EP4102296A4 - Pellicle frame, pellicle, exposure original plate with pellicle and exposure method, and method for manufacturing semiconductor device or liquid crystal display board - Google Patents
Pellicle frame, pellicle, exposure original plate with pellicle and exposure method, and method for manufacturing semiconductor device or liquid crystal display boardInfo
- Publication number
- EP4102296A4 EP4102296A4 EP21750061.0A EP21750061A EP4102296A4 EP 4102296 A4 EP4102296 A4 EP 4102296A4 EP 21750061 A EP21750061 A EP 21750061A EP 4102296 A4 EP4102296 A4 EP 4102296A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- pellicle
- exposure
- liquid crystal
- semiconductor device
- crystal display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title 2
- 239000004973 liquid crystal related substance Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020016970 | 2020-02-04 | ||
PCT/JP2021/003614 WO2021157539A1 (en) | 2020-02-04 | 2021-02-02 | Pellicle frame, pellicle, exposure original plate with pellicle and exposure method, and method for manufacturing semiconductor device or liquid crystal display board |
Publications (2)
Publication Number | Publication Date |
---|---|
EP4102296A1 EP4102296A1 (en) | 2022-12-14 |
EP4102296A4 true EP4102296A4 (en) | 2024-03-20 |
Family
ID=77200227
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP21750061.0A Pending EP4102296A4 (en) | 2020-02-04 | 2021-02-02 | Pellicle frame, pellicle, exposure original plate with pellicle and exposure method, and method for manufacturing semiconductor device or liquid crystal display board |
Country Status (7)
Country | Link |
---|---|
US (1) | US20230135575A1 (en) |
EP (1) | EP4102296A4 (en) |
JP (2) | JP6954498B1 (en) |
KR (1) | KR20220137023A (en) |
CN (2) | CN215449882U (en) |
TW (3) | TWI770802B (en) |
WO (1) | WO2021157539A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW202328808A (en) * | 2021-11-01 | 2023-07-16 | 日商信越化學工業股份有限公司 | Pellicle frame, and pellicle |
WO2023149056A1 (en) * | 2022-02-04 | 2023-08-10 | 日本軽金属株式会社 | Optical member and production method therefor |
WO2024009976A1 (en) * | 2022-07-06 | 2024-01-11 | 信越化学工業株式会社 | Pellicle frame, pellicle and exposure original plate with pellicle, method for producing pellicle frame, light exposure method, method for manufacturing semiconductor device, and method for manufacturing liquid crystal display plate |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002202589A (en) * | 2000-12-27 | 2002-07-19 | Mitsui Chemicals Inc | Pellicle |
US20140307237A1 (en) * | 2013-04-15 | 2014-10-16 | Shin-Etsu Chemical Co., Ltd. | Pellicle frame and pellicle with this |
US20180239242A1 (en) * | 2015-08-17 | 2018-08-23 | Mitsui Chemicals, Inc. | Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3388162B2 (en) * | 1997-12-03 | 2003-03-17 | 信越化学工業株式会社 | Method for manufacturing pellicle for lithography |
JP2001249442A (en) | 2000-03-07 | 2001-09-14 | Shin Etsu Chem Co Ltd | Pellicle for semiconductor lithography |
JP2002323752A (en) * | 2001-04-24 | 2002-11-08 | Asahi Glass Co Ltd | Pellicle |
JP2003222990A (en) * | 2001-11-21 | 2003-08-08 | Asahi Glass Co Ltd | Loading structure of photomask with pellicle |
JP2005292623A (en) * | 2004-04-02 | 2005-10-20 | Asahi Glass Co Ltd | Pellicle |
JP6347741B2 (en) * | 2014-12-25 | 2018-06-27 | 信越化学工業株式会社 | Pellicle |
JP6370255B2 (en) * | 2015-04-07 | 2018-08-08 | 信越化学工業株式会社 | Pellicle frame and pellicle using the same |
US20170090278A1 (en) * | 2015-09-30 | 2017-03-30 | G-Force Nanotechnology Ltd. | Euv pellicle film and manufacturing method thereof |
US10241390B2 (en) * | 2016-02-24 | 2019-03-26 | AGC Inc. | Reflective mask blank and process for producing the reflective mask blank |
KR101900720B1 (en) * | 2017-11-10 | 2018-09-20 | 주식회사 에스앤에스텍 | Pellicle for Extreme Ultraviolet(EUV) Lithography and Method for fabricating the same |
-
2021
- 2021-02-02 TW TW110103895A patent/TWI770802B/en active
- 2021-02-02 CN CN202120288860.5U patent/CN215449882U/en active Active
- 2021-02-02 WO PCT/JP2021/003614 patent/WO2021157539A1/en unknown
- 2021-02-02 EP EP21750061.0A patent/EP4102296A4/en active Pending
- 2021-02-02 CN CN202180011703.2A patent/CN115023651A/en active Pending
- 2021-02-02 US US17/796,145 patent/US20230135575A1/en active Pending
- 2021-02-02 JP JP2021523086A patent/JP6954498B1/en active Active
- 2021-02-02 KR KR1020227027691A patent/KR20220137023A/en active Search and Examination
- 2021-02-02 TW TW110201301U patent/TWM618015U/en unknown
- 2021-02-02 TW TW111120791A patent/TW202238261A/en unknown
- 2021-09-27 JP JP2021157022A patent/JP2022000709A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002202589A (en) * | 2000-12-27 | 2002-07-19 | Mitsui Chemicals Inc | Pellicle |
US20140307237A1 (en) * | 2013-04-15 | 2014-10-16 | Shin-Etsu Chemical Co., Ltd. | Pellicle frame and pellicle with this |
US20180239242A1 (en) * | 2015-08-17 | 2018-08-23 | Mitsui Chemicals, Inc. | Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle |
Non-Patent Citations (1)
Title |
---|
See also references of WO2021157539A1 * |
Also Published As
Publication number | Publication date |
---|---|
TW202147021A (en) | 2021-12-16 |
CN115023651A (en) | 2022-09-06 |
JPWO2021157539A1 (en) | 2021-08-12 |
JP6954498B1 (en) | 2021-10-27 |
TW202238261A (en) | 2022-10-01 |
EP4102296A1 (en) | 2022-12-14 |
TWM618015U (en) | 2021-10-11 |
KR20220137023A (en) | 2022-10-11 |
JP2022000709A (en) | 2022-01-04 |
TWI770802B (en) | 2022-07-11 |
CN215449882U (en) | 2022-01-07 |
US20230135575A1 (en) | 2023-05-04 |
WO2021157539A1 (en) | 2021-08-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
|
17P | Request for examination filed |
Effective date: 20220810 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
DAV | Request for validation of the european patent (deleted) | ||
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20240216 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: G03F 1/64 20120101AFI20240212BHEP |