WO2008087012A1 - Dispositif pour homogénéiser la lumière et dispositif pour produire une distribution linéaire de l'intensité dans un plan de travail - Google Patents

Dispositif pour homogénéiser la lumière et dispositif pour produire une distribution linéaire de l'intensité dans un plan de travail Download PDF

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Publication number
WO2008087012A1
WO2008087012A1 PCT/EP2008/000273 EP2008000273W WO2008087012A1 WO 2008087012 A1 WO2008087012 A1 WO 2008087012A1 EP 2008000273 W EP2008000273 W EP 2008000273W WO 2008087012 A1 WO2008087012 A1 WO 2008087012A1
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WO
WIPO (PCT)
Prior art keywords
lens array
light
lenses
center distance
lens
Prior art date
Application number
PCT/EP2008/000273
Other languages
German (de)
English (en)
Other versions
WO2008087012A8 (fr
Inventor
Aleksei Mikhailov
Vitalij Lissotschenko
Original Assignee
Limo Patentverwaltung Gmbh & Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Limo Patentverwaltung Gmbh & Co. Kg filed Critical Limo Patentverwaltung Gmbh & Co. Kg
Publication of WO2008087012A1 publication Critical patent/WO2008087012A1/fr
Publication of WO2008087012A8 publication Critical patent/WO2008087012A8/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0961—Lens arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0966—Cylindrical lenses

Definitions

  • the present invention relates to a device for homogenizing light according to the preamble of claim 1 and to an apparatus for producing a linear intensity distribution in a working plane according to the preamble of claim 10.
  • the mean propagation direction of the light means, especially if this is not a plane wave or at least partially divergent.
  • light beam, sub-beam or beam is meant, unless expressly stated otherwise, an idealized beam of geometric optics, but a real light beam, such as a laser beam with a Gaussian profile, which has no infinitesimal small, but an extended beam cross-section.
  • Pitch means the distance of the centers of the lenses of an array from each other in the direction in which the lenses in the array are juxtaposed.
  • a comparatively wide field lens is arranged in the direction in which the lenses are arranged next to one another in the array, which can superimpose the light which has passed through the lens arrays in a working plane. If a very long line-shaped intensity distribution is to be generated in the working plane, the field lens would have to be disproportionately wide. This raises manufacturing problems and may lead to Influencing the quality of the intensity distribution due to lens aberrations. Furthermore, the production of such a lens is associated with high costs.
  • the problem underlying the present invention is the provision of a device for the homogenization of light of the type mentioned above and a device for generating a linear intensity distribution in a working plane of the type mentioned which are constructed simpler and / or more effective.
  • the at least one second center distance of the second lens array is different from the at least one first center distance of the first lens array, so that portions of the light to be homogenized passed through different lenses of the second lens array are spaced behind and in the propagation direction of the light are superposed with each other to the second lens array in the first direction.
  • Center distance of the second lens array is smaller than the at least one first center distance of the first lens array.
  • the center distance of the second lens array could be greater than the at least one first center distance of the first lens array
  • the at least one second center distance of the second lens array is less than 10 ⁇ m from the at least one first center distance of the first
  • the at least one second center distance of the second lens array may be less than 5 .mu.m, in particular by 0.1 .mu.m to 3 .mu.m, preferably by 0.5 .mu.m to 1.5 .mu.m, for example by about 1 .mu.m from the at least one first center spacing of the first lens array differ. Even such a small difference between the pitch of the first and second lens arrays can cause a complete superposition of the portions of the light that have passed through individual lenses.
  • At least some of the lenses of the second lens array are different from each other.
  • at least the lenses arranged in the edge regions of the second lens array can be asymmetrical, in particular with respect to a central Y-Z plane.
  • groups of identical lenses can be provided which correspond to one another in terms of shape and size, the lenses of different groups being different from one another.
  • manufacturing costs can be reduced.
  • the device for producing a linear intensity distribution in a working plane according to claim 10 characterized by an inventive device for homogenization.
  • Fig. 1 a is a schematic partial view of a first
  • FIG. 1 b schematically shows an intensity distribution in a first plane of the device according to FIG. 1 a;
  • FIG. 1 c schematically shows an intensity distribution in a second plane of the device according to FIG. 1 a;
  • FIG. 2 shows a schematic partial plan view of an embodiment of a device according to the invention for homogenizing light
  • FIG. 3 is a schematic plan view of a first detail of the device according to FIG. 2;
  • FIG. 3 is a schematic plan view of a first detail of the device according to FIG. 2;
  • FIG. 4 is a schematic plan view of a second detail of the device according to FIG. 2; FIG.
  • Fig. 5a shows schematically an intensity distribution in a first
  • FIG. 5b schematically shows an intensity distribution in a second plane of the device according to FIG. 5a.
  • Cartesian coordinate systems are shown for clarity.
  • Fig. 1 a schematically a plurality of light sources 1 can be seen, which have a square outline and a central small circular light emitting portion 2.
  • Light sources 1 may be, for example, ends of optical fibers in corresponding holders.
  • the light of one or more lasers can be coupled into these optical fibers on the input side.
  • the light emitting sections 2 send out light beams 3 in the Z direction or into the plane of drawing of FIG. 1a.
  • the arrows 4 in Fig. 1 a and in each other of the figures are intended to indicate that in the X direction more light sources 1 or more light beams 3 may be present as shown. Due to the geometry of the light sources 1, the light emitting
  • Section 2 in Fig. 1 a separated by comparatively large spaces.
  • FIG. 1 b schematically shows an intensity distribution in the propagation direction Z of the light behind such compressing beam-shaping means. In this intensity distribution, the distances between the individual light beams 3 in the Y direction are reduced, whereas the distances in
  • second Beam reforming means can be achieved, the single of the light beams 3 are rotated relative to each other.
  • the light beams 3 arranged next to each other in the Y direction are rotated through 90 ° by the second beam shaping means, so that they are subsequently arranged next to one another in the X direction.
  • Fig. 1 c shows schematically the intensity distribution in the propagation direction Z of the light behind such rotating beam forming means.
  • FIG. 1 c shows that a plurality of light beams 3 are arranged close to each other in the X-direction.
  • FIG. 2 is a schematic representation of a device 5 according to the invention
  • this device 5 enters a light distribution, which corresponds for example to the intensity distribution of FIG. 1 c.
  • reference numerals a, b, c, d, e and f denote individual sections of the device 5.
  • the arrows 4 in FIG. 2 are intended to indicate that more sections than in the X-direction can be present in the X-direction.
  • an intensity distribution 6 is shown schematically in Fig. 2, which corresponds to that in Fig. 1 c and the densely arranged side by side light beams 3 is intended to illustrate.
  • the emerging from the device light beams 7 are in
  • the device 5 comprises a first lens array 9 and a second lens array 10, which are arranged one behind the other in the propagation direction Z of the light.
  • the lens arrays each comprise a plurality of cylindrical lenses 1 1, 12 arranged side by side in the X direction, the cylinder axes of which extend in the Y direction.
  • the cylindrical lenses 1 1 of the first lens array 9 correspond to each other in size and shape.
  • the cylindrical lenses 12 of the second lens array 10 of the sections c and d of the device 5 also correspond in size and shape, so that they form a first group of identical lenses.
  • the center distance Pi of the first lens array 9 is slightly larger than the center distance P 2 of the second
  • this light beam 3a is slightly deflected laterally in the X direction and leaves the second lens array 10 of the device 5 at an angle other than 0 ° to the Z direction as the light beam 7a. This leads to the already described superposition of
  • the sections e and f of the device 5 are shown in FIG. 4.
  • the first lens array 9 is designed in the sections e and f of the device 5 as well as in the sections c and d.
  • the design of the second lens array 10 differs in sections e and f from those in sections c and d.
  • the cylindrical lenses 13 of the second lens array 10 are asymmetrical with respect to a central Y-Z plane. In particular, the cylindrical lenses 13 are in the sections e and f on their middle
  • the cylindrical lenses 13 of the second lens array 10 of the sections e and f of the device 5 correspond to one another in terms of size and shape, so they have a second group of form same lenses. However, the cylindrical lenses 1 3 of the first group in the sections c and d are different from the cylindrical lenses 13 of the second group in the sections e and f.
  • the non-illustrated cylindrical lenses in the sections a and b of the second lens array 10 may also be designed asymmetrically, and they are also thinner on its side facing the middle portions c and d side than on its side facing the edge. Also these not pictured
  • Cylindrical lenses in sections a and b of the second lens array 10 correspond in size and shape to form a third group of like lenses.
  • the unillustrated cylindrical lenses of the third group in sections a and b of the second lens array 10 are different from the cylindrical lenses 13 of the first group in sections c and d and different from the cylindrical lenses 13 of the second group in sections e and f. If, as mentioned in the direction of the arrows 4 left and right further cylindrical lenses 13 connect, these are also in groups of the same but to the
  • Cylindrical lenses of other groups combined different cylindrical lenses.
  • the change in the symmetry or asymmetry of the cylindrical lenses takes place only during the transition from one group to the next, that is to say, for example, during the transition from section b to section c or during the transition from section d to section e.
  • This same design of the cylindrical lenses in the individual groups of manufacturing costs can be reduced.
  • the light beams which are deflected by the device 5 and which are superposed on the working plane 8 with respect to the X direction, can be viewed in the Y direction by focusing means (not shown) be focused so that in the working plane 8 is formed in the X direction extending line-shaped intensity distribution.
  • This intensity distribution can be very little extended in the Y direction and be very wide in the X direction, for example more than 50 cm wide, and can also be very homogeneous in the X direction.
  • FIG. 5 a shows an intensity distribution corresponding to FIG. 1 b of a device for producing a linear intensity distribution in a working plane which has more light sources in the Y direction than the device according to FIG. 1 a. Then, after compression in the Y direction, significantly more light beams 3 result in the Y direction next to each other or in FIG. 5a through the first beam shaping means.
  • the rotation through the second beam-shaping means then results in several rows 14 of light beams which are arranged close to one another in the X-direction being arranged side by side or one below the other in the Y-direction (see FIG. 5b).
  • These different rows 14 of light beams can be merged by unillustrated beam shaping means and / or focusing means in the working plane 8 in the Y direction to a linear intensity distribution which extends like the already described linear intensity distribution in the X direction.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Recrystallisation Techniques (AREA)

Abstract

L'invention concerne un dispositif pour homogénéiser la lumière muni d'un premier (9) réseau de lentilles comprenant une pluralité de lentilles qui sont disposées les unes à côté des autres dans une première direction (X). Selon l'invention, la lumière à homogénéiser peut passer à travers le premier réseau (9) de lentilles. Le dispositif est également muni d'un deuxième réseau (10) de lentilles comprenant une pluralité de lentilles qui sont disposées les unes à côté des autres dans la première direction (X). La lumière qui est passée à travers le premier réseau (9) de lentilles peut passer à travers le deuxième réseau (10) de lentilles et l'espacement (P2) des centres du deuxième réseau (10) de lentilles est différent de l'espacement (P1) des centres du premier réseau (9) de lentilles, de sorte que les proportions de lumière qui sont passées à travers différentes lentilles du deuxième réseau (10) de lentilles sont superposées les unes aux autres derrière le deuxième réseau (10) de lentilles dans la première direction (X).
PCT/EP2008/000273 2007-01-15 2008-01-15 Dispositif pour homogénéiser la lumière et dispositif pour produire une distribution linéaire de l'intensité dans un plan de travail WO2008087012A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007002891 2007-01-15
DE102007002891.3 2007-01-15

Publications (2)

Publication Number Publication Date
WO2008087012A1 true WO2008087012A1 (fr) 2008-07-24
WO2008087012A8 WO2008087012A8 (fr) 2008-12-04

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010130415A1 (fr) * 2009-05-14 2010-11-18 Limo Patentverwaltung Gmbh & Co. Kg Dispositif de formation d'un faisceau laser et dispositif à laser doté d'un tel dispositif
NL2005253C2 (en) * 2010-08-23 2012-02-27 Optics B V I Confocal line-scan ophthalmoscope.
DE102012205790A1 (de) * 2012-04-10 2013-10-10 Carl Zeiss Smt Gmbh Vorrichtung zur Homogenisierung von Laserstrahlung sowie Verfahren zu ihrer Herstellung
DE102013102553A1 (de) * 2013-03-13 2014-09-18 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung von Laserstrahlung
DE102013102863A1 (de) * 2013-03-20 2014-09-25 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung eines Laserstrahls

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265887A (ja) * 1993-03-10 1994-09-22 Seiko Epson Corp 投写型表示装置
JP2001281600A (ja) * 2000-03-29 2001-10-10 Seiko Epson Corp 光源装置およびそれを用いた投射型表示装置
EP1403695A1 (fr) * 2002-09-24 2004-03-31 Agfa-Gevaert AG Dispositif d'exposition d'un original comprenant une pluralité de sources lumineuses ponctuelles homogenisées et superposées
EP1580579A2 (fr) * 2004-03-24 2005-09-28 Semiconductor Energy Laboratory Co., Ltd. Homogénéisateur de faisceau et appareil d'irradiation par laser

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265887A (ja) * 1993-03-10 1994-09-22 Seiko Epson Corp 投写型表示装置
JP2001281600A (ja) * 2000-03-29 2001-10-10 Seiko Epson Corp 光源装置およびそれを用いた投射型表示装置
EP1403695A1 (fr) * 2002-09-24 2004-03-31 Agfa-Gevaert AG Dispositif d'exposition d'un original comprenant une pluralité de sources lumineuses ponctuelles homogenisées et superposées
EP1580579A2 (fr) * 2004-03-24 2005-09-28 Semiconductor Energy Laboratory Co., Ltd. Homogénéisateur de faisceau et appareil d'irradiation par laser

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010130415A1 (fr) * 2009-05-14 2010-11-18 Limo Patentverwaltung Gmbh & Co. Kg Dispositif de formation d'un faisceau laser et dispositif à laser doté d'un tel dispositif
US8749888B2 (en) 2009-05-14 2014-06-10 Limo Patentverwaltung Gmbh & Co. Kg Arrangement for producing laser radiation, and laser device comprising such an arrangement
EP2590548A2 (fr) * 2010-07-06 2013-05-15 I-Optics B.V. Ophtalmoscope confocal à balayage linéaire
US8789950B2 (en) 2010-07-06 2014-07-29 I-Optics B.V. Confocal line-scanning ophthalmoscope
NL2005253C2 (en) * 2010-08-23 2012-02-27 Optics B V I Confocal line-scan ophthalmoscope.
DE102012205790A1 (de) * 2012-04-10 2013-10-10 Carl Zeiss Smt Gmbh Vorrichtung zur Homogenisierung von Laserstrahlung sowie Verfahren zu ihrer Herstellung
DE102012205790B4 (de) * 2012-04-10 2015-02-05 Carl Zeiss Smt Gmbh Vorrichtung zur Homogenisierung von Laserstrahlung sowie Verfahren zu ihrer Herstellung
DE102013102553A1 (de) * 2013-03-13 2014-09-18 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung von Laserstrahlung
US10025108B2 (en) 2013-03-13 2018-07-17 Limo Patentverwaltung Gmbh & Co. Kg Device for homogenizing laser radiation
DE102013102553B4 (de) * 2013-03-13 2020-12-03 LIMO GmbH Vorrichtung zur Homogenisierung von Laserstrahlung
DE102013102863A1 (de) * 2013-03-20 2014-09-25 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung eines Laserstrahls
EP2976672B1 (fr) * 2013-03-20 2020-05-06 LIMO GmbH Dispositif d'homogénéisation d'un rayon laser

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Publication number Publication date
WO2008087012A8 (fr) 2008-12-04

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