EP4214748A1 - Dispositif comprenant un composant et un corps de refroidissement couplé - Google Patents

Dispositif comprenant un composant et un corps de refroidissement couplé

Info

Publication number
EP4214748A1
EP4214748A1 EP21805879.0A EP21805879A EP4214748A1 EP 4214748 A1 EP4214748 A1 EP 4214748A1 EP 21805879 A EP21805879 A EP 21805879A EP 4214748 A1 EP4214748 A1 EP 4214748A1
Authority
EP
European Patent Office
Prior art keywords
filler
component
connecting body
heat sink
porous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP21805879.0A
Other languages
German (de)
English (en)
Inventor
Matthias Heimann
Bernd Müller
Markus Pfeifer
Jörg Strogies
Klaus Wilke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP4214748A1 publication Critical patent/EP4214748A1/fr
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3736—Metallic materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3733—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids

Definitions

  • the present invention relates to a device with a component, a heat sink and a connecting element, by which the component is thermally connected to the heat sink.
  • the invention also relates to a method for producing such a device.
  • power electronic modules in particular are very often connected to heat sinks in order to ensure the necessary heat dissipation given the ever-increasing power loss densities and to reliably prevent the modules from overheating.
  • the corresponding heat sinks are usually arranged very close to the power modules and an attempt is made to achieve the lowest possible thermal resistance in the thermal connection of the heat sink to the module.
  • tight geometric tolerances often have to be maintained by the overall device, and the production should be able to be carried out as cost-effectively as possible overall.
  • soldered connection is made between the component to be cooled and the heat sink. It is therefore a permanent connection with the disadvantage that it cannot be easily detached to replace one of the elements. Furthermore, compliance with the superordinate geometric tolerances can be difficult here, since the production-related deviations in the dimensions of the heatsink and power module are very difficult to compensate for by controlled adjustments in the geometry of the solder layer. Finally, such a soldered connection is rigid after it has been produced, so that during operation of the device it is no longer possible to subsequently compensate for any geometric deviations from a target dimension that may be present.
  • the heat sink is coupled to the component to be cooled using thermal paste.
  • a connection that can be released again is created, and the connection is maintained by the heat sink and component being pressed against one another both during assembly and during operation.
  • Such contact pressure can be realized by a hold-down system that is fundamentally known in the prior art, in which contact pressure is generated, for example, by means of a spring or a clamp.
  • a disadvantage of this type of connection is that the thermal resistance is usually higher compared to soldered connections.
  • Another disadvantage is that the stability of the connection is often not very high at the high temperatures that occur during operation and in particular at the possible strong temperature fluctuations. In the event of prolonged operation, both the thermal resistance and the mechanical stability of such a connection can suffer.
  • the object of the invention is therefore to specify a device with a component and a heat sink coupled thereto, which overcomes the disadvantages mentioned.
  • a device is to be made available which has a comparatively low thermal resistance for has the coupling and at the same time allows a flexible compensation of manufacturing tolerances by a geometric adjustment of the connection layer.
  • the coupling should nevertheless be relatively simple and inexpensive to implement and should be as stable as possible during operation.
  • a further object is to specify a method for producing such a device.
  • the device according to the invention comprises a component, a cooling body and a connecting element which is arranged between the component and the cooling body and thermally connects the cooling body to the component.
  • the connecting element comprises a porous connecting body made of a metallic material, the pores of the connecting body being at least partially filled with a filler, the filler having a low-melting alloy or a fluorinated organic liquid.
  • the essential function of the connecting element is therefore the thermal coupling of the heat sink to the component in order to ensure effective cooling of the heat loss released in the component during operation of the device.
  • the connecting element serves to create the lowest possible thermal resistance between the component and the heat sink, so that overall an effective heat transfer from the component as the location of the power loss to the heat sink as the actual heat sink of the device is ensured. From the heat sink, the thermal energy is released to the surroundings of the device, namely either to the surrounding air or to another surrounding medium such as cooling water or cooling oil or another liquid or gaseous medium.
  • the connecting element is preferably the main thermal path between the component and the heat sink. If there are a number of parallel thermal paths between these two elements, then the one with the lowest thermal resistance should be formed via the connecting element.
  • the porous connecting body provides a fixed element in this thermal connection, through which defined geometric properties and in particular a predefined distance can be set.
  • a solid structure within the connection here.
  • fluctuations in the exact size and installation position of the elements to be connected can also be compensated for.
  • the connecting body can contribute to maintaining the required overall geometric tolerances of the device.
  • the porous design of this fixed connecting body simultaneously achieves a certain mechanical flexibility, so that even with a given original shape and original size of this connecting body, the dimensions actually present in the installation situation can still be fine-tuned.
  • a compression of the porous structure can be brought about by the action of a pressing force on the connecting body, so that a predefined target thickness can be achieved depending on the selected force.
  • this target thickness can be chosen to be slightly different for each individual device in a series of devices to be produced, in order to compensate for these fluctuations.
  • a geometrically variable framework is created in the connection area.
  • the described mechanical and geometric advantages of the porous connecting body are accompanied by a serious disadvantage if no further measures are taken: the presence of pores in this body weakens the thermal connection between the component and the heat sink. This applies at least if the interiors of the pores remain open and in this way hardly to Contribute to the thermal path (or more precisely: if they are filled with air and make a very small contribution to the coupling due to the low thermal conductivity of the air).
  • this problem is solved in that the pores are at least partially filled with a filler.
  • This filler should in particular be a solid or liquid filler or else a substance which can change between a liquid and a solid state during operation of the device. In any case, the filler is not gaseous.
  • This filling ensures that the proportion of air in the pores is displaced and the effective thermal conductivity of the connecting element is significantly improved compared to the unfilled connecting body.
  • the degree of this improvement depends on the filling level of the filler and can be adjusted depending on the required thermal properties. In this way, with the filler in the pores, a very flexible "tuning" between the desired geometric-mechanical and the desired thermal properties of the connecting element is possible.
  • the method according to the invention serves to produce the device according to the invention. It comprises the following steps: a) attaching the porous connecting body to the component, b) filling the porous connecting body with the filler, c) attaching the heat sink to the connecting body.
  • the component can thus be in particular a power electronic module or a power electronic component.
  • the advantages of the invention then come into play particularly effectively, since power loss densities in the field of power electronics are generally particularly high and continue to increase with increasing power, so that the formation of a heat dissipation path that is as efficient as possible is particularly important here.
  • a power electronic component can include a power transistor, for example, in particular an IGBT.
  • a module is to be understood in particular as a compact circuit unit made up of a number of individual components.
  • Such a module often also contains a wiring carrier (in particular a printed circuit board) via which the connection to the heat sink can be implemented.
  • the thermal connection can also be made directly to the component in a module.
  • the basic objective of the thermal connection to a heat sink is in any case independent of whether the component is a module or an individual component.
  • the heat sink can have a surface-enlarging structure, for example in the form of ribs, fins or in the form of a cooling star or ramified cooling structures.
  • a heat sink can cause the release of heat to the surrounding medium in a particularly effective manner.
  • Such a heat sink can in particular essentially be formed from a metallic material or at least include such a material as the main component.
  • One advantage of such a metallic heat sink is the comparatively high thermal conductivity of metals. Aluminum, copper or an alloy based on at least one of these metals are particularly preferred in this context.
  • heat sink can also be coated with a functional layer.
  • an aluminum-based heat sink can be coated with a nickel layer in order to achieve inerting, in particular with respect to reactive materials that can be used as fillers in the connecting body.
  • the porous connecting body is formed from a metallic material.
  • a metallic framework material has the advantage that, due to the high thermal conductivity of metals, good heat transport can already take place via the pore framework.
  • metallic pore frameworks can be deformed relatively easily in a non-destructive manner since they are not very brittle. In this way, with such a flexible scaffolding material, the geometrical adaptability mentioned above can be realized.
  • copper or a copper-based alloy is particularly suitable for this purpose.
  • a functional coating can also be useful for the framework material of the connecting body, in particular with a comparatively inert material, which prevents a reaction of the connecting body with the filler filled in it.
  • This can also be a nickel-based coating here, for example.
  • the connecting body is designed in such a way that it can be deformed in a non-destructive manner. In this way, a change in the thickness of the connecting element and thus a change in the distance between the component and the heat sink can be brought about in particular as a function of the action of a compressive force. In principle, this can either involve more elastic deformability or more plastic deformability. In the case of plastic deformation, a permanent geometric change can be brought about by means of a compressive force.
  • the porous connecting body can be essentially open-pored.
  • the cavities of the individual pores are connected to one another and to the external environment via passages, resulting in a network of cavities and thus a superordinate porosity.
  • the porous connecting body can be subsequently (ie after the completion of the porous structure) filled with a filler.
  • the formation of the framework and the filling with the filler can thus take place in two separate steps, which simplifies production overall.
  • a closed-pore connecting body can then also be used.
  • the volume filling factor of the porous connecting body is advantageously in a range between 15% and 70%.
  • This volume/filling factor should be understood to mean the proportion by volume of the connecting element that is given by the framework material and not by the cavities of the pores. If this volume/fill factor is very low, the mechanical stability of the framework structure is at risk. On the other hand, when it is very high, the formability is low. In the preferred range mentioned, both basic mechanical stability and sufficient deformability can be achieved with the connecting body.
  • the filler of the porous connecting body can advantageously have a metallic material.
  • this can be a low-melting alloy such as a solder material or a liquid metal.
  • the filler can also include a fluorinated organic liquid. This can be a perfluorotributylamine, for example.
  • Such liquids are marketed by the company 3M under the trade name "Fluorinert”.
  • Fluorinert FC-43 which is used in the prior art in particular as a coolant.
  • the filler prefferably be liquid, at least during assembly of the device, so that a geometric adjustment is possible by deforming the connecting body that is to be filled or has just been filled.
  • the filler can then be either solid or liquid, depending on the operating temperature and melting range, or it can also undergo an occasional phase change between these two aggregate states.
  • the filler has a thermal conductivity of at least 10 W/mK.
  • a thermally highly conductive filler material good heat coupling can be achieved overall via the connecting element by displacing the air from the pores. Even if the material of the porous structure does not conduct heat very well, a moderate to good effective overall thermal conductivity can still be achieved overall, depending on the degree of filling.
  • the precise choice of the materials and the degree of filling allows the effective overall conductivity to be adjusted in a very targeted manner, with the other requirements, in particular mechanical-geometric requirements, also being taken into account at the same time.
  • an effective overall thermal conductivity of the connecting element of 10 W/mK or more can be achieved.
  • the degree of filling (ie the proportion to which the pore volume is filled with the filler) can advantageously be between 25% and 80%. In principle, the degree of filling could also be even lower and even amount to only a few percent, but then the contribution of the filler to heat conduction is relatively small. On the other hand, the degree of filling can also be up to 90% or up to 95% or even higher, which correspondingly further increases the contribution to heat conduction.
  • it is often difficult to completely fill the porous structure firstly because not all the pores are always open to the outside and secondly because the wetting of the filler on the material of the connection body is not always optimal.
  • the filler can be liquid during assembly (in particular during filling of the connecting body), but solid during operation of the device. Its melting point is then chosen in such a way that it is above the maximum operating temperature that occurs.
  • the melting point or the melting range of the filler can generally be above 200.degree. C. and in particular between 200.degree. C. and 300.degree.
  • the filler can therefore in particular be a corresponding solder alloy.
  • Typical assembly temperatures at which such a solder can be filled into the connecting body as a filler are, for example, in the range between approximately 230° C. and 260° C.
  • the specified temperature range for the operation of the device can be selected such that the maximum operating temperature does not exceed a value of 200°C. For typical power modules, maximum operating temperatures may range between about 150°C and about 200°C, for example.
  • Suitable solder alloys can be, for example, tin-based solders, in particular tin-silver-copper solders (abbreviated to SAG, with e.g. about 3% silver and about 0.5% copper and a melting range between 217 °C and 219 °C) or tin -Antimony solders (with e.g. about 95% tin and about 5% antimony and a melting range between 232 °C and 240 °C) .
  • SAG tin-silver-copper solders
  • tin-Antimony solders with e.g. about 95% tin and about 5% antimony and a melting range between 232 °C and 240 °C
  • a major advantage of this first embodiment variant is that the permanently solid filler also ensures high stability during operation of the device. This means that there are no problems with possible changes in the degree of filling or the encapsulation of the connecting element during operation.
  • the connecting element is also less easily deformed during operation than with the liquid fillers. Therefore, a geometric adjustment here is mainly limited to the assembly step. However, this can be sufficient to compensate for fluctuations in the size and installation position of the elements to be connected.
  • such a reaction is rather disadvantageous and should be avoided as far as possible by a corresponding choice of material or by rendering the surface of the connecting body inert.
  • the filler can be liquid during assembly and can change between a liquid and a solid state during operation of the device. Its melting point is then chosen so that it is below the maximum operating temperature that occurs, but above the minimum operating temperature that occurs.
  • the melting point or the melting range of the filler can generally be between 100.degree. C. and 200.degree.
  • the filler can therefore in particular be a corresponding low-temperature soldering alloy.
  • Suitable solder alloys can be, for example, tin-bismuth-based solders (e.g. Sn43Bi58 with a melting point at 138°C) or indium-tin-based solders (e.g. with melting ranges between about 118°C and 131°C) or tin-antimony-based Solders (e.g. with a melting point of about 139°C) .
  • tin-bismuth-based solders e.g. Sn43Bi58 with a melting point at 138°C
  • indium-tin-based solders e.g. with melting ranges between about 118°C and 131°C
  • tin-antimony-based Solders e.g. with a melting point of about 139°C
  • comparatively common soldering materials can also be used. Due to the transition to the liquid aggregate state that occasionally occurs during operation, a geometric adjustment of the connecting element can also take place in the operating state.
  • the filler can be liquid during assembly, and also during loading be (at least typically) liquid during operation of the device. Its melting point is then chosen so that it is below the (typical) minimum operating temperature that occurs.
  • the melting point or the melting range of the filler is generally below 100 °C.
  • the filler can therefore in particular be a liquid metal or another type of cooling liquid, for example a fluorinated organic liquid and in particular a Fluorinert.
  • a liquid metal can advantageously include gallium, indium, tin and/or mercury, for example. Such metals are advantageous components in order to achieve a low melting point in a metallic alloy.
  • the liquid metal particularly advantageously contains gallium as well as indium and tin. According to a particularly preferred embodiment, it even consists exclusively of the three metals mentioned.
  • the liquid may be an alloy known in the art as Galinstan. Galinstan is a eutectic alloy containing about 68.5 percent by weight gallium, about 21.5 percent by weight indium and about 10 percent by weight tin. Such an alloy has a very low melting point of about -19°C.
  • suitable low-melting alloys are available, for example, under the names Indalloy 51 and Indalloy 60 from the US company Indium Corporation of Utica, NY.
  • suitable gallium-based alloys are, for example, those alloys that are described in patents US5800060B1 and US7726972B1.
  • they can also include additions of other metals such as zinc (in particular between about 2 and 10 percent by weight).
  • the alloys described which are based on gallium, indium and/or tin, have the advantage that they have a have low toxicity and are therefore relatively harmless in terms of health and environmental damage.
  • Mercury is also a suitable liquid metal or a suitable alloy component for low-melting alloys, but has the fundamental disadvantage that it is highly toxic.
  • the metallic liquid can be an eutectic alloy.
  • An alloy of this type is particularly preferred since a significantly lower melting point can be achieved with it than with its individual metallic components.
  • Liquid metals have the advantage in common with the solder alloys described above that they are comparatively good thermal conductors.
  • non-metallic liquids are typically much less thermally conductive.
  • the contribution of convection to the overall heat transport can be significantly higher, so that such materials - and in particular the Fluorinerts mentioned - can still be considered as fillers.
  • a fundamental difficulty with the second and third embodiment variants is that the (at least partially) liquid filler requires reliable encapsulation of the porous connecting body from the outside.
  • the connecting body is therefore (either before or after the filling process) of a suitable encapsulation or. encasement surround .
  • a compensating device can be provided with which a change in volume of a filler contained in the connecting body and which is liquid during operation of the device can be compensated.
  • a compensating reservoir can be provided which is fluidically connected to the filler within the connecting body. According to the principle of communicating tubes, changes in the taken amount of liquid filler f be compensated.
  • Such a height adjustment can be force-controlled, for example, it being possible in particular for a contact pressure force acting on the heat sink to be varied.
  • an external compensating device for the filler can also be dispensed with in the second and third embodiment variants.
  • This is particularly the case when the pores are not completely filled in the initial state, so that the degree of filling is automatically increased when the pore structure is compressed.
  • a compensation mechanism for the filling volume is already integrated into the incompletely filled pore structure. In this variant, therefore, complete liquid-tight encapsulation of the connecting element from the external environment is also possible.
  • step b) ie the filling of the porous connecting body with the filler, can be carried out separately and in particular before the other steps, so that a prefabricated, filled component is formed.
  • the connection of the sub-elements in steps a) and c) can be handled similarly to the prior art, which significantly simplifies production.
  • the filling step b) can also take place "in situ", in other words in close connection with the formation of the coupling. For example, it can take place after step a) but before step c).
  • steps a) and c) it is also possible for steps a) and c) to be carried out in advance, i.e. the connection between the component and heat sink via the connecting element is already created and the filling according to step b) only takes place at the very end, for example by Infiltration of the connecting body from the side.
  • both the connection of the connection body to the component according to step a) and the connection of the heat sink to the connection body according to step c) can be reversible. There is then no permanent (in particular no materially bonded) connection, but it is sufficient if the individual elements are connected to one another by a contact pressure.
  • the connecting element is a so-called "insert", i.e. a loosely inserted intermediate layer, which can advantageously be dismantled non-destructively in order to make changes to the device.
  • the connecting element can advantageously be flat and mat-like and in particular have a uniform thickness.
  • step a) As an alternative to the previously described stack that is loosely placed on top of one another, it is also possible, in principle, for a solid, materially bonded composite to be procured in step a) and/or in step c). This can be the case in particular if, in step a), the connecting body is applied to the component by additive manufacturing. This embodiment can be particularly advantageous in order to produce a porous body with firmly defined and, under certain circumstances, also geometrically complex pore properties. As an alternative to this application "in situ" by additive manufacturing, the porous connecting body can also be additively manufactured in advance, e.g. as a prefabricated component. methods are either not at all achievable or are less accurate or at least less easy to achieve .
  • a gradient can be produced in one of its geometric properties by additive manufacturing of the connecting body.
  • this can be a gradient across the layer thickness (ie in the direction of the distance between the component and the heat sink).
  • a gradient in the proportion of pores (i.e. in the open volume), in the pore size and/or in the degree of cross-linking of the pores can be created through targeted variation of the additive manufacturing parameters.
  • FIG. 1 shows a schematic cross-section of a device according to a first example of the invention
  • FIGS. 2 to 4 show different stages in the manufacture of an exemplary device.
  • FIG. 1 shows a schematic cross section of a device 1 according to a first exemplary embodiment of the invention.
  • This device 1 contains a component 100 which is thermally coupled to a heat sink 200 via a connecting element 300 . A dissipation of the heat loss released during the operation of the component 100 is effected via this thermal path.
  • the component is a module that contains a power electronic component 130 . Most of the heat loss of the module is released in this electronic power component 130 , which is why the thermal connection to the heat sink 200 is also realized in the spatial vicinity of the component 130 .
  • the module also includes other elements, including a Main wiring support 110, which can optionally also carry other electronic components that are not shown here.
  • a further wiring support 140 is arranged here, which is assigned to the individual component 130 .
  • the two wiring carriers 110 and 140 are electrically connected to the component 130 and to other elements not explicitly shown here via metallization layers 150 .
  • the main wiring carrier 110 is connected to an external circuit or other electrical or electronic devices connectable.
  • the area of the power electronic functional unit 120 is encapsulated with an encapsulation resin 170 in relation to the external environment.
  • the thermal coupling of the power electronic functional unit 120 to the heat sink 200 is realized by a flat, mat-like connecting element 300 .
  • This is thermally connected to the wiring carrier 140 via a metallization layer 160 .
  • this arrangement is only to be understood as an example, and the connection could in principle also take place in other areas of the module.
  • a single (power) electronic component 130 could also be connected directly to the connecting element 300, ie without a wiring carrier 140 connected in between.
  • the connecting element 300 can be inserted loosely or with the component 100 or be permanently connected to the heat sink 200 .
  • the connecting element 300 has a connecting body 310 which is designed as a porous structure, as can be seen in the detail enlargement A.
  • the material of this pore structure 312 can be a metallic material, for example.
  • the detail enlargement shows only an example of an embodiment with a comparatively low volume filling factor of the framework material and a correspondingly high volume proportion of the pores 311 .
  • the volumetric filling factor of the framework can in practice vary over a wide range of values, depending on the thermal and mechanical-geometrical requirements.
  • the porous connecting body 310 is open-pored, d. H . the individual pores 311 are connected to one another, at least for the most part, via passages to form a superordinate network.
  • FIG. 1 shows an example of a state in which the pores 311 of the connecting body 310 are filled with a filler 320 only in the left-hand part of the drawing.
  • a substantial part of the open pores 311 is filled with the filler 320 .
  • the connecting body 310 has not yet been infiltrated with the filler 320 .
  • This can be a process stage, for example, in which the connecting body 310 is just being infiltrated with the liquid filler 320, so that a liquid front 330 results in the middle area.
  • the filler 320 is a liquid material.
  • the filler 320 can be liquid or solid or can switch between these two aggregate states.
  • a state in which the pores 311 are essentially completely filled is shown in section A only as an example. In practice, only a much smaller degree of filling can be achieved, especially if some of the pores are very small and the wetting properties are not sufficient for complete filling.
  • the at least partial filling of the pores 311 with the filler 320 causes air to be displaced from the pores 311 and replaced by a material with higher thermal conductivity (compared to air).
  • the thermal conductivity of the connecting body 310 is increased compared to the unfilled state.
  • the thermal connection to the heat sink 200 is significantly improved.
  • the cooling element A plurality of cooling fins 210 per 200 to promote the dissipation of heat from the heat sink to the environment.
  • the heat sink 200 is pressed with a pressing force F onto the connecting element 310 and thus indirectly also the other parts of the power electronic functional unit 120.
  • This contact pressure is achieved, for example, via a hold-down system that is not shown in detail here.
  • the connecting element 300 can be compressed to different extents.
  • the porous design of the connecting body leads to mechanical deformability, so that the thickness d of the connecting body can be varied as a function of the force F. In this way, the thickness d can be adjusted in a targeted manner, and production-related fluctuations in the size and installation position of the elements 100 and 200 to be connected can be compensated for.
  • This deformability of the connecting body 310 is also given in the filled state, at least as long as the filler 320 is in a liquid aggregate state. There is thus a possibility of geometric adjustment at least during assembly. If the filler has such a low melting point that it is (partially) liquid even when the device is in operation, then the possibility of geometric adaptation continues to exist here as well.
  • the finished device is designed very similarly to the example in FIG.
  • FIG. 2 shows a process stage in which the connecting body 310 of the connecting element has already been applied to the component 100 but has not yet been filled with the filler.
  • the connecting body 310 can be placed loosely in the manner of an insert. It is particularly preferred, however, that it has been produced “in situ” on the component 100 by additive manufacturing 160 of the wiring board 140 permanently connected. However, this permanent connection can also take place elsewhere, in particular on the (power electronic) component 130 itself.
  • additive manufacturing can produce a gradient of certain properties of the pore structure in the direction of the thickness d.
  • a gradient can also be generated in a different spatial direction, or different gradients with regard to different properties can be superimposed.
  • the varied property can in particular be a geometric property such as the pore size, the geometric fill factor of the pore structure and/or the degree of crosslinking of the pores. However, it can also be a gradient in the material composition of the pore structure.
  • FIG Figure 3 shows a subsequent process stage, in which the finished connecting body 310 is filled "in situ" with the filler 320.
  • a dosing device 400 shown only schematically, is connected to the connecting body 310. This can, as shown here, on the side of the connecting body or also in principle from the top side that is still open. A liquid front 330 can also be seen here, since the connecting body 310 is only partially filled with the filler.
  • FIG Figure 4 shows a subsequent state of the device 1, in which the heat sink 200 is connected to the now fully filled connecting element 300.
  • the heat sink is pressed with a pressing force F onto the connecting element 300 the mechanical flexibility becomes the mat-like connecting element ent 300 is compressed due to the contact pressure F, so that its thickness d is reduced compared to FIGS.
  • a desired thickness can be set as a function of the force, at least as long as the filler is still liquid.
  • the pressing force can be designed to be relatively small, especially when only minor geometric adjustments are necessary. Since the wetting of the heat sink 200 by the liquid filler can also contribute to the connection of the heat sink, this contact pressure can advantageously be selected to be lower than in the prior art.
  • the filler also remains (at least partially) in the liquid state during operation of the device, it can be advantageous to encapsulate the connecting element from the external environment at least in the area of the peripheral lateral boundary surface.
  • Such an encapsulation can also completely encapsulate the connecting element, so that in the finished state it can no longer release any liquid filler into the environment.
  • an external compensating device can also be provided, which can absorb the escaping filler material, in particular when the connecting element is strongly compressed, and release it again when there is a decompression.
  • a compensating tank can be provided, for example, which is fluidically connected to the interior of the pore structure in the lateral area of the connecting element in the same way as the dosing device in FIG.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

L'invention concerne un dispositif (1), comprenant : un composant (100) ; un corps de refroidissement (200) ; et un élément de liaison (300) qui est disposé entre le composant (100) et le corps de refroidissement (200) et relie thermiquement le corps de refroidissement (200) au composant (100). L'élément de liaison (300) possède un corps de liaison poreux (310), les pores (311) du corps de liaison (310) étant au moins partiellement remplis d'une charge (320). L'invention concerne également un procédé de production d'un tel dispositif (1).
EP21805879.0A 2020-12-15 2021-10-29 Dispositif comprenant un composant et un corps de refroidissement couplé Pending EP4214748A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP20214055.4A EP4016609A1 (fr) 2020-12-15 2020-12-15 Dispositif pourvu de composant structurel et de corps creux accouplé
PCT/EP2021/080154 WO2022128228A1 (fr) 2020-12-15 2021-10-29 Dispositif comprenant un composant et un corps de refroidissement couplé

Publications (1)

Publication Number Publication Date
EP4214748A1 true EP4214748A1 (fr) 2023-07-26

Family

ID=73854534

Family Applications (2)

Application Number Title Priority Date Filing Date
EP20214055.4A Withdrawn EP4016609A1 (fr) 2020-12-15 2020-12-15 Dispositif pourvu de composant structurel et de corps creux accouplé
EP21805879.0A Pending EP4214748A1 (fr) 2020-12-15 2021-10-29 Dispositif comprenant un composant et un corps de refroidissement couplé

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP20214055.4A Withdrawn EP4016609A1 (fr) 2020-12-15 2020-12-15 Dispositif pourvu de composant structurel et de corps creux accouplé

Country Status (4)

Country Link
US (1) US20240038621A1 (fr)
EP (2) EP4016609A1 (fr)
CN (1) CN116569330A (fr)
WO (1) WO2022128228A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4300571A1 (fr) * 2022-06-27 2024-01-03 Infineon Technologies Austria AG Agencement de module semiconducteur de puissance et son procédé de fabrication

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4227434C2 (de) 1992-08-19 1994-08-18 Geraberger Thermometerwerk Gmb Fieberthermometer
US5459352A (en) * 1993-03-31 1995-10-17 Unisys Corporation Integrated circuit package having a liquid metal-aluminum/copper joint
DE10015962C2 (de) * 2000-03-30 2002-04-04 Infineon Technologies Ag Hochtemperaturfeste Lotverbindung für Halbleiterbauelement
US7726972B1 (en) 2009-07-17 2010-06-01 Delphi Technologies, Inc. Liquid metal rotary connector apparatus for a vehicle steering wheel and column
US9420731B2 (en) * 2013-09-18 2016-08-16 Infineon Technologies Austria Ag Electronic power device and method of fabricating an electronic power device
US11602922B2 (en) * 2017-07-06 2023-03-14 Lg Chem, Ltd. Composite material

Also Published As

Publication number Publication date
WO2022128228A1 (fr) 2022-06-23
EP4016609A1 (fr) 2022-06-22
CN116569330A (zh) 2023-08-08
US20240038621A1 (en) 2024-02-01

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