft extends through a spacer sleeve.
  • the bending beam is thus supported at both its ends by a bearing arrangement as described above, so that the bending beam forms a single-span beam in the static sense.
  • the bearing arrangement further comprises a spacer sleeve which is surrounded by the spring element and which in turn surrounds the shaft of the fastening element over a length extension which experiences an expansion as a result of the bracing of the support element with the base element.
  • the shaft of the fastening element, the spacer sleeve and the spring element are thus arranged essentially concentrically to one another, the spacer sleeve having a length that corresponds to the clamping length of the fastening element and thus to the length of the shaft, which as a result of the tension of the support element with the base element.
  • the length of the spacer sleeve corresponds to that section of the shaft which is stretched as a result of the bracing of the support element with the base element.
  • the axial length of the spacer sleeve must be selected to be large enough that the shaft of the fastening element is already under tension when the bearing arrangement is not under load.
  • the axial length of the spacer sleeve should be matched to the axial extent of the spring element in such a way that when the bearing arrangement is not under load, i.e. without a vacuum pump on the support element, it is force-free and does not exert any preloading effect.
  • the spacer sleeve thus defines the mutual distance between the support element and the base element in the unloaded state of the bearing assembly, which also ensures that the spring element does not exert a preload effect when the bearing assembly is unloaded.
  • the fastening element can only be tightened until a specified distance is established between the support element and the base element.
  • At least one guide for the spring element can be formed on the support element and/or on the base element, which guide can ensure that the spring element is compressed purely axially during operation of the pump. Thus, any transverse deflections of the spring element can be prevented by the guide.
  • a guide serves as a positional securing device for The spring element maintains its concentric position with respect to the fastener and the spacer sleeve surrounding the fastener shaft. This prevents the spring element from coming into contact with the spacer sleeve, which can otherwise lead to unwanted rattling noises during operation of a vacuum pump.
  • the guide in question can, for example, be a dome formed on the base element and/or on the support element, which is surrounded by the spring element and with which a respective end of the spacer sleeve is in contact.
  • the guide in question can, for example, be a dome formed on the base element and/or on the support element, which is surrounded by the spring element and with which a respective end of the spacer sleeve is in contact.
  • one end of the shaft of the fastening element is screwed into the dome, for which purpose a cavity with a corresponding internal thread can be formed therein.
  • the spring element surrounds the dome, its radial alignment is fixed relative to the spacer sleeve on the dome, so that the spring element does not touch the spacer sleeve in the desired way, which could otherwise cause undesirable rattling noises.
  • the guide can also be a countersink in the form of a blind hole formed in the base element and/or in the support element, which accommodates the respective end of the spring element. This can also prevent any misalignment of the spring element with respect to the spacer sleeve, thus preventing unwanted rattling noises that could otherwise occur when the spring element comes into contact with the spacer sleeve.
  • a dome is formed on the base element to guide the spacer sleeve, which the Surrounds the spring element and on which one end of the spacer sleeve rests, whereas a corresponding recess is formed in the support element, which receives the other end of the spring element.
  • the dome can also be formed on the support element and the recess in the base element.
  • the spacer sleeve is made of a plastic material, since this ensures that no undesirable rattling noises are caused even if contact should occur between the spring element and the spacer during vibrations that are not strictly axial.
  • the design of the spacer sleeve from a plastic material can prevent undesirable rattling noises resulting from contact between the spacer sleeve and the shaft of the fastening element and the carrier element.
  • the design of the spacer sleeve from a plastic material can prove particularly advantageous if no guides are provided for the spring element, since in this case undesirable rattling noises can be prevented even if contact should occur between the spring element and the spacer sleeve.
  • the support element comprises two bending beams that run essentially parallel to each other.
  • a vacuum pump can be mounted on the two bending beams, bridging the distance between the two bending beams.
  • the two bending beams are thus largely vibrationally decoupled from each other, so that a deflection of one bending beam has no influence on the deflection of the other bending beam, and vice versa.
  • the respective spring element of each bearing arrangement has a spring constant which is selected to be large enough that the spring element itself does not go into block during operation of the vacuum pump.
  • the pumping station comprises at least two bearing arrangements whose spring elements, spacer sleeves and fastening elements are oriented perpendicular to one another.
  • the Fig. 1 shows a section of a pumping station 10 according to the invention in the view.
  • the Fig. 1 a portion of a housing 12 of the pumping station 10, in which a backing pump 14 in the form of a diaphragm vacuum pump is housed.
  • a high-vacuum pump supported by the pumping station 10 and in particular its housing 12, in the form of, for example, a turbomolecular vacuum pump, which is arranged upstream of the backing pump 14 in the direction of flow.
  • the backing pump 14 is located on a support element 16, which can be, for example, a support plate on which the backing pump 14 stands.
  • the support element 16 can comprise two bending beams 18 spaced perpendicularly to the plane of the drawing and running parallel to one another, on which the backing pump 14 is fastened in such a way that it bridges the distance between the two bending beams 18.
  • Fig. 1 can be removed, the respective bending beam 18 is elastically supported at both its ends by means of a spring element 20 on a base element 22 of the housing 12, whereby it can be prevented that operational vibrations of the backing pump 14 can be transmitted to the housing 12 and from there to a turbomolecular vacuum pump (not shown) mounted thereon.
  • a turbomolecular vacuum pump (not shown) mounted thereon.
  • the support element 16 or the bending beam 18 is supported on the base element 22 via a spring element 20 in the form of a helical compression spring 20, for which purpose the Spring element 20 extends between the two mutually facing surfaces of the support element 16 and the base element 22.
  • the support element 16 is clamped to the base element 22 by means of a fastening element 24 in the form of a bolt screw 24, wherein the shaft 26 of the bolt screw 24 extends through the helical compression spring 20.
  • the free end of the shaft 26 of the bolt screw 24 can be screwed either into an internal thread formed in the base element 22 or into a nut which is located below the base element 22 in contact with the same.
  • the screw head 28 rests on the upper side of the support element 16 via a washer 30, so that the same is secured against lifting forces on the base element 22.
  • the washer 30 is not necessarily required, however, if the bore 34 of the support element 16 is so small that the screw head 28 does not fit through, or if a flange-head screw is used.
  • the fastening element 24 thus creates a transport lock that can prevent the support element 16 from jumping off the spring element 20 during transport of the pumping station 10.
  • the shaft 26 of the fastening element 24 is surrounded by a spacer sleeve 32, which can preferably be made of a plastic material.
  • the spacer sleeve 32 extends between the underside of the washer 30 and the side of the base element 22 facing the carrier element 16.
  • the spacer sleeve 32 extends through the opening 34 formed in the carrier element 16, through which the shaft 26 of the fastening element 24 also extends.
  • the axial extent of the spacer sleeve 32 thus predetermines the maximum distance between the carrier element 16 and the base element 22, ensuring that the fastening element 24 can only be tightened to the exact extent that the spring element 20 exerts a preload force of a predetermined magnitude.
  • the spacer sleeve 32 extends between the underside of the washer 30 and the side of the base element 22 facing the support element 16, the axial length of the spacer sleeve 32 thus determines the length of the screw shaft 26 stretched under tension.
  • This length of a screw shaft stretched under tension is usually referred to as the clamping length, which in technical mechanics refers to the thickness of the components to be connected, including any washers present.
  • the axial length of the spacer sleeve 32 should be selected to be large enough that, in the unloaded state of the bearing arrangement, i.e., in which no pump is yet resting on the support element 16, the spring element 20 does not exert any preloading effect and thus the shaft 26 of the fastening element 24 is subjected to tension solely by the tightening torque of the fastening element 24.
  • the spring constant of the spring element 20, however, should be selected to be large enough that the spring element 20 does not go into block even during operation of a backing pump mounted on the support element 16.
  • the spacer sleeve 32 is advisable to manufacture from a plastic material, as this ensures that no disturbing rattling noises occur when there is contact between the spring element 20 and the spacer sleeve 32.
  • a hollow cylindrical recess 36 is formed in the side of the support element 16 facing the base element 22, which recess receives the corresponding end of the spring element 20 and is coaxially aligned with the opening 34 in the support element 16.
  • the spring element 20 is thus held in the recess 36 in the radial direction, whereby the coaxial arrangement of the spring element 20, the spacer sleeve 32 and the fastening element 24 is permanently maintained.
  • a dome 38 in the form of a hollow cylindrical elevation is formed on the side of the base element 22 facing the carrier element 16, wherein the helical compression spring 20 surrounds the dome 38, so that the helical compression spring 20 is held in place in the radial direction.
  • a dome 38 in the form of a hollow cylindrical elevation is formed on the side of the base element 22 facing the carrier element 16, wherein the helical compression spring 20 surrounds the dome 38, so that the helical compression spring 20 is held in place in the radial direction.
  • the lower end of the spacer sleeve 32 which here also consists of a plastic material, rests on the dome 38, which means that the length of the shaft 26 of the fastening element 24, which experiences an expansion as a result of the bracing of the carrier element 20 with the base element 22, and the axial height extension of the dome 38 is less than in the embodiment of the Fig. 2 .
  • the dome 38 is provided with an internal thread (not shown) into which the free end of the shaft 26 is screwed; alternatively, however, the dome 38 can also merely define a through-opening through which the shaft 26 extends, wherein a nut can be provided below the base element 22 or above the support element 16, which nut rests on the base element 22 or on the support element 16, into which nut the free end of the shaft 26 is screwed.
  • a dome 38 is formed on the base element 22 and a recess 36 is formed in the support element 16 to secure the respective spring end.
  • the support element 16 is a bending beam 18 with an angular cross-section, wherein the vertical angle leg 40 is secured to a vertical base element section 22' in a manner corresponding to the horizontal angle leg for a bearing arrangement comprising spring element 20, spacer sleeve 32 and fastening element 24.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP23178938.9A 2023-06-13 2023-06-13 Pumpstand für eine vakuumpumpe Active EP4265909B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP23178938.9A EP4265909B1 (de) 2023-06-13 2023-06-13 Pumpstand für eine vakuumpumpe
JP2023210075A JP2024178888A (ja) 2023-06-13 2023-12-13 真空ポンプ用のポンプスタンド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP23178938.9A EP4265909B1 (de) 2023-06-13 2023-06-13 Pumpstand für eine vakuumpumpe

Publications (2)

Publication Number Publication Date
EP4265909A1 EP4265909A1 (de) 2023-10-25
EP4265909B1 true EP4265909B1 (de) 2025-04-02

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ID=86764598

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EP23178938.9A Active EP4265909B1 (de) 2023-06-13 2023-06-13 Pumpstand für eine vakuumpumpe

Country Status (2)

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EP (1) EP4265909B1 (https=)
JP (1) JP2024178888A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102911607B1 (ko) * 2025-07-16 2026-01-12 한석민 배터리 충격완화구조가 적용된 전자척

Family Cites Families (21)

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US2687270A (en) * 1950-11-21 1954-08-24 Robinson Aviat Inc Vibration absorption beam mount
US3323764A (en) * 1965-03-03 1967-06-06 Wright Barry Corp Shock and vibration mount
US3785167A (en) * 1972-12-11 1974-01-15 Amana Refrigeration Inc Noise reduction means for connecting refrigerant compressors in air conditioners
JPS49138405U (https=) * 1973-03-22 1974-11-28
JPS544637Y2 (https=) * 1973-05-24 1979-02-27
JPS52103406U (https=) * 1976-02-04 1977-08-05
JPS52166105U (https=) * 1976-06-10 1977-12-16
JPS6024952Y2 (ja) * 1976-08-06 1985-07-26 富士電機株式会社 空気調和機における電動圧縮機の支持装置
JPS5745407Y2 (https=) * 1976-11-02 1982-10-06
JPS5442002U (https=) * 1977-08-30 1979-03-20
US4306708A (en) * 1979-05-14 1981-12-22 Tennessee Bolt And Screw Co., Inc. Means for establishing a support post for a grommet
JPS5748393U (https=) * 1980-09-04 1982-03-18
JPS6155181U (https=) * 1984-08-24 1986-04-14
JPS61175585U (https=) * 1985-04-20 1986-11-01
JPS6436578U (https=) * 1987-08-28 1989-03-06
KR100595545B1 (ko) * 2004-01-30 2006-07-03 엘지전자 주식회사 압축기의 지지장치
WO2015075270A1 (de) * 2013-11-25 2015-05-28 Continental Teves Ag & Co. Ohg Hochgedämpftes lagerelement
AT14651U1 (de) * 2015-05-22 2016-03-15 Secop Gmbh Kältemittelverdichter
CN111895225B (zh) * 2020-07-03 2022-03-29 宁波爱发科机械制造有限公司 可抽拉式真空机组机架
DE212020000257U1 (de) * 2020-07-03 2020-12-01 Suzhou Zhongchuang Sunshine New Energy Technology Co., Ltd. Eine Stoßdämpfungsvorrichtung zur Wartung der Vakuumpumpe
CN213745947U (zh) * 2020-11-30 2021-07-20 威固乐真空设备(浙江)有限公司 一种新型真空泵

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Publication number Publication date
EP4265909A1 (de) 2023-10-25
JP2024178888A (ja) 2024-12-25

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