EP4041479A1 - Dispositif laser pour générer un rayonnement laser et dispositif d'impression 3d comprenant un tel dispositif laser - Google Patents

Dispositif laser pour générer un rayonnement laser et dispositif d'impression 3d comprenant un tel dispositif laser

Info

Publication number
EP4041479A1
EP4041479A1 EP20790224.8A EP20790224A EP4041479A1 EP 4041479 A1 EP4041479 A1 EP 4041479A1 EP 20790224 A EP20790224 A EP 20790224A EP 4041479 A1 EP4041479 A1 EP 4041479A1
Authority
EP
European Patent Office
Prior art keywords
laser
laser device
plane
radiation
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20790224.8A
Other languages
German (de)
English (en)
Inventor
Aliaksei KRASNABERSKI
Stephan Schneider
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Limo GmbH
Original Assignee
Limo GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102019126888.5A external-priority patent/DE102019126888A1/de
Application filed by Limo GmbH filed Critical Limo GmbH
Publication of EP4041479A1 publication Critical patent/EP4041479A1/fr
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20—Direct sintering or melting
    • B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30—Process control
    • B22F10/36—Process control of energy beam parameters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40—Radiation means
    • B22F12/44—Radiation means characterised by the configuration of the radiation means
    • B22F12/45—Two or more
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/34—Laser welding for purposes other than joining
    • B23K26/342—Build-up welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0905—Dividing and/or superposing multiple light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends

Definitions

  • Laser device for generating laser radiation as well as 3D printing device with such a laser device
  • the present invention relates to a laser device for generating laser radiation, which has an intensity distribution with a plurality of intensity maxima in a working plane, as well as a 3D printing device with such a laser device.
  • a laser beam, light beam, partial beam or beam does not mean an idealized beam of geometrical optics, but a real light beam, such as a laser beam with a Gaussian profile or a modified Gaussian profile that is not infinitesimal has a small, but an extended beam cross-section.
  • the M-profile denotes an intensity profile of laser radiation, the cross-section of which has a lower intensity in the middle than in one or more extra-central areas.
  • Intensity distribution meant, which at least one direction can essentially be described by a rectangular function (rect (x)).
  • Real intensity distributions that deviate from a rectangular function in the percentage range or have sloping edges are also to be referred to as top hat distribution or top hat profile.
  • a laser device of the type mentioned at the beginning and a 3D printing device of the type mentioned at the beginning are known, for example, from WO 2015/134075 A2.
  • a 3D printing device uses a plurality of semiconductor lasers, the light of which is coupled into a plurality of optical fibers.
  • the laser radiation emerging from the optical fibers is used for the targeted application of a starting material for 3D printing, which is arranged in a work area of the 3D printing device.
  • a disadvantage of laser devices known from the prior art and 3D printing devices with optical fibers from which the laser radiation required for 3D printing emerges is that, as a rule, only a small working distance can be achieved. This can damage or contaminate the optics used. Furthermore, there are gaps between the individual pixels used for 3D printing because the gaps between the cores of the optical fibers are comparatively large and the sheaths of adjacent optical fibers are arranged between the cores. Furthermore, the pixel size is often too large, so that a good resolution cannot be achieved.
  • the problem on which the present invention is based is to create a laser device of the type mentioned above and a 3D printing device of the type mentioned above, which allow a smaller pixel size in the working plane and / or a larger working distance.
  • the laser device comprises a laser light source which, when the laser device is in operation, emits laser radiation that forms a linear or planar intensity distribution with a plurality of intensity maxima in a first plane, the intensity maxima in at least one transverse direction , which is perpendicular to the central direction of propagation of the laser radiation, at least partially have a first distance from one another, the laser device further comprising a projection device which maps the first plane into the working plane in such a way that a linear or planar intensity distribution with a plurality of intensity maxima is formed.
  • the intensity maxima of the intensity distribution in the first plane in at least one transverse direction which is perpendicular to the direction of propagation of the laser radiation, can at least partially have a first distance from one another, the projection device being able to map the first plane into the working plane so reduced that the intensity maxima the intensity distribution in the working plane in at least one transverse direction, which is perpendicular to the direction of propagation of the laser radiation, at least partially have a second distance from one another which is smaller than the first distance.
  • the intensity maxima in the working plane can all have the second distance from one another in the at least one transverse direction.
  • the reduction achieved by the projection device can be between 1 and 20.
  • the size of the intensity maxima or the pixel size in the working plane can be significantly reduced. Also the distances between the individual Intensity maxima can thereby be reduced. In particular, the gaps between the intensity maxima can be filled accordingly.
  • the pixel size can be significantly smaller than 100 ⁇ m or even smaller than the diameter of the cores of the optical fibers.
  • the working distance between the projection device and the working plane is greater than 50 mm, in particular greater than 100 mm, preferably equal to or greater than 200 mm.
  • a reducing projection device increases the working distance accordingly, so that, for example, distances of more than 200 mm can be achieved. In this way, damage to or contamination of the optics used can be avoided. Furthermore, there is an increased depth of field in the working plane.
  • the intensity maxima of the intensity distribution in the first plane in at least one transverse direction, which is perpendicular to the direction of propagation of the laser radiation are at least partially at a first distance from one another, the projection device being able to map the first plane into the working plane in this way, that the intensity maxima of the intensity distribution in the working plane in at least one transverse direction, which is perpendicular to the direction of propagation of the laser radiation, at least partially have a second distance from one another, which is greater than the first distance or which is equal to the first distance.
  • the projection device can achieve a magnification between 1 and 5 or a magnification of 1, for example.
  • the projection device is a telecentric projection device, in particular a projection device that is telecentric on both sides.
  • a telecentric Projection device Through a telecentric Projection device, uniform angular distributions of the laser radiation can be achieved in the working plane. In 3D printing, the even angular distributions lead to even temperature distributions of the raw material to be heated. Compared to a non-telecentric projection device, a telecentric projection device has a greater depth of field and less distortion.
  • At least one component of the projection device is cylindrical in shape.
  • at least one component of the projection device can be cylindrical or spherical or aspherical in shape.
  • at least one component of the projection device is a microlens array.
  • the at least one microlens array is a refractive, reflective or holographic optical element or an optical element with a continuous surface or a binary or multi-stage diffractive optical element.
  • the laser light source comprises at least one fiber laser.
  • other laser light sources such as laser diode bars or the like can also be provided.
  • the laser light source comprises a plurality of optical fibers, from the ends of which a partial radiation of the laser radiation emerges, the optical fibers being in particular single-mode fibers or large-mode area fibers or few-mode fibers.
  • the diffraction index M 2 of such light sources can especially for use with a converter, smaller than 2, preferably smaller than 1.5.
  • the laser light source can have a holder with a plurality of grooves, in particular V-shaped grooves, each of the optical fibers being arranged in one of the grooves.
  • the optical fibers can be precisely positioned with respect to one another.
  • a very constant overlap of the individual intensity maxima of, for example, only 1 pm can be realized in the working plane.
  • the part of the holder that has the V-grooves can be formed in one piece.
  • a one-dimensional or two-dimensional array of optical fibers is formed in that the optical fibers or their ends are connected directly, for example by gluing and / or splicing, to an optical component or to a window, in particular wherein the Connection of the optical fibers with the optical component or the window a, preferably one-piece, optical component is created.
  • the optical component can be the first optical component arranged behind the laser light source in the direction of propagation of the laser radiation.
  • the window can be part of a fiber holder or fiber carrier, for example.
  • the intensity maxima generated in the first plane are each formed by the partial radiation exiting from one of the optical fibers.
  • Suitable optics can be provided in order to focus the partial radiation in the first plane.
  • the partial radiations in the individual optical fibers have a mode profile which corresponds to a Bessel profile or a Gaussian profile or an M profile or a top hat profile.
  • the intensity maxima in the working plane can each have a Gaussian or a super Gaussian or a top hat profile or an M profile or a process-optimized profile.
  • any profile can be generated in the working plane that can deviate from the named profiles.
  • the profile of the intensity distributions can preferably be changed as a function of the materials to be processed.
  • the laser device comprises at least one converter which can change the intensity profile of the laser radiation or one or more of the partial radiations, wherein the converter can, for example, convert a Gaussian profile into a top-hat profile.
  • the at least one converter is designed as a 2D Gaussian to Airy disc functions converter, in particular as an axially symmetrical binary phase plate, or that the at least one converter is designed as a 1 D Gaussian to Sinc -Function converter is designed, in particular as two cylindrical binary phase plates, which are aligned perpendicular to each other.
  • a plurality of converters can be provided, which are arranged in a one-dimensional or a two-dimensional array.
  • Such an array of converters could be arranged between the laser light source and the projection device. It can be provided that the at least one converter is integrated into the projection device. In this case, a single converter could be used instead of an array of converters.
  • Working plane each have a circular or a square or a hexagonal outline.
  • square outlines are advantageous because gaps can be avoided between them.
  • the laser device comprises at least one collimation element, in particular a plurality of collimation elements, for collimation of the laser radiation emerging from the laser light source.
  • the plurality of collimation elements can be arranged in a one-dimensional or a two-dimensional array, which is in particular a lens array.
  • the collimation elements can reduce the divergence of the laser radiation. If the collimation elements are designed as crossed cylindrical lenses, spaces between individual partial beams can be reduced.
  • the plurality of intensity maxima in the working plane can be switched on or off individually or in groups, in particular by appropriate control of the laser light source. This results in individually addressable pixels in the working plane for 3D printing.
  • the individual pixels or intensity maxima in the working plane can have up to several 100 W of power per pixel.
  • linear or planar intensity distributions can be generated in the working plane.
  • the laser device comprises means for superimposing individual partial radiations emanating from the laser light source into individual pixels in the first plane and / or that the laser device comprises means for dividing individual or all partial radiations emanating from the laser light source into several pixels in the first level .
  • the superposition can take place, for example, in a geometrical or optical manner. Alternatively, a superposition can also be achieved via polarization couplers or wavelength couplers.
  • the superposition of several partial beams to form a pixel can be advantageous, for example, to enable power scaling or to reduce the loads on critical optical elements or to have one or more reserve channels if individual channels fail.
  • the division of partial radiation into a plurality of pixels can be advantageous, for example, in the case of parallel processing.
  • the laser device comprises at least one Fourier lens and / or at least one array of Fourier lenses, which are arranged in particular between the laser light source and the first plane.
  • the at least one Fourier lens and / or the at least one array of Fourier lenses can serve, for example, as a means for superimposing individual partial radiations emanating from the laser light source into individual pixels in the first plane. It can be provided that several subsystems of the laser device, which for example generate several laser lines consisting of pixels, can be operated in parallel.
  • the laser device is a laser device according to the invention.
  • Laser device represents an industrially very attractive solution with which, in particular, 3D printing can be carried out with metallic starting materials.
  • the working plane of the laser device can correspond to the working area of the 3D printing device.
  • the scanning device can be designed such that the laser radiation is moved relative to the work area or the work area is moved relative to the laser radiation.
  • the laser radiation generated by the laser device can be deflected by the scanning device as a whole, the scanning device being designed, for example, as a galvano scanner. This is possible in particular because of the good beam quality that can be generated with the laser device according to the invention, the large working distance and the large depth of field in the working plane.
  • FIG. 1 shows a schematic side view of a first embodiment of a laser device according to the invention
  • FIG. 2a shows a first intensity distribution of a laser radiation generated with a laser device according to the invention in a working plane
  • 2b shows a second intensity distribution of a laser radiation generated in a working plane with a laser device according to the invention
  • 3a shows a third intensity distribution of a laser radiation generated in a working plane with a laser device according to the invention
  • 3b shows a fourth intensity distribution of a laser radiation generated in a working plane with a laser device according to the invention
  • FIG. 4 shows a fifth intensity distribution of a laser radiation generated in a working plane with a laser device according to the invention
  • 5 shows a schematic side view of a second embodiment of a laser device according to the invention
  • 6 shows a schematic side view of a third embodiment of a laser device according to the invention
  • FIG. 7a shows a sixth intensity distribution of a laser radiation generated with a laser device according to the invention in a working plane
  • FIG. 7b shows a diagram which illustrates the sixth intensity distribution according to FIG. 7a;
  • 7c shows a seventh intensity distribution of a laser radiation generated in a working plane with a laser device according to the invention
  • FIG. 7d shows a diagram which illustrates the seventh intensity distribution according to FIG. 7c
  • FIG. 8 shows a schematic side view of a fourth embodiment of a laser device according to the invention.
  • FIG. 9 shows a schematic side view of a fifth embodiment of a laser device according to the invention.
  • FIG. 10 shows a schematic side view of a sixth embodiment of a laser device according to the invention.
  • 1 1 shows a schematic side view of a seventh embodiment of a laser device according to the invention
  • 12 shows a schematic side view of an eighth embodiment of a laser device according to the invention
  • FIG. 13 shows a schematic side view of a ninth embodiment of a laser device according to the invention.
  • FIG. 14 shows a schematic side view of a tenth embodiment of a laser device according to the invention.
  • FIG. 15 shows a schematic side view of an eleventh embodiment of a laser device according to the invention.
  • FIG. 16 shows an eighth intensity distribution of a laser radiation generated in a working plane with a laser device according to the invention
  • FIG. 17 shows a schematic side view of a twelfth embodiment of a laser device according to the invention.
  • FIG. 18 shows a schematic side view of a detail of a first embodiment of a 3D printing device according to the invention
  • 19 shows a schematic side view of a detail of a second embodiment of a 3D printing device according to the invention
  • 20 shows a schematic side view of a detail of a third embodiment of a 3D printing device according to the invention
  • 21 a shows a schematic side view of a first embodiment of a projection device of a laser device according to the invention, with some exemplary beams of a laser radiation moving through the projection device being shown;
  • FIG. 21 b shows a schematic side view of the projection device according to FIG. 21 a, in which the laser radiation moving through the projection device is shown;
  • 21c shows a schematic side view, rotated by 90 °, of the projection device according to FIG. 21a, in which the laser radiation moving through the projection device is shown;
  • 22a is a schematic side view of a second
  • Embodiment of a projection device of a laser device according to the invention some exemplary beams of a laser radiation moving through the projection device being shown;
  • FIG. 22b shows a schematic side view of the projection device according to FIG. 22a, in which the
  • 22c shows a schematic side view, rotated by 90 °, of the projection device according to FIG. 22a, in which the laser radiation moving through the projection device is shown;
  • 23a is a schematic side view of a third one
  • Embodiment of a projection device of a laser device according to the invention some exemplary beams of a laser radiation moving through the projection device being shown;
  • 23b shows a schematic side view of the projection device according to FIG. 23a, in which the laser radiation moving through the projection device is shown;
  • 23c is a schematic side view of FIG
  • FIG. 24 shows a schematic side view of a detail of a thirteenth embodiment of a laser device according to the invention.
  • the first embodiment of a laser device according to the invention depicted in FIG. 1 comprises a laser light source 1 for generating one that is only indicated schematically in FIG. 1 Laser radiation 2.
  • the laser light source 1 is designed in particular as an array of lasers, preferably as an array of fiber lasers with a plurality of optical fibers 3, from each of which a partial radiation of the laser radiation 2 emerges.
  • the continuous wave output power of the laser light source 1 can be between 1 W and 1000 W, for example.
  • the wavelength of the laser radiation 2 emitted by the laser light source 1 can be, for example, 1080 nm.
  • a plurality of other lasers such as a laser diode bar with a plurality of emitters are provided, the light of which is each coupled into an optical fiber.
  • the optical fibers 3 are arranged next to one another in a direction which corresponds to the vertical direction in FIG. 1. This results in a one-dimensional array of optical fibers 3, from the ends of which one of the partial radiation emerges.
  • the distance between the centers of the optical fibers can be between 20 ⁇ m and several millimeters.
  • the optical fibers 3 are not arranged next to one another in one direction but rather are arranged next to one another in two directions, in particular perpendicular to one another.
  • the laser light source 1 comprises, in particular, a holder (not shown) with a plurality of V-shaped grooves which are arranged equidistant from one another. Each of the optical fibers 3 is arranged in one of the grooves.
  • the holder can in particular consist of silicone or glass.
  • the optical fibers 3 can be positioned precisely with respect to one another by means of this holder in V-grooves.
  • the part of the holder that has the V-grooves can be formed in one piece.
  • the optical component can be the first in the direction of propagation
  • the optical fibers can also be connected to a window that is part of a fiber holder or fiber carrier, for example.
  • a preferably one-piece optical component can be created.
  • the diameter of the core 4 of the optical fibers 3 indicated in FIG. 1 can be between a few ⁇ m and 100 ⁇ m or more.
  • the mode profile of the laser radiation in each of the optical fibers 3 can be a Bessel profile or a Gaussian profile or a quasi-Gaussian profile or an M profile.
  • the laser radiation 2 emerging from the fiber ends forms in a first plane 5 an intensity distribution 6, indicated schematically in FIG. 1, which has a plurality of intensity maxima 7 spaced apart from one another.
  • the intensity maxima 7 can each have a Gaussian profile, for example.
  • Each of these intensity maxima 7 is formed by one of the partial radiations which emerge from one of the ends of the optical fibers 3.
  • the half width (FWHM) of the individual intensity maxima 7 can be between 10 pm and more than 1 mm.
  • the first distance di of these intensity maxima 7 from one another is indicated in FIG. 1.
  • the laser device further comprises a projection device 8, which is indicated in FIG. 1 only by a rectangle.
  • the projection device 8 is in particular a telecentric, preferably a double-sided telecentric projection device.
  • the numerical aperture of the projection device 8 can be between 0.001 and 0.1 or more.
  • the projection device 8 can comprise at least one refractive component and / or at least one diffractive component and / or at least one reflective component. There is the possibility that at least one component of the projection device is cylindrical or spherical or aspherical in shape. It can be provided that at least one component of the projection device 8 is a microlens array.
  • the at least one microlens array can be a refractive, reflective or holographic optical element or an optical element with a continuous surface or a binary or multi-stage diffractive optical element.
  • the projection device 8 can comprise at least one component which is used to correct chromatic aberration.
  • the projection device 8 can have a zoom function in order to adapt the size of pixels in the working plane or line sizes.
  • the projection device 8 can at least one of the folding of the
  • the projection device 8 can comprise at least one component with a cooling function.
  • the first embodiment of a projection device 8 depicted in FIG. 1 maps the first plane 5 into the working plane 11.
  • the projection device 8 performs a scaled-down
  • the intensity distribution 6 ‘of the laser radiation 2 in the working plane 1 1 is thereby compressed compared to the intensity distribution 6 in the first plane 5.
  • the second distance d2 of the intensity maxima 7 ‘from one another in the working plane 11 is smaller than the first distance di of the intensity maxima 7 in the first plane 5.
  • the reduction in size of the projection device 8 can be between 1 and 20, for example.
  • the projection device 8 further increases the working distance of the working plane 11 from the laser device.
  • the size of the intensity maxima 7 'in the working plane 11 can also be influenced by selecting a working plane that is spaced apart from the working plane 11 and into which a plane adjacent to the first plane is mapped.
  • Fig. 1 are examples of this two planes 5 ', 5 "adjacent to the first plane 5 and two planes 1 1", 1 1' adjacent to the working plane 1 1 are shown.
  • the intensity maxima 7 'of the laser radiation generated in the working plane 11 can be viewed as pixels of a laser radiation that is used for a 3D printing device for generating a spatially extended product.
  • the working plane 11 can be arranged in a working area of a 3D printing device, with the starting material for 3D printing to be applied to the laser radiation being able to be supplied to the working area.
  • Levels 1 1 to 1 1 ", the second distance d2 for the levels 1 1 to 1 1” is more or less the same, whereas the size of the individual partial beams in the levels 1 1 to 1 1 "due to the residual divergence as for the Levels 5 to 5 "are slightly different from each other.
  • an optimal pixel size is determined not only by the optical pixel size and / or the intensity profile, but also by the physical properties of the materials to be processed, such as the thermal conductivity and the density of the material to be processed.
  • the size of the partial radiation or the pixels can be adapted by simply changing from one level 1 1 to another level 1 1 ', 1 1 ". This can be, for example, a change from a level 1 1, 1 1', 1 1 " with the best homogeneity of the line intensity to another level 1 1,
  • the individual intensity maxima 7 ‘or pixels of the laser radiation 2 used for 3D printing can be switched on and off in a targeted manner. This switching on or off of the pixels can in particular be achieved by appropriate control of the laser light source 1. For example, some of the
  • Fiber lasers can be switched on or off.
  • the cross section of the intensity maxima 7 ‘or of the pixels is circular in the embodiment according to FIG. 1.
  • the cross section is indicated in FIG. 1 by the circles 12 arranged next to one another.
  • FIG. 2a shows a linear intensity distribution 6 6 of the laser radiation 2 in the working plane 1 1 in a state in which all pixels or intensity maxima 7 ‘are present.
  • Fig. 2b shows the intensity distribution 6 ‘in a state in which every second pixel is switched off.
  • FIGS. 3a and 3b show a similar comparison for a laser device which generates a planar intensity distribution 6 ′ in the working plane 11.
  • 3a shows the intensity distribution 6 'of the laser radiation 2 in the working plane 11 in a state in which all pixels or intensity maxima 7' are present are.
  • FIG. 3b shows the intensity distribution 6 'in a state in which every second pixel is switched off.
  • Fig. 4 shows a planar intensity distribution 6 ‘in the working plane 1 1, in which the pixels or intensity maxima 7 Sind are hexagonally densely packed.
  • the embodiment shown in FIG. 5 essentially corresponds to that in FIG. 1.
  • the embodiment according to FIG. 5 comprises a schematically indicated additional array 13 of optical elements 14 between the laser light source 1 and the projection device 8.
  • the optical elements 14 can be collimation lenses in order to collimate the laser radiation 2 emerging from the laser light source 1.
  • the optical elements 14 can also be imaging elements or telescopic elements in order to enlarge the depth of field of a focal plane generated in the first plane 5.
  • the optical elements 14 can, for example, map the fiber ends into the first plane 5.
  • the optical elements 14 can be cylindrical or spherical in shape.
  • optical elements 14 of the two arrays 13 can, for example, be cylindrical lenses that are crossed with respect to one another.
  • FIG. 6 essentially corresponds to that in FIG.
  • Embodiment according to FIG. 6 an additional array 15 of converters 16 and an additional array 17 of Fourier lenses 18.
  • the converters 16, together with the Fourier lenses 18, can Change the intensity profile of the laser radiation 2 or one or more of the partial radiations, each of the converters 16 being able to convert, for example, a Gaussian profile into a top-hat profile.
  • each of the converters 16 can convert a Gaussian profile into an M profile, for example.
  • a converter can be provided which is designed as a 2D Gaussian to Airy disc functions converter.
  • An Airy disc function corresponds to ⁇ Ji (r) / r, where Ji is a Bessel function of the first type.
  • Such Airy disc functions are described, for example, in US Pat. No. 9,285,593 B1.
  • Functions converter is an axially symmetric binary phase plate. Such a phase plate is described in US Pat. No. 5,300,756.
  • a converter can also be provided which is designed as a 1 D Gaussian-to-Sinc function converter.
  • a sinc function corresponds to 5 ⁇ h (pc) / pc.
  • An example of a 1 D Gaussian-to-Sinc function converter are two cylindrical binary phase plates which are aligned perpendicular to one another.
  • Such a converter for example a 2D converter or two 1 D plates aligned perpendicularly to one another, is used together with a Fourier lens as a Gaussian-to-Tophat converter or a Gaussian-to-M-shape converter.
  • FIGS. 7a and 7b show a linear intensity distribution 6 of the laser radiation 2 in the working plane 11 in a state in which all pixels or intensity maxima 7 ‘are present.
  • FIGS. 7c and 7d show the intensity distribution 6 ‘in a state in which every second pixel is switched off. This makes it clear that the intensity maxima 7 ‘in FIG. 7d have a top-hat profile.
  • FIG. 8 essentially corresponds to that in FIG. 6.
  • the embodiment according to FIG. 8 comprises only one array 13 of optical elements 14, which can be designed as collimation lenses, for example, and an additional array 15 of converters 16, the Fourier lenses being integrated into this array 15.
  • FIG. 9 essentially corresponds to that in FIG. 8.
  • the embodiment according to FIG. 9 comprises only one array 13 of optical elements 14, which can be designed as collimation lenses, for example, the converter and the Fourier lenses in this array 15 are integrated.
  • FIG. 10 corresponds essentially to that in FIG. 6.
  • the cross section is
  • Intensity maxima 7 'or the pixels are square.
  • the cross section is indicated in FIG. 10 by the squares 19 arranged next to one another.
  • a square cross section of the Intensity maxima 7 ' can be achieved, for example, by using crossed cylinder lenses instead of spherical or aspherical circular lenses. This can be the lenses of the arrays 13, 17.
  • the embodiment shown in Fig. 1 1 corresponds to
  • the cross section of the intensity maxima 7 or of the pixels is square.
  • the cross section is indicated in FIG. 11 by the squares 19 arranged next to one another.
  • FIG. 12 essentially corresponds to that in FIG. 9.
  • the cross section of the intensity maxima 7 ‘or of the pixels is square.
  • the cross section is indicated in FIG. 12 by the squares 19 arranged next to one another.
  • a converter 20 which can change the intensity profile 6 of all partial radiations of the laser radiation 2.
  • the converter 20 can, for example, convert a Gaussian profile into a top hat profile or a Gaussian profile into an M profile.
  • the intensity maxima 7 in the first plane 5 have a Gaussian profile and the intensity maxima 7 ′ in the working plane 11 have a top-hat profile.
  • the converter 20 can be designed as a 2D Gaussian to Airy disc functions converter.
  • An example of a 2D Gaussian to Airy disc functions converter is an axially symmetric binary phase plate.
  • the converter 20 can also be designed as a 1 D Gaussian-to-Sinc function converter.
  • Converters are two cylindrical binary phase plates that are aligned perpendicular to each other.
  • the second half of the projection lens 8, which is arranged behind the converter 20 can serve as a Fourier lens.
  • a different Fourier lens can alternatively be provided.
  • the converter 20 is arranged in the projection device 8 at a location at which aperture diaphragms are usually provided.
  • the embodiment shown in FIG. 14 essentially corresponds to that in FIG. 13.
  • the embodiment according to FIG. 14 comprises a schematically indicated additional array 13 of optical elements 14 between the laser light source 1 and the projection device 8.
  • the optical elements 14 can Be collimation lenses in order to collimate the laser radiation 2 emerging from the laser light source 1.
  • the optical elements 14 can also be imaging elements or telescopic elements in order to enlarge the depth of field of a focal plane generated in the first plane 5.
  • the optical elements 14 can, for example, map the fiber ends into the first plane 5.
  • the optical elements 14 can be cylindrical or spherical in shape.
  • FIG. 15 essentially corresponds to that in FIG. 13.
  • the cross section of the intensity maxima 7 ′ or of the pixels is square.
  • the cross section is indicated in FIG. 15 by the squares 19 arranged next to one another.
  • FIG. 16 shows a planar or rectangular intensity distribution 6 ‘of the laser radiation 2 in the working plane 11 that can be generated by the laser device according to FIG. 15.
  • it can have 5 by 150 pixels with a top hat profile and a
  • Diameters of more than 100 ⁇ m can be provided. In the state shown in FIG. 16, every second pixel or intensity maximum 7 is switched off.
  • FIG. 17 essentially corresponds to that in FIG. 14.
  • the cross section of the intensity maxima 7 ′ or of the pixels is square.
  • the cross section is indicated in FIG. 17 by the squares 19 arranged next to one another.
  • a scanning device 21 indicated only schematically, is provided in addition to a laser device, with which the laser radiation 2 can be moved in the working plane 11.
  • the scanning device 21 can be designed, for example, as a polygon scanner or as a galvanometer scanner.
  • the scanning device 21 is arranged between the projection device 8 and the working plane 11.
  • the working plane 11 of the laser device can correspond to a working area of the 3D printing device to which the starting material for the 3D printing to be acted upon with the laser radiation 2 can be supplied.
  • FIG. 17 can be integrated into the 3D printing device according to FIG. 18.
  • the embodiment shown in FIG. 19 corresponds to FIG.
  • the scanning device 21 is arranged in the projection device 8, in particular between a first part 9 and a second part 10 of the projection device 8.
  • the common converter 20 is between the
  • the two parts 9, 10 can form a Fourier transforming device.
  • the first part 9 can, for example, have a zoom function to have.
  • the second part 10 can serve, for example, as an F-theta lens or as a flat field lens.
  • FIG. 20 corresponds essentially to that in FIG. 19. In contrast to this, in the embodiment according to FIG. 20
  • Projection device 8 arranged, wherein the scanning device 21 can nevertheless be arranged in particular between two schematically indicated parts 9, 10 and in front of the common converter 20.
  • the two parts 9, 10 can form a Fourier transforming device.
  • the first part 9 can have a zoom function, for example.
  • the second part 10 can serve, for example, as an F-theta objective or as a flat field lens.
  • the laser radiation 2 generated by the laser device can be deflected by the scanning device 21 as a whole.
  • FIGS. 21 a to 21 c a preferred embodiment of a projection device 8 is shown, which brings about a reduction by a factor of 5 when imaging from the first plane 5 into the working plane 11.
  • the projection device 8 three groups 22, 23, 24 of at least one lens each are provided.
  • the first group 22 has a positive refractive power
  • the second group 23 has a negative refractive power
  • the third group 24 in turn has a positive refractive power.
  • 21b and 21c show the passage of the laser radiation 2 through the projection device 8 in two mutually perpendicular directions x, y transversely to the direction of propagation z.
  • FIGS. 22a to 22c a likewise preferred embodiment of a projection device 8 is shown, which effects a 1: 1 mapping from the first plane 5 into the working plane 11.
  • the projection device 8 there are again three groups 22, 23, 24 each provided by at least one lens.
  • the first group 22 has a positive refractive power
  • the second group 23 has a negative refractive power
  • the third group 24 in turn has a positive refractive power.
  • FIGS. 22b and 22c show the passage of the laser radiation 2 through the projection device 8 in two mutually perpendicular directions x, y transverse to the direction of propagation z.
  • the projection device 8 depicted in FIGS. 23a to 23c corresponds to that according to FIGS. 22a to 22c except for an additional converter 20 which is arranged in the projection device 8 at a location where aperture diaphragms are usually provided.
  • the converter 20 consists of two Gaussian-to-top hat converters which are arranged one behind the other and are arranged crossed with respect to one another.
  • FIGS. 23a to 23c show the passage of the laser radiation 2 through the projection device 8 in two mutually perpendicular directions x, y transverse to the direction of propagation z.
  • the embodiment shown in FIGS. 23a to 23c can on the one hand be viewed as a projection device or imaging device with an additional converter. Alternatively, the embodiment can also be understood in this way that between a first Fourier-transforming part 25 and a second Fourier-transforming part 26 of the converter 20 is arranged.
  • the projection device 8 was shown in the same way in FIGS. 1, 5, 6 and 8 to 12 or in FIGS. 13 to 18 and 20. Nevertheless, the projection device 8 shown in individual of the figures can have components or a structure or properties that differ from those of other individual or all other projection devices 8 in the other figures. Furthermore, due to a different environment of the projection device 8, such as the addition of an array 13 (see FIGS. 1 and 5 or FIGS. 13 and 14), the imaging properties of the projection device 8, such as the distance from the first level 5 to working level 1 1, even if the distance is shown in simplified form in each case the same in the figures.
  • mapping the first plane 5 into the working plane 11 the order of the intensity maxima 7, 7 ‘or the pixels arranged next to one another can be maintained or changed.
  • three pixels a - b - c arranged next to one another in the first level 5 in the working plane 11 could also be in the order a '- b' - c 'or, for example, in the order c' - b '- a' or for example be arranged in the order b '- a' - c '.
  • a two-dimensional array not shown, of for example 9 by 150 optical fibers is provided, of which the laser radiation 2 shown in FIG. 24 goes out.
  • the embodiment comprises two arrays 13 of optical elements 14, which are designed as cylindrical lenses and are used for collimation.
  • the cylinder axes of the cylinder lenses on the two arrays 13 are aligned perpendicular to one another or designed as crossed cylinder lenses.
  • the embodiment according to FIG. 24 furthermore comprises two mutually crossed arrays 15 of converters 16. Furthermore, the embodiment comprises a Fourier lens 27 and an adjoining array 17 of Fourier lenses 18.
  • the converters 16, together with the Fourier lenses 18, can define the intensity profile of the laser radiation 2 or change one or more of the partial radiations, each of the converters 16 being able to convert, for example, a Gaussian profile into a top-hat profile. Alternatively, each of the converters 16 can convert a Gaussian profile into an M profile, for example.
  • the nine partial radiations of the laser radiation 2 running next to one another in the vertical direction in FIG. 24 are combined by the Fourier lens 27 with one another in the first plane 5, so that a linear intensity distribution with 1 by 150 pixels is generated there.
  • the intensity distribution from the first plane 5 is mapped into the working plane 11 by the projection device (not shown).

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Abstract

L'invention concerne un dispositif laser pour générer un rayonnement laser, qui présente une répartition d'intensité avec une pluralité de maxima d'intensité dans un plan de travail (11), comprenant une source de lumière laser (1) qui émet un rayonnement laser (2) pendant le fonctionnement du dispositif laser, formant une répartition d'intensité linéaire ou plane (6) avec une pluralité de maxima d'intensité (7) dans un premier plan (5), les maxima d'intensité (7) étant au moins partiellement à une première distance (d1) les uns des autres dans au moins une direction transversale perpendiculaire à la direction de propagation du rayonnement laser (2), et comprenant de plus un dispositif de projection (8) qui projette le premier plan (5) dans le plan de travail (11) de telle sorte qu'une répartition d'intensité linéaire ou plane (6') avec une pluralité de maxima d'intensité (7') est produite dans le plan de travail (11).
EP20790224.8A 2019-10-07 2020-10-06 Dispositif laser pour générer un rayonnement laser et dispositif d'impression 3d comprenant un tel dispositif laser Pending EP4041479A1 (fr)

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DE102019126888.5A DE102019126888A1 (de) 2019-10-07 2019-10-07 Laservorrichtung zur Erzeugung von Laserstrahlung sowie 3D-Druck-Vorrichtung mit einer derartigen Laservorrichtung
DE102019135446 2019-12-20
PCT/EP2020/077999 WO2021069441A1 (fr) 2019-10-07 2020-10-06 Dispositif laser pour générer un rayonnement laser et dispositif d'impression 3d comprenant un tel dispositif laser

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US (1) US20240066630A1 (fr)
EP (1) EP4041479A1 (fr)
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JP2024531055A (ja) * 2021-08-19 2024-08-29 ヴァルカンフォームズ インコーポレイテッド アディティブマニュファクチャリングにおいて使用するためのエンドキャップを含む光ファイバ
CN115447137B (zh) * 2022-09-29 2024-06-14 哈尔滨工程大学 一种光固化3d打印装置以及打印方法

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CN114631047A (zh) 2022-06-14

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