EP2054751A1 - Dispositif d'homogeneisation de lumiere et dispositif laser de production d'une repartition d'intensite lineaire dans un plan de travail - Google Patents

Dispositif d'homogeneisation de lumiere et dispositif laser de production d'une repartition d'intensite lineaire dans un plan de travail

Info

Publication number
EP2054751A1
EP2054751A1 EP07764852A EP07764852A EP2054751A1 EP 2054751 A1 EP2054751 A1 EP 2054751A1 EP 07764852 A EP07764852 A EP 07764852A EP 07764852 A EP07764852 A EP 07764852A EP 2054751 A1 EP2054751 A1 EP 2054751A1
Authority
EP
European Patent Office
Prior art keywords
laser
lenses
intensity distribution
light
lens array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07764852A
Other languages
German (de)
English (en)
Inventor
Thomas Mitra
Andreas Bayer
Heiko Ganser
Torsten STEINBRÜCK
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Focuslight Germany GmbH
Original Assignee
Hentze Lissotschenko Patentverwaltungs GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hentze Lissotschenko Patentverwaltungs GmbH and Co KG filed Critical Hentze Lissotschenko Patentverwaltungs GmbH and Co KG
Publication of EP2054751A1 publication Critical patent/EP2054751A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0043—Inhomogeneous or irregular arrays, e.g. varying shape, size, height
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/005—Arrays characterized by the distribution or form of lenses arranged along a single direction only, e.g. lenticular sheets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0062—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between
    • G02B3/0068—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between arranged in a single integral body or plate, e.g. laminates or hybrid structures with other optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0062—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between

Definitions

  • the present invention relates to a device for homogenizing light according to the preamble of claim 1 and to a laser device for producing a linear intensity distribution in a working plane according to the preamble of claim 7.
  • Homogenization of light have lens arrays in which a plurality, in particular all of the lenses are different from all other lenses in terms of aperture, focal length and possibly other parameters. By a particular random distribution of these different lenses in the array is a good
  • WO 2005/085935 Another device for homogenization is known from WO 2005/085935.
  • a plurality of biconvex cylindrical lenses are arranged side by side in a lens array, wherein each of the lenses is the same size and has the same focal length.
  • a top hat Such an intensity distribution has, for example, very good homogeneity and very steep flanks.
  • the falling flanks may have a defined pitch. This can in Homogenisierern according to the prior art by Defocusing can be achieved. However, the intensity profile generally deteriorates and is difficult to control.
  • An application for this purpose are, for example, long, compound lines, as they are to be generated by the laser device mentioned above.
  • long laser lines for example greater than 100 mm
  • the distance is at least as long as the line is long. In industrial applications, this much space is often not available, especially for line lengths of more than one meter.
  • a laser device of the type mentioned is known from US 6,717, 105 B1.
  • the laser device described therein comprises a plurality of laser light sources, each associated with an optical means.
  • the optical means each form laser beams with a linear intensity distribution from the laser light of the laser light sources, wherein these individual laser beams can be superimposed in a working plane to form a common line-shaped intensity distribution.
  • the center distances of the lenses decrease or increase from the inside to the outside.
  • the desired radiation characteristic of the homogenizer is realized by a variation of the center distance (pitch), in particular with a simultaneously constant focal length of the individual lenses of the lens array.
  • the center distance pitch
  • This principle is suitable for one-stage as well as two-stage homogenization, as well as for the use of a monolithic
  • the core of the invention is thus a homogenizer, which generates a defined, trapezoidal angular distribution for one or two axes.
  • the optical means of the laser device comprise a device according to the invention for homogenization.
  • Fig. 1 is a perspective view of an inventive
  • FIG. 2a shows a side view of a first embodiment of a device according to the invention for the homogenization of light
  • FIG. 2b shows a side view of a second embodiment of a device according to the invention for the homogenization of light
  • FIG. 4 shows an intensity distribution which can be achieved with a laser device according to the invention in arbitrary units.
  • FIG. 1 The basic principle of a laser device according to the invention is shown in FIG.
  • On display are seven laser modules 1 with similar, but not necessarily the same beam profile that illuminate a Optikmod ul.
  • seven optical means 2 are included for beam shaping, each generating laser light 3 with an at least partially line-shaped intensity distribution.
  • the special feature is that through the use of inventive
  • the laser modules 1, which illuminate that Optikmod ul, can be easily replaced due to the vast independence of the optical module from the input beam.
  • Fig. 2a shows a device according to the invention for
  • the lenses 6 are formed as cylindrical lenses with cylinder axes in the Y direction. It can be clearly seen that the pitch P 1 , P 2 of the lenses 6 in the center of the lens array 5 is smaller than at the edge. This is achieved in that the width of the lenses 6 in the X direction (see coordinate system shown), in which they are arranged side by side, increases from the center outwards. Alternatively, there is a possibility that the center distance decreases from the center to the outside.
  • the focal length of the lenses 6 is the same for all the lenses 6.
  • the focal length f ⁇ of the rear refractive surfaces in the Z direction may correspond to the thickness of the lenses 6 in the Z direction or in the propagating direction of the homogenizing light.
  • Fig. 2b shows a two-stage device according to the invention for the homogenization of light.
  • This comprises two lens arrays 7, 8, each having a plurality of lenses 9, 1 0. Again, take the center distance P 1 , P 2 of the lenses 7, 8 from the center outwards. Alternatively, there is also the possibility that the center distance decreases from the center to the outside.
  • the focal length of the lenses for all lenses 9 on the first lens array 7 and / or for all lenses 10 on the second lens array 8 is the same.
  • the focal length fio of the Z-direction rear refractive surfaces may correspond to the distance of the lenses 9 to the lenses 10 in the Z direction.
  • a plurality of cylindrical lenses with cylinder axes can then be arranged in the X direction, for example on the mutually facing sides of the lens arrays 7, 8 according to FIG. 2b.
  • These cylindrical lenses can be a corresponding from the
  • FIG. 3 shows that with such a device for homogenization, an intensity profile can be generated which has a central region of constant intensity and two edge regions with linearly decreasing intensity.
  • a defined, trapezoidal angular distribution for one or two axes can be generated.
  • This principle is suitable for one-stage as well as for a two-stage homogenization, as well as for the use of a monolithic homogenizer.
  • FIG. 4 shows a simulation result for the laser device. Two lines of the laser light 3 with trapezoidal intensity distribution, each 190 mm in length, are combined to form a linear intensity distribution 4. The homogeneity thereby achieved is about 96% or about + 1-2%.
  • flanks with constant slope of the intensity distribution of the individual lines of the laser light 3 can thus be superimposed optimally in the working plane to a linear intensity distribution 4.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Laser Beam Processing (AREA)

Abstract

La présente invention concerne un dispositif d'homogénéisation de la lumière, comprenant une matrice de lentilles (5, 7, 8) avec une pluralité de lentilles (6, 9, 10) qui peuvent être traversées par la lumière à homogénéiser. La matrice de lentilles (5, 7, 8) présente au moins deux écartements moyens différents entre les lentilles (6, 9, 10), et les écartements moyens entre les lentilles (6, 9, 10) augmentent ou diminuent de l'intérieur vers l'extérieur. L'invention concerne en outre un dispositif laser de production d'une répartition d'intensité linéaire dans un plan de travail avec un tel dispositif d'homogénéisation de la lumière.
EP07764852A 2006-07-13 2007-06-26 Dispositif d'homogeneisation de lumiere et dispositif laser de production d'une repartition d'intensite lineaire dans un plan de travail Withdrawn EP2054751A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006032657 2006-07-13
DE102006033069 2006-07-14
PCT/EP2007/005626 WO2008006460A1 (fr) 2006-07-13 2007-06-26 Dispositif d'homogénéisation de lumière et dispositif laser de production d'une répartition d'intensité linéaire dans un plan de travail

Publications (1)

Publication Number Publication Date
EP2054751A1 true EP2054751A1 (fr) 2009-05-06

Family

ID=38521011

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07764852A Withdrawn EP2054751A1 (fr) 2006-07-13 2007-06-26 Dispositif d'homogeneisation de lumiere et dispositif laser de production d'une repartition d'intensite lineaire dans un plan de travail

Country Status (5)

Country Link
US (1) US8395844B2 (fr)
EP (1) EP2054751A1 (fr)
JP (1) JP2009543143A (fr)
KR (1) KR20090029748A (fr)
WO (1) WO2008006460A1 (fr)

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DE102009021251A1 (de) 2009-05-14 2010-11-18 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Formung von Laserstrahlung sowie Laservorrichtung mit einer derartigen Vorrichtung
US8946594B2 (en) * 2011-11-04 2015-02-03 Applied Materials, Inc. Optical design for line generation using microlens array
JP2015531895A (ja) 2012-09-24 2015-11-05 リモ パテントフェルヴァルトゥング ゲーエムベーハー ウント コー．カーゲーＬＩＭＯ Ｐａｔｅｎｔｖｅｒｗａｌｔｕｎｇ ＧｍｂＨ ＆ Ｃｏ．ＫＧ 作業面におけるレーザビームの線形強度分布を発生させるための装置
JP6175761B2 (ja) * 2012-12-03 2017-08-09 セイコーエプソン株式会社 電気光学装置及び電子機器
JP5884743B2 (ja) * 2013-01-30 2016-03-15 ソニー株式会社 照明装置および表示装置
JPWO2016185853A1 (ja) * 2015-05-15 2018-03-08 ソニー株式会社 光源装置、照明装置およびプロジェクタ
CN111505749B (zh) 2019-01-31 2023-08-15 日亚化学工业株式会社 透镜阵列以及照明光学装置
JP7311746B2 (ja) * 2019-01-31 2023-07-20 日亜化学工業株式会社 レンズアレイ及び照明光学装置

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JPH0424712A (ja) * 1990-05-15 1992-01-28 Matsushita Electric Ind Co Ltd ２次元レンズアレイおよび神経ネットワーク回路
JP2788791B2 (ja) * 1991-01-08 1998-08-20 三菱電機株式会社 フライアイレンズ装置およびそのフライアイレンズ装置を含む照明装置
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JPH10253916A (ja) * 1997-03-10 1998-09-25 Semiconductor Energy Lab Co Ltd レーザー光学装置
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DE10136611C1 (de) * 2001-07-23 2002-11-21 Jenoptik Laserdiode Gmbh Optische Anordnung zur Formung und Homogenisierung eines von einer Laserdiodenanordnung ausgehenden Laserstrahls
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US6859326B2 (en) * 2002-09-20 2005-02-22 Corning Incorporated Random microlens array for optical beam shaping and homogenization
US7186004B2 (en) * 2002-12-31 2007-03-06 Karlton David Powell Homogenizing optical sheet, method of manufacture, and illumination system
WO2005008593A1 (fr) 2003-07-18 2005-01-27 Canon Kabushiki Kaisha Dispositif de traitement d'image, dispositif d'imagerie, procede de traitement d'image
US6950239B2 (en) 2004-01-08 2005-09-27 Tang Yin S Method for making micro-lens array
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JP2007528509A (ja) * 2004-03-06 2007-10-11 ヘンツェ−リソチェンコ パテントフェルヴァルトゥングス ゲーエムベーハー ウント コー．カーゲー 光を均一化するための装置および照射のための配置またはそのような装置による集光
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JP4665630B2 (ja) * 2005-07-05 2011-04-06 株式会社日立製作所 投射型映像表示装置およびオプチカルインテグレータ

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Also Published As

Publication number Publication date
US8395844B2 (en) 2013-03-12
WO2008006460A1 (fr) 2008-01-17
KR20090029748A (ko) 2009-03-23
US20110051253A1 (en) 2011-03-03
JP2009543143A (ja) 2009-12-03

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