EP3983199A1

EP3983199A1 - Device for treating or inspecting a material, use of the device

Info

Publication number: EP3983199A1
Application number: EP20743582.7A
Authority: EP
Inventors: Andreas Richter; Robert Kirchner; Georgi Paschew
Original assignee: Technische Universitaet Dresden
Current assignee: Heteromerge GmbH
Priority date: 2019-06-11
Filing date: 2020-06-11
Publication date: 2022-04-20
Also published as: CN113993690A; WO2020249171A1; US20220219388A1; DE102019115780A1; DE102019115780B4

Abstract

The invention relates to a device and its use for multiphoton printing for the additive manufacture of three-dimensional structures or for the inspection of these and other structures of comparable size ratios in the presence of an inspection medium. In order to manufacture and inspect three-dimensional structures that have varying properties and/or material compositions, the device according to the invention is characterized by a locally selective material feed (9), a locally selective material discharge (11) and locally selective, focused emission or reception of electromagnetic radiation.

Description

Device for the treatment or inspection of a material,

Use of the device

The invention relates generally to devices and to methods for treating or inspecting a material which can be carried out with the devices. It affects in particular

Devices and their use for multiphoton printing for the additive production of three-dimensional structures or for the inspection of such and other structures with comparable proportions in the presence of a

Inspection medium.

The devices have a material supply, a

Material discharge and an optical unit. The

optical unit comprises means for emission or for

Reception of electromagnetic radiation. The optical unit also has means for aligning the transmitted or received radiation.

Using 3D printing, the production of one-piece complex 3D structures is known, for example the laser sintering of particulate starting material or the

Multiphoton printing. The latter allows a resolution of the substructures in the millimeter to micrometer and

Submicron range. Such a printing process uses photocrosslinkable printing materials that have a liquid to pasty consistency and are placed in a work plane in order to be treated there by means of electromagnetic radiation and a multiphoton polymerization initiated therewith

to be solidified. The solidification is point by point in the focal point of the electromagnetic radiation Radiation source initiated so that a structural element, the smallest unit of the three-dimensional structure, is created in the focal point, now also referred to as the working point. To produce the entire structure, the focus point changes step by step by following a movement path, regularly but not necessarily in layers, and thus building up the structure point by point.

To trigger the polymerization is long-wave

Laser radiation is generated so that the radiation intensity achieved at the point of impact is sufficient to generate the polymerization in the respective printing material as a result of the absorption of two or more photons.

The supply of printing materials, the spatial and temporal control of the radiation emissions and others for the

The process steps and parameters required to carry out the process are designed using a

Control unit realized or provided. The

Trajectories of the focal point, which are required for the construction of the entire structure, are regularly determined by means of a CAD data set that is stored in the control unit and depicts the structure, or by control commands

gone.

To use 3D structures from different materials

In the past, complex and sequential process steps had to be carried out to produce multiphoton printing.

First, material A was printed. Then the excess material was removed and the already printed structure was covered with material B. After the current

the crouched structure in material A has been visually located and the printing process has been aligned for material B, Material B could be printed. The change of the material required the removal of the print object from the printer, the flushing with special chemicals, the dismantling in the

Printer as well as the exact positioning of the second

Print area in material B to that already printed

Parts in material A with a very high accuracy. The time required for such a material change

is necessary, prevents the effective production of structures from several materials, which also vary in layers. It should also be ensured that the structures that have already been built up survive the cleaning without damage. For this, the structures must be stable in themselves. Often times, the structure is only stable enough after completion.

A printing device that can be used for the process has, in addition to the radiation source suitable for the process, for example for areal illumination (irradiation), a material feed which supplies the required liquid and pasty printing materials in the required amount and on the extent of the illumination

required location. Next is one

Holding device formed, which includes the 3D structure to be produced including any required

Support materials. This is usually a platform on which the 3D structure is built. By

Positioning of the radiation source relative to the platform and energy input by means of lighting can

Sub-structures of the 3D structure are generated one after the other.

With regard to this method, reference is made, for example, to DE 10 2011 012 412 A1. In the method described there, 3D structures with macroscopic and microscopic substructures using two materials with different photosensitivities. The different materials are used in layers. To make a change of material within the structure, the structure becomes a

Cleaning process in a 5-minute ethanol bath

to remove any remains of the previously used printing material.

Because of the very small structure sizes that can be produced with this technology, which can be in the range of less than one micrometer, the small amount of space available for building the structure is special

Challenges. These challenges exist both for the device with its components and for the inspection of the structures. In order to achieve the required resolution, lenses with high

Magnification and used with high numerical aperture. These lenses have a working distance of less than 400 to 500 pm.

Based on the prior art described above, the invention is concerned with the task of a

Multiphoton printing process and one that can be used for this

Device indicate with which 3D structures with changing properties and / or from several

different printing materials can be produced. Such variations in structure are intended both between the

Layers as well as within a layer be possible.

Furthermore, it is desirable that the variability includes both a change in the printing materials and a change in the properties of the same material. It is also desirable that the known support materials can be replaced by support structures which can be better integrated into the printing process and that the stability and dimensional accuracy are improved during the process.

The 3D structures should also be in micrometer and

Submicrometer can be produced.

In order to carry out the observation of the structural elements which can be produced with the printing method, it is further desirable to have an inspection method and a method that can be used for this

To have inspection device available, which the printing process with its achievable structure sizes

supported and variable on the used

Materials is tunable. This object is achieved by an apparatus of claim 1, the use of the apparatus in a multiphoton printing method according to claim 8 and in one

Inspection method according to claim 14 solved. The dependent claims each relating to the claims mentioned describe advantageous embodiments of the

Objects.

The essential concept of the invention of the device and the method that can be carried out with it is to this effect

describe that a site-selective and separate

Paper feed of the substrate or the

Inspection medium in the form of portions interacts with a location-selective material discharge and - in the case of printing - location-selective lighting. In the printing process, the materials supplied and removed are printing materials, at least one of which can be photo-crosslinked and is cured in a location-selective manner by means of point polymerization.

Furthermore, incompatible but sufficiently reactive materials can be connected to one another through the in-situ material change.

The material is preferably supplied in portions and allows a wide variety of variations for the methods on

Working point, available material portions. This particularly applies to a change in their

Composition. A complete replacement of the

Materials during a process as well as the provision of additives to adjust the material properties or auxiliary materials that support the process are possible. Depending on the type and scope of the materials required at the respective portioning point, material derivation can take place at all portioning points of a three-dimensional structure or a layer thereof or only several, specifically selected portioning points.

This is possible separately, point by point, since old material, in particular that from the previous printing or polymerisation step and also from the previous inspection step, is in the vicinity of the current one

Portioning point has been reached, carried away and new material can be brought in. Due to the small quantities required for each location, the printing material can be modified after a short time and even completely exchanged after only a short waiting time. This applies in particular to sub-structures to be printed in micrometer and Submicrometer range, which require correspondingly small portions for a structural element.

In an analogous manner, for the point-wise, d. H. inspection procedures related to the structural elements

Inspection medium can be specifically supplied and discharged and varied. In this way the best possible resolution can be achieved and at the same time the optics and the object must be protected from harmful or undesirable influences. The inspection medium can be fed in at different times,

for example, after the production of a substructure, so that the inspection can be integrated directly into the printing process. Depending on the materials used, such a combined printing and inspection process for the material feed and

Material discharge For printing and inspection the same or separate feed and discharge can be used.

An inspection medium can also be combined with a second

Inspection medium can be mixed, also with a temporal change in the mixing ratio. Next can a

Temporary auxiliary, for example for rinsing or

other, or together with the inspection medium for

Application.

The inspection medium can be exchanged or modified at only one point, for example if the geometry, size and / or structure change over time at this point. In this case, the inspection medium can be modified step by step so that the resolution is adapted to the change in structure. There is also the possibility of making the modification automatically if the change in the structure is automated, for example, if a predefined

Blurring or by means of pattern recognition, and on this basis a control of the supply and possibly also the discharge of inspection medium takes place. There is also the option of 3D printing and

Inspection of the microscopic structures so too

link that the printing material, if necessary with the addition of suitable aids, at the same time as

Inspection medium can be used. In this case, the optical unit has both means for generating and also means for receiving electromagnetic radiation, which can be used simultaneously or one after the other.

Using the principle of variable

Material provision and / or material composition can be the inspection device and the

Inspection procedure also independent of one

Printing process for the inspection of microscopic structures and the printing process with an alternative

Inspection procedures are used. Features used to implement the concept are described below. This will be the expert in

Combine different embodiments differently with one another, insofar as this appears reasonable and suitable for an application. The term “printing material” used for the invention denotes both the crosslinkable materials which are curable and thus form the structural elements, as well as other materials which are available for producing the respective structural element at the portioning point should .

The term "location-selective" refers to

Material application and lighting an application of the

Printing material and lighting to solidify the printing material, which is targeted in relation to the location

can be varied and its extent can be limited to a dimension that correlates with the structural elements to be produced as the smallest units of the 3D structure. The variability of the situation includes that one

Relative movement between the relevant material outlet or the radiation outlet of the emission unit and the 3D structure or the holding device of the 3D structure

is feasible. The site-selective application of a

Printing material also includes that the portion of material formed is due to a mixture of both

Print materials has a larger expansion. as the

Focus point.

The term "pasty" is used in relation to the invention

understood to mean that a material is viscous, pasty to paste-like, so that the material is flowable and under pressure by means of lines and nozzles of the material supply and discharge

can be transported and dispensed as a portion and can be derived. The viscosity of the pasty materials used, depending on the size of the structural elements and the pressures and flow rates that can be used for the supply and discharge, can be in the range from 1 to 500 mPa s, preferably in the range from 1 to 250 mPa s, more preferably in the range of 1 to 150 mPa s, more preferably in the range from 1 to 100 mPa s. This allows flow velocities of the Material of less than 1 ml / min can be achieved.

A portion of material is formed on the

Surface of a substrate, the substrate being a

in terms of material and shape to the respective

Process can be matched carrier substrate or a previously with the printing process or another

previous process generated structure can be.

The latter can be a substructure of a structure to be produced by means of the printing process. The location-selective and meterable material feed and the optical alignment and focus on the

The material portion or the point on the substrate defined by the inspection should be referred to as the working point in relation to the device. With reference to the method in which a portion of the printing and / or inspection material is produced there, this is also referred to here as the portioning point. With regard to the production of the print portion of an individual structural element of a three-dimensional structure, the “portioning point” represents that spatially extended area or “printing point” in which a structural element is printed. It is evident that the size of the actual focal point of the radiation does not have to correspond to the size of the portioning point.

In analogy to this, the "inspection point" is that point on which the observation is directed and focused and which lies within the portion of the inspection medium.

A device for treating or observing a

Materials according to such a concept include a

Material supply with at least one material outlet, regularly one for each material used. A

The material used can also be a material composition consisting of a mixture of several materials that is already present as a mixture before being fed to the operating point. This can remain unchanged in the course of the process or can be mixed with other materials at the operating point.

Two, three or more material outlets are preferred

arranged, the material outlets are according to the

The consistency of the materials is designed in such a way that it enables a location-selective, metered supply of the materials to the

Allow working point. The location-selective application includes that the respective material outlet can be positioned in the vicinity of the working point and that the

The focal point of an optical unit of the device lies within the applied pressure portion.

The device further comprises a material discharge with at least one material inlet. At least one

The material inlet is designed according to the expected consistency of the material at the working point in such a way that the liquid to pasty material can be diverted from the working point in a location-selective manner. Here, too, the location-selective derivation includes the

Material outlet can be positioned near the working point. The position must be so close to the working point that the material that is no longer required can be diverted. In the printing process, that is the one that is not solidified

Material surrounding the structural element when

Inspection procedure that is currently no longer required

Inspection medium. At least one material outlet of the material supply and / or at least one material inlet of the material discharge can be mounted on the radiation outlet or on the objective. In this way, the material portion, ie the portion of the printing materials or the portion of the inspection medium, can be precisely portioned and / or the material discharge can be designed particularly effectively, since the material inlet is also arranged in the relevant portion or at least in its immediate vicinity. This too

Measure improves and accelerates the discharge of material. Alternatively, at least one material outlet and / or one material inlet, even without the effect of immersion, can be mounted at the radiation outlet of the radiation source, with the advantages described above.

The effect desired in each case can be achieved for different sizes of the material portion if the at least one material inlet and / or one material outlet can be detachably or variably positioned or mounted on the lens in both ways. Thus, the device can be equipped with different and several material outlets and material inlets and can be designed, for example, as a print head which is used for printing one type of

Structural element or the entire three-dimensional

Has structure required radiation and material components.

In order to be able to carry out the material variations described, the material supply is connected to at least one first reservoir of a first material,

If necessary, the material supply with a second reservoir of the second material and further reservoirs in Connected. In the case of the printing process, the first material is a photo-crosslinkable printing material; in the case of the inspection process, this is an inspection medium. The materials can be conveyed from the reservoir to the working point by means of suitable fluidic components.

The device further comprises an optical unit. In the case of a printing device, this is an emission unit and, in the case of an inspection device, an inspection unit, for example a microscope or a camera. Both

Units can also be combined with one another in one optical unit.

An emission unit has at least one radiation source which is designed for generation

electromagnetic radiation, which provides the required radiation intensity in the focus point. Laser sources in particular are currently suitable. However, as the development of radiation sources progresses, other radiation sources may also become available.

The optical unit comprises means for aligning and focusing the generated radiation on one

Portioning point or that of the inspection point

incident (received) radiation on the

Inspection unit. Such means suitable for forwarding, deflecting, filtering and focusing the radiation are optical components, such as mirrors,

Lenses, collimators, light guides and others. These are to be referred to here as a summary for both device variants as an object.

According to one embodiment of the device that is Objective of the optical unit can be positioned at such a distance from the portioning point that the

Radiation output or radiation input within the

Material portion lies, which can be generated by means of the material supply at the working point. Such a configuration makes requirements with regard to the size of the radiation exit and has the effect that the surface of the objective facing the working point is physically

Is in contact with a portion of material. In this way, the radiation-reducing interfaces are avoided. In addition, the material supply and the material discharge are very close to the focal point of the radiation source

brought up. This results in very short dead times and

quick material changes possible.

As a result of this design of the device as

Immersion device, the space between

Radiation output or radiation input and working point are enlarged to the extent that a portion of a print material that can be produced to a limited extent, possibly with a supplemented inspection medium, allows. Furthermore, the freedom of the materials and geometries that can be used is essential

improved. It can be based on such materials and / or

Geometries of substrates, carrier substrates or structures that have already been produced, are printed that have a

Allow wetting with the printing material. Is the

Device by means of a suitable

Positioning device three-dimensional plus

Angular orientation movable, the pressure can also be on

Freeform surfaces, for example on optical

Fiber waveguides. According to one embodiment of the device, that surface of the objective which comes into physical contact with one of the supplied liquid or pasty materials during or as a result of the supply can be used as an aid

Have positioning of the material between the lens and the substrate. The from printing and / or

Inspection material wetted surface is regularly the bottom of the lens. The positioning means are used for the targeted feeding of the materials into the intermediate space, depending on the space to be produced or to

inspecting structure can be very small. Such

Positioning aids can be channels, open or partially closed, or other recesses or

Cavities, their position or direction and their size are adapted to the respective material portion to be produced and their position.

Such channels, depressions, cavities or the like can be formed, for example, in an adapter, for example plate-shaped, which can be attached to the objective and which is itself part of the positioning means.

The design of such an adapter can be according to various requirements, such as the

Properties of the material supplied, the shape and dimensions of the volumes required, the requirements of the objective, the desired portion size and others vary. Unless a channel or otherwise shaped

Positioning means is closed, this only applies to areas away from the working point. In the area of

The fluidic system of the operating point itself is open.

Apparently the positioning means are like that formed and arranged that their contact with the

Carrier substrate is avoided at least in the area of the working point during use of the device in order to avoid damage to the substrate or the object.

A positioning means only supports that

Material flow .

Surface treatments or surface coatings are also suitable, for example by improving wetting. Conversely, these can

Positioning aids as well as the material drainage

support or unwanted expansion of the

Prevent material portion. If material portions in the micro- and nanometer range are to be produced, the type

The position and dimensions of such microfluidic means are adapted accordingly. The positioning aids for the supply and discharge of the material are also suitable

Reduce the use of materials by directing the material specifically to the place of use.

Due to the micro- and sub-microstructures that can also be produced with the device, according to a

Design of the device, the material supply and the material discharge have microfluidic components, such as nozzles, channels, valves, wall structures, pumps and others. Microfluidics is a special field of fluidics and deals with the behavior, precise control and manipulation of liquids in the smallest of spaces and very small volumes, typically in the sub-millimeter range. In this size range, different physical laws play a role than in macrofluidics. The smaller the dimensions, the greater the ratio of Surface to volume. Capillary forces and

Surface charges dominate over gravity and enable other fluid drives. Furthermore

small channels enable eddy-free flows. Because of these advantages, the microfluidic support

Components the dosed material supply and the removal of material residues. These effects can be used in the same way for the supply and discharge of printing materials as well as immersion media.

The described configurations of the device are as complex components to an existing device,

in particular as a print head on a printing device or as an inspection head on an inspection device, adaptable, with which comparable amounts of material are processed, but there are no restrictions compared to the known printing or inspection process.

Such a device, which has the head unit described in each case, additionally comprises a

Holding device which is designed to hold the three-dimensional structure in the course of its manufacture and / or its inspection. Such a holding device is usually a work platform, which can optionally have a lateral boundary.

A positioning device of the device is

designed for positioning the optical unit, the material outlets, the material inlets and the

Holding device relative to each other. It depends on various conditions, such as the structure to be produced or inspected, the design of the

Material feed and material discharge, the one used Materials and other which of the components is moved. As a result, it is necessary both the working point and the locations of material supply and material discharge

Step by step with the desired precision and

Reposition stride relative to structure. For this purpose, the positioning device accesses the components to be moved in each case, which are the possible ones

Have freedom of movement. If the material output or material outputs and material input or material inputs are connected to the radiation source or the objective in such a way that they are part of a head unit, the head unit and the holding device are positioned relative to one another.

The exact positioning in time and space that

Control of the emission unit, including its

The radiation source or the inspection unit as well as the control of the material supply and the material discharge are carried out by means of a control unit. For this purpose, the control unit is communicatively connected to the relevant components of the device.

In summary, it can be stated that the devices are designed in such a way that even very small volumes of material can be processed. This allows the

Exchange times for the materials are kept extremely short. The same structural design allows

to dynamically vary the concentration of materials during their processing or use. The device can also be easily adapted to a wide variety of systems.

The device described above can with the

corresponding embodiment for different processes be used. According to a first use of a device designed for multiphoton printing, three-dimensional structures are produced by using a

Material portion is generated on a suitable substrate and the polymerization is initiated by means of electromagnetic radiation. By repeating the creation of such a structural element many times in the desired

The three-dimensional structure is created relative to one another.

To carry out the printing process, printing material, at least the first of which is photocrosslinkable, is provided, and a portion of it is transferred to the desired location, i.e. H. location-selective, supplied. The electromagnetic radiation from the radiation source is focused on the pressure portion thus formed.

According to the invention, at least one printing material,

preferably two or more printing materials are used to form a printing portion. Due to the photocrosslinkability of the at least one, i. H. of the first print material is after completion of the respective print portion, this is location-selective by means of the emission unit during a

Radiation interval illuminated and consequently solidified to such an extent that a structural element

is trained.

Such material delivery also includes the use of two or more photocrosslinkable materials in one

Pressure portion. Alternatively or in addition, a

Printing material can be a further photocrosslinkable printing material which has a photosensitivity that differs from the first printing material. Alternatively, the second printing material can be a substance that has the physical properties, such as, for example, the optical, electrical, magnetic or mechanical properties, or the chemical properties, such as, for example, the compatibility with others

Fabrics. Such substances are, for example, fillers or dopants or other suitable ones

Additives. The use of photoactivatable

Printing materials that are under lighting

Changing binding properties or making them available as new printing materials through photodecomposition offers further possibilities for variation in the print portion.

The supply of aids such as washing-up liquid,

Solvents, adhesion promoters or others are possible and should be included in the term “printing material”.

For example, a solvent can be added which washes out uncrosslinked material before new or different material is introduced. In this way, immiscible materials can also be combined with one another. Rinsing with an auxiliary material that improves the adhesion of the building-up printing material in an intermediate step is also possible.

After finishing the lighting on the respective

Portioning point is left there

non-solidified material of the pressure portion derived in a suitable manner, for example by suction. In this way, a desired different printing material or a desired different material composition of the printing portion can be used at the next next portioning point

are fed. By simultaneously diverting the remaining old material and feeding new material to the next adjacent portioning point in accordance with one embodiment of the method, the waiting time between the

Radiation intervals can be further shortened. In addition

allows the simultaneous material supply and material removal that by means of the relationship between material supply and material discharge, the amount of material of the respective

Print material can be varied fluently. A continuous supply of material is also possible.

The process steps of material supply, illumination of the pressure portion and material discharge are further

Portioning points are repeated many times, building up the three-dimensional structure successively. The sequence of the spatial position of the portioning points is specified by a suitable control unit, for example by a CAD data set and the one described

Process step carried out at each portioning point with the respectively desired material composition. The required material composition can be achieved by one or more of the following changes to the previous composition:

- Use of a first printing material that is different from the previous one;

- Use of one or more others

Printing materials that are photocrosslinkable;

- Use of one or more others

Printing materials that are not photocrosslinkable;

- Change in proportions (volume or weight percent) of one or more printing materials going into the structural element in the mixture of the printing portion, wherein the total amount of the mixture of the printing portion can be maintained or changed;

- Addition of another photo crosslinkable

Printing material with change or maintenance of the

Proportion (volume or weight percent) of the second printing material to the total amount of the mixture of

Pressure portion. Further variants for the composition of the print portions are possible. It is advantageous, for example, that without material exchange but solely through dynamic variation of the concentration of fillers within the

Material composition properties such as optical

Refractive index, magnetization strength, coloring,

Fluorescence, shrinkage and swelling behavior, etc. can be varied. Gradients, i.e. H. a steady or almost steady, also gradual change of a

Property can be produced in the structure. If the change in the material composition also requires a change in the radiation parameters, this will be evident at the relevant portioning point

adapted.

According to the various outlined above

Usability of the at the respective portioning point

supplied printing materials, it is evident that in particular the process steps of material supply, material discharge and lighting in different

Order can be done. Also intermediate steps in which For example, there is no lighting, as is the case with a location-selective flushing or something else are possible.

It has proven to be advantageous in the point-wise construction of the three-dimensional structure using the

described printing materials and by means of location-selective material supply, location-selective material discharge and

Location-selective lighting so that the printed object does not dry out prematurely during its production and thus a structural collapse due to capillary forces can be avoided. The high structural integrity in every intermediate step

It also allows elements made from a new material to be built into the existing matrix made from a first material if it is open-pored enough to accommodate the printing materials to be introduced. If the matrix consists of a photosensitive material, the new material may have a different photosensitivity. In such a case, the existing matrix is transparent to the radiation for crosslinking the new material, so that its crosslinking can also take place within the existing matrix.

The described material supply, material discharge and

Lighting allows the method to be designed as an immersion method, in which the radiation output of the emission unit during the illumination with the

Pressure portion is in physical contact. A

Immersion method is characterized in that at least that surface of the lens through which

Radiation enters or exits in a liquid or pasty immersion medium so far that it fills the space between the objective and the focal point. By the relative higher value of the refractive index of the air

Immersion medium, a higher numerical aperture and a higher resolution of the objective of the emission unit can be achieved. For this purpose, the radiation output of the emission unit is immersed in the liquid or pasty pressure portion, which thus serves as an immersion medium, so that the surface of the optics facing the pressure portion is brought into physical contact with the material portion, i.e. is covered by the material of the print portion.

According to one embodiment of the method, the three-dimensional structure is built up in layers, with one layer being built up from a multiplicity of structural elements. Due to the previously described

The interaction of location-selective material supply and location-selective material discharge can result in a change in the composition of print portions both within a layer and from layer to layer. In this way, three-dimensional structures with a locally freely selectable material composition can be achieved.

In terms of the method, it is also possible that at least one group of structural elements, i. H. a

contiguous area within the three-dimensional structure is formed by using at least one monomer as the first printing material and a crosslinking agent as the second printing material and printing, optionally with a variation of the concentration of the crosslinking agent. Such an area can function as a sacrificial layer, for example as a support or filling area, which can later be dissolved again.

Those using the method described in the above The three-dimensional structure that can be produced has a variation in the material composition and / or in the material property within the structure, which is in a horizontal, corresponding to the coordinate system of the XY plane usually used in three-dimensional space, and / or in the direction perpendicular to it, the Z-direction, ie within the structure - viewed theoretically - can extend as desired. A variation of one or more material properties within the three-dimensional structure in the form of gradients is also possible.

The minimal waiting times during material removal allow the material to be changed and, at the same time, especially in the variant of the immersion process, periodic substructures with the highest spatial resolution below 500 nm, preferably smaller than 300 nm, more preferably smaller than 200 nm, even smaller than 100 nm to realize. Substructures in

Submicron, which are made of different materials. The repetitive nature of this

Substructures is supported by a constant change of the printing material. In addition, gradient structures can be formed. In which, for example, a certain filler can be as dynamic and

can be varied continuously.

With the method according to the invention are due to the

Variability in terms of pressure as well as

combinable materials different components

manufacturable. For example, lens stacks made from several optically different materials can be printed or lenses whose index of refraction varies within the lens. The method can also be used for printing mechanically active structures, such as micromechanical components, and their components

can consist of different materials.

The described principle of the printing process using location-selective material supply and material removal with focused lighting can also be applied to the

Use inspection procedures. This will be a

suitable inspection medium by means of a material feed at the working point, which in this case is the inspection point. The portioning takes place to the extent that the surface of the lens facing the object with the inspection medium, which in this embodiment as

Is referred to as immersion medium, is in physical contact, d. H. due to the focusing of the lens on the desired inspection point and the associated

Adjustment of the distance between lens and

The inspection point is immersed in the immersion medium as described above for the immersion printing process. To exchange the immersion medium or after the inspection has ended, the immersion medium can be used by means of a location-selective

Material drainage must be removed.

Here, too, a good adaptation of the properties of the immersion medium to the requirements of the inspection is possible due to the variation in the materials used, as described above for the printing process. Also one

Both methods can be combined if the

Emission unit is temporarily replaced by an inspection unit and instead of or in addition to the print portion a portion of an immersion medium matched to the objective of the inspection unit is supplied. It is also possible that the printing materials themselves are compatible with the

Immersion lens compatible. The use of a known immersion medium, such as an immersion oil, is also possible. The

Focusing can be done through a transparent substrate into the immersion medium, which can be changed if necessary

respectively . The time variance of the

The inspection medium can also be used for the immersion process, so that a structure that changes over time can be optimally represented. The invention is explained in more detail below with reference to embodiments of the device. To this end shows

1 shows a printing device with a print head,

Fig. 2 an inspection device with a

Inspection head, and

Fig. 3 shows a lens which is an embodiment of

Has positioning aids for the material.

The figures show the devices only schematically to the extent necessary to explain the invention. They do not claim to be complete or to be accurate. The printing device according to FIG. 1 comprises a

Emission unit 1 with a radiation source 2 and a radiation output 3. A laser is used as the radiation source used. The radiation output 3 is one

Opposite the work platform 4, on which a carrier substrate 5 for receiving the three-dimensional structure (not

shown) is arranged. The focus point of the

Emission unit 6, which is also work and

Portioning point is between the

Radiation output 3 and the carrier substrate 5 or the three-dimensional structure with their progressive

Construction .

At the radiation outlet 3 of the radiation source 2, two material outlets 8 are one by means of suitable holding means 7

Material feed 9 and a material inlet 10 one

Material discharge 11 mounted. Material outlets 8 and

Material inlet 10 are as microfluidic nozzles

educated. You realize the feed of the first

Printing material 12.1 and the second printing material 12.2 The holding means 7 allow assembly and disassembly of the nozzles and the assembly of further nozzles for others

Printing materials and / or a further material inlet 10. The two printing materials 12.1, 12.2 are each held in a reservoir 13.1, 13.2 and are connected to the nozzles by means of microfluidic channels 14.

The design of the emission unit 1 with radiation source 2 and the assembly of the material outlets 8 and the

The material inlet 10 at the radiation outlet 3 has the effect that these components together form a print head 18 which can be used on existing printing systems.

The delivery of the two printing materials 12.1, 12.2 onto the carrier substrate 5 causes the mixture and the formation a pressure portion 15. The pressure portion 15 is so large and positioned that the radiation outlet 3 of the

Radiation source 2 is in physical contact with the pressure portion 15, in the exemplary embodiment within the

Print portion 15 lies.

A control unit 16 of the printing device controls the

Emission unit 1, the material supply 9 and the

Material discharge 11 and a positioning device 17. The latter carries out the movements of the radiation source 2 relative to the work platform 4 by the

Emission unit 1 is moved.

To carry out the method, the print head 18 is positioned opposite the carrier substrate 4, and in this position a print portion 15 is delivered onto the carrier substrate 5. Polymerization is initiated in the print portion 15 by means of a focused laser beam 19 and as a result a structural element (not shown) is formed. Then the print head 18 is in a

moved to an adjacent position and a second

Structural element formed, which can be connected to the first or is connected in subsequent steps. This process is first carried out repeatedly to form a first layer of the three-dimensional structure, and each further layer of the three-dimensional structure is subsequently produced in the same way.

The inspection device according to FIG. 2 has a

comparable structure. The emission unit is through an observation unit 1, the radiation output through an objective 3 of the observation unit 1, at least one print material through an immersion medium 12, which in FIG a reservoir 13 is held, the pressure portion by a portion 15 of the immersion medium and the

Print head unit by an immersion head unit 18

replaced. In contrast to the focal point of the printing device, the inspection point 6 of an inspection device lies on the surface of the three-dimensional structure 5.Instead of the pressure portion, a portion of the immersion medium 12 is generated on the carrier substrate for the inspection process, so that the immersion medium 12 forms the space between the objective 3 and carrier substrate 5 fills in. For the rest, reference is made to the explanations relating to FIG. 1.

3 shows an objective 3 with a view of its underside 19 which, in use, faces the carrier substrate (not shown). An adapter plate 20, which has a central optical window 25 in the form of a round passage, is arranged on the underside 19. The optical window 25 lies in the middle of a microfluidic,

for example completely open channel 21, which runs centrally over the adapter plate 20 and as

Positioning aid acts. The width of the channel 21 is greater than that in the illustrated embodiment

Diameter of the optical window 25. Alternatively, it is possible for the optical window to be larger than the width of the channel, it not being necessary to completely fill the optical window.

The feed of the material to the optical window takes place at one end of the channel 21, referred to as the inflow 23 for differentiation, by means of the material feed (not shown), in that the material is introduced into the channel 21. A portion of a liquid or pasty material (not shown) flows in the flow direction 22 into the channel 21 and, due to a predefined, sufficient portion size, fills the optical window 25 at least to such an extent that the material is in physical contact with the carrier substrate. After completion of the respective method step, the material is sucked out of the channel 21 by means of a material discharge (not shown) at the other end of the channel 21, referred to as the drain 24, and can subsequently be replaced by another material. Such an adapter plate 20 is both for a

Printing device (not shown) as well as for a

Inspection device (not shown) can be used.

Accordingly, the material can be a printing material or an immersion material. In the application lies the

Adapter plate 20 opposite carrier substrate 5 (not shown) and the material portion is of such a size and is guided by means of channel 21 into such a position that the space between carrier substrate 5 and lens 3 in the area of optical window 25 is completely filled .

Device for the treatment or inspection of a material,

Use of the device

List of reference symbols

1 issue unit; Observation unit

2 radiation source

3 radiation output, lens

4 work platform

5 three-dimensional structure

6 focus point, portioning point,

Inspection point

7 holding means

8 Material output

9 Material feed

10 Incoming material

11 Material discharge

12, 12.1, 12.2 printing materials, inspection medium

13, 13.1, 13.2 reservoir

14 channels

15 Print portion, portion of the inspection medium

16 control unit

17 Positioning device

18 print head assembly, immersion head assembly

19 bottom

20 adapter plate

21 channel

22 Direction of flow

23 influx

24 drain

25 optical window

Claims

1. Device for treating a material placed at a working point of the device by means of

electromagnetic radiation or for the observation of such a material, comprising the following components:

- A material supply (9) with at least one

Material outlet (8), designed for the location-selective, meterable supply of a liquid or pasty

Materials (12) to the operating point (6) for forming a portion of material on a substrate;

- A material discharge (11) with at least one

Material inlet (10), designed for the location-selective discharge of liquid and / or pasty material (12) from the working point (6),

- wherein the material supply (9) is connected to a first reservoir (13.1) of the first material (12.1),

- An optical unit, which means for generating and emitting electromagnetic radiation for

Working point and means for aligning and focusing on the working point (6) and / or means for receiving electromagnetic radiation from the working point (6) and means for aligning and focusing, the means for aligning and

Focusing of the transmitted and also the received radiation are each referred to here as an objective.

2. Device according to claim 1, wherein the lens (3) is designed to be positioned at such a distance from the working point (6) that the radiation output or radiation input of the lens (3) facing the working point (3) is in physical contact with the material portion (12) is.

3. Device according to one of the preceding claims, wherein the material supply has a second material outlet for the location-selective, meterable supply of a second liquid or pasty material (12) to

Working point (6) for forming a material portion and wherein the material supply (9) is connected to a second reservoir (13.2) of the second material,

4. Device according to one of the preceding claims, wherein the operating point (6) facing underside of the

Objective (3) has a positioning aid for positioning the liquid or pasty material between the objective and the substrate.

5. Device according to one of the preceding claims, wherein the material supply (9) and the material discharge (11) have microfluidic components.

6. Device according to one of the preceding claims, comprising the following further components:

- A holding device designed to hold the substrate (5) and the object (3) relative to one another;

- A positioning device designed for

Positioning of the lens (3), at least one of the Material outlets (8), the material inlet (10) and the holder device relative to one another;

- A control unit (18) which is designed for

Control of the optical unit (1), the material supply (9), the material discharge (11) and the

Positioning device and which with these

Components is communicatively connected.

7. Use of a device according to one of the

preceding claims for additive manufacturing

three-dimensional structures (5), the emission unit (1) being designed for the spatially selective, focused

Illumination of photocrosslinkable printing material (12) in the course of a succession of radiation intervals, the method comprising the following steps: - providing at least one first printing material

(12) which is photocrosslinkable;

- Location-selective supply of at least one portion of the first printing material (12) to the working point, which is determined by the focal point (6) of the radiation source (2) and is hereinafter also referred to as the portioning point (6), by means of the material supply (9), while generating a pressure portion (15) at the portioning point (6), which comprises at least the first printing material (12);

- Location-selective illumination of the pressure portion (15) generated at the portioning point (6) during a

Radiation interval such that multiphoton processes are brought about in the pressure portion (15) and

as a result, a structural element is formed which comprises at least the first printing material (12); - Location-selective derivation of proportions of the printing material (12) from the portioning point (6);

- multiple repetitions of the generation of a

Print portion (15) and its lighting in one

Sequence of further portioning points (6) with the generation of one of a large number of

Structural elements existing three-dimensional

Structure (5),

- The derivation of printing material (12) one after the other at each individual portioning point and / or

takes place at the same time at several portioning points (6) of the three-dimensional structure (5).

8. Multiphoton printing method according to claim 7, wherein at least one portioning point (6) at least one

Portion of a further printing material (12) for

Portioning point (6) is supplied in a location-selective manner and / or at least one of the printing materials (12) used at the preceding portioning point (6) is replaced by another printing material (12).

9. Multiphoton printing method according to one of claims 7 or 8, wherein the working point (6) facing

Radiation output or radiation input of the lens (3) during the irradiation or an inspection of the

Working point is brought into physical contact with the material portion (12).

10. Multi-photon printing method according to one of claims 7 to 9, wherein print portions (15) are formed within an existing matrix, which consists of an open-pored and a material transparent to the wavelengths used for illumination.

11. Multiphoton printing method according to one of claims 7 to 10, wherein the material discharge (11) and the supply of new printing material (12) take place simultaneously.

12. Multiphoton printing method according to one of claims 7 to 11, wherein the three-dimensional structure (5) from

Substructures, especially with a periodic

Repetition of substructures, is built up, and the size of a substructure is smaller than 500 nm, preferably smaller than 300 nm, more preferably smaller than 200 nm, more preferably smaller than 100 nm.

13. Use of a device according to one of claims 1 to 6 for the inspection of a microscopic object, the method comprises the following steps:

- Provision of at least one immersion medium (12),

- Site-selective supply of a portion of the

Immersion medium (12) to an inspection point (6) on the object by means of at least one material outlet (8) of the material supply (9);

- Setting a distance between the lens (3) and inspection point (6) such that the surface of the lens (3) facing the object with the

Immersion medium (12) is in physical contact; - Focusing the observation unit (1) on the

Inspection point (6) and

- Location-selective derivation of at least parts of the

Immersion medium (12).

14. A method for inspecting an object according to claim

13, with this or at least one further

Inspection point (6) the immersion medium (12) is modified in that it is at least partially replaced by another immersion medium (12).

15. A method for inspecting an object according to claim

14, the modification of the immersion medium taking place on the basis of a change in the object which is determined in the course of the inspection.