EP4050973A4 - Plasma generation device and plasma processing method - Google Patents
Plasma generation device and plasma processing method Download PDFInfo
- Publication number
- EP4050973A4 EP4050973A4 EP19950060.4A EP19950060A EP4050973A4 EP 4050973 A4 EP4050973 A4 EP 4050973A4 EP 19950060 A EP19950060 A EP 19950060A EP 4050973 A4 EP4050973 A4 EP 4050973A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- plasma
- processing method
- generation device
- plasma processing
- plasma generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/466—Radiofrequency discharges using capacitive coupling means, e.g. electrodes
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2019/041419 WO2021079420A1 (en) | 2019-10-22 | 2019-10-22 | Plasma generation device and plasma processing method |
Publications (2)
Publication Number | Publication Date |
---|---|
EP4050973A1 EP4050973A1 (en) | 2022-08-31 |
EP4050973A4 true EP4050973A4 (en) | 2022-11-09 |
Family
ID=75619936
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19950060.4A Pending EP4050973A4 (en) | 2019-10-22 | 2019-10-22 | Plasma generation device and plasma processing method |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP4050973A4 (en) |
JP (1) | JP7133724B2 (en) |
CN (1) | CN114586473A (en) |
WO (1) | WO2021079420A1 (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017056185A1 (en) * | 2015-09-29 | 2017-04-06 | 富士機械製造株式会社 | Plasma generating device |
EP3197245A1 (en) * | 2014-09-16 | 2017-07-26 | Fuji Machine Mfg. Co., Ltd. | Plasma gas irradiation device |
DE102016125699A1 (en) * | 2016-12-23 | 2018-06-28 | Plasmatreat Gmbh | A nozzle assembly, apparatus for producing an atmospheric plasma jet, use thereof, method for plasma treatment of a cloth or a plastic film, plasma-treated nonwoven fabric and use thereof |
EP3432691A1 (en) * | 2016-03-14 | 2019-01-23 | Fuji Corporation | Plasma generator |
WO2019150447A1 (en) * | 2018-01-30 | 2019-08-08 | 株式会社Fuji | Plasma processing machine |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS3621622Y1 (en) * | 1959-02-03 | 1961-08-21 | ||
DE29911974U1 (en) | 1999-07-09 | 2000-11-23 | Agrodyn Hochspannungstechnik G | Plasma nozzle |
JP2005302681A (en) * | 2003-05-14 | 2005-10-27 | Sekisui Chem Co Ltd | Plasma processing device |
JP2015144078A (en) * | 2014-01-31 | 2015-08-06 | 富士機械製造株式会社 | Air-pressure plasma generator |
MX2017015474A (en) * | 2015-06-02 | 2018-08-15 | Fuji Machine Mfg | Plasma generating device. |
-
2019
- 2019-10-22 WO PCT/JP2019/041419 patent/WO2021079420A1/en unknown
- 2019-10-22 JP JP2021553194A patent/JP7133724B2/en active Active
- 2019-10-22 EP EP19950060.4A patent/EP4050973A4/en active Pending
- 2019-10-22 CN CN201980101498.1A patent/CN114586473A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3197245A1 (en) * | 2014-09-16 | 2017-07-26 | Fuji Machine Mfg. Co., Ltd. | Plasma gas irradiation device |
WO2017056185A1 (en) * | 2015-09-29 | 2017-04-06 | 富士機械製造株式会社 | Plasma generating device |
EP3432691A1 (en) * | 2016-03-14 | 2019-01-23 | Fuji Corporation | Plasma generator |
DE102016125699A1 (en) * | 2016-12-23 | 2018-06-28 | Plasmatreat Gmbh | A nozzle assembly, apparatus for producing an atmospheric plasma jet, use thereof, method for plasma treatment of a cloth or a plastic film, plasma-treated nonwoven fabric and use thereof |
WO2019150447A1 (en) * | 2018-01-30 | 2019-08-08 | 株式会社Fuji | Plasma processing machine |
Non-Patent Citations (1)
Title |
---|
See also references of WO2021079420A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2021079420A1 (en) | 2021-04-29 |
JP7133724B2 (en) | 2022-09-08 |
JPWO2021079420A1 (en) | 2021-04-29 |
EP4050973A1 (en) | 2022-08-31 |
CN114586473A (en) | 2022-06-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
|
17P | Request for examination filed |
Effective date: 20220421 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R079 Free format text: PREVIOUS MAIN CLASS: H05H0001240000 Ipc: H05H0001460000 |
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A4 | Supplementary search report drawn up and despatched |
Effective date: 20221012 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H05H 1/46 20060101AFI20221006BHEP |
|
DAV | Request for validation of the european patent (deleted) | ||
DAX | Request for extension of the european patent (deleted) | ||
P01 | Opt-out of the competence of the unified patent court (upc) registered |
Effective date: 20230328 |